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Piezoelectric Aluminum Nitride Films
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Book Synopsis Piezoelectric Aluminum Nitride Films by : Michael T. Duffy
Download or read book Piezoelectric Aluminum Nitride Films written by Michael T. Duffy and published by . This book was released on 1975 with total page 139 pages. Available in PDF, EPUB and Kindle. Book excerpt: Piezoelectric films of AlN and GaN were grown on sapphire substrates for use in the generation, propagation, and processing of surface acoustic waves. The films were grown by CVD heteroepitaxy using the metal-organic reactants trimethyl aluminum or trimethyl gallium. Greatest emphasis was placed on optimization of the aluminum nitride-sapphire system as determined by the (1,1,-2,0)AlN/(1,-1,0,2)Al2O3 epitaxial relationship. The films were examined with respect to crystallography, surface topography, optical properties, uniformity, and ease of polishing. A wide range of epitaxial growth temperatures was covered in order to establish optimum conditions for the growth of relatively thick films with minimum surface structure and residual composite strain. The possibility of growing silicon on the same substrate with AlN in a side-by-side configuration was examined and shown to be feasible. Aluminum transducer patterns were fabricated on some samples to form delay lines.
Book Synopsis Piezoelectric Aluminum Nitride Thin Films by PECVD by : Gustavo Sanchez Mathon
Download or read book Piezoelectric Aluminum Nitride Thin Films by PECVD written by Gustavo Sanchez Mathon and published by . This book was released on 2009 with total page 432 pages. Available in PDF, EPUB and Kindle. Book excerpt: Polycrystalline aluminum nitride thin films were produced with a microwave-plasma enhanced chemical vapor deposition technique. The plasma-injector distance, the substrate temperature and the RF bias were the main variables which allowed achieving this objective. At the time, it was possible to control the preferential orientation as 0001 or 1010, both interesting for piezoelectric applications. The growth mechanisms that conducted to film microstructure development under different process conditions were explained, enriched by the comparison with a physical vapor deposition sputtering technique. The obtained films were characterized in their piezoelectric performance, including the construction of surface acoustic wave devices and bulk acoustic wave devices. Adequate piezoelectric response and acoustic velocities were obtained for 0001 oriented films, while 1010 oriented films did not show piezoelectric response under the configurations essayed. An extensive analysis was done in order to explain these behaviors.
Book Synopsis Effect of Interface Fields on the Piezoelectric Response of Aluminum Nitride Thin Films by : John Preston Harman
Download or read book Effect of Interface Fields on the Piezoelectric Response of Aluminum Nitride Thin Films written by John Preston Harman and published by . This book was released on 2008 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis High Temperature Annealing Studies on the Piezoelectric Properties of Thin Aluminum Nitride Films by :
Download or read book High Temperature Annealing Studies on the Piezoelectric Properties of Thin Aluminum Nitride Films written by and published by . This book was released on 2008 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: A Rapid Thermal Annealing (RTA) system was used to anneal sputtered and MOVPE grown Aluminum Nitride (AlN) thin films at temperatures up to 1000°C in ambient and controlled environments. According to Energy Dispersive X-Ray Analysis (EDAX), the films annealed in an ambient environment rapidly oxidize after five minutes at 1000°C. Below 1000°C the films oxidized linearly as a function of annealing temperature which is consistent with what has been reported in literature [1]. Laser Doppler Vibrometry (LDV) was used to measure the piezoelectric coefficient, d33, of these films. Films annealed in an ambient environment had a weak piezoelectric response indicating that oxidation on the surface of the film reduces the value of d33. A high temperature furnace has been built that is capable of taking in-situ measurements of the piezoelectric response of AlN films. In-situ d33 measurements are recorded up to 300°C for both sputtered and MOVPE-grown AlN thin films. The measured piezoelectric response appears to increase with temperature up to 300°C possibly due to stress in the film.
Book Synopsis Aluminum Nitride Thin Films - Deposition for Fabrication, Characterization and Fabrication of Surface Acoustic Wave Devices by : Charlee Fansler
Download or read book Aluminum Nitride Thin Films - Deposition for Fabrication, Characterization and Fabrication of Surface Acoustic Wave Devices written by Charlee Fansler and published by . This book was released on 2008 with total page 124 pages. Available in PDF, EPUB and Kindle. Book excerpt: Aluminum Nitride (AlN) thin films can be used for many device applications; for example, Surface Acoustic Wave (SAW) devices, microelectromechanical systems (MEMS) applications, and packaging applications. In this work, AlN is the critical layer in the fabrication process. One challenge is reliable deposition over wafer size substrates. The method of interest for deposition is pulsed DC sputtering. The (002) plane is the desired plane for its piezoelectric properties. The surface roughness of the deposited AlN is low and adheres well to the substrate. An AlN layer was deposited on a UNCD/Si substrate. Al was deposited on the AlN layer to form the IDTs (interdigital transducers) for SAW devices. SAW devices were fabricated on quartz - ST substrate. To verify the SAW devices work, they were tested using a network analyzer. This book discusses these results and parameters for AlN film deposition, film properties and implications for devices. This book would be beneficial for professionals, scientists, engineers, and graduate students in science and engineering working in the areas of wide bandgap semi-conductors, nitrides and piezoelectric materials and various acoustic wave devices.
Book Synopsis Piezoelectric Energy Harvesting by : Alper Erturk
Download or read book Piezoelectric Energy Harvesting written by Alper Erturk and published by John Wiley & Sons. This book was released on 2011-04-04 with total page 377 pages. Available in PDF, EPUB and Kindle. Book excerpt: The transformation of vibrations into electric energy through the use of piezoelectric devices is an exciting and rapidly developing area of research with a widening range of applications constantly materialising. With Piezoelectric Energy Harvesting, world-leading researchers provide a timely and comprehensive coverage of the electromechanical modelling and applications of piezoelectric energy harvesters. They present principal modelling approaches, synthesizing fundamental material related to mechanical, aerospace, civil, electrical and materials engineering disciplines for vibration-based energy harvesting using piezoelectric transduction. Piezoelectric Energy Harvesting provides the first comprehensive treatment of distributed-parameter electromechanical modelling for piezoelectric energy harvesting with extensive case studies including experimental validations, and is the first book to address modelling of various forms of excitation in piezoelectric energy harvesting, ranging from airflow excitation to moving loads, thus ensuring its relevance to engineers in fields as disparate as aerospace engineering and civil engineering. Coverage includes: Analytical and approximate analytical distributed-parameter electromechanical models with illustrative theoretical case studies as well as extensive experimental validations Several problems of piezoelectric energy harvesting ranging from simple harmonic excitation to random vibrations Details of introducing and modelling piezoelectric coupling for various problems Modelling and exploiting nonlinear dynamics for performance enhancement, supported with experimental verifications Applications ranging from moving load excitation of slender bridges to airflow excitation of aeroelastic sections A review of standard nonlinear energy harvesting circuits with modelling aspects.
Book Synopsis Aluminum Nitride Thin Films and Structures for Piezoelectric Microelectromechanical Systems (PMEMS) Applications by : Adam Kabulski
Download or read book Aluminum Nitride Thin Films and Structures for Piezoelectric Microelectromechanical Systems (PMEMS) Applications written by Adam Kabulski and published by . This book was released on 2008 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Aluminum Nitride Thin Films on Titanium by : Seth E. Boeshore
Download or read book Aluminum Nitride Thin Films on Titanium written by Seth E. Boeshore and published by ProQuest. This book was released on 2006 with total page 332 pages. Available in PDF, EPUB and Kindle. Book excerpt: Piezoelectric unimorph cantilever beams have been fabricated from the deposited films and used for the first demonstration of piezoelectric transduction on titanium. At large displacements, these beams exhibit nonlinear spring softening. An analytical model has been developed to accurately describe the frequency response of these beams and to calculate the material properties of the film. Test results from these beams show that d 31 and k231 for the films are within 10% of the reported values.
Book Synopsis Aluminum Nitride Piezoelectric Thin Films Reactively Deposited in Closed Field Unbalanced Magnetron Sputtering for Elevated Temperature 'smart' Tribological Applications by : Masood Hasheminiasari
Download or read book Aluminum Nitride Piezoelectric Thin Films Reactively Deposited in Closed Field Unbalanced Magnetron Sputtering for Elevated Temperature 'smart' Tribological Applications written by Masood Hasheminiasari and published by . This book was released on 2013 with total page 168 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Piezoelectric MEMS Resonators by : Harmeet Bhugra
Download or read book Piezoelectric MEMS Resonators written by Harmeet Bhugra and published by Springer. This book was released on 2017-01-09 with total page 423 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book introduces piezoelectric microelectromechanical (pMEMS) resonators to a broad audience by reviewing design techniques including use of finite element modeling, testing and qualification of resonators, and fabrication and large scale manufacturing techniques to help inspire future research and entrepreneurial activities in pMEMS. The authors discuss the most exciting developments in the area of materials and devices for the making of piezoelectric MEMS resonators, and offer direct examples of the technical challenges that need to be overcome in order to commercialize these types of devices. Some of the topics covered include: Widely-used piezoelectric materials, as well as materials in which there is emerging interest Principle of operation and design approaches for the making of flexural, contour-mode, thickness-mode, and shear-mode piezoelectric resonators, and examples of practical implementation of these devices Large scale manufacturing approaches, with a focus on the practical aspects associated with testing and qualification Examples of commercialization paths for piezoelectric MEMS resonators in the timing and the filter markets ...and more! The authors present industry and academic perspectives, making this book ideal for engineers, graduate students, and researchers.
Book Synopsis Ultra-thin Aluminum Nitride Films for Flexible MEMS Sensors by : Md Sajeeb Rayhan
Download or read book Ultra-thin Aluminum Nitride Films for Flexible MEMS Sensors written by Md Sajeeb Rayhan and published by . This book was released on 2016 with total page 145 pages. Available in PDF, EPUB and Kindle. Book excerpt: Microelectromechanical systems (MEMS) sensors using ultrathin aluminum nitride (AlN) film were developed and fabricated using conventional photolithography techniques in the class 100 clean room with a view to integrate them in flexible substrates along with flexible electronics. The MEMS sensors were designed, analytically modeled, fabricated and characterized. Some of the MEMS sensors were only designed and simulated using finite element method (FEM) for the scope of the dissertation. These MEMS sensors can be applied to many applications such as automobile, robotics, biomedical, biometrics, health condition monitoring, GPS tracking devices, smartphones and aircrafts. MEMS pressure sensors using AlN based piezoelectric film were designed, fabricated and characterized in the form of array of cantilever based structures. A 300 nm thick ultrathin and flexible AlN film with a feature size of ~12 [micron] which was deposited using DC reactive magnetron sputtering system and sandwiched between two electrodes to induce cantilever shaped structures acted as the sensing element of the cantilever sensors. After fabrication, several cantilevers were chosen for electrical characterization. The pressure sensors were characterized in a probe station system to measure the piezoelectric voltage signals and power spectral densities. With the help of simulation results, numerical modeling was also carried out to find the theoretical output voltage ranges and sensitivity of the cantilevers. The simple and flexible cantilevers form the basis for future piezoelectric energy harvesters, pressure sensors, fingerprint sensors and accelerometers using ultrathin AlN film those can be integrated on a system-on-chip (SoC) circuit. Initially, the ultrathin AlN films were developed by changing the deposition temperature and Ar/N2 gas flow ratio and characterized using SEM, XRD and EDX to analyze the quality of the film. Stress analyses were taken into consideration to check the mechanical strength and reliability of the pressure sensors. In addition, bending performance was also analyzed by calculating the radius of curvature (ROC) of the cantilevers. Finally, noise performance was also analyzed. Ultra-thin AlN based novel flexible MEMS fingerprint sensors were designed using finite element method i.e., CoventorWare® with a view to improve the pixel resolution and, hence, the quality of scanned fingerprint image. Two different sized pixel dimensions were used for the design of three fingerprint sensors; they are: a) FPS725A b) FPS725B, and c) FPS1016. The pixel dimension for FPS725A and FPS725B was 35 [micron] by 35 [micron]. The pixel feature was equivalent to an imaging resolution of 725 dot-perinch (dpi). The other sensor had a pixel size of 25 [micron] by 25 [micron] and was equivalent to an imaging resolution of 1016 dpi. In both type of sensors, 200 nm thick, ultrathin AlN film was used as the sensing element. The difference between FPS725A and FPS725B was the location of the sensing element. In FPS725A, AlN film was deposited on top of Al2O3 diaphragm while in FPS725B, AlN was located inside the diaphragm. The fabrications process flow will be discussed in details in the fingerprint sensor chapter. In brief, the fingerprint sensors were comprised of array of pixels and each pixel was made of a cavity like structure which was basically an aluminum oxide (Al2O3) based structure. Underneath the cavity like structure, there was an adjacent piezoelectric plate or film which was sandwiched between two metal electrodes. The total area of the sensors is identical and considered to be 15 mm by 15 mm for practical use. Piezoelectric output voltage with respect to various applied finger pressure were calculated using the stress contour found from the simulation results. Finally, piezoelectric response for each sensor for different finger pressure was found from the slope of the piezoelectric voltage versus applied force plot. The average piezoelectric responses are found to be 225.74 V/N, 115.58 V/N, and 125.52 V/N for FPS725A, FPS725B, and FPS1016, respectively. Stress analysis and noise performance of the sensors were studied. For practical use, the CMOS readouts will be taken from the Silicon substrate through the electrical metallization of pure metal electrodes which will be covered in the chapter. An AlN based piezoelectric z-axis MEMS accelerometer was designed and simulated using CoventorWare®. Modal harmonic analysis was carried out and the simulated resonant frequency was found to be 2.26 kHz. Various loads were applied on top proof mass of the accelerometer ranging from 1g to 10g. Piezoelectric output voltages due to applied loads were calculated. The voltages ranged from 0.00082 V to 0.000082 V. The piezoelectric response or sensitivity was also calculated and found to be 0.000082 V/N. Noise performances was also analyzed and noise equivalent acceleration (NEA) was calculated. Noise equivalent acceleration was found to be 0.253 g/[square root]Hz.
Book Synopsis High Temperature Studies of Thin Film Aluminum Nitride and Piezoelectric Characterization of Mesa Structures by :
Download or read book High Temperature Studies of Thin Film Aluminum Nitride and Piezoelectric Characterization of Mesa Structures written by and published by . This book was released on 2009 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Research Study in Growth of Aluminum-Nitride on Sapphire Piezoelectric Films by : Kenneth M. Lakin
Download or read book Research Study in Growth of Aluminum-Nitride on Sapphire Piezoelectric Films written by Kenneth M. Lakin and published by . This book was released on 1976 with total page 77 pages. Available in PDF, EPUB and Kindle. Book excerpt: The growth and characterization of aluminum nitride epitaxial films on R-plane sapphire has been investigated in an eighteen month program aimed at improving the quality and uniformity of the material for use in microwave bandpass filters. This report details the entire process of AlN film processing starting from the polishing of sapphire wafers and ending with the electrical characterization of the resultant films. The polishing of sapphire proved to be a major effort because the constraints of wafer thickness optical flatness, wafer bowing due to thermal expansion stresses, and a defect free surface finish were not all compatible. Improvements were made in the A1N growth system and operating procedure which resulted in films of lower defect density, lower apparent strain, and improved acoustoelectric characteristics. Etching of the polished AlN surface followed by SEM examination was implemented as a means of checking crystal film perfection. Measurements made on the temperature coefficient of delay of the film composite have shown values as low as 13 ppm for a thickness to wavelength ratio of 0.66 and indicate that zero temperature coefficient will be obtained at a somewhat larger thickness. (Author).
Book Synopsis Piezoelectric Aluminium Scandium Nitride (AlScN) Thin Films by : Agne Zukauskaite
Download or read book Piezoelectric Aluminium Scandium Nitride (AlScN) Thin Films written by Agne Zukauskaite and published by Mdpi AG. This book was released on 2023-06-14 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt: Recently, aluminium scandium nitride (AlScN) emerged as a material with superior properties compared to aluminium nitride (AlN). Substituting Al with Sc in AlN leads to a dramatic increase in the piezoelectric coefficient as well as in electromechanical coupling. This discovery finally allowed us to overcome the limitations of AlN thin films in various piezoelectric applications while still enabling us to benefit from all of the advantages of the parent material system, such as a high temperature stability, CMOS compatibility, and good mechanical properties. Potential applications include RF filters (bulk acoustic wave (BAW) or surface acoustic wave (SAW) resonators), energy harvesting, sensing applications, and infra-red detectors. The recent progress in MOCVD- and MBE-grown AlScN has led to high-frequency and -power electronics, (high-electron-mobility transistors (HEMTs)). AlScN is the first wurtzite III-nitride where ferroelectric switching was observed, allowing for many new possible applications in semiconductor memories additionally, it enables the additional functionality of switching to applications where piezoelectric materials are already in use. This Special Issue was very successful in covering all of the main aspects of AlScN research, including its growth, the fundamental and application-relevant properties, and device fabrication and characterization. We can see that AlScN technology is mature enough to be utilized in wafer-level material development and complicated devices, but there is still much to discover in terms of deposition process control, anisotropy, and, in particular, ferroelectric behavior.
Book Synopsis Robotic Tactile Sensing by : Ravinder S. Dahiya
Download or read book Robotic Tactile Sensing written by Ravinder S. Dahiya and published by Springer Science & Business Media. This book was released on 2012-07-29 with total page 258 pages. Available in PDF, EPUB and Kindle. Book excerpt: Future robots are expected to work closely and interact safely with real-world objects and humans alike. Sense of touch is important in this context, as it helps estimate properties such as shape, texture, hardness, material type and many more; provides action related information, such as slip detection; and helps carrying out actions such as rolling an object between fingers without dropping it. This book presents an in-depth description of the solutions available for gathering tactile data, obtaining aforementioned tactile information from the data and effectively using the same in various robotic tasks. The efforts during last four decades or so have yielded a wide spectrum of tactile sensing technologies and engineered solutions for both intrinsic and extrinsic touch sensors. Nowadays, new materials and structures are being explored for obtaining robotic skin with physical features like bendable, conformable, and stretchable. Such features are important for covering various body parts of robots or 3D surfaces. Nonetheless, there exist many more hardware, software and application related issues that must be considered to make tactile sensing an effective component of future robotic platforms. This book presents an in-depth analysis of various system related issues and presents the trade-offs one may face while developing an effective tactile sensing system. For this purpose, human touch sensing has also been explored. The design hints coming out of the investigations into human sense of touch can be useful in improving the effectiveness of tactile sensory modality in robotics and other machines. Better integration of tactile sensors on a robot’s body is prerequisite for the effective utilization of tactile data. The concept of semiconductor devices based sensors is an interesting one, as it allows compact and fast tactile sensing systems with capabilities such as human-like spatio-temporal resolution. This book presents a comprehensive description of semiconductor devices based tactile sensing. In particular, novel Piezo Oxide Semiconductor Field Effect Transistor (POSFET) based approach for high resolution tactile sensing has been discussed in detail. Finally, the extension of semiconductors devices based sensors concept to large and flexile areas has been discussed for obtaining robotic or electronic skin. With its multidisciplinary scope, this book is suitable for graduate students and researchers coming from diverse areas such robotics (bio-robots, humanoids, rehabilitation etc.), applied materials, humans touch sensing, electronics, microsystems, and instrumentation. To better explain the concepts the text is supported by large number of figures.
Book Synopsis Microsensors, MEMS, and Smart Devices by : Julian W. Gardner
Download or read book Microsensors, MEMS, and Smart Devices written by Julian W. Gardner and published by John Wiley & Sons. This book was released on 2001 with total page 536 pages. Available in PDF, EPUB and Kindle. Book excerpt: Microsensors and MEMS (micro-electro-mechanical systems) are revolutionising the semiconductor industry. A microsystem or the so-called "system-on-a-chip" combines microelectronic circuitry with microsensors and microactuators. This emergent field has seen the development of applications ranging from the electronic nose and intelligent ear to micro-tweezers and the modern ink-jet nozzle. Providing a complete overview of microsensor technologies, this unique reference addresses vital integration issues for the successful application of microsensors, MEMS and smart devices. Features include: * Review of traditional and emerging fabrication processes including bulk and silicon micromachining, microstereolithography and polymer processing methods. * Focus on the use of IDT (interdigital transducer) microsensors in the development of low energy budget, wireless MEMS or micromachines. * Coverage of the katest applications in smart devices including the electronic nose, tongue and finger, along with smart sensors and strcutures such as smart skin. * An overview of the development of intelligent sensing devices through the use of sensor arrays, parametric compensation of sensor sugnals and ASIC technology. * Comprehensive appendices outlining vital MEMS material properties, relevant web sites and a guide to key institutions active in the field. Microsensors, MEMS and Smart Devices presents readers with the means to understand and evaluate microsystems. Advanced students and researchers in microelectronics, engineers and developers of microsensor systems will find this comprehensive treatment essential reading. Detailed coverage of material properties makes this an important reference work for mechnical engineers, physicists and material scientists working in the field.
Book Synopsis Characterization of the Piezoelectric Response of Aluminum Nitride Grown by DC Magnetron Sputtering for Applications in Thin-film Resonators by : Rajan Sharad Naik
Download or read book Characterization of the Piezoelectric Response of Aluminum Nitride Grown by DC Magnetron Sputtering for Applications in Thin-film Resonators written by Rajan Sharad Naik and published by . This book was released on 1998 with total page 14 pages. Available in PDF, EPUB and Kindle. Book excerpt:
