Optical Inspection of Microsystems

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Author :
Publisher : CRC Press
ISBN 13 : 1420019163
Total Pages : 524 pages
Book Rating : 4.4/5 (2 download)

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Book Synopsis Optical Inspection of Microsystems by : Wolfgang Osten

Download or read book Optical Inspection of Microsystems written by Wolfgang Osten and published by CRC Press. This book was released on 2018-10-03 with total page 524 pages. Available in PDF, EPUB and Kindle. Book excerpt: Where conventional testing and inspection techniques fail at the micro-scale, optical techniques provide a fast, robust, and relatively inexpensive alternative for investigating the properties and quality of microsystems. Speed, reliability, and cost are critical factors in the continued scale-up of microsystems technology across many industries, and optical techniques are in a unique position to satisfy modern commercial and industrial demands. Optical Inspection of Microsystems is the first comprehensive, up-to-date survey of the most important and widely used full-field optical metrology and inspection technologies. Under the guidance of accomplished researcher Wolfgang Osten, expert contributors from industrial and academic institutions around the world share their expertise and experience with techniques such as image correlation, light scattering, scanning probe microscopy, confocal microscopy, fringe projection, grid and moiré techniques, interference microscopy, laser Doppler vibrometry, holography, speckle metrology, and spectroscopy. They also examine modern approaches to data acquisition and processing. The book emphasizes the evaluation of various properties to increase reliability and promote a consistent approach to optical testing. Numerous practical examples and illustrations reinforce the concepts. Supplying advanced tools for microsystem manufacturing and characterization, Optical Inspection of Microsystems enables you to reach toward a higher level of quality and reliability in modern micro-scale applications.

Optical Inspection of Microsystems, Second Edition

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Author :
Publisher : CRC Press
ISBN 13 : 1498779506
Total Pages : 570 pages
Book Rating : 4.4/5 (987 download)

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Book Synopsis Optical Inspection of Microsystems, Second Edition by : Wolfgang Osten

Download or read book Optical Inspection of Microsystems, Second Edition written by Wolfgang Osten and published by CRC Press. This book was released on 2019-06-21 with total page 570 pages. Available in PDF, EPUB and Kindle. Book excerpt: Where conventional testing and inspection techniques fail at the microscale, optical techniques provide a fast, robust, noninvasive, and relatively inexpensive alternative for investigating the properties and quality of microsystems. Speed, reliability, and cost are critical factors in the continued scale-up of microsystems technology across many industries, and optical techniques are in a unique position to satisfy modern commercial and industrial demands. Optical Inspection of Microsystems, Second Edition, extends and updates the first comprehensive survey of the most important optical measurement techniques to be successfully used for the inspection of microsystems. Under the guidance of accomplished researcher Wolfgang Osten, expert contributors from industrial and academic institutions around the world share their expertise and experience with techniques such as image processing, image correlation, light scattering, scanning probe microscopy, confocal microscopy, fringe projection, grid and moire techniques, interference microscopy, laser-Doppler vibrometry, digital holography, speckle metrology, spectroscopy, and sensor fusion technologies. They also examine modern approaches to data acquisition and processing, such as the determination of surface features and the estimation of uncertainty of measurement results. The book emphasizes the evaluation of various system properties and considers encapsulated components to increase quality and reliability. Numerous practical examples and illustrations of optical testing reinforce the concepts. Supplying effective tools for increased quality and reliability, this book Provides a comprehensive, up-to-date overview of optical techniques for the measurement and inspection of microsystems Discusses image correlation, displacement and strain measurement, electro-optic holography, and speckle metrology techniques Offers numerous practical examples and illustrations Includes calibration of optical measurement systems for the inspection of MEMS Presents the characterization of dynamics of MEMS

Optical Inspection of Microsystems, Second Edition

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Author :
Publisher : CRC Press
ISBN 13 : 0429532652
Total Pages : 656 pages
Book Rating : 4.4/5 (295 download)

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Book Synopsis Optical Inspection of Microsystems, Second Edition by : Wolfgang Osten

Download or read book Optical Inspection of Microsystems, Second Edition written by Wolfgang Osten and published by CRC Press. This book was released on 2019-06-21 with total page 656 pages. Available in PDF, EPUB and Kindle. Book excerpt: Where conventional testing and inspection techniques fail at the microscale, optical techniques provide a fast, robust, noninvasive, and relatively inexpensive alternative for investigating the properties and quality of microsystems. Speed, reliability, and cost are critical factors in the continued scale-up of microsystems technology across many industries, and optical techniques are in a unique position to satisfy modern commercial and industrial demands. Optical Inspection of Microsystems, Second Edition, extends and updates the first comprehensive survey of the most important optical measurement techniques to be successfully used for the inspection of microsystems. Under the guidance of accomplished researcher Wolfgang Osten, expert contributors from industrial and academic institutions around the world share their expertise and experience with techniques such as image processing, image correlation, light scattering, scanning probe microscopy, confocal microscopy, fringe projection, grid and moire techniques, interference microscopy, laser-Doppler vibrometry, digital holography, speckle metrology, spectroscopy, and sensor fusion technologies. They also examine modern approaches to data acquisition and processing, such as the determination of surface features and the estimation of uncertainty of measurement results. The book emphasizes the evaluation of various system properties and considers encapsulated components to increase quality and reliability. Numerous practical examples and illustrations of optical testing reinforce the concepts. Supplying effective tools for increased quality and reliability, this book Provides a comprehensive, up-to-date overview of optical techniques for the measurement and inspection of microsystems Discusses image correlation, displacement and strain measurement, electro-optic holography, and speckle metrology techniques Offers numerous practical examples and illustrations Includes calibration of optical measurement systems for the inspection of MEMS Presents the characterization of dynamics of MEMS

Micro-optical Technologies for Measurement, Sensors, and Microsystems

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Author :
Publisher :
ISBN 13 :
Total Pages : 356 pages
Book Rating : 4.3/5 (91 download)

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Book Synopsis Micro-optical Technologies for Measurement, Sensors, and Microsystems by :

Download or read book Micro-optical Technologies for Measurement, Sensors, and Microsystems written by and published by . This book was released on 1996 with total page 356 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Diffractive Optics and Optical Microsystems

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Author :
Publisher : Springer Science & Business Media
ISBN 13 : 1489914749
Total Pages : 406 pages
Book Rating : 4.4/5 (899 download)

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Book Synopsis Diffractive Optics and Optical Microsystems by : S. Martellucci

Download or read book Diffractive Optics and Optical Microsystems written by S. Martellucci and published by Springer Science & Business Media. This book was released on 2013-06-29 with total page 406 pages. Available in PDF, EPUB and Kindle. Book excerpt: Proceedings of the 20th Course of the International School of Quantum Electronics held in Erice, Italy, November 14-24, 1996

Microsystem Engineering of Lab-on-a-chip Devices

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Author :
Publisher : John Wiley & Sons
ISBN 13 : 352760636X
Total Pages : 270 pages
Book Rating : 4.5/5 (276 download)

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Book Synopsis Microsystem Engineering of Lab-on-a-chip Devices by : Oliver Geschke

Download or read book Microsystem Engineering of Lab-on-a-chip Devices written by Oliver Geschke and published by John Wiley & Sons. This book was released on 2006-08-21 with total page 270 pages. Available in PDF, EPUB and Kindle. Book excerpt: Written by an interdisciplinary team of chemists, biologists and engineers from one of the leading European centers for microsystem research, MIC in Lyngby, Denmark, this book introduces and discusses the different aspects of (bio)chemical microsystem development. Unlike other, far more voluminous and theoretical books on this topic, this is a concise, practical handbook, dealing with analytical applications, particularly in the life sciences. Topics include: * microfluidics * silicon micromachining * glass and polymer micromachining * packaging * analytical chemistry illustrated with examples taken mainly from ongoing research projects at MIC.

Advances in Multiphysics Simulation and Experimental Testing of Mems

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Publisher : World Scientific
ISBN 13 : 1908979127
Total Pages : 504 pages
Book Rating : 4.9/5 (89 download)

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Book Synopsis Advances in Multiphysics Simulation and Experimental Testing of Mems by : Attilio Frangi

Download or read book Advances in Multiphysics Simulation and Experimental Testing of Mems written by Attilio Frangi and published by World Scientific. This book was released on 2008-07-29 with total page 504 pages. Available in PDF, EPUB and Kindle. Book excerpt: This volume takes a much needed multiphysical approach to the numerical and experimental evaluation of the mechanical properties of MEMS and NEMS. The contributed chapters present many of the most recent developments in fields ranging from microfluids and damping to structural analysis, topology optimization and nanoscale simulations. The book responds to a growing need emerging in academia and industry to merge different areas of expertise towards a unified design and analysis of MEMS and NEMS. Contents:Challenges in Modeling Liquid and Gas Flows in Micro/Nano Devices (M Gad-el-Hak)Using the Kinetic Equations for MEMS and NEMS (C Cercignani et al.)Applying the Direct Simulation Monte Carlo (DSMC) Method to Gas-Filled MEMS Devices (M A Gallis)New Approaches for the Simulation of Microfluidics in MEMS (T Y Ng et al.)Evaluating Gas Damping in MEMS Using Fast Integral Equation Solvers (A Frangi et al.)Experimental Techniques for Damping Characterization of Micro and Nanostructures (A Bosseboeuf & H Mathias)Nonlinear Dynamics of Electrostatically Actuated MEMS (S K De & N Aluru)Coupled Deformation Analysis of Thin MEMS Plates (S Mukherjee & S Telukunta)Pull-In Instability in Electrostatically Actuated MEMS Due to Coulomb and Casimir Forces (R C Batra et al.)Numerical Simulation of BioMEMS with Dielectrophoresis (G R Liu & C X Song)Continuous Modeling of Multi-Physics Problems of Microsystems for Topology Optimization (G K Ananthasuresh)Mechanical Characterization of Polysilicon at the Micro-Scale Through On-Chip Tests (A Corigliano et al.)Nano-Scale Testing of Nanowires and Carbon Nanotubes Using a Micro-Electro-Mechanical System (H D Espinosa et al.) Readership: Postgraduate students, researchers and scientists in academia and the MEMS/NEMS industry. Keywords:MEMS;NEMS;Microfluidics;Electrostatics;Pull-In Instability;BIOMEMS;Optimization;Coupled AnalysesKey Features:Reinforces links between the most advanced applications from academia and industry by presenting several applications to real MEMSIncludes several chapters on the experimental testing of MEMS and NEMS to evaluate their dynamical behavior and material properties and validate the numerical procedures describedDraws together contributions from leading experts worldwideTakes a new approach to the subject by focusing on the multiphysical nature of the problemsReviews:“This book would be of interest to those in academic or industrial research that model MEMS devices. The book will provide some of the latest methods used to model these devices along with some experimental methods used to characterize MEMS.”IEEE Electrical Insulation Magazine

Sensors and Microsystems

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Author :
Publisher : World Scientific
ISBN 13 : 9812835989
Total Pages : 567 pages
Book Rating : 4.8/5 (128 download)

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Book Synopsis Sensors and Microsystems by : Natale C. Di

Download or read book Sensors and Microsystems written by Natale C. Di and published by World Scientific. This book was released on 2009 with total page 567 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book collects a number of papers presented at the 13th Italian Conference on Sensors and Microsystems. It provides a unique perspective on the research and development of sensors, microsystems and related technologies in Italy. Besides the scientific value of the papers, this book offers a unique source of data to analysts that intend to survey the Italian situation on sensors and microsystems.

Cold Micro Metal Forming

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Author :
Publisher : Springer Nature
ISBN 13 : 3030112802
Total Pages : 358 pages
Book Rating : 4.0/5 (31 download)

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Book Synopsis Cold Micro Metal Forming by : Frank Vollertsen

Download or read book Cold Micro Metal Forming written by Frank Vollertsen and published by Springer Nature. This book was released on 2019-09-13 with total page 358 pages. Available in PDF, EPUB and Kindle. Book excerpt: This open access book contains the research report of the Collaborative Research Center “Micro Cold Forming” (SFB 747) of the University of Bremen, Germany. The topical research focus lies on new methods and processes for a mastered mass production of micro parts which are smaller than 1mm (by forming in batch size higher than one million). The target audience primarily comprises research experts and practitioners in production engineering, but the book may also be of interest to graduate students alike.

Microsystems Engineering

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Publisher : SPIE-International Society for Optical Engineering
ISBN 13 : 9780819440952
Total Pages : 190 pages
Book Rating : 4.4/5 (49 download)

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Book Synopsis Microsystems Engineering by : Christophe Gorecki

Download or read book Microsystems Engineering written by Christophe Gorecki and published by SPIE-International Society for Optical Engineering. This book was released on 2001 with total page 190 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Micro Total Analysis Systems 2000

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Publisher : Springer Science & Business Media
ISBN 13 : 9401722641
Total Pages : 639 pages
Book Rating : 4.4/5 (17 download)

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Book Synopsis Micro Total Analysis Systems 2000 by : Albert van den Berg

Download or read book Micro Total Analysis Systems 2000 written by Albert van den Berg and published by Springer Science & Business Media. This book was released on 2013-11-11 with total page 639 pages. Available in PDF, EPUB and Kindle. Book excerpt: This volume contains the proceedings of the fourth international symposium on Micro Total Analysis Systems (muTAS 2000). Cutting-edge research of all invited and contributed papers presented by the world’s leading muTAS groups provides the state of the art of this electrifying, multidisciplinary field.

Smart Technologies for Precision Assembly

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Publisher : Springer Nature
ISBN 13 : 3030726320
Total Pages : 370 pages
Book Rating : 4.0/5 (37 download)

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Book Synopsis Smart Technologies for Precision Assembly by : Svetan Ratchev

Download or read book Smart Technologies for Precision Assembly written by Svetan Ratchev and published by Springer Nature. This book was released on 2021-04-01 with total page 370 pages. Available in PDF, EPUB and Kindle. Book excerpt: This open access book constitutes the refereed post-conference proceedings of the 9th IFIP WG 5.5 International Precision Assembly Seminar, IPAS 2020, held virtually in December 2020. The 16 revised full papers and 10 revised short papers presented together with 1 keynote paper were carefully reviewed and selected from numerous submissions. The papers address topics such as assembly design and planning; assembly operations; assembly cells and systems; human centred assembly; and assistance methods in assembly.

Micro-Assembly Technologies and Applications

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Publisher : Springer Science & Business Media
ISBN 13 : 0387774025
Total Pages : 400 pages
Book Rating : 4.3/5 (877 download)

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Book Synopsis Micro-Assembly Technologies and Applications by : Svetan Ratchev

Download or read book Micro-Assembly Technologies and Applications written by Svetan Ratchev and published by Springer Science & Business Media. This book was released on 2008-01-15 with total page 400 pages. Available in PDF, EPUB and Kindle. Book excerpt: Micro-assembly is a key enabling technology for cost effective manufacture of new generations of complex micro products. It is also a critical technology for retaining mdustrial capabilities in high labour cost areas such as Europe since up to 80% of the production cost in some industries is attributed directly to assembly processes. With the continuous trend for product miniaturisation, the scientific and technologi cal developments in micro-assembly are expected to have a significant long-term economic, demographic and social impact. A distinctive feature of the process is that surface forces are often dominant over gravity forces, which determines a number of specific technical challenges. Critical areas which are currently being addressed include development of assembly systems with high positional accuracy, micro gripping methods that take into ac count the adhesive surface forces, high precision micro-feeding techniques and mi cro-joining processes. Micro-assembly has developed rapidly over the last few years and all the pre dictions are that it will remain a critical technology for high value products in a number of key sectors such as healthcare, communications, defence and aerospace. The key challenge is to match the significant technological developments with a new generation of micro products that will establish firmly micro-assembly as a core manufacturing process.

Micromanufacturing

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Publisher : Springer Science & Business Media
ISBN 13 : 1402059493
Total Pages : 362 pages
Book Rating : 4.4/5 (2 download)

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Book Synopsis Micromanufacturing by : Kornel F. Ehmann

Download or read book Micromanufacturing written by Kornel F. Ehmann and published by Springer Science & Business Media. This book was released on 2007-04-29 with total page 362 pages. Available in PDF, EPUB and Kindle. Book excerpt: This international technology assessment study has focused on the emerging global trend toward the miniaturization of manufacturing processes, equipment and systems for microscale components and products. The study has investigated both the state-of-the-art as well as emerging technologies from the scientific, technological, and commercialization perspectives across key industrial sectors in the USA, Asia and Europe.

Comprehensive Microsystems

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Publisher : Elsevier Science
ISBN 13 : 9780444521941
Total Pages : 2100 pages
Book Rating : 4.5/5 (219 download)

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Book Synopsis Comprehensive Microsystems by :

Download or read book Comprehensive Microsystems written by and published by Elsevier Science. This book was released on 2007-12-19 with total page 2100 pages. Available in PDF, EPUB and Kindle. Book excerpt: Comprehensive Microsystems, is a new 3-volume reference work on Microelectromechanical Systems (MEMS). The microsystems field has expanded to embrace a host of technologies, and microelectronics has now been joined by micro-mechanics, micro-fluidics and micro-optics to allow the fabrication of complex, multi- functional integrated microsystems. At over 2000 pages, Comprehensive Microsystems represents the authoritative primary reference source on microsystems. It addresses the need for an overview of the technologies and capabilities available in this highly interdisciplinary and dynamically-growing engineering field. Comprehensive Microsystems, provides an exhaustive overview of the wide range of topics which comprise the microsystems field, including, design and materials, fabrication and packaging, optical systems, chemical and biological systems, physical sensors, actuation, electronics for MEMS and industrial applications. Every article in the work has been commissioned by a panel of internationally recognized editors and written by an acknowledged expert in any one of a variety of disciplines. The articles provide a concise overview of a particular aspect of the microsystems field and are accompanied by extensive bibliographies, cross-referencing and indexes, enhancing the value of the text. by guiding the user to the most relevant further reading within the ever-expanding available literature. Much care has been given to avoid overlap and to provide consistency in style and contents. The first and foremost comprehensive reference on Microelectromechanical Systems (MEMS) Unifies established research from recognized sources in an easily accessible format Provides an essential reference source for both academics and professionals in the field

ISTFA 2006

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Publisher : ASM International
ISBN 13 : 1615030891
Total Pages : 524 pages
Book Rating : 4.6/5 (15 download)

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Book Synopsis ISTFA 2006 by : Electronic Device Failure Analysis Society

Download or read book ISTFA 2006 written by Electronic Device Failure Analysis Society and published by ASM International. This book was released on 2006 with total page 524 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Microscopy and Analysis

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Publisher :
ISBN 13 :
Total Pages : 426 pages
Book Rating : 4.3/5 (91 download)

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Book Synopsis Microscopy and Analysis by :

Download or read book Microscopy and Analysis written by and published by . This book was released on 2004 with total page 426 pages. Available in PDF, EPUB and Kindle. Book excerpt: