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Author : Dimitris P. Lymberopoulos
Publisher :
ISBN 13 :
Total Pages : 544 pages
Book Rating : 4.:/5 (353 download)
Download or read book Multidimensional Modeling and Simulation of Plasma Processing Reactors written by Dimitris P. Lymberopoulos and published by . This book was released on 1995 with total page 544 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : National Research Council
Publisher : National Academies Press
ISBN 13 : 0309175135
Total Pages : 74 pages
Book Rating : 4.3/5 (91 download)
Download or read book Database Needs for Modeling and Simulation of Plasma Processing written by National Research Council and published by National Academies Press. This book was released on 1996-10-21 with total page 74 pages. Available in PDF, EPUB and Kindle. Book excerpt: In spite of its high cost and technical importance, plasma equipment is still largely designed empirically, with little help from computer simulation. Plasma process control is rudimentary. Optimization of plasma reactor operation, including adjustments to deal with increasingly stringent controls on plant emissions, is performed predominantly by trial and error. There is now a strong and growing economic incentive to improve on the traditional methods of plasma reactor and process design, optimization, and control. An obvious strategy for both chip manufacturers and plasma equipment suppliers is to employ large-scale modeling and simulation. The major roadblock to further development of this promising strategy is the lack of a database for the many physical and chemical processes that occur in the plasma. The data that are currently available are often scattered throughout the scientific literature, and assessments of their reliability are usually unavailable. Database Needs for Modeling and Simulation of Plasma Processing identifies strategies to add data to the existing database, to improve access to the database, and to assess the reliability of the available data. In addition to identifying the most important needs, this report assesses the experimental and theoretical/computational techniques that can be used, or must be developed, in order to begin to satisfy these needs.
Author : R.J. Shul
Publisher : Springer Science & Business Media
ISBN 13 : 3642569897
Total Pages : 664 pages
Book Rating : 4.6/5 (425 download)
Download or read book Handbook of Advanced Plasma Processing Techniques written by R.J. Shul and published by Springer Science & Business Media. This book was released on 2011-06-28 with total page 664 pages. Available in PDF, EPUB and Kindle. Book excerpt: Pattern transfer by dry etching and plasma-enhanced chemical vapor de position are two of the cornerstone techniques for modern integrated cir cuit fabrication. The success of these methods has also sparked interest in their application to other techniques, such as surface-micromachined sen sors, read/write heads for data storage and magnetic random access memory (MRAM). The extremely complex chemistry and physics of plasmas and their interactions with the exposed surfaces of semiconductors and other materi als is often overlooked at the manufacturing stage. In this case, the process is optimized by an informed "trial-and-error" approach which relies heavily on design-of-experiment techniques and the intuition of the process engineer. The need for regular cleaning of plasma reactors to remove built-up reaction or precursor gas products adds an extra degree of complexity because the interaction of the reactive species in the plasma with the reactor walls can also have a strong effect on the number of these species available for etching or deposition. Since the microelectronics industry depends on having high process yields at each step of the fabrication process, it is imperative that a full understanding of plasma etching and deposition techniques be achieved.
Author : R. C. Alkire
Publisher :
ISBN 13 :
Total Pages : 308 pages
Book Rating : 4.F/5 ( download)
Download or read book Proceedings of the Second International Symposium on Electrochemical Processing of Tailored Materials written by R. C. Alkire and published by . This book was released on 1993 with total page 308 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : National Research Council
Publisher : National Academies Press
ISBN 13 : 0309045975
Total Pages : 88 pages
Book Rating : 4.3/5 (9 download)
Download or read book Plasma Processing of Materials written by National Research Council and published by National Academies Press. This book was released on 1991-02-01 with total page 88 pages. Available in PDF, EPUB and Kindle. Book excerpt: Plasma processing of materials is a critical technology to several of the largest manufacturing industries in the worldâ€"electronics, aerospace, automotive, steel, biomedical, and toxic waste management. This book describes the relationship between plasma processes and the many industrial applications, examines in detail plasma processing in the electronics industry, highlights the scientific foundation underlying this technology, and discusses education issues in this multidisciplinary field. The committee recommends a coordinated, focused, and well-funded research program in this area that involves the university, federal laboratory, and industrial sectors of the community. It also points out that because plasma processing is an integral part of the infrastructure of so many American industries, it is important for both the economy and the national security that America maintain a strong leadership role in this technology.
Author :
Publisher : National Academies
ISBN 13 :
Total Pages : 50 pages
Book Rating : 4.1/5 (54 download)
Download or read book Plasma Processing and Processing Science written by and published by National Academies. This book was released on 1995 with total page 50 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Heon Chang Kim
Publisher :
ISBN 13 :
Total Pages : 234 pages
Book Rating : 4.:/5 (436 download)
Download or read book Modeling and Simulation of Plasma Processing Equipment written by Heon Chang Kim and published by . This book was released on 1998 with total page 234 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author :
Publisher :
ISBN 13 :
Total Pages : 842 pages
Book Rating : 4.E/5 ( download)
Download or read book Journal of Research of the National Institute of Standards and Technology written by and published by . This book was released on 1995 with total page 842 pages. Available in PDF, EPUB and Kindle. Book excerpt: Reports NIST research and development in the physical and engineering sciences in which the Institute is active. These include physics, chemistry, engineering, mathematics, and computer sciences. Emphasis on measurement methodology and the basic technology underlying standardization.
Author : NATIONAL RESEARCH COUNCIL WASHINGTON DC.
Publisher :
ISBN 13 :
Total Pages : 71 pages
Book Rating : 4.:/5 (227 download)
Download or read book Database Needs for Modeling and Simulation of Plasma Processing written by NATIONAL RESEARCH COUNCIL WASHINGTON DC. and published by . This book was released on 1996 with total page 71 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author :
Publisher :
ISBN 13 :
Total Pages : 896 pages
Book Rating : 4.3/5 (91 download)
Download or read book American Doctoral Dissertations written by and published by . This book was released on 1995 with total page 896 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Ronald Leonel Kinder Oxom
Publisher :
ISBN 13 :
Total Pages : 304 pages
Book Rating : 4.:/5 (511 download)
Download or read book Modeling of Wave Heated Discharges Used in Plasma Processing Reactors written by Ronald Leonel Kinder Oxom and published by . This book was released on 2001 with total page 304 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Michael A. Langerman
Publisher :
ISBN 13 :
Total Pages : 342 pages
Book Rating : 4.:/5 (417 download)
Download or read book A Multidimensional Finite Element MHD Model of an Arc Plasma Reactor written by Michael A. Langerman and published by . This book was released on 1989 with total page 342 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Pramod Subramonium
Publisher :
ISBN 13 :
Total Pages : 348 pages
Book Rating : 4.:/5 (55 download)
Download or read book Simulation of Transients and Transport in Plasma Processing Reactors written by Pramod Subramonium and published by . This book was released on 2003 with total page 348 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Loucas C. Christophorou
Publisher : Springer Science & Business Media
ISBN 13 : 144198979X
Total Pages : 507 pages
Book Rating : 4.4/5 (419 download)
Download or read book Gaseous Dielectrics X written by Loucas C. Christophorou and published by Springer Science & Business Media. This book was released on 2012-12-06 with total page 507 pages. Available in PDF, EPUB and Kindle. Book excerpt: The book contains a broad and in depth review by leading world experts of the progress and the problems of current interest in gaseous dielectrics and their use, especially as insulators in high-voltage equipment and substations. Recent advances in superconductivity for power transmission and in plasma technology are also included. The fundamental, applied and industrial research described in the book allows the electric power industry to transmit and distribute electrical energy in more efficient, safe and environmentally acceptable ways.
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Author :
Publisher :
ISBN 13 :
Total Pages : 6 pages
Book Rating : 4.:/5 (662 download)
Download or read book Missive van het hof over twee mandamementen [i.e. mandamenten] by haar verleend tegens bewindhebberen van de Oostindische Compagnie te Middelburg en te Enkhuysen tot voldoening van gages die sy reeds uitgekeert hadden aan persoonen die voorgegeeven hadden erfgenaamen ab intestato te zyn van een overleede Oostindiënvaarder written by and published by . This book was released on 1749 with total page 6 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Uwe Kortshagen
Publisher : Springer
ISBN 13 : 0306470764
Total Pages : 553 pages
Book Rating : 4.3/5 (64 download)
Download or read book Electron Kinetics and Applications of Glow Discharges written by Uwe Kortshagen and published by Springer. This book was released on 2006-04-11 with total page 553 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book resulted from the NATO Advanced Research Workshop on “Electron Kinetics and Applications of Glow Discharges,” held in St. Petersburg, Russia, on May 19-23, 1997. Glow discharges have found widespread applications in many technological processes from the manufacture of semiconductors, to recent developments in na- technology, to the traditional fields of gas lasers, and discharge lamps. Consequently, the interest in the physics of glow discharges has experienced yet another resurgence of interest. While the non-equilibrium character of glow discharges is widely accepted, the opinion still prevails that the main features can be captured by fluid models, and that kinetic treatments are only required for the understanding of subtle details. The erroneousness of this belief is demonstrated by the failure of fluid models to describe many basic features of glow discharges such as, for instance, electrode phenomena, striations, and collisionless heating effects. An adequate description of glow discharges thus has to be of kinetic nature.
Author :
Publisher :
ISBN 13 :
Total Pages : 464 pages
Book Rating : 4.:/5 (3 download)
Download or read book Scientific and Technical Aerospace Reports written by and published by . This book was released on 1995 with total page 464 pages. Available in PDF, EPUB and Kindle. Book excerpt:
