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CMOS - MEMS

Author : Henry Baltes
Publisher : John Wiley & Sons
ISBN 13 : 352767506X
Total Pages : 610 pages
Book Rating : 4.5/5 (276 download)

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Book Synopsis CMOS - MEMS by : Henry Baltes

Download or read book CMOS - MEMS written by Henry Baltes and published by John Wiley & Sons. This book was released on 2013-03-26 with total page 610 pages. Available in PDF, EPUB and Kindle. Book excerpt: This edition of 'CMOS-MEMS' was originally published in the successful series 'Advanced Micro & Nanosystems'. Here, the combination of the globally established, billion dollar chip mass fabrication technology CMOS with the fascinating and commercially promising new world of MEMS is covered from all angles. The book introduces readers to this fi eld and takes them from fabrication technologies and material charaterization aspects to the actual applications of CMOS-MEMS - a wide range of miniaturized physical, chemical and biological sensors and RF systems. Vital knowledge on circuit and system integration issues concludes this in-depth treatise, illustrating the advantages of combining CMOS and MEMS in the first place, rather than having a hybrid solution.

3D and Circuit Integration of MEMS

Author : Masayoshi Esashi
Publisher : John Wiley & Sons
ISBN 13 : 3527823255
Total Pages : 528 pages
Book Rating : 4.5/5 (278 download)

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Book Synopsis 3D and Circuit Integration of MEMS by : Masayoshi Esashi

Download or read book 3D and Circuit Integration of MEMS written by Masayoshi Esashi and published by John Wiley & Sons. This book was released on 2021-03-16 with total page 528 pages. Available in PDF, EPUB and Kindle. Book excerpt: Explore heterogeneous circuit integration and the packaging needed for practical applications of microsystems MEMS and system integration are important building blocks for the “More-Than-Moore” paradigm described in the International Technology Roadmap for Semiconductors. And, in 3D and Circuit Integration of MEMS, distinguished editor Dr. Masayoshi Esashi delivers a comprehensive and systematic exploration of the technologies for microsystem packaging and heterogeneous integration. The book focuses on the silicon MEMS that have been used extensively and the technologies surrounding system integration. You’ll learn about topics as varied as bulk micromachining, surface micromachining, CMOS-MEMS, wafer interconnection, wafer bonding, and sealing. Highly relevant for researchers involved in microsystem technologies, the book is also ideal for anyone working in the microsystems industry. It demonstrates the key technologies that will assist researchers and professionals deal with current and future application bottlenecks. Readers will also benefit from the inclusion of: A thorough introduction to enhanced bulk micromachining on MIS process, including pressure sensor fabrication and the extension of MIS process for various advanced MEMS devices An exploration of epitaxial poly Si surface micromachining, including process condition of epi-poly Si, and MEMS devices using epi-poly Si Practical discussions of Poly SiGe surface micromachining, including SiGe deposition and LP CVD polycrystalline SiGe A concise treatment of heterogeneously integrated aluminum nitride MEMS resonators and filters Perfect for materials scientists, electronics engineers, and electrical and mechanical engineers, 3D and Circuit Integration of MEMS will also earn a place in the libraries of semiconductor physicists seeking a one-stop reference for circuit integration and the practical application of microsystems.

MEMS Materials and Processes Handbook

Author : Reza Ghodssi
Publisher : Springer Science & Business Media
ISBN 13 : 0387473181
Total Pages : 1211 pages
Book Rating : 4.3/5 (874 download)

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Book Synopsis MEMS Materials and Processes Handbook by : Reza Ghodssi

Download or read book MEMS Materials and Processes Handbook written by Reza Ghodssi and published by Springer Science & Business Media. This book was released on 2011-03-18 with total page 1211 pages. Available in PDF, EPUB and Kindle. Book excerpt: MEMs Materials and Processes Handbook" is a comprehensive reference for researchers searching for new materials, properties of known materials, or specific processes available for MEMS fabrication. The content is separated into distinct sections on "Materials" and "Processes". The extensive Material Selection Guide" and a "Material Database" guides the reader through the selection of appropriate materials for the required task at hand. The "Processes" section of the book is organized as a catalog of various microfabrication processes, each with a brief introduction to the technology, as well as examples of common uses in MEMs.

Handbook of Silicon Based MEMS Materials and Technologies

Author : Markku Tilli
Publisher : William Andrew
ISBN 13 : 0323312233
Total Pages : 827 pages
Book Rating : 4.3/5 (233 download)

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Book Synopsis Handbook of Silicon Based MEMS Materials and Technologies by : Markku Tilli

Download or read book Handbook of Silicon Based MEMS Materials and Technologies written by Markku Tilli and published by William Andrew. This book was released on 2015-09-02 with total page 827 pages. Available in PDF, EPUB and Kindle. Book excerpt: The Handbook of Silicon Based MEMS Materials and Technologies, Second Edition, is a comprehensive guide to MEMS materials, technologies, and manufacturing that examines the state-of-the-art with a particular emphasis on silicon as the most important starting material used in MEMS. The book explains the fundamentals, properties (mechanical, electrostatic, optical, etc.), materials selection, preparation, manufacturing, processing, system integration, measurement, and materials characterization techniques, sensors, and multi-scale modeling methods of MEMS structures, silicon crystals, and wafers, also covering micromachining technologies in MEMS and encapsulation of MEMS components. Furthermore, it provides vital packaging technologies and process knowledge for silicon direct bonding, anodic bonding, glass frit bonding, and related techniques, shows how to protect devices from the environment, and provides tactics to decrease package size for a dramatic reduction in costs. - Provides vital packaging technologies and process knowledge for silicon direct bonding, anodic bonding, glass frit bonding, and related techniques - Shows how to protect devices from the environment and decrease package size for a dramatic reduction in packaging costs - Discusses properties, preparation, and growth of silicon crystals and wafers - Explains the many properties (mechanical, electrostatic, optical, etc.), manufacturing, processing, measuring (including focused beam techniques), and multiscale modeling methods of MEMS structures - Geared towards practical applications rather than theory

MEMS

Author : Mohamed Gad-el-Hak
Publisher : CRC Press
ISBN 13 : 1420036556
Total Pages : 576 pages
Book Rating : 4.4/5 (2 download)

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Book Synopsis MEMS by : Mohamed Gad-el-Hak

Download or read book MEMS written by Mohamed Gad-el-Hak and published by CRC Press. This book was released on 2005-11-29 with total page 576 pages. Available in PDF, EPUB and Kindle. Book excerpt: As our knowledge of microelectromechanical systems (MEMS) continues to grow, so does The MEMS Handbook. The field has changed so much that this Second Edition is now available in three volumes. Individually, each volume provides focused, authoritative treatment of specific areas of interest. Together, they comprise the most comprehensive collection

MEMS and MOEMS Technology and Applications

Author : P. Rai-Choudhury
Publisher : SPIE Press
ISBN 13 : 9780819437167
Total Pages : 544 pages
Book Rating : 4.4/5 (371 download)

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Book Synopsis MEMS and MOEMS Technology and Applications by : P. Rai-Choudhury

Download or read book MEMS and MOEMS Technology and Applications written by P. Rai-Choudhury and published by SPIE Press. This book was released on 2000 with total page 544 pages. Available in PDF, EPUB and Kindle. Book excerpt: The silicon age that led the computer revolution has significantly changed the world. The next 30 years will see the incorporation of new types of functionality onto the chip-structures that will enable the chip to reason, to sense, to act and to communicate. Micromachining technologies offer a wide range of possibilities for active and passive devices. Recent developments have produced sensors, actuators and optical systems. Many of these technologies are based on surface micromachining, which has evolved from silicon integrated circuit technology. This book is written by experts in the field. It contains useful details in design and processing and can be utilized as a reference book or as a textbook.

Process Variations in Microsystems Manufacturing

Author : Michael Huff
Publisher : Springer Nature
ISBN 13 : 3030405605
Total Pages : 531 pages
Book Rating : 4.0/5 (34 download)

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Book Synopsis Process Variations in Microsystems Manufacturing by : Michael Huff

Download or read book Process Variations in Microsystems Manufacturing written by Michael Huff and published by Springer Nature. This book was released on 2020-04-09 with total page 531 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book thoroughly examines and explains the basic processing steps used in MEMS fabrication (both integrated circuit and specialized micro machining processing steps. The book places an emphasis on the process variations in the device dimensions resulting from these commonly used processing steps. This will be followed by coverage of commonly used metrology methods, process integration and variations in material properties, device parameter variations, quality assurance and control methods, and design methods for handling process variations. A detailed analysis of future methods for improved microsystems manufacturing is also included. This book is a valuable resource for practitioners, researchers and engineers working in the field as well as students at either the undergraduate or graduate level.

Mems for Biomedical Applications

Author : Shekhar Bhansali
Publisher : Elsevier
ISBN 13 : 0857096273
Total Pages : 511 pages
Book Rating : 4.8/5 (57 download)

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Book Synopsis Mems for Biomedical Applications by : Shekhar Bhansali

Download or read book Mems for Biomedical Applications written by Shekhar Bhansali and published by Elsevier. This book was released on 2012-07-18 with total page 511 pages. Available in PDF, EPUB and Kindle. Book excerpt: The application of Micro Electro Mechanical Systems (MEMS) in the biomedical field is leading to a new generation of medical devices. MEMS for biomedical applications reviews the wealth of recent research on fabrication technologies and applications of this exciting technology.The book is divided into four parts: Part one introduces the fundamentals of MEMS for biomedical applications, exploring the microfabrication of polymers and reviewing sensor and actuator mechanisms. Part two describes applications of MEMS for biomedical sensing and diagnostic applications. MEMS for in vivo sensing and electrical impedance spectroscopy are investigated, along with ultrasonic transducers, and lab-on-chip devices. MEMS for tissue engineering and clinical applications are the focus of part three, which considers cell culture and tissue scaffolding devices, BioMEMS for drug delivery and minimally invasive medical procedures. Finally, part four reviews emerging biomedical applications of MEMS, from implantable neuroprobes and ocular implants to cellular microinjection and hybrid MEMS.With its distinguished editors and international team of expert contributors, MEMS for biomedical applications provides an authoritative review for scientists and manufacturers involved in the design and development of medical devices as well as clinicians using this important technology. - Reviews the wealth of recent research on fabrication technologies and applications of Micro Electro Mechanical Systems (MEMS) in the biomedical field - Introduces the fundamentals of MEMS for biomedical applications, exploring the microfabrication of polymers and reviewing sensor and actuator mechanisms - Considers MEMS for biomedical sensing and diagnostic applications, along with MEMS for in vivo sensing and electrical impedance spectroscopy

MEMS and Microstructures in Aerospace Applications

Author : Robert Osiander
Publisher : CRC Press
ISBN 13 : 1420027743
Total Pages : 402 pages
Book Rating : 4.4/5 (2 download)

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Book Synopsis MEMS and Microstructures in Aerospace Applications by : Robert Osiander

Download or read book MEMS and Microstructures in Aerospace Applications written by Robert Osiander and published by CRC Press. This book was released on 2018-10-03 with total page 402 pages. Available in PDF, EPUB and Kindle. Book excerpt: The promise of MEMS for aerospace applications has been germinating for years, and current advances bring the field to the very cusp of fruition. Reliability is chief among the challenges limiting the deployment of MEMS technologies in space, as the requirement of zero failure during the mission is quite stringent for this burgeoning field. MEMS and Microstructures in Aerospace Applications provides all the necessary tools to overcome these obstacles and take MEMS from the lab bench to beyond the exosphere. The book begins with an overview of MEMS development and provides several demonstrations of past and current examples of MEMS in space. From this platform, the discussion builds to fabrication technologies; the effect of space environmental factors on MEMS devices; and micro technologies for space systems, instrumentation, communications, thermal control, guidance navigation and control, and propulsion. Subsequent chapters explore factors common to all of the described systems, such as MEMS packaging, handling and contamination control, material selection for specific applications, reliability practices for design and application, and assurance practices. Edited and contributed by an outstanding team of leading experts from industry, academia, and national laboratories, MEMS and Microstructures in Aerospace Applications illuminates the path toward qualifying and integrating MEMS devices and instruments into future space missions and developing innovative satellite systems.

First International Conference on Artificial Intelligence and Cognitive Computing

Author : Raju Surampudi Bapi
Publisher : Springer
ISBN 13 : 9811315809
Total Pages : 704 pages
Book Rating : 4.8/5 (113 download)

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Book Synopsis First International Conference on Artificial Intelligence and Cognitive Computing by : Raju Surampudi Bapi

Download or read book First International Conference on Artificial Intelligence and Cognitive Computing written by Raju Surampudi Bapi and published by Springer. This book was released on 2018-11-04 with total page 704 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book presents original research works by researchers, engineers and practitioners in the field of artificial intelligence and cognitive computing. The book is divided into two parts, the first of which focuses on artificial intelligence (AI), knowledge representation, planning, learning, scheduling, perception-reactive AI systems, evolutionary computing and other topics related to intelligent systems and computational intelligence. In turn, the second part focuses on cognitive computing, cognitive science and cognitive informatics. It also discusses applications of cognitive computing in medical informatics, structural health monitoring, computational intelligence, intelligent control systems, bio-informatics, smart manufacturing, smart grids, image/video processing, video analytics, medical image and signal processing, and knowledge engineering, as well as related applications.

Recent Advances in Mechatronics

Author : Ryszard Jablonski
Publisher : Springer Science & Business Media
ISBN 13 : 3540739564
Total Pages : 709 pages
Book Rating : 4.5/5 (47 download)

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Book Synopsis Recent Advances in Mechatronics by : Ryszard Jablonski

Download or read book Recent Advances in Mechatronics written by Ryszard Jablonski and published by Springer Science & Business Media. This book was released on 2007-09-19 with total page 709 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book presents recent state of advances in mechatronics presented on the 7th International Conference Mechatronics 2007, hosted at the Faculty of Mechatronics, Warsaw University of Technology, Poland. The selected papers give an overview of the state-of-the-art and present new research results and prospects of the future development in this interdisciplinary field of mechatronic systems.

A Modular Technology for Packaging and Assembling Microelectromechanical Systems (MEMS)

Author : Carlos Gonzalez
Publisher :
ISBN 13 :
Total Pages : 514 pages
Book Rating : 4.:/5 (57 download)

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Book Synopsis A Modular Technology for Packaging and Assembling Microelectromechanical Systems (MEMS) by : Carlos Gonzalez

Download or read book A Modular Technology for Packaging and Assembling Microelectromechanical Systems (MEMS) written by Carlos Gonzalez and published by . This book was released on 1997 with total page 514 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Advanced Materials and Technologies for Micro/Nano-Devices, Sensors and Actuators

Author : Evgeni Gusev
Publisher : Springer
ISBN 13 : 9048138078
Total Pages : 310 pages
Book Rating : 4.0/5 (481 download)

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Book Synopsis Advanced Materials and Technologies for Micro/Nano-Devices, Sensors and Actuators by : Evgeni Gusev

Download or read book Advanced Materials and Technologies for Micro/Nano-Devices, Sensors and Actuators written by Evgeni Gusev and published by Springer. This book was released on 2010-03-03 with total page 310 pages. Available in PDF, EPUB and Kindle. Book excerpt: A NATO Advanced Research Workshop (ARW) entitled “Advanced Materials and Technologies for Micro/Nano Devices, Sensors and Actuators” was held in St. Petersburg, Russia, from June 29 to July 2, 2009. The main goal of the Workshop was to examine (at a fundamental level) the very complex scientific issues that pertain to the use of micro- and nano-electromechanical systems (MEMS and NEMS), devices and technologies in next generation commercial and defen- related applications. Micro- and nano-electromechanical systems represent rather broad and diverse technological areas, such as optical systems (micromirrors, waveguides, optical sensors, integrated subsystems), life sciences and lab equipment (micropumps, membranes, lab-on-chip, membranes, microfluidics), sensors (bio-sensors, chemical sensors, gas-phase sensors, sensors integrated with electronics) and RF applications for signal transmission (variable capacitors, tunable filters and antennas, switches, resonators). From a scientific viewpoint, this is a very multi-disciplinary field, including micro- and nano-mechanics (such as stresses in structural materials), electronic effects (e. g. charge transfer), general electrostatics, materials science, surface chemistry, interface science, (nano)tribology, and optics. It is obvious that in order to overcome the problems surrounding next-generation MEMS/NEMS devices and applications it is necessary to tackle them from different angles: theoreticians need to speak with mechanical engineers, and device engineers and modelers to listen to surface physicists. It was therefore one of the main objectives of the workshop to bring together a multidisciplinary team of distinguished researchers.

Springer Handbook of Nanotechnology

Author : Bharat Bhushan
Publisher : Springer Science & Business Media
ISBN 13 : 3540012184
Total Pages : 1232 pages
Book Rating : 4.5/5 (4 download)

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Book Synopsis Springer Handbook of Nanotechnology by : Bharat Bhushan

Download or read book Springer Handbook of Nanotechnology written by Bharat Bhushan and published by Springer Science & Business Media. This book was released on 2004-01-19 with total page 1232 pages. Available in PDF, EPUB and Kindle. Book excerpt: This major work has established itself as the definitive reference in the nanoscience and nanotechnology area in one volume. In presents nanostructures, micro/nanofabrication, and micro/nanodevices. Special emphasis is on scanning probe microscopy, nanotribology and nanomechanics, molecularly thick films, industrial applications and microdevice reliability, and on social aspects. Reflecting further developments, the new edition has grown from six to eight parts. The latest information is added to fields such as bionanotechnology, nanorobotics, and NEMS/MEMS reliability. This classic reference book is orchestrated by a highly experienced editor and written by a team of distinguished experts for those learning about the field of nanotechnology.

Modular Systems for Energy Usage Management

Author : Yatish T. Shah
Publisher : CRC Press
ISBN 13 : 1000763846
Total Pages : 625 pages
Book Rating : 4.0/5 (7 download)

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Book Synopsis Modular Systems for Energy Usage Management by : Yatish T. Shah

Download or read book Modular Systems for Energy Usage Management written by Yatish T. Shah and published by CRC Press. This book was released on 2020-01-22 with total page 625 pages. Available in PDF, EPUB and Kindle. Book excerpt: "...[a] very unique book that integrates benefits of modular systems for enhanced sustainability to meet the global challenges of rapid and sometimes uncontrolled industrialization in the 21st century."—Pinakin Patel, T2M Global This book examines the role of the modular approach for the back end of the energy industry—energy usage management. It outlines the use of modular approaches for the processes used to improve energy conservation and efficiency, which are preludes to the prudent use of energy. Since energy consumption is conventionally broken down into four sectors—residential, transportation, industrial, and commercial—the discussions on energy usage management are also broken down into these four sectors in the book. The book examines the use of modular systems for five application areas that cover the sectors described above: buildings, vehicles, computers and electrical/electronic products, district heating, and wastewater treatment and desalination. This book also discusses the use of a modular approach for energy storage and transportation. Finally, it describes how the modular approach facilitates bottom-up, top-down, and hybrid simulation and modeling of the energy systems from various scientific and socioeconomic perspectives. Aimed at industry professionals and researchers involved in the energy industry, this book illustrates in detail, with the help of concrete industrial examples, how a modular approach can facilitate management of energy usage.

MOEMS

Author : M. Edward Motamedi
Publisher : SPIE Press
ISBN 13 : 9780819450210
Total Pages : 640 pages
Book Rating : 4.4/5 (52 download)

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Book Synopsis MOEMS by : M. Edward Motamedi

Download or read book MOEMS written by M. Edward Motamedi and published by SPIE Press. This book was released on 2005 with total page 640 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book introduces the exciting and fast-moving field of MOEMS to graduate students, scientists, and engineers by providing a foundation of both micro-optics and MEMS that will enable them to conduct future research in the field. Born from the relatively new fields of MEMS and micro-optics, MOEMS are proving to be an attractive and low-cost solution to a range of device problems requiring high optical functionality and high optical performance. MOEMS solutions include optical devices for telecommunication, sensing, and mobile systems such as v-grooves, gratings, shutters, scanners, filters, micromirrors, switches, alignment aids, lens arrays, and hermetic wafer-scale optical packaging. An international team of leading researchers contributed to this book, and it presents examples and problems employing cutting-edge MOEM devices. It will inspire researchers to further advance the design, fabrication, and analysis of MOEM systems.

CMOS and Beyond

Author : Tsu-Jae King Liu
Publisher : Cambridge University Press
ISBN 13 : 1316148025
Total Pages : 439 pages
Book Rating : 4.3/5 (161 download)

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Book Synopsis CMOS and Beyond by : Tsu-Jae King Liu

Download or read book CMOS and Beyond written by Tsu-Jae King Liu and published by Cambridge University Press. This book was released on 2015-02-05 with total page 439 pages. Available in PDF, EPUB and Kindle. Book excerpt: Get up to speed with the future of logic switch design with this indispensable overview of the most promising successors to modern CMOS transistors. Learn how to overcome existing design challenges using novel device concepts, presented using an in-depth, accessible, tutorial-style approach. Drawing on the expertise of leading researchers from both industry and academia, and including insightful contributions from the developers of many of these alternative logic devices, new concepts are introduced and discussed from a range of different viewpoints, covering all the necessary theoretical background and developmental context. Covering cutting-edge developments with the potential to overcome existing limitations on transistor performance, such as tunneling field-effect transistors (TFETs), alternative charge-based devices, spin-based devices, and more exotic approaches, this is essential reading for academic researchers, professional engineers, and graduate students working with semiconductor devices and technology.