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Author : Corrado Di Natale
Publisher : World Scientific
ISBN 13 : 9789810241995
Total Pages : 442 pages
Book Rating : 4.2/5 (419 download)
Download or read book Sensors and Microsystems written by Corrado Di Natale and published by World Scientific. This book was released on 2000 with total page 442 pages. Available in PDF, EPUB and Kindle. Book excerpt: http://www.worldscientific.com/worldscibooks/10.1142/4327
Author : Zhaoying Zhou
Publisher : Springer Science & Business Media
ISBN 13 : 3642182933
Total Pages : 1011 pages
Book Rating : 4.6/5 (421 download)
Download or read book Microsystems and Nanotechnology written by Zhaoying Zhou and published by Springer Science & Business Media. This book was released on 2012-08-30 with total page 1011 pages. Available in PDF, EPUB and Kindle. Book excerpt: “Microsystems and Nanotechnology” presents the latest science and engineering research and achievements in the fields of microsystems and nanotechnology, bringing together contributions by authoritative experts from the United States, Germany, Great Britain, Japan and China to discuss the latest advances in microelectromechanical systems (MEMS) technology and micro/nanotechnology. The book is divided into five parts – the fundamentals of microsystems and nanotechnology, microsystems technology, nanotechnology, application issues, and the developments and prospects – and is a valuable reference for students, teachers and engineers working with the involved technologies. Professor Zhaoying Zhou is a professor at the Department of Precision Instruments & Mechanology , Tsinghua University , and the Chairman of the MEMS & NEMS Society of China. Dr. Zhonglin Wang is the Director of the Center for Nanostructure Characterization, Georgia Tech, USA. Dr. Liwei Lin is a Professor at the Department of Mechanical Engineering, University of California at Berkeley, USA.
Author : Alberto Corigliano
Publisher : John Wiley & Sons
ISBN 13 : 1119053838
Total Pages : 332 pages
Book Rating : 4.1/5 (19 download)
Download or read book Mechanics of Microsystems written by Alberto Corigliano and published by John Wiley & Sons. This book was released on 2018-04-02 with total page 332 pages. Available in PDF, EPUB and Kindle. Book excerpt: Mechanics of Microsystems Alberto Corigliano, Raffaele Ardito, Claudia Comi, Attilio Frangi, Aldo Ghisi and Stefano Mariani, Politecnico di Milano, Italy A mechanical approach to microsystems, covering fundamental concepts including MEMS design, modelling and reliability Mechanics of Microsystems takes a mechanical approach to microsystems and covers fundamental concepts including MEMS design, modelling and reliability. The book examines the mechanical behaviour of microsystems from a ‘design for reliability’ point of view and includes examples of applications in industry. Mechanics of Microsystems is divided into two main parts. The first part recalls basic knowledge related to the microsystems behaviour and offers an overview on microsystems and fundamental design and modelling tools from a mechanical point of view, together with many practical examples of real microsystems. The second part covers the mechanical characterization of materials at the micro-scale and considers the most important reliability issues (fracture, fatigue, stiction, damping phenomena, etc) which are fundamental to fabricate a real working device. Key features: Provides an overview of MEMS, with special focus on mechanical-based Microsystems and reliability issues. Includes examples of applications in industry. Accompanied by a website hosting supplementary material. The book provides essential reading for researchers and practitioners working with MEMS, as well as graduate students in mechanical, materials and electrical engineering.
Author : Werner Karl Schomburg
Publisher : Springer
ISBN 13 : 3662470233
Total Pages : 384 pages
Book Rating : 4.6/5 (624 download)
Download or read book Introduction to Microsystem Design written by Werner Karl Schomburg and published by Springer. This book was released on 2015-06-25 with total page 384 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book systematically describes the design options for micro systems as well as the equations needed for calculating the behavior of their basic elements. The fundamental equations needed to calculate the effects and forces that are important in micro systems are also provided. Readers do not require previous knowledge of fabrication processes. This second edition of the volume is a thoroughly revised and extended update. The target audience primarily comprises experts in the field of micro systems and the book is also suitable for graduate engineering students. For quick reference, equations are presented in tables that can be found in an index at the end of the book.
Author : Krzysztof Iniewski
Publisher : CRC Press
ISBN 13 : 1351833561
Total Pages : 762 pages
Book Rating : 4.3/5 (518 download)
Download or read book Integrated Microsystems written by Krzysztof Iniewski and published by CRC Press. This book was released on 2017-12-19 with total page 762 pages. Available in PDF, EPUB and Kindle. Book excerpt: As rapid technological developments occur in electronics, photonics, mechanics, chemistry, and biology, the demand for portable, lightweight integrated microsystems is relentless. These devices are getting exponentially smaller, increasingly used in everything from video games, hearing aids, and pacemakers to more intricate biomedical engineering and military applications. Edited by Kris Iniewski, a revolutionary in the field of advanced semiconductor materials, Integrated Microsystems: Electronics, Photonics, and Biotechnology focuses on techniques for optimized design and fabrication of these intelligent miniaturized devices and systems. Composed of contributions from experts in academia and industry around the world, this reference covers processes compatible with CMOS integrated circuits, which combine computation, communications, sensing, and actuation capabilities. Light on math and physics, with a greater emphasis on microsystem design and configuration and electrical engineering, this book is organized in three sections—Microelectronics and Biosystems, Photonics and Imaging, and Biotechnology and MEMs. It addresses key topics, including physical and chemical sensing, imaging, smart actuation, and data fusion and management. Using tables, figures, and equations to help illustrate concepts, contributors examine and explain the potential of emerging applications for areas including biology, nanotechnology, micro-electromechanical systems (MEMS), microfluidics, and photonics.
Author : S Nihtianov
Publisher : Woodhead Publishing
ISBN 13 : 0081020562
Total Pages : 606 pages
Book Rating : 4.0/5 (81 download)
Download or read book Smart Sensors and MEMS written by S Nihtianov and published by Woodhead Publishing. This book was released on 2018-02-27 with total page 606 pages. Available in PDF, EPUB and Kindle. Book excerpt: Smart Sensors and MEMS: Intelligent Devices and Microsystems for Industrial Applications, Second Edition highlights new, important developments in the field, including the latest on magnetic sensors, temperature sensors and microreaction chambers. The book outlines the industrial applications for smart sensors, covering direct interface circuits for sensors, capacitive sensors for displacement measurement in the sub-nanometer range, integrated inductive displacement sensors for harsh industrial environments, advanced silicon radiation detectors in the vacuum ultraviolet (VUV) and extreme ultraviolet (EUV) spectral range, among other topics. New sections include discussions on magnetic and temperature sensors and the industrial applications of smart micro-electro-mechanical systems (MEMS). The book is an invaluable reference for academics, materials scientists and electrical engineers working in the microelectronics, sensors and micromechanics industry. In addition, engineers looking for industrial sensing, monitoring and automation solutions will find this a comprehensive source of information. - Contains new chapters that address key applications, such as magnetic sensors, microreaction chambers and temperature sensors - Provides an in-depth information on a wide array of industrial applications for smart sensors and smart MEMS - Presents the only book to discuss both smart sensors and MEMS for industrial applications
Author : Gerald Gerlach
Publisher : John Wiley & Sons
ISBN 13 : 0470770929
Total Pages : 376 pages
Book Rating : 4.4/5 (77 download)
Download or read book Introduction to Microsystem Technology written by Gerald Gerlach and published by John Wiley & Sons. This book was released on 2008-04-30 with total page 376 pages. Available in PDF, EPUB and Kindle. Book excerpt: Over half a century after the discovery of the piezoresistive effect, microsystem technology has experienced considerable developments. Expanding the opportunities of microelectronics to non-electronic systems, its number of application fields continues to increase. Microsensors are one of the most important fields, used in medical applications and micromechanics. Microfluidic systems are also a significant area, most commonly used in ink-jet printer heads. This textbook focuses on the essentials of microsystems technology, providing a knowledgeable grounding and a clear path through this well-established scientific dicipline. With a methodical, student-orientated approach, Introduction to Microsystem Technology covers the following: microsystem materials (including silicon, polymers and thin films), and the scaling effects of going micro; fabrication techniques based on different material properties, descriptions of their limitations and functional and shape elements produced by these techniques; sensors and actuators based on elements such as mechanical, fluidic, and thermal (yaw rate sensor components are described); the influence of technology parameters on microsystem properties, asking, for example, when is the function of a microsystem device robust and safe? The book presents problems at the end of each chapter so that you may test your understanding of the key concepts (full solutions for these are given on an accompanying website). Practical examples are included also, as well as case studies that enable a better understanding of the technology as a whole. With its extensive treatment on the fundamentals of microsystem technology, this book also serves as a compendium for engineers and technicians working with microsystem technology.
Author : Evgeni Gusev
Publisher : Springer Science & Business Media
ISBN 13 : 9048138051
Total Pages : 310 pages
Book Rating : 4.0/5 (481 download)
Download or read book Advanced Materials and Technologies for Micro/Nano-Devices, Sensors and Actuators written by Evgeni Gusev and published by Springer Science & Business Media. This book was released on 2010-03-15 with total page 310 pages. Available in PDF, EPUB and Kindle. Book excerpt: A NATO Advanced Research Workshop (ARW) entitled “Advanced Materials and Technologies for Micro/Nano Devices, Sensors and Actuators” was held in St. Petersburg, Russia, from June 29 to July 2, 2009. The main goal of the Workshop was to examine (at a fundamental level) the very complex scientific issues that pertain to the use of micro- and nano-electromechanical systems (MEMS and NEMS), devices and technologies in next generation commercial and defen- related applications. Micro- and nano-electromechanical systems represent rather broad and diverse technological areas, such as optical systems (micromirrors, waveguides, optical sensors, integrated subsystems), life sciences and lab equipment (micropumps, membranes, lab-on-chip, membranes, microfluidics), sensors (bio-sensors, chemical sensors, gas-phase sensors, sensors integrated with electronics) and RF applications for signal transmission (variable capacitors, tunable filters and antennas, switches, resonators). From a scientific viewpoint, this is a very multi-disciplinary field, including micro- and nano-mechanics (such as stresses in structural materials), electronic effects (e. g. charge transfer), general electrostatics, materials science, surface chemistry, interface science, (nano)tribology, and optics. It is obvious that in order to overcome the problems surrounding next-generation MEMS/NEMS devices and applications it is necessary to tackle them from different angles: theoreticians need to speak with mechanical engineers, and device engineers and modelers to listen to surface physicists. It was therefore one of the main objectives of the workshop to bring together a multidisciplinary team of distinguished researchers.
Author : Kieran Delaney
Publisher : Springer Science & Business Media
ISBN 13 : 0387462643
Total Pages : 419 pages
Book Rating : 4.3/5 (874 download)
Download or read book Ambient Intelligence with Microsystems written by Kieran Delaney and published by Springer Science & Business Media. This book was released on 2008-10-17 with total page 419 pages. Available in PDF, EPUB and Kindle. Book excerpt: Augmented Materials and Smart Objects investigates the issues required to ensure technology platforms capable of being seamlessly integrated into everyday objects. In particular, it deals with the requirements for integrated computation and MEMs sensors, system-in-a-package solutions, and multi-chip modules. On top of this, the publication’s 500 pages cover the impact of the trend towards embedded microelectronic electronics sub-systems, novel assembly techniques for autonomous MEMs sensors, and practical performance issues that are key to the AmI concept.
Author : Bartlomiej F. Romanowicz
Publisher : Springer Science & Business Media
ISBN 13 : 146155621X
Total Pages : 156 pages
Book Rating : 4.4/5 (615 download)
Download or read book Methodology for the Modeling and Simulation of Microsystems written by Bartlomiej F. Romanowicz and published by Springer Science & Business Media. This book was released on 2012-12-06 with total page 156 pages. Available in PDF, EPUB and Kindle. Book excerpt: Over the past two decades, technologies for microsystems fabrication have made considerable progress. This has made possible a large variety of new commercial devices ranging, for example, from integrated pressure and acceleration microsensors to active micromirror arrays for image projection. In the near future, there will be a number of new devices, which will be commercialized in many application areas. The field of microsystems is characterized by its wide diversity, which requires a multidisciplinary approach for design and processes as well as in application areas. Although there is a common technological background derived from integrated circuits, it is clear that microsystems will require additional application-specific technologies. Since most microsystem technologies are based on batch processing and dedicated to mass production, prototyping is likely to be an expensive and time-consuming step. It is recognized that standardization of the processes as well as of the design tools will definitely help reduce the entry cost of microsystems. This creates a very challenging situation for the design, modeling and simulation of microsystems. Methodology for the Modeling and Simulation of Microsystems is the first book to give an overview of the problems associated with modeling and simulation of microsystems. It introduces a new methodology, which is supported by several examples. It should provide a useful starting point for both scientists and engineers seeking background information for efficient design of microsystems.
Author : Arnaldo D'amico
Publisher : World Scientific
ISBN 13 : 9814491950
Total Pages : 514 pages
Book Rating : 4.8/5 (144 download)
Download or read book Sensors And Microsystems, Proceedings Of The 5th Italian Conference - Extended To Mediterranean Countries written by Arnaldo D'amico and published by World Scientific. This book was released on 2000-12-18 with total page 514 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book offers a unique view on the research activities (industrial and academic) carried out in Italy in the fields of chemical and physical sensors, biosensors, and microsystems. It contains about 80 papers on all fields of sensors and microsystems.The 5th Italian Conference on Sensors and Microsystems was held in Lecce, Italy. This location opened the conference to mediterranean countries, particularly the Middle East.The proceedings have been selected for coverage in:• Materials Science Citation Index®• Index to Scientific & Technical Proceedings (ISTP CDROM version / ISI Proceedings)• CC Proceedings — Engineering & Physical Sciences
Author : Muthu Wijesundara
Publisher : Springer Science & Business Media
ISBN 13 : 1441971211
Total Pages : 247 pages
Book Rating : 4.4/5 (419 download)
Download or read book Silicon Carbide Microsystems for Harsh Environments written by Muthu Wijesundara and published by Springer Science & Business Media. This book was released on 2011-05-17 with total page 247 pages. Available in PDF, EPUB and Kindle. Book excerpt: Silicon Carbide Microsystems for Harsh Environments reviews state-of-the-art Silicon Carbide (SiC) technologies that, when combined, create microsystems capable of surviving in harsh environments, technological readiness of the system components, key issues when integrating these components into systems, and other hurdles in harsh environment operation. The authors use the SiC technology platform suite the model platform for developing harsh environment microsystems and then detail the current status of the specific individual technologies (electronics, MEMS, packaging). Additionally, methods towards system level integration of components and key challenges are evaluated and discussed based on the current state of SiC materials processing and device technology. Issues such as temperature mismatch, process compatibility and temperature stability of individual components and how these issues manifest when building the system receive thorough investigation. The material covered not only reviews the state-of-the-art MEMS devices, provides a framework for the joining of electronics and MEMS along with packaging into usable harsh-environment-ready sensor modules.
Author : Tai-Ran Hsu
Publisher : John Wiley & Sons
ISBN 13 : 1119771161
Total Pages : 579 pages
Book Rating : 4.1/5 (197 download)
Download or read book MEMS and Microsystems written by Tai-Ran Hsu and published by John Wiley & Sons. This book was released on 2020-07-16 with total page 579 pages. Available in PDF, EPUB and Kindle. Book excerpt: Technology/Engineering/Mechanical A bestselling MEMS text...now better than ever. An engineering design approach to Microelectromechanical Systems, MEMS and Microsystems remains the only available text to cover both the electrical and the mechanical aspects of the technology. In the five years since the publication of the first edition, there have been significant changes in the science and technology of miniaturization, including microsystems technology and nanotechnology. In response to the increasing needs of engineers to acquire basic knowledge and experience in these areas, this popular text has been carefully updated, including an entirely new section on the introduction of nanoscale engineering. Following a brief introduction to the history and evolution of nanotechnology, the author covers the fundamentals in the engineering design of nanostructures, including fabrication techniques for producing nanoproducts, engineering design principles in molecular dynamics, and fluid flows and heat transmission in nanoscale substances. Other highlights of the Second Edition include: * Expanded coverage of microfabrication plus assembly and packaging technologies * The introduction of microgyroscopes, miniature microphones, and heat pipes * Design methodologies for thermally actuated multilayered device components * The use of popular SU-8 polymer material Supported by numerous examples, case studies, and applied problems to facilitate understanding and real-world application, the Second Edition will be of significant value for both professionals and senior-level mechanical or electrical engineering students.
Author : Olav Solgaard
Publisher : Springer Science & Business Media
ISBN 13 : 0387683518
Total Pages : 641 pages
Book Rating : 4.3/5 (876 download)
Download or read book Photonic Microsystems written by Olav Solgaard and published by Springer Science & Business Media. This book was released on 2009-04-05 with total page 641 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book describes Microelectromechanical systems (MEMS) technology and demonstrates how MEMS allow miniaturization, parallel fabrication, and efficient packaging of optics, as well as integration of optics and electronics. The book shows how the characteristics of MEMS enable practical implementations of a variety of applications, including projection displays, fiber switches, interferometers, and spectrometers. The authors conclude with an up-to-date discussion of the need for the combination of MEMS and Photonic crystals.
Author : N. Wu
Publisher : The Electrochemical Society
ISBN 13 : 1607687585
Total Pages : 49 pages
Book Rating : 4.6/5 (76 download)
Download or read book Sensors, Actuators, and Microsystems General Session written by N. Wu and published by The Electrochemical Society. This book was released on 2016-09-21 with total page 49 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : G. K. Ananthasuresh
Publisher : Wiley Global Education
ISBN 13 : 1118213904
Total Pages : 498 pages
Book Rating : 4.1/5 (182 download)
Download or read book Micro and Smart Systems written by G. K. Ananthasuresh and published by Wiley Global Education. This book was released on 2012-04-13 with total page 498 pages. Available in PDF, EPUB and Kindle. Book excerpt: Microsystems are systems that integrate, on a chip or a package, one or more of many different categories of microdevices. As the past few decades were dominated by the development and rapid miniaturization of circuitry, the current and coming decades are witnessing a similar revolution in the miniaturization of sensors, actuators, and electronics; and communication, control and power devices. Applications ranging from biomedicine to warfare are driving rapid innovation and growth in the field, which is pushing this topic into graduate and undergraduate curricula in electrical, mechanical, and biomedical engineering.
Author : Danick Briand
Publisher : John Wiley & Sons
ISBN 13 : 3527319026
Total Pages : 492 pages
Book Rating : 4.5/5 (273 download)
Download or read book Micro Energy Harvesting written by Danick Briand and published by John Wiley & Sons. This book was released on 2015-06-22 with total page 492 pages. Available in PDF, EPUB and Kindle. Book excerpt: With its inclusion of the fundamentals, systems and applications, this reference provides readers with the basics of micro energy conversion along with expert knowledge on system electronics and real-life microdevices. The authors address different aspects of energy harvesting at the micro scale with a focus on miniaturized and microfabricated devices. Along the way they provide an overview of the field by compiling knowledge on the design, materials development, device realization and aspects of system integration, covering emerging technologies, as well as applications in power management, energy storage, medicine and low-power system electronics. In addition, they survey the energy harvesting principles based on chemical, thermal, mechanical, as well as hybrid and nanotechnology approaches. In unparalleled detail this volume presents the complete picture -- and a peek into the future -- of micro-powered microsystems.
