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Author : Peter W. Hawkes
Publisher :
ISBN 13 : 9780120147250
Total Pages : 282 pages
Book Rating : 4.1/5 (472 download)
Download or read book Microelectronics and Microscopy written by Peter W. Hawkes and published by . This book was released on 1992 with total page 282 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Chih-Hang Tung
Publisher : John Wiley & Sons
ISBN 13 : 9780471457725
Total Pages : 688 pages
Book Rating : 4.4/5 (577 download)
Download or read book ULSI Semiconductor Technology Atlas written by Chih-Hang Tung and published by John Wiley & Sons. This book was released on 2003-10-06 with total page 688 pages. Available in PDF, EPUB and Kindle. Book excerpt: More than 1,100 TEM images illustrate the science of ULSI The natural outgrowth of VLSI (Very Large Scale Integration), Ultra Large Scale Integration (ULSI) refers to semiconductor chips with more than 10 million devices per chip. Written by three renowned pioneers in their field, ULSI Semiconductor Technology Atlas uses examples and TEM (Transmission Electron Microscopy) micrographs to explain and illustrate ULSI process technologies and their associated problems. The first book available on the subject to be illustrated using TEM images, ULSI Semiconductor Technology Atlas is logically divided into four parts: * Part I includes basic introductions to the ULSI process, device construction analysis, and TEM sample preparation * Part II focuses on key ULSI modules--ion implantation and defects, dielectrics and isolation structures, silicides/salicides, and metallization * Part III examines integrated devices, including complete planar DRAM, stacked cell DRAM, and trench cell DRAM, as well as SRAM as examples for process integration and development * Part IV emphasizes special applications, including TEM in advanced failure analysis, TEM in advanced packaging development and UBM (Under Bump Metallization) studies, and high-resolution TEM in microelectronics This innovative guide also provides engineers and managers in the microelectronics industry, as well as graduate students, with: * More than 1,100 TEM images to illustrate the science of ULSI * A historical introduction to the technology as well as coverage of the evolution of basic ULSI process problems and issues * Discussion of TEM in other advanced microelectronics devices and materials, such as flash memories, SOI, SiGe devices, MEMS, and CD-ROMs
Author : Umberto Celano
Publisher : Springer
ISBN 13 : 3030156125
Total Pages : 408 pages
Book Rating : 4.0/5 (31 download)
Download or read book Electrical Atomic Force Microscopy for Nanoelectronics written by Umberto Celano and published by Springer. This book was released on 2019-08-01 with total page 408 pages. Available in PDF, EPUB and Kindle. Book excerpt: The tremendous impact of electronic devices on our lives is the result of continuous improvements of the billions of nanoelectronic components inside integrated circuits (ICs). However, ultra-scaled semiconductor devices require nanometer control of the many parameters essential for their fabrication. Through the years, this created a strong alliance between microscopy techniques and IC manufacturing. This book reviews the latest progress in IC devices, with emphasis on the impact of electrical atomic force microscopy (AFM) techniques for their development. The operation principles of many techniques are introduced, and the associated metrology challenges described. Blending the expertise of industrial specialists and academic researchers, the chapters are dedicated to various AFM methods and their impact on the development of emerging nanoelectronic devices. The goal is to introduce the major electrical AFM methods, following the journey that has seen our lives changed by the advent of ubiquitous nanoelectronics devices, and has extended our capability to sense matter on a scale previously inaccessible.
Author : Alain Claverie
Publisher : John Wiley & Sons
ISBN 13 : 1118579054
Total Pages : 280 pages
Book Rating : 4.1/5 (185 download)
Download or read book Transmission Electron Microscopy in Micro-nanoelectronics written by Alain Claverie and published by John Wiley & Sons. This book was released on 2013-01-29 with total page 280 pages. Available in PDF, EPUB and Kindle. Book excerpt: Today, the availability of bright and highly coherent electron sources and sensitive detectors has radically changed the type and quality of the information which can be obtained by transmission electron microscopy (TEM). TEMs are now present in large numbers not only in academia, but also in industrial research centers and fabs. This book presents in a simple and practical way the new quantitative techniques based on TEM which have recently been invented or developed to address most of the main challenging issues scientists and process engineers have to face to develop or optimize semiconductor layers and devices. Several of these techniques are based on electron holography; others take advantage of the possibility of focusing intense beams within nanoprobes. Strain measurements and mappings, dopant activation and segregation, interfacial reactions at the nanoscale, defect identification and specimen preparation by FIB are among the topics presented in this book. After a brief presentation of the underlying theory, each technique is illustrated through examples from the lab or fab.
Author : Meier, Tobias
Publisher : KIT Scientific Publishing
ISBN 13 : 3731502534
Total Pages : 192 pages
Book Rating : 4.7/5 (315 download)
Download or read book Magnetoresistive and Thermoresistive Scanning Probe Microscopy with Applications in Micro- and Nanotechnology written by Meier, Tobias and published by KIT Scientific Publishing. This book was released on 2014-10-02 with total page 192 pages. Available in PDF, EPUB and Kindle. Book excerpt: This work presents approaches to extend limits of scanning probe microscopy techniques towards more versatile instruments using integrated sensor concepts. For structural surface analysis, magnetoresistive sensing is introduced and thermoresistive sensing is applied to study nanoscale phonon transport in chain-like molecules. Investigating with these techniques the properties of shape memory polymers, a fabrication method to design application-inspired micro- and nanostructures is introduced.
Author : Tejinder Gandhi
Publisher : ASM International
ISBN 13 : 1627082468
Total Pages : 750 pages
Book Rating : 4.6/5 (27 download)
Download or read book Microelectronics Fialure Analysis Desk Reference, Seventh Edition written by Tejinder Gandhi and published by ASM International. This book was released on 2019-11-01 with total page 750 pages. Available in PDF, EPUB and Kindle. Book excerpt: The Electronic Device Failure Analysis Society proudly announces the Seventh Edition of the Microelectronics Failure Analysis Desk Reference, published by ASM International. The new edition will help engineers improve their ability to verify, isolate, uncover, and identify the root cause of failures. Prepared by a team of experts, this updated reference offers the latest information on advanced failure analysis tools and techniques, illustrated with numerous real-life examples. This book is geared to practicing engineers and for studies in the major area of power plant engineering. For non-metallurgists, a chapter has been devoted to the basics of material science, metallurgy of steels, heat treatment, and structure-property correlation. A chapter on materials for boiler tubes covers composition and application of different grades of steels and high temperature alloys currently in use as boiler tubes and future materials to be used in supercritical, ultra-supercritical and advanced ultra-supercritical thermal power plants. A comprehensive discussion on different mechanisms of boiler tube failure is the heart of the book. Additional chapters detailing the role of advanced material characterization techniques in failure investigation and the role of water chemistry in tube failures are key contributions to the book.
Author : Peter W. Hawkes
Publisher : Academic Press
ISBN 13 : 0323989209
Total Pages : 546 pages
Book Rating : 4.3/5 (239 download)
Download or read book The Beginnings of Electron Microscopy - Part 2 written by Peter W. Hawkes and published by Academic Press. This book was released on 2022-04-26 with total page 546 pages. Available in PDF, EPUB and Kindle. Book excerpt: The Beginnings of Electron Microscopy - Part 2, Volume 221 in the Advances in Imaging and Electron Physics series, highlights new advances in the field, with this new volume presenting interesting chapters on Recollections from the Early Years: Canada-USA, My Recollection of the Early History of Our Work on Electron Optics and the Electron Microscope, Walter Hoppe (1917–1986), Reminiscences of the Development of Electron Optics and Electron Microscope Instrumentation in Japan, Early Electron Microscopy in The Netherlands, L. L. Marton, 1901-1979, The Invention of the Electron Fresnel Interference Biprism, The Development of the Scanning Electron Microscope, and much more. Provides the authority and expertise of leading contributors from an international board of authors Presents the latest release in Advances in Imaging and Electron Physics series
Author : EDFAS Desk Reference Committee
Publisher : ASM International
ISBN 13 : 1615037268
Total Pages : 673 pages
Book Rating : 4.6/5 (15 download)
Download or read book Microelectronics Failure Analysis written by EDFAS Desk Reference Committee and published by ASM International. This book was released on 2011 with total page 673 pages. Available in PDF, EPUB and Kindle. Book excerpt: Includes bibliographical references and index.
Author : John R. Devaney
Publisher :
ISBN 13 :
Total Pages : 60 pages
Book Rating : 4.:/5 (31 download)
Download or read book Semiconductor Measurement Technology written by John R. Devaney and published by . This book was released on 1977 with total page 60 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Peter W. Hawkes
Publisher : Elsevier
ISBN 13 : 9780080525457
Total Pages : 369 pages
Book Rating : 4.5/5 (254 download)
Download or read book Advances in Imaging and Electron Physics written by Peter W. Hawkes and published by Elsevier. This book was released on 2001-05-23 with total page 369 pages. Available in PDF, EPUB and Kindle. Book excerpt: Advances in Imaging and Electron Physics merges two long-running serials-Advances in Electronics and Electron Physics and Advances in Optical and Electron Microscopy. This series features extended articles on the physics of electron devices (especially semiconductor devices), particle optics at high and low energies, microlithography, image science and digital image processing, electromagnetic wave propagation, electron microscopy, and the computing methods used in all these domains.
Author :
Publisher : Academic Press
ISBN 13 : 9780080577623
Total Pages : 885 pages
Book Rating : 4.5/5 (776 download)
Download or read book The Growth of Electron Microscopy written by and published by Academic Press. This book was released on 1996-08-05 with total page 885 pages. Available in PDF, EPUB and Kindle. Book excerpt: As a complement to The Beginnings of Electron Microscopy, Advances in Imaging and Electron Physics is pleased to present Volume 96, The Growth of Electron Microscopy. This comprehensive collection of articles surveys the accomplishments of various national groups that comprise the International Federation of Societies of Electron Microscopy (IFSEM).
Author : Abraham Landzberg
Publisher : Springer Science & Business Media
ISBN 13 : 1461520290
Total Pages : 663 pages
Book Rating : 4.4/5 (615 download)
Download or read book Microelectronics Manufacturing Diagnostics Handbook written by Abraham Landzberg and published by Springer Science & Business Media. This book was released on 2012-12-06 with total page 663 pages. Available in PDF, EPUB and Kindle. Book excerpt: The world of microelectronics is filled with cusses measurement systems, manufacturing many success stories. From the use of semi control techniques, test, diagnostics, and fail ure analysis. It discusses methods for modeling conductors for powerful desktop computers to their use in maintaining optimum engine per and reducing defects, and for preventing de formance in modem automobiles, they have fects in the first place. The approach described, clearly improved our daily lives. The broad while geared to the microelectronics world, has useability of the technology is enabled, how applicability to any manufacturing process of similar complexity. The authors comprise some ever, only by the progress made in reducing their cost and improving their reliability. De of the best scientific minds in the world, and fect reduction receives a significant focus in our are practitioners of the art. The information modem manufacturing world, and high-quality captured here is world class. I know you will diagnostics is the key step in that process. find the material to be an excellent reference in of product failures enables step func Analysis your application. tion improvements in yield and reliability. which works to reduce cost and open up new Dr. Paul R. Low applications and technologies. IBM Vice President and This book describes the process ofdefect re of Technology Products General Manager duction in the microelectronics world.
Author : Freddy Adams
Publisher : Elsevier
ISBN 13 : 0444634509
Total Pages : 480 pages
Book Rating : 4.4/5 (446 download)
Download or read book Chemical Imaging Analysis written by Freddy Adams and published by Elsevier. This book was released on 2015-06-06 with total page 480 pages. Available in PDF, EPUB and Kindle. Book excerpt: Chemical Imaging Analysis covers the advancements made over the last 50 years in chemical imaging analysis, including different analytical techniques and the ways they were developed and refined to link the composition and structure of manmade and natural materials at the nano/micro scale to the functional behavior at the macroscopic scale. In a development process that started in the early 1960s, a variety of specialized analytical techniques was developed – or adapted from existing techniques – and these techniques have matured into versatile and powerful tools for visualizing structural and compositional heterogeneity. This text explores that journey, providing a general overview of imaging techniques in diverse fields, including mass spectrometry, optical spectrometry including X-rays, electron microscopy, and beam techniques. Provides comprehensive coverage of analytical techniques used in chemical imaging analysis Explores a variety of specialized techniques Provides a general overview of imaging techniques in diverse fields
Author :
Publisher : ASM International
ISBN 13 : 0871707691
Total Pages : 160 pages
Book Rating : 4.8/5 (717 download)
Download or read book Microelectronic Failure Analysis written by and published by ASM International. This book was released on 2002-01-01 with total page 160 pages. Available in PDF, EPUB and Kindle. Book excerpt: Provides new or expanded coverage on the latest techniques for microelectronic failure analysis. The CD-ROM includes the complete content of the book in fully searchable Adobe Acrobat format. Developed by the Electronic Device Failure Analysis Society (EDFAS) Publications Committee
Author :
Publisher :
ISBN 13 :
Total Pages : 700 pages
Book Rating : 4.F/5 ( download)
Download or read book NBS Special Publication written by and published by . This book was released on 1968 with total page 700 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : United States. National Bureau of Standards
Publisher :
ISBN 13 :
Total Pages : 356 pages
Book Rating : 4.:/5 (42 download)
Download or read book Publications of the National Bureau of Standards ... Catalog written by United States. National Bureau of Standards and published by . This book was released on 1972 with total page 356 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Michael Halliwell
Publisher : Springer Science & Business Media
ISBN 13 : 0306471078
Total Pages : 571 pages
Book Rating : 4.3/5 (64 download)
Download or read book Acoustical Imaging written by Michael Halliwell and published by Springer Science & Business Media. This book was released on 2006-05-26 with total page 571 pages. Available in PDF, EPUB and Kindle. Book excerpt: The origin ofthe International Acoustical Imaging Symposium series can be traced to 1967, when a meeting on acoustical holography was held in C alifornia. In those days, acoustical holography was at the leading edge of research but, as the importance of this subject waned, so the title of the series was changed from Acoustical Holography to Acoustical Imaging in 1978. The early Symposia were held at various venues in the United States. In 1980. the series became international, with the Symposium that year taking place in Cannes in France. The pattern now is to try to met alternately in the USA and in another part of the world so that active researchers everywhere can conveniently attend at a reasonably high frequency. It was a great privilege for us in Bristol in the United Kingdom to be chosen to host the 25th Symposium, which convened on 19 March 2000 and spread over four days. We were blessed not only by good weather, but also by the attendance ofnearly 100 pa rticipants who came from 17 c ountries. A large number of papers were accepted for presentation, either orally or as posters. Whether an oral presentation or a poster, all were considered to have equal merit, and no distinction is made between them in the published proceedings. There were no parallel sessions, so every participant could attend every presentation. The re sultant disciplinary cross fertilisation maintained the t radition of past Symposia.
