Micro System Technologies 90

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Micro System Technologies 90

Author : Herbert Reichl
Publisher : Springer Science & Business Media
ISBN 13 : 3642456782
Total Pages : 843 pages
Book Rating : 4.6/5 (424 download)

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Book Synopsis Micro System Technologies 90 by : Herbert Reichl

Download or read book Micro System Technologies 90 written by Herbert Reichl and published by Springer Science & Business Media. This book was released on 2012-12-06 with total page 843 pages. Available in PDF, EPUB and Kindle. Book excerpt: On September 10-13, 1990, the first international meeting on Microsystem Technologies takes place at the Berlin International Congress Center. Most of the traditional congresses deal with themes that become more and more specific, and only a small part of the scientific world is reflected. The Micro System Technologies is attempting to take the opposite direction: During the last two decades the development of microelectronics was characterized by a tremendous increase of complexity of integrated circuits. At the same time the fields of microoptics and micromechanics have been developed to an advanced state of the art by the application of thin film and semiconductor technologies. The trend of the future development is to increase the integration density by combining the microelectronic, microoptic, and micro mechanic aspects to new complex multifunctional systems, which are able to comprise sensors, actuators, analogue and digital circuits on the same chip or on multichip-modules. Microsystems will lead to extensions of the field of microelectronic applications with important technical alterations and can open new considerable markets. For the realization of economical solutions for microsystems a lot of interdisciplinary cooperation and know-how has to be developed. New materials for sensitive layers, substrates, conducting, semiconducting, or isolating thin films are the basis for the development of new technologies. The increasing complexity leads to increasing interaction among electrical and non-electrical quantities.

Microsystem Technology

Author : Wolfgang Menz
Publisher : John Wiley & Sons
ISBN 13 : 3527613013
Total Pages : 512 pages
Book Rating : 4.5/5 (276 download)

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Book Synopsis Microsystem Technology by : Wolfgang Menz

Download or read book Microsystem Technology written by Wolfgang Menz and published by John Wiley & Sons. This book was released on 2008-07-11 with total page 512 pages. Available in PDF, EPUB and Kindle. Book excerpt: This completely revised edition of a bestselling concise introduction to microsystems technology includes the latest trends in this emerging scientific discipline. The chapters on silicium and LIGA technology are greatly expanded, whilst new topics include application aspects in medicine and health technology, lithography and electroplating.

Microsystem Technology in Chemistry and Life Sciences

Author : Andreas Manz
Publisher : Springer Science & Business Media
ISBN 13 : 3540695443
Total Pages : 269 pages
Book Rating : 4.5/5 (46 download)

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Book Synopsis Microsystem Technology in Chemistry and Life Sciences by : Andreas Manz

Download or read book Microsystem Technology in Chemistry and Life Sciences written by Andreas Manz and published by Springer Science & Business Media. This book was released on 2003-09-05 with total page 269 pages. Available in PDF, EPUB and Kindle. Book excerpt: "WHAT DOES NOT NEED TO BE BIG, WILL BE SMALL", a word by an engineer at a recent conference on chips technology. This sentence is particularly true for chemistry. Microfabrication technology emerged from microelectronics into areas like mechanics and now chemistry and biology. The engineering of micron and submicron sized features on the surface of silicon, glass and polymers opens a whole new world. Micromotors smaller than human hair have been fabricated and they work fine. It is the declared goal of the authors to bring these different worlds together in this volume. Authors have been carefully chosen to guarantee for the quality of the contents. An engineer, a chemist or a biologist will find new impulses from the various chapters in this book.

Micro System Technologies 90

Author : Herbert Reichl
Publisher : Springer
ISBN 13 :
Total Pages : 884 pages
Book Rating : 4.E/5 ( download)

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Book Synopsis Micro System Technologies 90 by : Herbert Reichl

Download or read book Micro System Technologies 90 written by Herbert Reichl and published by Springer. This book was released on 1990 with total page 884 pages. Available in PDF, EPUB and Kindle. Book excerpt: On September 10-13, 1990, the first international meeting on Microsystem Technologies takes place at the Berlin International Congress Center. Most of the traditional congresses deal with themes that become more and more specific, and only a small part of the scientific world is reflected. The Micro System Technologies is attempting to take the opposite direction: During the last two decades the development of microelectronics was characterized by a tremendous increase of complexity of integrated circuits. At the same time the fields of microoptics and micromechanics have been developed to an advanced state of the art by the application of thin film and semiconductor technologies. The trend of the future development is to increase the integration density by combining the microelectronic, microoptic, and micro mechanic aspects to new complex multifunctional systems, which are able to comprise sensors, actuators, analogue and digital circuits on the same chip or on multichip-modules. Microsystems will lead to extensions of the field of microelectronic applications with important technical alterations and can open new considerable markets. For the realization of economical solutions for microsystems a lot of interdisciplinary cooperation and know-how has to be developed. New materials for sensitive layers, substrates, conducting, semiconducting, or isolating thin films are the basis for the development of new technologies. The increasing complexity leads to increasing interaction among electrical and non-electrical quantities.

Micro-system Technologies 90

Author : Herbert Reichl
Publisher : Springer Verlag
ISBN 13 : 9780387530253
Total Pages : 858 pages
Book Rating : 4.5/5 (32 download)

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Book Synopsis Micro-system Technologies 90 by : Herbert Reichl

Download or read book Micro-system Technologies 90 written by Herbert Reichl and published by Springer Verlag. This book was released on 1990 with total page 858 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Microsystem Technology

Author : Hans-Peter Saluz
Publisher : Birkhäuser
ISBN 13 : 3034888171
Total Pages : 592 pages
Book Rating : 4.0/5 (348 download)

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Book Synopsis Microsystem Technology by : Hans-Peter Saluz

Download or read book Microsystem Technology written by Hans-Peter Saluz and published by Birkhäuser. This book was released on 2012-12-06 with total page 592 pages. Available in PDF, EPUB and Kindle. Book excerpt: Biomolecular studies are the trial of Man to understand how Nature manages information at the molecular level. The understanding of molecular informa tion handling in nature is essential for the molecular optimization in chem istry, molecular biology, molecular pharmacology and therefore - as an ex ample - for the development of specifically acting drugs. The famous recent method of technical information management is digital electronics. Over the past few years, evidence has arisen that computerized and molecular information managements have many similar and overlapping aspects. For example, both technology and nature use digitized information and both use small structures for the efficient handling of information. Furthermore, they optimize their processes in order to gain a maximum of information with a minimum of invested energy. During the last two decades, novel experimental techniques in biomolec ular sciences have paved the way for artificial biomolecular optimization. In the same time interval, the progress of micro system technology has been extended from the field of digital electronics and sensing to micro liquid hand ling, and the field of chip-supported substance handling began. It appears that the "marriage" of physical micro technology and molecular processing will be consummated soon. The contact of both fields has been realized in for ex ample DNA chips. Such connections will also become relevant in additional fields in the near future. Biomolecular investigations are the first to profit from these fast growing scientific and technical connections between micro systems and molecular sciences.

Introduction to Microsystem Technology

Author : Gerald Gerlach
Publisher : John Wiley & Sons
ISBN 13 : 0470770929
Total Pages : 376 pages
Book Rating : 4.4/5 (77 download)

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Book Synopsis Introduction to Microsystem Technology by : Gerald Gerlach

Download or read book Introduction to Microsystem Technology written by Gerald Gerlach and published by John Wiley & Sons. This book was released on 2008-04-30 with total page 376 pages. Available in PDF, EPUB and Kindle. Book excerpt: Over half a century after the discovery of the piezoresistive effect, microsystem technology has experienced considerable developments. Expanding the opportunities of microelectronics to non-electronic systems, its number of application fields continues to increase. Microsensors are one of the most important fields, used in medical applications and micromechanics. Microfluidic systems are also a significant area, most commonly used in ink-jet printer heads. This textbook focuses on the essentials of microsystems technology, providing a knowledgeable grounding and a clear path through this well-established scientific dicipline. With a methodical, student-orientated approach, Introduction to Microsystem Technology covers the following: microsystem materials (including silicon, polymers and thin films), and the scaling effects of going micro; fabrication techniques based on different material properties, descriptions of their limitations and functional and shape elements produced by these techniques; sensors and actuators based on elements such as mechanical, fluidic, and thermal (yaw rate sensor components are described); the influence of technology parameters on microsystem properties, asking, for example, when is the function of a microsystem device robust and safe? The book presents problems at the end of each chapter so that you may test your understanding of the key concepts (full solutions for these are given on an accompanying website). Practical examples are included also, as well as case studies that enable a better understanding of the technology as a whole. With its extensive treatment on the fundamentals of microsystem technology, this book also serves as a compendium for engineers and technicians working with microsystem technology.

Sensors, Micro- and Nanosensor Technology

Author : Wolfgang Göpel
Publisher : John Wiley & Sons
ISBN 13 : 3527620613
Total Pages : 579 pages
Book Rating : 4.5/5 (276 download)

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Book Synopsis Sensors, Micro- and Nanosensor Technology by : Wolfgang Göpel

Download or read book Sensors, Micro- and Nanosensor Technology written by Wolfgang Göpel and published by John Wiley & Sons. This book was released on 2008-07-11 with total page 579 pages. Available in PDF, EPUB and Kindle. Book excerpt: Sensors is the first self-contained series to deal with the whole area of sensors. It describes general aspects, technical and physical fundamentals, construction, function, applications and developments of the various types of sensors. This final volume of the series uncovers trends in sensor technology and gives a comprehensive overview of the sensor market. The use of sensors in microsystems and in vacuum microelectronic as well as in acoustic wave devices is discussed. Present and emerging applications of sensors in aerospace, environmental, automotive, and medical industries, among others, are described. This volume is an indispensable reference work for both specialists and newcomers, researchers and developers

Computer Aided Systems Theory - EUROCAST '93

Author : Franz Pichler
Publisher : Springer Science & Business Media
ISBN 13 : 9783540576013
Total Pages : 484 pages
Book Rating : 4.5/5 (76 download)

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Book Synopsis Computer Aided Systems Theory - EUROCAST '93 by : Franz Pichler

Download or read book Computer Aided Systems Theory - EUROCAST '93 written by Franz Pichler and published by Springer Science & Business Media. This book was released on 1994-01-28 with total page 484 pages. Available in PDF, EPUB and Kindle. Book excerpt: This volume contains a selection of papers presented at the third European Computer Aided Systems Theory workshop, EUROCAST '93, held in Spain in February 1993. The workshop emphasizes interdisciplinarity with the specificgoal of creating a synergy between fields such as systems theory, computer science, systems engineering and related areas. The contributions in this volume are strongly related to current problems in CAST research. They emphasize an engineering point of view concerning systems theory. Since the computer is an essential instrument in CAST research, there are close relations to specific topics incomputer science. The papers are grouped into parts on systems theory and systems technology, specific methods, and applications.

Intelligent Sensors

Author : H. Yamasaki
Publisher : Elsevier
ISBN 13 : 9780080523903
Total Pages : 308 pages
Book Rating : 4.5/5 (239 download)

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Book Synopsis Intelligent Sensors by : H. Yamasaki

Download or read book Intelligent Sensors written by H. Yamasaki and published by Elsevier. This book was released on 1996-04-22 with total page 308 pages. Available in PDF, EPUB and Kindle. Book excerpt: Sensors are the front end devices for information acquisition from the natural and/or artificial world. Higher performance of advanced sensing systems is achieved by using various types of machine intelligence. Intelligent sensors are smart devices with signal processing functions shared by distributed machine intelligence. Typical examples of intelligent sensors are the receptors and dedicated signal processing systems of the human sensory systems. The most important job of information processing in the sensory system is to extract necessary information from the receptors signals and transmit the useful information to the brain. This dedicated information processing is carried out in a distributed manner to reduce the work load of the brain. The processing also lightens the load of signal transmission through the neural network, the capacity of which is limited. Although the performance of the receptors in our human sensory system is not always ideal and is frequently inferior to that of man-made sensors, the total performance is usually far superior to those of our technical sensing systems. The weak points of human receptors are masked by the information processing. This processing makes our sensory system adaptable to the environment and optimizes system performance. The basic idea of this book, which contains new computing paradigms, is that the most advanced intelligent sensing system is the human sensory system. Section I reviews the technologies of intelligent sensors and discusses how they developed. Typical approaches for the realization of intelligent sensors emphasizing the architecture of intelligent sensing systems are also described. In section II, fundamental technologies for the fabrication of intelligent sensors and actuators are presented. Integration and micro-miniaturization techniques are emphasized. Section III presents advanced technologies approaching human sensory systems, these technologies are not directly aimed at practical applications, but introduce the readers to the development of engineering models of sensory systems. Technologies of integrated intelligent sensors, which will shortly be in use are introduced in section IV. In section V, examples are given of intelligent sensing systems which are used in industrial installations. Hardware for machine intelligence is not integrated at present, but can soon be implemented in the monolithic integrated structure. Without this machine intelligence, new functions, for example, self diagnosis or defects identification, cannot be realized. This section also demonstrates the potential of intelligent sensors in industry. Section VI introduces two interesting topics which are closely related to intelligent sensing systems. The first one is multisensor fusion. It is expected to be one of the fundamental and powerful technologies for realizing an advanced intelligent sensing systems. The second is visualizing technology of the sensed states for easy comprehension of the dynamic multi-dimensional state. This is useful for intelligent man-machine interfaces. This book will be recognised by readers as a milestone in the rapid progress of intelligent sensors.

Handbook of Microlithography, Micromachining, and Microfabrication: Micromachining and microfabrication

Author : P. Rai-Choudhury
Publisher : IET
ISBN 13 : 9780852969113
Total Pages : 716 pages
Book Rating : 4.9/5 (691 download)

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Book Synopsis Handbook of Microlithography, Micromachining, and Microfabrication: Micromachining and microfabrication by : P. Rai-Choudhury

Download or read book Handbook of Microlithography, Micromachining, and Microfabrication: Micromachining and microfabrication written by P. Rai-Choudhury and published by IET. This book was released on 1997 with total page 716 pages. Available in PDF, EPUB and Kindle. Book excerpt: Contains useful process details, recipes, tables, charts and includes numerous device applications.

Shape and Functional Elements of the Bulk Silicon Microtechnique

Author : Joachim Frühauf
Publisher : Springer Science & Business Media
ISBN 13 : 3540268766
Total Pages : 229 pages
Book Rating : 4.5/5 (42 download)

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Book Synopsis Shape and Functional Elements of the Bulk Silicon Microtechnique by : Joachim Frühauf

Download or read book Shape and Functional Elements of the Bulk Silicon Microtechnique written by Joachim Frühauf and published by Springer Science & Business Media. This book was released on 2005-12-05 with total page 229 pages. Available in PDF, EPUB and Kindle. Book excerpt: This methodic manual presents a survey of the form-related and functional elements of the bulk silicon microtechnique. It gives a systematic description of simple shape elements and of elements for mechanical, fluidic and optical applications. This manual includes practical instructions for the use of the relevant techniques and an extensive collection of examples for the support of the search for applications via photographs, drawings and references. It serves as a valuable guide to the design of etch masks and processes while summarizing the important properties of silicon, especially aiming at producers of sensors and microtechnical components, as well as producers of components of precision engineering and optical applications.

Proceedings of the Workshop on Microtechnologies and Applications to Space Systems

Author :
Publisher :
ISBN 13 :
Total Pages : 382 pages
Book Rating : 4.:/5 (317 download)

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Book Synopsis Proceedings of the Workshop on Microtechnologies and Applications to Space Systems by :

Download or read book Proceedings of the Workshop on Microtechnologies and Applications to Space Systems written by and published by . This book was released on 1993 with total page 382 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Bonding in Microsystem Technology

Author : Jan A. Dziuban
Publisher : Springer Science & Business Media
ISBN 13 : 1402045891
Total Pages : 345 pages
Book Rating : 4.4/5 (2 download)

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Book Synopsis Bonding in Microsystem Technology by : Jan A. Dziuban

Download or read book Bonding in Microsystem Technology written by Jan A. Dziuban and published by Springer Science & Business Media. This book was released on 2007-01-30 with total page 345 pages. Available in PDF, EPUB and Kindle. Book excerpt: This is the first compendium on silicon/glass microsystems made by deep wet etching and the first book with a detailed description of bonding techniques used in microsystem technology. Technological results presented in the book have been tested experimentally by the author and his team, and can be utilized in day-to-day laboratory practice. Special attention has been paid to the highest level of accessibility of the book by students.

Fundamentals of Microfabrication and Nanotechnology, Three-Volume Set

Author : Marc J. Madou
Publisher : CRC Press
ISBN 13 : 1351990616
Total Pages : 3654 pages
Book Rating : 4.3/5 (519 download)

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Book Synopsis Fundamentals of Microfabrication and Nanotechnology, Three-Volume Set by : Marc J. Madou

Download or read book Fundamentals of Microfabrication and Nanotechnology, Three-Volume Set written by Marc J. Madou and published by CRC Press. This book was released on 2018-12-14 with total page 3654 pages. Available in PDF, EPUB and Kindle. Book excerpt: Now in its third edition, Fundamentals of Microfabrication and Nanotechnology continues to provide the most complete MEMS coverage available. Thoroughly revised and updated the new edition of this perennial bestseller has been expanded to three volumes, reflecting the substantial growth of this field. It includes a wealth of theoretical and practical information on nanotechnology and NEMS and offers background and comprehensive information on materials, processes, and manufacturing options. The first volume offers a rigorous theoretical treatment of micro- and nanosciences, and includes sections on solid-state physics, quantum mechanics, crystallography, and fluidics. The second volume presents a very large set of manufacturing techniques for micro- and nanofabrication and covers different forms of lithography, material removal processes, and additive technologies. The third volume focuses on manufacturing techniques and applications of Bio-MEMS and Bio-NEMS. Illustrated in color throughout, this seminal work is a cogent instructional text, providing classroom and self-learners with worked-out examples and end-of-chapter problems. The author characterizes and defines major research areas and illustrates them with examples pulled from the most recent literature and from his own work.

The MEMS Handbook

Author : Mohamed Gad-el-Hak
Publisher : CRC Press
ISBN 13 : 9781420050905
Total Pages : 1386 pages
Book Rating : 4.0/5 (59 download)

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Book Synopsis The MEMS Handbook by : Mohamed Gad-el-Hak

Download or read book The MEMS Handbook written by Mohamed Gad-el-Hak and published by CRC Press. This book was released on 2001-09-27 with total page 1386 pages. Available in PDF, EPUB and Kindle. Book excerpt: The revolution is well underway. Our understanding and utilization of microelectromechanical systems (MEMS) are growing at an explosive rate with a worldwide market approaching billions of dollars. In time, microdevices will fill the niches of our lives as pervasively as electronics do right now. But if these miniature devices are to fulfill their mammoth potential, today's engineers need a thorough grounding in the underlying physics, modeling techniques, fabrication methods, and materials of MEMS. The MEMS Handbook delivers all of this and more. Its team of authors-unsurpassed in their experience and standing in the scientific community- explore various aspects of MEMS: their design, fabrication, and applications as well as the physical modeling of their operations. Designed for maximum readability without compromising rigor, it provides a current and essential overview of this fledgling discipline.

From MEMS to Bio-MEMS and Bio-NEMS

Author : Marc J. Madou
Publisher : CRC Press
ISBN 13 : 142005516X
Total Pages : 652 pages
Book Rating : 4.4/5 (2 download)

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Book Synopsis From MEMS to Bio-MEMS and Bio-NEMS by : Marc J. Madou

Download or read book From MEMS to Bio-MEMS and Bio-NEMS written by Marc J. Madou and published by CRC Press. This book was released on 2011-06-13 with total page 652 pages. Available in PDF, EPUB and Kindle. Book excerpt: From MEMS to Bio-MEMS and Bio-NEMS: Manufacturing Techniques and Applications details manufacturing techniques applicable to bionanotechnology. After reviewing MEMS techniques, materials, and modeling, the author covers nanofabrication, genetically engineered proteins, artificial cells, nanochemistry, and self-assembly. He also discusses scaling laws in MEMS and NEMS, actuators, fluidics, and power and brains in miniature devices. He concludes with coverage of various MEMS and NEMS applications. Fully illustrated in color, the text contains end-of-chapter problems, worked examples, extensive references for further reading, and an extensive glossary of terms. Details the Nanotechnology, Biology, and Manufacturing Techniques Applicable to Bionanotechnology Topics include: Nonlithography manufacturing techniques with lithography-based methods Nature as an engineering guide and contrasts top-down and bottom-up approaches Packaging, assembly, and self-assembly from ICs to DNA and biological cells Selected new MEMS and NEMS processes and materials, metrology techniques, and modeling Scaling laws, actuators, power generation, and the implementation of brains in miniaturizes devices Different strategies for making micromachines smarter The transition out of the laboratory and into the marketplace The third volume in Fundamentals of Microfabrication and Nanotechnology, Third Edition, Three-Volume Set, the book discusses top-down and bottom-up manufacturing methods and explains how to use nature as a guide. It provides a better understanding of how to match different manufacturing options with a given application that students can use to identify additional killer MEMS and NEMS applications. Other volumes in the set include: Solid-State Physics, Fluidics, and Analytical Techniques in Micro- and Nanotechnology Manufacturing Techniques for Microfabrication and Nanotechnology