Micro Mechanical Transducers

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Micro Mechanical Transducers

Author : Min-hang Bao
Publisher : Elsevier
ISBN 13 : 9780080524030
Total Pages : 392 pages
Book Rating : 4.5/5 (24 download)

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Book Synopsis Micro Mechanical Transducers by : Min-hang Bao

Download or read book Micro Mechanical Transducers written by Min-hang Bao and published by Elsevier. This book was released on 2000-10-16 with total page 392 pages. Available in PDF, EPUB and Kindle. Book excerpt: Some years ago, silicon-based mechanical sensors, like pressure sensors, accelerometers and gyroscopes, started their successful advance. Every year, hundreds of millions of these devices are sold, mainly for medical and automotive applications. The airbag sensor on which research already started several decades ago at Stanford University can be found in every new car and has saved already numerous lives. Pressure sensors are also used in modern electronic blood pressure equipment. Many other mechanical sensors, mostly invisible to the public, perform useful functions in countless industrial and consumer products. The underlying physics and technology of silicon-based mechanical sensors is rather complex and is treated in numerous publications scattered throughout the literature. Therefore, a clear need existed for a handbook that thoroughly and systematically reviews the present basic knowledge on these devices. After a short introduction, Professor Bao discusses the main issues relevant to silicon-based mechanical sensors. First a thorough treatment of stress and strain in diaphragms and beams is presented. Next, vibration of mechanical structures is illuminated, followed by a chapter on air damping. These basic chapters are then succeeded by chapters in which capacitive and piezoresistive sensing techniques are amply discussed. The book concludes with chapters on commercially available pressure sensors, accelerometers and resonant sensors in which the above principles are applied. Everybody, involved in designing silicon-based mechanical sensors, will find a wealth of useful information in the book, assisting the designer in obtaining highly optimized devices.

Analysis and Design Principles of MEMS Devices

Author : Minhang Bao
Publisher : Elsevier
ISBN 13 : 9780080455624
Total Pages : 328 pages
Book Rating : 4.4/5 (556 download)

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Book Synopsis Analysis and Design Principles of MEMS Devices by : Minhang Bao

Download or read book Analysis and Design Principles of MEMS Devices written by Minhang Bao and published by Elsevier. This book was released on 2005-04-12 with total page 328 pages. Available in PDF, EPUB and Kindle. Book excerpt: Sensors and actuators are now part of our everyday life and appear in many appliances, such as cars, vending machines and washing machines. MEMS (Micro Electro Mechanical Systems) are micro systems consisting of micro mechanical sensors, actuators and micro electronic circuits. A variety of MEMS devices have been developed and many mass produced, but the information on these is widely dispersed in the literature. This book presents the analysis and design principles of MEMS devices. The information is comprehensive, focusing on microdynamics, such as the mechanics of beam and diaphragm structures, air damping and its effect on the motion of mechanical structures. Using practical examples, the author examines problems associated with analysis and design, and solutions are included at the back of the book. The ideal advanced level textbook for graduates, Analysis and Design Principles of MEMS Devices is a suitable source of reference for researchers and engineers in the field. * Presents the analysis and design principles of MEMS devices more systematically than ever before. * Includes the theories essential for the analysis and design of MEMS includes the dynamics of micro mechanical structures * A problem section is included at the end of each chapter with answers provided at the end of the book.

MEMS Mechanical Sensors

Author : Stephen Beeby
Publisher : Artech House
ISBN 13 : 9781580538732
Total Pages : 282 pages
Book Rating : 4.5/5 (387 download)

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Book Synopsis MEMS Mechanical Sensors by : Stephen Beeby

Download or read book MEMS Mechanical Sensors written by Stephen Beeby and published by Artech House. This book was released on 2004 with total page 282 pages. Available in PDF, EPUB and Kindle. Book excerpt: Annotation Engineers and researchers can turn to this reference time and time again when they need to overcome challenges in design, simulation, fabrication, and application of MEMS (microelectromechanical systems) sensors.

Micro Mechanical Systems

Author : T. Fukuda
Publisher : Elsevier
ISBN 13 : 0080536549
Total Pages : 276 pages
Book Rating : 4.0/5 (85 download)

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Book Synopsis Micro Mechanical Systems by : T. Fukuda

Download or read book Micro Mechanical Systems written by T. Fukuda and published by Elsevier. This book was released on 1998-07-24 with total page 276 pages. Available in PDF, EPUB and Kindle. Book excerpt: In ten sections this book describes the principles and technology of Micro Mechanical Systems. Section one is a general introduction to the historical background and the parallels to microelectronics, reviewing the motivation for microsystems, and discussing microphysics and design and the evolution from microcomponents to microsystems. Section two covers the areas of photolithographic microfabrication, basic concepts of planar processing, materials, and processes. Section three looks at micromachining by machine tools, its history, basic principles and preparation methods. Section four discusses tribological aspects of microsystems. Section five covers fabrication, performance and examples of silicon microsensors. Section six looks at electric and magnetic micro-actuators for micro-robots. Section seven covers energy source and power supply methods. Section eight covers controlling principles and methods of micro mechanical systems and section nine gives examples of microsystems and micromachines. The final section discusses the future problems and outlook of micro mechanical systems.

Mechanical Microsensors

Author : Miko Elwenspoek
Publisher : Springer Science & Business Media
ISBN 13 : 9783540675822
Total Pages : 328 pages
Book Rating : 4.6/5 (758 download)

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Book Synopsis Mechanical Microsensors by : Miko Elwenspoek

Download or read book Mechanical Microsensors written by Miko Elwenspoek and published by Springer Science & Business Media. This book was released on 2001-01-12 with total page 328 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book provides a comprehensive description of microsensors for mechanical quantities (flow, pressure, force, inertia) fabricated by silicon micromachining. Since the design of such sensors requires interdisciplinary teamwork, the presentation is made accessible to engineers trained in electrical and mechanical engineering, physics and chemistry. The reader is guided through the micromachining fabrication process. A chapter on microsensor packaging completes the discussion of technological problems. The description of the basic physics required for sensor design includes the mechanics of deformation and the piezoresistive transduction to electrical signals. There is also a comprehensive discussion of resonant sensors, the hydrodynamics and heat transfer relevant for flow sensors, and, finally, electronic interfacing and readout circuitry. Numerous up-to-date case studies are presented, together with the working, fabrication and design of the sensors.

A Micromechanical Resonant Sensor for Structural Health Monitoring

Author : Joachim Eisele
Publisher :
ISBN 13 :
Total Pages : 176 pages
Book Rating : 4.:/5 (89 download)

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Book Synopsis A Micromechanical Resonant Sensor for Structural Health Monitoring by : Joachim Eisele

Download or read book A Micromechanical Resonant Sensor for Structural Health Monitoring written by Joachim Eisele and published by . This book was released on 2007 with total page 176 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Handbook of Force Transducers

Author : Dan Mihai Stefanescu
Publisher : Springer Science & Business Media
ISBN 13 : 3642182968
Total Pages : 634 pages
Book Rating : 4.6/5 (421 download)

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Book Synopsis Handbook of Force Transducers by : Dan Mihai Stefanescu

Download or read book Handbook of Force Transducers written by Dan Mihai Stefanescu and published by Springer Science & Business Media. This book was released on 2011-03-16 with total page 634 pages. Available in PDF, EPUB and Kindle. Book excerpt: Part I introduces the basic "Principles and Methods of Force Measurement" according to a classification into a dozen of force transducers types: resistive, inductive, capacitive, piezoelectric, electromagnetic, electrodynamic, magnetoelastic, galvanomagnetic (Hall-effect), vibrating wires, (micro)resonators, acoustic and gyroscopic. Two special chapters refer to force balance techniques and to combined methods in force measurement. Part II discusses the "(Strain Gauge) Force Transducers Components", evolving from the classical force transducer to the digital / intelligent one, with the incorporation of three subsystems (sensors, electromechanics and informatics). The elastic element (EE) is the "heart" of the force transducer and basically determines its performance. A 12-type elastic element classification is proposed (stretched / compressed column or tube, bending beam, bending and/or torsion shaft, middle bent bar with fixed ends, shear beam, bending ring, yoke or frame, diaphragm, axial-stressed torus, axisymmetrical and voluminous EE), with emphasis on the optimum location of the strain gauges. The main properties of the associated Wheatstone bridge, best suited for the parametrical transducers, are examined, together with the appropriate electronic circuits for SGFTs. The handbook fills a gap in the field of Force Measurement, both experts and newcomers, no matter of their particular interest, finding a lot of useful and valuable subjects in the area of Force Transducers; in fact, it is the first specialized monograph in this inter- and multidisciplinary field.

Fundamentals of Microfabrication

Author : Marc J. Madou
Publisher : CRC Press
ISBN 13 : 1482274000
Total Pages : 764 pages
Book Rating : 4.4/5 (822 download)

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Book Synopsis Fundamentals of Microfabrication by : Marc J. Madou

Download or read book Fundamentals of Microfabrication written by Marc J. Madou and published by CRC Press. This book was released on 2018-10-08 with total page 764 pages. Available in PDF, EPUB and Kindle. Book excerpt: MEMS technology and applications have grown at a tremendous pace, while structural dimensions have grown smaller and smaller, reaching down even to the molecular level. With this movement have come new types of applications and rapid advances in the technologies and techniques needed to fabricate the increasingly miniature devices that are literally changing our world. A bestseller in its first edition, Fundamentals of Microfabrication, Second Edition reflects the many developments in methods, materials, and applications that have emerged recently. Renowned author Marc Madou has added exercise sets to each chapter, thus answering the need for a textbook in this field. Fundamentals of Microfabrication, Second Edition offers unique, in-depth coverage of the science of miniaturization, its methods, and materials. From the fundamentals of lithography through bonding and packaging to quantum structures and molecular engineering, it provides the background, tools, and directions you need to confidently choose fabrication methods and materials for a particular miniaturization problem. New in the Second Edition Revised chapters that reflect the many recent advances in the field Updated and enhanced discussions of topics including DNA arrays, microfluidics, micromolding techniques, and nanotechnology In-depth coverage of bio-MEMs, RF-MEMs, high-temperature, and optical MEMs. Many more links to the Web Problem sets in each chapter

Microfabrication for Industrial Applications

Author : Regina Luttge
Publisher : William Andrew
ISBN 13 : 081551977X
Total Pages : 312 pages
Book Rating : 4.8/5 (155 download)

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Book Synopsis Microfabrication for Industrial Applications by : Regina Luttge

Download or read book Microfabrication for Industrial Applications written by Regina Luttge and published by William Andrew. This book was released on 2011-08-31 with total page 312 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book focuses on the industrial perspective for micro- and nanofabrication methods including large-scale manufacturing, transfer of concepts from lab to factory, process tolerance, yield, robustness, and cost. It gives a history of miniaturization, micro- and nanofabrication, and surveys industrial fields of application, illustrating fabrication processes of relevant micro and nano devices. Concerning sub-micron feature manufacture, the book explains: the philosophy of micro/ nanofabrication for integrated circuit industry; thin film deposition; (waveguide, plastic, semiconductor) material processing; packaging; interconnects; stress (e.g., thin film residual); economic; and environmental aspects. Micro/nanomechanical sensors and actuators are explained in depth with information on applications, materials (incl. functional polymers), methods, testing, fabrication, integration, reliability, magnetic microstructures, etc. Shows engineers & students how to evaluate the potential value of current and nearfuture manufacturing processes for miniaturized systems in industrial environments Explains the top-down and bottom up approaches to nanotechnology, nanostructures fabricated with beams, nano imprinting methods, nanoparticle manufacturing (and their health aspects), nanofeature analysis, and connecting nano to micro to macro Discusses issues for practical application cases; possibilities of dimension precision; large volume manufacturing of micro- & nanostructures (machines, materials, costs) Explains applications of Microsystems for information technology, e.g.: data recording (camera, microphone), storage (memories, CDs), communication; computing; and displays (beamers, LCD, TFT) Case studies are given for sensors, resonators, probes, transdermal medical systems, micro- pumps & valves, inkjets, DNA-analysis, lab-on-a-chip, & micro-cooling

Nano- and Microfabrication for Industrial and Biomedical Applications

Author : Regina Luttge
Publisher : William Andrew
ISBN 13 : 0323389287
Total Pages : 278 pages
Book Rating : 4.3/5 (233 download)

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Book Synopsis Nano- and Microfabrication for Industrial and Biomedical Applications by : Regina Luttge

Download or read book Nano- and Microfabrication for Industrial and Biomedical Applications written by Regina Luttge and published by William Andrew. This book was released on 2016-06-12 with total page 278 pages. Available in PDF, EPUB and Kindle. Book excerpt: Nano- and Microfabrication for Industrial and Biomedical Applications, Second Edition, focuses on the industrial perspective on micro- and nanofabrication methods, including large-scale manufacturing, the transfer of concepts from lab to factory, process tolerance, yield, robustness, and cost. The book gives a history of miniaturization and micro- and nanofabrication, and surveys industrial fields of application, illustrating fabrication processes of relevant micro and nano devices. In this second edition, a new focus area is nanoengineering as an important driver for the rise of novel applications by integrating bio-nanofabrication into microsystems. In addition, new material covers lithographic mould fabrication for soft-lithography, nanolithography techniques, corner lithography, advances in nanosensing, and the developing field of advanced functional materials. Luttge also explores the view that micro- and nanofabrication will be the key driver for a "tech-revolution" in biology and medical research that includes a new case study that covers the developing organ-on-chip concept. Presents an interdisciplinary approach that makes micro/nanofabrication accessible equally to engineers and those with a life science background, both in academic settings and commercial R&D Provides readers with guidelines for assessing the commercial potential of any new technology based on micro/nanofabrication, thus reducing the investment risk Updated edition presents nanoengineering as an important driver for the rise of novel applications by integrating bio-nanofabrication into microsystems

Non-driven Micromechanical Gyroscopes and Their Applications

Author : Fuxue Zhang
Publisher : Springer
ISBN 13 : 3662540452
Total Pages : 361 pages
Book Rating : 4.6/5 (625 download)

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Book Synopsis Non-driven Micromechanical Gyroscopes and Their Applications by : Fuxue Zhang

Download or read book Non-driven Micromechanical Gyroscopes and Their Applications written by Fuxue Zhang and published by Springer. This book was released on 2017-11-09 with total page 361 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book comprehensively and systematically introduces readers to the theories, structures, performance and applications of non-driven mechanical and non-driven micromechanical gyroscopes. The book is divided into three parts, the first of which mainly addresses mathematic models, precision, performance and operating error in non-driven mechanical gyroscopes. The second part focuses on the operating theory, error, phase shift and performance experiments involving non-driven micromechanical gyroscopes in rotating flight carriers, while the third part shares insights into the application of non-driven micromechanical gyroscopes in control systems for rotating flight carriers. The book offers a unique resource for all researchers and engineers who are interested in the use of inertial devices and automatic control systems for rotating flight carriers. It can also serve as a reference book for undergraduates, graduates and instructors in related fields at colleges and universities.

Electromechanics and MEMS

Author : Thomas B. Jones
Publisher : Cambridge University Press
ISBN 13 : 1139619047
Total Pages : 581 pages
Book Rating : 4.1/5 (396 download)

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Book Synopsis Electromechanics and MEMS by : Thomas B. Jones

Download or read book Electromechanics and MEMS written by Thomas B. Jones and published by Cambridge University Press. This book was released on 2013-05-02 with total page 581 pages. Available in PDF, EPUB and Kindle. Book excerpt: Offering a consistent, systematic approach to capacitive, piezoelectric and magnetic MEMS, from basic electromechanical transducers to high-level models for sensors and actuators, this comprehensive textbook equips graduate and senior-level undergraduate students with all the resources necessary to design and develop practical, system-level MEMS models. The concise yet thorough treatment of the underlying principles of electromechanical transduction provides a solid theoretical framework for this development, with each new topic related back to the core concepts. Repeated references to the shared commonalities of all MEMS encourage students to develop a systems-based design perspective. Extensive use is made of easy-to-interpret electrical and mechanical analogs, such as electrical circuits, electromechanical two-port models and the cascade paradigm. Each chapter features worked examples and numerous problems, all designed to test and extend students' understanding of the key principles.

Handbook of Micro/Nano Tribology

Author : Bharat Bushan
Publisher : CRC Press
ISBN 13 : 9781420050493
Total Pages : 884 pages
Book Rating : 4.0/5 (54 download)

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Book Synopsis Handbook of Micro/Nano Tribology by : Bharat Bushan

Download or read book Handbook of Micro/Nano Tribology written by Bharat Bushan and published by CRC Press. This book was released on 2020-10-28 with total page 884 pages. Available in PDF, EPUB and Kindle. Book excerpt: This second edition of Handbook of Micro/Nanotribology addresses the rapid evolution within this field, serving as a reference for the novice and the expert alike. Two parts divide this handbook: Part I covers basic studies, and Part II addresses design, construction, and applications to magnetic storage devices and MEMS. Discussions include: surface physics and methods for physically and chemically characterizing solid surfaces roughness characterization and static contact models using fractal analysis sliding at the interface and friction on an atomic scale scratching and wear as a result of sliding nanofabrication/nanomachining as well as nano/picoindentation lubricants for minimizing friction and wear surface forces and microrheology of thin liquid films measurement of nanomechanical properties of surfaces and thin films atomic-scale simulations of interfacial phenomena micro/nanotribology and micro/nanomechanics of magnetic storage devices This comprehensive book contains 16 chapters contributed by more than 20 international researchers. In each chapter, the presentation starts with macroconcepts and then lead to microconcepts. With more than 500 illustrations and 50 tables, Handbook of Micro/Nanotribology covers the range of relevant topics, including characterization of solid surfaces, measurement techniques and applications, and theoretical modeling of interfaces. What's New in the Second Edition? New chapters on: AFM instrumentation Surface forces and adhesion Design and construction of magnetic storage devices Microdynamical devices and systems Mechanical properties of materials in microstructure Micro/nanotribology and micro/nanomechanics of MEMS devices

Controls, Automation of Communication Systems (ICCACS2004)

Author :
Publisher : Allied Publishers
ISBN 13 : 9788177647266
Total Pages : 328 pages
Book Rating : 4.6/5 (472 download)

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Book Synopsis Controls, Automation of Communication Systems (ICCACS2004) by :

Download or read book Controls, Automation of Communication Systems (ICCACS2004) written by and published by Allied Publishers. This book was released on 2004 with total page 328 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Micromachined Transducers Sourcebook

Author : Gregory T. A. Kovacs
Publisher : McGraw-Hill Science, Engineering & Mathematics
ISBN 13 : 9780072907223
Total Pages : 0 pages
Book Rating : 4.9/5 (72 download)

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Book Synopsis Micromachined Transducers Sourcebook by : Gregory T. A. Kovacs

Download or read book Micromachined Transducers Sourcebook written by Gregory T. A. Kovacs and published by McGraw-Hill Science, Engineering & Mathematics. This book was released on 1998 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt: Designed for a graduate-level course in micromachined devices, or as an introduction to the field for practicing engineers, this book presents an overview of the field, beginning with micromachining approaches and including all major categories of transduction. It examines the fabrication of individual devices through the study of design issues and provides examples of key transducers, or structures, for comparison of performances obtainable through different approaches.

Optical Sensors and Microsystems

Author : S. Martellucci
Publisher : Springer Science & Business Media
ISBN 13 : 0306470993
Total Pages : 312 pages
Book Rating : 4.3/5 (64 download)

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Book Synopsis Optical Sensors and Microsystems by : S. Martellucci

Download or read book Optical Sensors and Microsystems written by S. Martellucci and published by Springer Science & Business Media. This book was released on 2007-05-08 with total page 312 pages. Available in PDF, EPUB and Kindle. Book excerpt: Proceedings of the 22nd Course of the International School of Quantum Electronics, held 27 November-2 December 1997, in Erice, Italy. In recent years, fiber optical sensors and optical microsystems have assumed a significant role in sensing and measurement of many kinds. These optical techniques are utilised in a wide range of fields, including biomedicine, environmental sensing, mechanical and industrial measurement, and art preservation. This volume, an up-to-date survey of optical sensors and optical microsystems, aims at combining a tutorial foundation with analysis of current research in this area, and an extensive coverage of both technology and applications.

Sensors for Mechatronics

Author : P. P. L. Regtien
Publisher : Elsevier
ISBN 13 : 0123914973
Total Pages : 323 pages
Book Rating : 4.1/5 (239 download)

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Book Synopsis Sensors for Mechatronics by : P. P. L. Regtien

Download or read book Sensors for Mechatronics written by P. P. L. Regtien and published by Elsevier. This book was released on 2012-01-17 with total page 323 pages. Available in PDF, EPUB and Kindle. Book excerpt: This title offers an overview of various sensors and sensor systems as required and applied in mechatronics. Emphasis lies on the physical background of the operating principles, illustrated with examples of commercially available sensors and of recent and future developments.