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Laser Assisted Deposition And Etching For Semiconductor Processing
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Book Synopsis Laser Processing of Thin Films and Microstructures by : Ian W. Boyd
Download or read book Laser Processing of Thin Films and Microstructures written by Ian W. Boyd and published by Springer Science & Business Media. This book was released on 2013-03-08 with total page 328 pages. Available in PDF, EPUB and Kindle. Book excerpt: This text aims at providing a comprehensive and up to date treatment of the new and rapidly expanding field of laser pro cessing of thin films, particularly, though by no means exclu sively, of recent progress in the dielectrics area. The volume covers all the major aspects of laser processing technology in general, from the background and history to its many potential applications, and from the theory to the necessary experimental considerations. It highlights and compares the vast array of processing conditions now available with intense photon beams, as well as the properties of the films and microstructures pro duced. Separate chapters deal with the fundamentals of laser interactions with matter, and with experimental considerations. Detailed consideration is also given to film deposition, nuclea tion and growth, oxidation and annealing, as well as selective and localized. etching and ablation, not only in terms of the various photon-induced processes, but also with respect to traditional as well as other competing new technologies.
Book Synopsis Laser Assisted Deposition, Etching, and Doping by : Susan D. Allen
Download or read book Laser Assisted Deposition, Etching, and Doping written by Susan D. Allen and published by . This book was released on 1984 with total page 154 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Surface Processing and Laser Assisted Chemistry by : E. Fogarassy
Download or read book Surface Processing and Laser Assisted Chemistry written by E. Fogarassy and published by Elsevier. This book was released on 1990-12-01 with total page 495 pages. Available in PDF, EPUB and Kindle. Book excerpt: The papers in this volume cover all aspects of laser assisted surface processing ranging from the preparation of high-Tc superconducting layer structures to industrial laser applications for device fabrication. The topics presented give recent results in organometallic chemistry and laser photochemistry, and novel surface characterization techniques. The ability to control the surface morphology by digital deposition and etching shows one of the future directions for exciting applications of laser surface processing, some of which may apply UV and VUV excitation. The understanding of elementary proceses is essential for the design of novel deposition methods, with diamond CVD being an outstanding example. The high quality of these contributions once again demonstrates that the E-MRS is an efficient forum for interaction between research workers and industry.
Book Synopsis Laser-Assisted Microtechnology by : Simeon M. Metev
Download or read book Laser-Assisted Microtechnology written by Simeon M. Metev and published by Springer Science & Business Media. This book was released on 2013-03-09 with total page 283 pages. Available in PDF, EPUB and Kindle. Book excerpt: Laser-Assisted Microtechnology introduces the principles and techniques of laser-assisted microtechnology with emphasis on micromachining of thin films, microprocessing of materials, maskless laser micropatterning and laser-assisted synthesis of thin-film systems. The experimental and theoretical physico-chemical basis of every technological process is presented in detail. On the basis of some characteristic examples of applications, the capabilities of the technological methods as well as the optimum conditions for their realization are discussed. In this second edition, besides the actualization of the literature, a new chapter concerning the laser-assisted wet chemical micro etching, has been added. This is a new method for direct 3D-micro structuring of solids, with a number of potential applications.
Book Synopsis Semiconductor Processing and Characterization with Lasers, Applications in Photovoltaics by : M. Brieger
Download or read book Semiconductor Processing and Characterization with Lasers, Applications in Photovoltaics written by M. Brieger and published by . This book was released on 1995 with total page 394 pages. Available in PDF, EPUB and Kindle. Book excerpt: Lasers are playing an increasingly important role in various fields of semiconductor and device technology. Of special significance is their contribution to the advanced technologies that are needed for economic solutions in photovoltaics. There, lasers are used in processing and characterization of photovoltaic materials, solar cells and module technology.
Book Synopsis Laser Processing and Chemistry by : Dieter Bäuerle
Download or read book Laser Processing and Chemistry written by Dieter Bäuerle and published by Springer Science & Business Media. This book was released on 2013-06-29 with total page 788 pages. Available in PDF, EPUB and Kindle. Book excerpt: Laser Processing and Chemistry gives an overview of the fundamentals and applications of laser-matter interactions, in particular with regard to laser material processing. Special attention is given to laser-induced physical and chemical processes at gas-solid, liquid-solid, and solid-solid interfaces. Starting with the background physics, the book proceeds to examine applications of laser techniques in micro-machining, and the patterning, coating, and modification of material surfaces. This third edition has been revised and enlarged to cover new topics such as the synthesis of nanoclusters and nanocrystalline films, ultrashort-pulse laser processing, laser polishing, cleaning, and lithography. Graduate students, physicists, chemists, engineers, and manufacturers alike will find this book an invaluable reference work on laser processing.
Book Synopsis Process Technology for Semiconductor Lasers by : Kenichi Iga
Download or read book Process Technology for Semiconductor Lasers written by Kenichi Iga and published by Springer Science & Business Media. This book was released on 2013-03-07 with total page 181 pages. Available in PDF, EPUB and Kindle. Book excerpt: A description of the design principles, seen mainly from the fabrication point of view. Following a review of the historical development and of the materials used in lasing at short to long wavelengths, the book goes on to discuss the basic design principles for semiconductor-laser devices and the epitaxy for laser production. One entire chapter is devoted to the technology of liquid-phase epitaxy, while another treats vapor-phase and beam epitaxies. The whole is rounded off with mode-control techniques and an introduction to surface-emitting lasers.
Book Synopsis The Physics of Micro/Nano-Fabrication by : Ivor Brodie
Download or read book The Physics of Micro/Nano-Fabrication written by Ivor Brodie and published by Springer Science & Business Media. This book was released on 1992 with total page 676 pages. Available in PDF, EPUB and Kindle. Book excerpt: In this revised and expanded edition, the authors provide a comprehensive overview of the tools, technologies, and physical models needed to understand, build, and analyze microdevices. Students, specialists within the field, and researchers in related fields will appreciate their unified presentation and extensive references.
Book Synopsis Atomic Layer Processing by : Thorsten Lill
Download or read book Atomic Layer Processing written by Thorsten Lill and published by John Wiley & Sons. This book was released on 2021-06-28 with total page 306 pages. Available in PDF, EPUB and Kindle. Book excerpt: Learn about fundamental and advanced topics in etching with this practical guide Atomic Layer Processing: Semiconductor Dry Etching Technology delivers a hands-on, one-stop resource for understanding etching technologies and their applications. The distinguished scientist, executive, and author offers readers in-depth information on the various etching technologies used in the semiconductor industry, including thermal, isotropic atomic layer, radical, ion-assisted, and reactive ion etching. The book begins with a brief history of etching technology and the role it has played in the information technology revolution, along with a collection of commonly used terminology in the industry. It then moves on to discuss a variety of different etching techniques, before concluding with discussions of the fundamentals of etching reactor design and newly emerging topics in the field such as the role played by artificial intelligence in the technology. Atomic Layer Processing includes a wide variety of other topics as well, all of which contribute to the author's goal of providing the reader with an atomic-level understanding of dry etching technology sufficient to develop specific solutions for existing and emerging semiconductor technologies. Readers will benefit from: A complete discussion of the fundamentals of how to remove atoms from various surfaces An examination of emerging etching technologies, including laser and electron beam assisted etching A treatment of process control in etching technology and the role played by artificial intelligence Analyses of a wide variety of etching methods, including thermal or vapor etching, isotropic atomic layer etching, radical etching, directional atomic layer etching, and more Perfect for materials scientists, semiconductor physicists, and surface chemists, Atomic Layer Processing will also earn a place in the libraries of engineering scientists in industry and academia, as well as anyone involved with the manufacture of semiconductor technology. The author's close involvement with corporate research & development and academic research allows the book to offer a uniquely multifaceted approach to the subject.
Book Synopsis Plasma Processing of Semiconductors by : P.F. Williams
Download or read book Plasma Processing of Semiconductors written by P.F. Williams and published by Springer Science & Business Media. This book was released on 2013-11-11 with total page 610 pages. Available in PDF, EPUB and Kindle. Book excerpt: Plasma Processing of Semiconductors contains 28 contributions from 18 experts and covers plasma etching, plasma deposition, plasma-surface interactions, numerical modelling, plasma diagnostics, less conventional processing applications of plasmas, and industrial applications. Audience: Coverage ranges from introductory to state of the art, thus the book is suitable for graduate-level students seeking an introduction to the field as well as established workers wishing to broaden or update their knowledge.
Book Synopsis Chemical Processing with Lasers by : Dieter Bäuerle
Download or read book Chemical Processing with Lasers written by Dieter Bäuerle and published by Springer Science & Business Media. This book was released on 2013-03-09 with total page 253 pages. Available in PDF, EPUB and Kindle. Book excerpt: Materials processing with lasers is a rapidly expanding field which is increasingly captivating the attention of scientists, engineers and manufacturers alike. The aspect of most interest to scientists is provided by the basic interaction mechanisms between the intense light of a laser and materials exposed to a chemically reactive or nonreactive surrounding medium. Engineers and manufacturers see in the laser a new tool which will not only make manufacturing cheaper, faster, cleaner and more accurate but which also opens up entirely new technologies and manufacturing methods that are simply not available using existing techniques. Actual and potential applications range from laser machining to laser-induced materials transformation, coating, patterning, etc. , opening up the prospect of exciting new processing methods for micromechanics, metallurgy, integrated optics, semiconductor manufacture and chemical engineering. This book concentrates on the new and interdisciplinary field of 1 aser-i nduced chemicaZ process i ng of materi als. The techni que permits maskless single-step deposition of thin films of metals, semiconductors or insulators with lateral dimensions ranging from a few tenths of a micrometer up to several centimeters. Moreover, materials removal or synthesis, or surface modifications, such as oxidation, nitridation, reduction, metallization and doping, are also possible within similar dimensions. This book is meant as an introduction. It attempts to cater for the very broad range of specific interests which different groups of readers will have, and this thinking underlies the way in which the material has been arranged.
Book Synopsis Theory and Application of Laser Chemical Vapor Deposition by : J. Mazumder
Download or read book Theory and Application of Laser Chemical Vapor Deposition written by J. Mazumder and published by Springer Science & Business Media. This book was released on 2013-06-29 with total page 406 pages. Available in PDF, EPUB and Kindle. Book excerpt: In this monograph, the authors offer a comprehensive examination of the latest research on Laser Chemical Vapor Deposition (LCVD). Chapters explore the physics of LCVD as well as the principles of a wide range of related phenomena-including laser-matter interactions, heat transfer, fluid flow, chemical kinetics, and adsorption. With this reference, researchers will discover how to apply these principles to developing theories about various types of LCVD processes; gain greater insight into the basic mechanisms of LCVD; and obtain the ability to design and control an LCVD system.
Book Synopsis Laser Processing and Diagnostics by : D. Bäuerle
Download or read book Laser Processing and Diagnostics written by D. Bäuerle and published by Springer Science & Business Media. This book was released on 2013-11-11 with total page 561 pages. Available in PDF, EPUB and Kindle. Book excerpt: Laser processing is now a rapidly increasing field with many real and potential applications in different areas of technology such as micromecha nics, metallurgy, integrated optics, and semiconductor device fabrication. The neces s ity for such soph i st i cated 1 i ght sources as 1 asers is based on the spatial coherence and the monochromaticity of laser light. The spatial coherence permits extreme focussing of the laser light resulting in the availability of high energy densities which can be used for strongly loca lized heat- and chemical-treatment of materials, with a resolution down to 1 ess than 1 lJIll. When us i ng pul sed or scanned cw-l asers, 1 oca 1 i zat i on in time is also possible. Additionally, the monochromaticity of laser light allows for control of the depth of heat treatment and/or selective, nonthermal bond breaking - within the surface of the material or within the molecules of the surrounding reactive atmosphere - simply by tuning the laser wavelength. These inherent advantages of laser light permit micromachining of materials (drilling, cutting, welding etc.) and also allow single-step controlled area processing of thin films and surfaces. Processes include structural transformation (removal of residual damage, grain growth in polycrystalline material, amorphization, surface hardening etc.), etching, doping, alloying, or deposition. In addition, laser processing is not 1 imited to planar substrates.
Book Synopsis Design of New Materials by : David L. Cocke
Download or read book Design of New Materials written by David L. Cocke and published by Springer Science & Business Media. This book was released on 2012-12-06 with total page 368 pages. Available in PDF, EPUB and Kindle. Book excerpt: Dr. George P. Thomon, Nobel Laureate in Physics said, "We have labelled civilizations by the main materials which they have used: The Stone Age, the Bronze Age and the Iron Age ••• a civilization is both developed and limited by the materials at its disposal. Today, man lives on the boundary between the Iron Age and a New Materials Age." The ever more stringent requirements for materials to accomplish specific functions and withstand extreme conditions, as dictated by the needs of industry and defense, con tinue to spur ever more intensive research in Materials Science. According to the recent report "Trends and Opportunities in Materials Research" a vital goal of materials research is to design synthesize and fabricate in high yield, new materials with properties that can be pre dicted, varied and controlled. In the past this has been a fairly empirical process, but as we gain more comprehensive understanding of the behavior of matter on an atomic and molecular scale this goal becomes ever more attain able. An important recent trend is the increasing sophistication and power of theoretical approaches. Aided by the development of computers and versa tile numerical techniques, as well as concepts from statistical mechanics, theorists are beginning to confront the complexity of real materials. Important advances are expected through a concentrated attack on model systems in which the theorist, experimental scientist and engineer all work together towards designing new materials and controlling their properties.
Book Synopsis Lasers-Induced Plasmas and Applications by : Radziemski
Download or read book Lasers-Induced Plasmas and Applications written by Radziemski and published by CRC Press. This book was released on 2020-09-10 with total page 464 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book discusses the physics of plasma initiation and reviews the features of dissipating, propagating plasmas. It deals with advances in diagnostics for high-energy, laser-fusion plasmas. The book reviews the basic physical processes, plasma characteristics of the "continuous optical discharge".
Book Synopsis Laser Processing of Semiconductors and Hybrids by : Edward J. Swenson
Download or read book Laser Processing of Semiconductors and Hybrids written by Edward J. Swenson and published by . This book was released on 1986 with total page 116 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Emerging Technologies for In Situ Processing by : D.J. Ehrlich
Download or read book Emerging Technologies for In Situ Processing written by D.J. Ehrlich and published by Springer Science & Business Media. This book was released on 2012-12-06 with total page 286 pages. Available in PDF, EPUB and Kindle. Book excerpt: Proceedings of the NATO Advanced Research Workshop, Cargèse, France, May 4-8, 1987