In Situ Process Diagnostics and Intelligent Materials Processing:

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Publisher : Cambridge University Press
ISBN 13 : 9781107413566
Total Pages : 306 pages
Book Rating : 4.4/5 (135 download)

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Book Synopsis In Situ Process Diagnostics and Intelligent Materials Processing: by : Peter A. Rosenthal

Download or read book In Situ Process Diagnostics and Intelligent Materials Processing: written by Peter A. Rosenthal and published by Cambridge University Press. This book was released on 2014-06-05 with total page 306 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book, first published in 1998, focuses on the rapidly developing field of sensor technology for process monitoring and control during fabrication of advanced materials and structures. Research in sensor driven, closed-loop control of the fabrication process (i.e., process-state monitoring), as well as product-state (e.g., wafer-state) monitoring are discussed. Featured are process techniques that include chemical vapor deposition (CVD), metalorganic chemical vapor deposition (MOCVD), plasma-enhanced chemical vapor deposition (PECVD), molecular beam epitaxy (MBE), rapid thermal processing (RTP), reactive-ion and plasma etching, electron beam evaporation, pulsed laser deposition (PLD), and sputtering. Materials of interest include electronic and optical thin films such as semiconductors, epitaxial oxides, metals and dielectrics, as well as particles and nanostructured materials. Sensing techniques for monitoring variables such as temperature, composition, optical properties, film thickness and particle-size distribution are highlighted. Topics include: sensor technologies and semiconductor diagnostics; sensor technologies and thin-film diagnostics; in situ diagnostics of oxide film growth and processes and intelligent processing of electronic ceramics.

In Situ Characterization of Thin Film Growth

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Publisher : Elsevier
ISBN 13 : 0857094955
Total Pages : 295 pages
Book Rating : 4.8/5 (57 download)

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Book Synopsis In Situ Characterization of Thin Film Growth by : Gertjan Koster

Download or read book In Situ Characterization of Thin Film Growth written by Gertjan Koster and published by Elsevier. This book was released on 2011-10-05 with total page 295 pages. Available in PDF, EPUB and Kindle. Book excerpt: Advanced techniques for characterizing thin film growth in situ help to develop improved understanding and faster diagnosis of issues with the process. In situ characterization of thin film growth reviews current and developing techniques for characterizing the growth of thin films, covering an important gap in research. Part one covers electron diffraction techniques for in situ study of thin film growth, including chapters on topics such as reflection high-energy electron diffraction (RHEED) and inelastic scattering techniques. Part two focuses on photoemission techniques, with chapters covering ultraviolet photoemission spectroscopy (UPS), X-ray photoelectron spectroscopy (XPS) and in situ spectroscopic ellipsometry for characterization of thin film growth. Finally, part three discusses alternative in situ characterization techniques. Chapters focus on topics such as ion beam surface characterization, real time in situ surface monitoring of thin film growth, deposition vapour monitoring and the use of surface x-ray diffraction for studying epitaxial film growth. With its distinguished editors and international team of contributors, In situ characterization of thin film growth is a standard reference for materials scientists and engineers in the electronics and photonics industries, as well as all those with an academic research interest in this area. Chapters review electron diffraction techniques, including the methodology for observations and measurements Discusses the principles and applications of photoemission techniques Examines alternative in situ characterisation techniques

Chemical Aspects of Electronic Ceramics Processing: Volume 495

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Publisher : Mrs Proceedings
ISBN 13 :
Total Pages : 496 pages
Book Rating : 4.3/5 (91 download)

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Book Synopsis Chemical Aspects of Electronic Ceramics Processing: Volume 495 by : Prashant N. Kumta

Download or read book Chemical Aspects of Electronic Ceramics Processing: Volume 495 written by Prashant N. Kumta and published by Mrs Proceedings. This book was released on 1998-08-03 with total page 496 pages. Available in PDF, EPUB and Kindle. Book excerpt: Containing 65 papers from the symposium titled Chemical Aspects of Electronic Ceramics Processing held in November- December 1997 in Boston, the contents of this volume are divided into five sections: chemical vapor deposition of oxide ceramics; chemical vapor deposition of nonoxide ceramics; solution routes to ceramic materials; characterization and application of ceramic materials; and process characterization as a form of novel processing of ceramic materials. Annotation copyrighted by Book News, Inc., Portland, OR

Semiconductor Process and Device Performance Modelling: Volume 490

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Publisher :
ISBN 13 :
Total Pages : 296 pages
Book Rating : 4.3/5 (91 download)

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Book Synopsis Semiconductor Process and Device Performance Modelling: Volume 490 by : Scott T. Dunham

Download or read book Semiconductor Process and Device Performance Modelling: Volume 490 written by Scott T. Dunham and published by . This book was released on 1998-10-02 with total page 296 pages. Available in PDF, EPUB and Kindle. Book excerpt: Highlights recent advances in technology computer-aided design (TCAD) and identifies critical areas for future emphasis. The 39 contributions from the December 1997 symposium cover four main topics--bulk process modeling, equipment modeling, topography modeling, and characterization and device modeling. Paper topics include arsenic deactivation in silicon; defect reactions induced by reactive ion etching; optimization of AMT barrel reactors for silicon epitaxy; grain structure evolution and the reliability of Al(Cu) thin film interconnects; and improved quantitative mobility spectrum analysis. Annotation copyrighted by Book News, Inc., Portland, OR

Rapid Thermal and Integrated Processing

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Publisher :
ISBN 13 :
Total Pages : 914 pages
Book Rating : 4.3/5 (91 download)

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Book Synopsis Rapid Thermal and Integrated Processing by :

Download or read book Rapid Thermal and Integrated Processing written by and published by . This book was released on 1998 with total page 914 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Recent Advances in Catalytic Materials: Volume 497

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Publisher :
ISBN 13 :
Total Pages : 274 pages
Book Rating : 4.3/5 (91 download)

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Book Synopsis Recent Advances in Catalytic Materials: Volume 497 by : Nelly m. Rodriguez

Download or read book Recent Advances in Catalytic Materials: Volume 497 written by Nelly m. Rodriguez and published by . This book was released on 1998-10-15 with total page 274 pages. Available in PDF, EPUB and Kindle. Book excerpt: From the 1997 symposium (month not noted) come 33 papers devoted to new techniques and technologies in catalytic materials which touch upon issues of the environment, material development, and more energy efficient processes. The material is organized into sections which explore oxide, metal, carbon-based, and porous catalysts; zeolited and related materials; acids and bases; and surface modifications. Annotation copyrighted by Book News, Inc., Portland, OR

Materials Science of the Cell: Volume 489

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Publisher :
ISBN 13 :
Total Pages : 248 pages
Book Rating : 4.3/5 (91 download)

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Book Synopsis Materials Science of the Cell: Volume 489 by : B. Mulder

Download or read book Materials Science of the Cell: Volume 489 written by B. Mulder and published by . This book was released on 1998-11-16 with total page 248 pages. Available in PDF, EPUB and Kindle. Book excerpt: The 34 papers investigate the processing routes and properties of the complex molecular and macromolecular structures that hold biological cells together, both to reveal some of the mysteries of cell function and to identify natural solutions for optimizing membranes that might be adapted for applications in materials science. They cover the mechanics of DNA; the cytoskeleton, semiflexible polymers, polyelectrolytes, and motor proteins; properties and models of membranes and their interactions with macromolecules; biomaterials; and cells and cellular processes. Annotation copyrighted by Book News, Inc., Portland, OR

Science and Technology of Magnetic Oxides: Volume 494

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Publisher :
ISBN 13 :
Total Pages : 384 pages
Book Rating : 4.3/5 (91 download)

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Book Synopsis Science and Technology of Magnetic Oxides: Volume 494 by : Michael F. Hundley

Download or read book Science and Technology of Magnetic Oxides: Volume 494 written by Michael F. Hundley and published by . This book was released on 1998-03-26 with total page 384 pages. Available in PDF, EPUB and Kindle. Book excerpt: The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.

Nondestructive Characterization of Materials in Aging Systems: Volume 503

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Publisher : Mrs Proceedings
ISBN 13 :
Total Pages : 368 pages
Book Rating : 4.3/5 (91 download)

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Book Synopsis Nondestructive Characterization of Materials in Aging Systems: Volume 503 by : Robert L. Crane

Download or read book Nondestructive Characterization of Materials in Aging Systems: Volume 503 written by Robert L. Crane and published by Mrs Proceedings. This book was released on 1998-08-14 with total page 368 pages. Available in PDF, EPUB and Kindle. Book excerpt: The 43 papers describe new techniques for characterizing the location and size of cracks, the extent of water absorption in adhesives and other polymers, neutron-induced losses of fracture toughness in reactor steels, and the weathering of concrete. They also present applications to structures that for economic reasons are being used well past their design lives. Special emphasis is given to the structural health of concrete, defects in high- strength aircraft materials, and steels in nuclear reactors. Annotation copyrighted by Book News, Inc., Portland, OR

Atomistic Mechanisms in Beam Synthesis and Irradiation of Materials: Volume 504

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Publisher : Mrs Proceedings
ISBN 13 :
Total Pages : 488 pages
Book Rating : 4.3/5 (91 download)

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Book Synopsis Atomistic Mechanisms in Beam Synthesis and Irradiation of Materials: Volume 504 by :

Download or read book Atomistic Mechanisms in Beam Synthesis and Irradiation of Materials: Volume 504 written by and published by Mrs Proceedings. This book was released on 1999-03 with total page 488 pages. Available in PDF, EPUB and Kindle. Book excerpt: Some 70 papers focus on atomistic processes that occur in metals, ceramics and glasses, and polymers exposed to energetic beams in order to synthesize or modify a material. Sections also explore defects and modelling, energetic particle synthesis and mechanical properties, and optical materials and nanoclusters. The invited papers cover defect evolution in ion-implanted Silicon from point to extended defects, achievements of the Japanese government and university projects in ion and laser beam technology, forming metastable materials by ion-beam-assisted deposition and its application to metal clusters in ceramic matrices, and the mesoscale engineering of nanocomposite nonlinear optical materials. Annotation copyrighted by Book News, Inc., Portland, OR

Electrical, Optical and Magnetic Properties of Organic Solid-State Materials IV: Volume 488

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Publisher :
ISBN 13 :
Total Pages : 992 pages
Book Rating : 4.:/5 (318 download)

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Book Synopsis Electrical, Optical and Magnetic Properties of Organic Solid-State Materials IV: Volume 488 by : John R. Reynolds

Download or read book Electrical, Optical and Magnetic Properties of Organic Solid-State Materials IV: Volume 488 written by John R. Reynolds and published by . This book was released on 1998-05-06 with total page 992 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book shows that research involving electrical, optical and magnetic properties of organic solid-state materials continues to grow both in scope and technological importance. Early studies of charge transport in conducting polymers have evolved from the elucidation of fundamental structure/function relationships to applications such as batteries, simple electrical devices such as diodes, chemical sensors, antistatic coatings, microwave and millimeter wave-absorbing materials, and photochromic devices. A particularly exciting evolution has been the discovery and development of organic light-emitting diodes (OLEDs) which appear to be nearing commercialization in an amazingly short period of time. This application is of particular interest because both electrical and optical properties must be considered.. Topics include: organic light-emitting materials and devices; photonic materials and devices; conducting and electroactive polymers and materials; molecular and supramolecular engineering; organic metals and magnetic materials and poster presentations.

Power Semiconductor Materials and Devices: Volume 483

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Publisher : Mrs Proceedings
ISBN 13 :
Total Pages : 478 pages
Book Rating : 4.3/5 (91 download)

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Book Synopsis Power Semiconductor Materials and Devices: Volume 483 by : S. J. Pearton

Download or read book Power Semiconductor Materials and Devices: Volume 483 written by S. J. Pearton and published by Mrs Proceedings. This book was released on 1997 with total page 478 pages. Available in PDF, EPUB and Kindle. Book excerpt: The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.

Covalently Bonded Disordered Thin-Film Materials: Volume 498

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Publisher : Mrs Proceedings
ISBN 13 :
Total Pages : 336 pages
Book Rating : 4.3/5 (91 download)

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Book Synopsis Covalently Bonded Disordered Thin-Film Materials: Volume 498 by : M. P. Siegel

Download or read book Covalently Bonded Disordered Thin-Film Materials: Volume 498 written by M. P. Siegel and published by Mrs Proceedings. This book was released on 1998-04-22 with total page 336 pages. Available in PDF, EPUB and Kindle. Book excerpt: The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.

Materials and Devices for Silicon-Based Optoelectronics: Volume 486

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Publisher : Mrs Proceedings
ISBN 13 :
Total Pages : 440 pages
Book Rating : 4.3/5 (91 download)

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Book Synopsis Materials and Devices for Silicon-Based Optoelectronics: Volume 486 by : Albert Polman

Download or read book Materials and Devices for Silicon-Based Optoelectronics: Volume 486 written by Albert Polman and published by Mrs Proceedings. This book was released on 1998-07 with total page 440 pages. Available in PDF, EPUB and Kindle. Book excerpt: Presents 57 contributions from the fall 1997 symposium. Some of the most important conclusions to emerge from the papers are: Si-based visible and infrared light provide competing and complementary methods to overcome poor performance of Si as a light emitter; the silicon-on- insulator Si/SiO2/Si systems are ideal for highly confined waveguides and microphotonics components and for the fabrication of quantum wells and resonant tunneling structures; efficient integrated modulators and optically pumped amplifiers hold promise for Si-compatible optoelectronics; SiGe quantum wells, Ge films on buffered Si, and SnGe-alloys-upon-Si could be used for efficient near infrared light detection, once dark current problems are solved; and finally, new monolithic approaches to the engineering of the optical approaches of Si are allowing new applications and market space for low-cost Si-compatible integrated optoelectronics and microphotonics. Annotation copyrighted by Book News, Inc., Portland, OR

Flat Panel Display Materials

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Publisher :
ISBN 13 :
Total Pages : 372 pages
Book Rating : 4.3/5 (91 download)

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Book Synopsis Flat Panel Display Materials by :

Download or read book Flat Panel Display Materials written by and published by . This book was released on 1998 with total page 372 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Low-dielectric Constant Materials

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Publisher :
ISBN 13 :
Total Pages : 408 pages
Book Rating : 4.3/5 (91 download)

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Book Synopsis Low-dielectric Constant Materials by :

Download or read book Low-dielectric Constant Materials written by and published by . This book was released on 1998 with total page 408 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Infrared Applications of Semiconductors II: Volume 484

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Publisher :
ISBN 13 :
Total Pages : 720 pages
Book Rating : 4.:/5 (318 download)

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Book Synopsis Infrared Applications of Semiconductors II: Volume 484 by : Donald L. McDaniel

Download or read book Infrared Applications of Semiconductors II: Volume 484 written by Donald L. McDaniel and published by . This book was released on 1998-04-20 with total page 720 pages. Available in PDF, EPUB and Kindle. Book excerpt: The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.