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Author :
Publisher :
ISBN 13 :
Total Pages : 508 pages
Book Rating : 4.3/5 (91 download)
Download or read book Proceedings of the ... International Symposium on Semiconductor Wafer Bonding written by and published by . This book was released on 1993 with total page 508 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Marc J. Madou
Publisher : CRC Press
ISBN 13 : 1482274000
Total Pages : 764 pages
Book Rating : 4.4/5 (822 download)
Download or read book Fundamentals of Microfabrication written by Marc J. Madou and published by CRC Press. This book was released on 2018-10-08 with total page 764 pages. Available in PDF, EPUB and Kindle. Book excerpt: MEMS technology and applications have grown at a tremendous pace, while structural dimensions have grown smaller and smaller, reaching down even to the molecular level. With this movement have come new types of applications and rapid advances in the technologies and techniques needed to fabricate the increasingly miniature devices that are literally changing our world. A bestseller in its first edition, Fundamentals of Microfabrication, Second Edition reflects the many developments in methods, materials, and applications that have emerged recently. Renowned author Marc Madou has added exercise sets to each chapter, thus answering the need for a textbook in this field. Fundamentals of Microfabrication, Second Edition offers unique, in-depth coverage of the science of miniaturization, its methods, and materials. From the fundamentals of lithography through bonding and packaging to quantum structures and molecular engineering, it provides the background, tools, and directions you need to confidently choose fabrication methods and materials for a particular miniaturization problem. New in the Second Edition Revised chapters that reflect the many recent advances in the field Updated and enhanced discussions of topics including DNA arrays, microfluidics, micromolding techniques, and nanotechnology In-depth coverage of bio-MEMs, RF-MEMs, high-temperature, and optical MEMs. Many more links to the Web Problem sets in each chapter
Author : Marc J. Madou
Publisher : CRC Press
ISBN 13 : 1420055194
Total Pages : 672 pages
Book Rating : 4.4/5 (2 download)
Download or read book Manufacturing Techniques for Microfabrication and Nanotechnology written by Marc J. Madou and published by CRC Press. This book was released on 2011-06-13 with total page 672 pages. Available in PDF, EPUB and Kindle. Book excerpt: Designed for science and engineering students, this text focuses on emerging trends in processes for fabricating MEMS and NEMS devices. The book reviews different forms of lithography, subtractive material removal processes, and additive technologies. Both top-down and bottom-up fabrication processes are exhaustively covered and the merits of the different approaches are compared. Students can use this color volume as a guide to help establish the appropriate fabrication technique for any type of micro- or nano-machine.
Author : Marc J. Madou
Publisher : CRC Press
ISBN 13 : 1482274663
Total Pages : 1983 pages
Book Rating : 4.4/5 (822 download)
Download or read book Fundamentals of Microfabrication and Nanotechnology, Three-Volume Set written by Marc J. Madou and published by CRC Press. This book was released on 2018-12-14 with total page 1983 pages. Available in PDF, EPUB and Kindle. Book excerpt: Now in its third edition, Fundamentals of Microfabrication and Nanotechnology continues to provide the most complete MEMS coverage available. Thoroughly revised and updated the new edition of this perennial bestseller has been expanded to three volumes, reflecting the substantial growth of this field. It includes a wealth of theoretical and practical information on nanotechnology and NEMS and offers background and comprehensive information on materials, processes, and manufacturing options. The first volume offers a rigorous theoretical treatment of micro- and nanosciences, and includes sections on solid-state physics, quantum mechanics, crystallography, and fluidics. The second volume presents a very large set of manufacturing techniques for micro- and nanofabrication and covers different forms of lithography, material removal processes, and additive technologies. The third volume focuses on manufacturing techniques and applications of Bio-MEMS and Bio-NEMS. Illustrated in color throughout, this seminal work is a cogent instructional text, providing classroom and self-learners with worked-out examples and end-of-chapter problems. The author characterizes and defines major research areas and illustrates them with examples pulled from the most recent literature and from his own work.
Author : P. Rai-Choudhury
Publisher : SPIE Press
ISBN 13 : 9780819423795
Total Pages : 706 pages
Book Rating : 4.4/5 (237 download)
Download or read book Handbook of Microlithography, Micromachining, and Microfabrication: Micromachining and microfabrication written by P. Rai-Choudhury and published by SPIE Press. This book was released on 1997 with total page 706 pages. Available in PDF, EPUB and Kindle. Book excerpt: Focusing on the use of microlithography techniques in microelectronics manufacturing, this volume is one of a series addressing a rapidly growing field affecting the integrated circuit industry. New applications in such areas as sensors, actuators and biomedical devices, are described.
Author : Lubomyr Taras Romankiw
Publisher : The Electrochemical Society
ISBN 13 : 9781566771139
Total Pages : 820 pages
Book Rating : 4.7/5 (711 download)
Download or read book Proceedings of the Fourth International Symposium on Magnetic Materials, Processes, and Devices written by Lubomyr Taras Romankiw and published by The Electrochemical Society. This book was released on 1996 with total page 820 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Mohamed Gad-el-Hak
Publisher : CRC Press
ISBN 13 : 1420036556
Total Pages : 576 pages
Book Rating : 4.4/5 (2 download)
Download or read book MEMS written by Mohamed Gad-el-Hak and published by CRC Press. This book was released on 2005-11-29 with total page 576 pages. Available in PDF, EPUB and Kindle. Book excerpt: As our knowledge of microelectromechanical systems (MEMS) continues to grow, so does The MEMS Handbook. The field has changed so much that this Second Edition is now available in three volumes. Individually, each volume provides focused, authoritative treatment of specific areas of interest. Together, they comprise the most comprehensive collection
Author : Joachim N. Burghartz
Publisher : John Wiley & Sons
ISBN 13 : 1118517539
Total Pages : 637 pages
Book Rating : 4.1/5 (185 download)
Download or read book Guide to State-of-the-Art Electron Devices written by Joachim N. Burghartz and published by John Wiley & Sons. This book was released on 2013-03-19 with total page 637 pages. Available in PDF, EPUB and Kindle. Book excerpt: Winner, 2013 PROSE Award, Engineering and Technology Concise, high quality and comparative overview of state-of-the-art electron device development, manufacturing technologies and applications Guide to State-of-the-Art Electron Devices marks the 60th anniversary of the IRE electron devices committee and the 35th anniversary of the IEEE Electron Devices Society, as such it defines the state-of-the-art of electron devices, as well as future directions across the entire field. Spans full range of electron device types such as photovoltaic devices, semiconductor manufacturing and VLSI technology and circuits, covered by IEEE Electron and Devices Society Contributed by internationally respected members of the electron devices community A timely desk reference with fully-integrated colour and a unique lay-out with sidebars to highlight the key terms Discusses the historical developments and speculates on future trends to give a more rounded picture of the topics covered A valuable resource R&D managers; engineers in the semiconductor industry; applied scientists; circuit designers; Masters students in power electronics; and members of the IEEE Electron Device Society.
Author : M. Elwenspoek
Publisher : Springer Science & Business Media
ISBN 13 : 3662043211
Total Pages : 306 pages
Book Rating : 4.6/5 (62 download)
Download or read book Mechanical Microsensors written by M. Elwenspoek and published by Springer Science & Business Media. This book was released on 2012-12-06 with total page 306 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book on mechanical microsensors is based on a course organized by the Swiss Foundation for Research in Microtechnology (FSRM) in Neuchatel, Swit zerland, and developed and taught by the authors. Support by FSRM is herewith gratefully acknowledged. This book attempts to serve two purposes. First it gives an overview on me chanical microsensors (sensors for pressure, force, acceleration, angular rate and fluid flow, realized by silicon micromachining). Second, it serves as a textbook for engineers to give them a comprehensive introduction on the basic design issues of these sensors. Engineers active in sensor design are usually educated either in electrical engineering or mechanical engineering. These classical educa tional pro grams do not prepare the engineer for the challenging task of sensor design since sensors are instruments typically bridging the disciplines: one needs a rather deep understanding of both mechanics and electronics. Accordingly, the book contains discussion of the basic engineering sciences relevant to mechanical sensors, hopefully in a way that it is accessible for all colours of engineers. Engi rd th neering students in their 3 or 4 year should have enough knowledge to be able to follow the arguments presented in this book. In this sense, this book should be useful as textbook for students in courses on mechanical microsensors (as is CUf rently being done at the University ofTwente).
Author : Mike Golio
Publisher : CRC Press
ISBN 13 : 142000672X
Total Pages : 734 pages
Book Rating : 4.4/5 (2 download)
Download or read book RF and Microwave Passive and Active Technologies written by Mike Golio and published by CRC Press. This book was released on 2018-10-03 with total page 734 pages. Available in PDF, EPUB and Kindle. Book excerpt: In the high frequency world, the passive technologies required to realize RF and microwave functionality present distinctive challenges. SAW filters, dielectric resonators, MEMS, and waveguide do not have counterparts in the low frequency or digital environment. Even when conventional lumped components can be used in high frequency applications, their behavior does not resemble that observed at lower frequencies. RF and Microwave Passive and Active Technologies provides detailed information about a wide range of component technologies used in modern RF and microwave systems. Updated chapters include new material on such technologies as MEMS, device packaging, surface acoustic wave (SAW) filters, bipolar junction and heterojunction transistors, and high mobility electron transistors (HMETs). The book also features a completely rewritten section on wide bandgap transistors.
Author : Peter J. Hesketh
Publisher : The Electrochemical Society
ISBN 13 : 9781566773720
Total Pages : 268 pages
Book Rating : 4.7/5 (737 download)
Download or read book Microfabricated Systems and MEMS VI written by Peter J. Hesketh and published by The Electrochemical Society. This book was released on 2002 with total page 268 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Harvey C. Hoch
Publisher : Cambridge University Press
ISBN 13 : 9780521462648
Total Pages : 448 pages
Book Rating : 4.4/5 (626 download)
Download or read book Nanofabrication and Biosystems written by Harvey C. Hoch and published by Cambridge University Press. This book was released on 1996-07-13 with total page 448 pages. Available in PDF, EPUB and Kindle. Book excerpt: The book also aims to stimulate innovative, productive interactions among materials scientists, engineers, and biologists, and to explore ways in which materials scientists and engineers can exploit biological principles and biological assemblies to produce new and ever smaller devices.
Author : Rudy J. van de Plassche
Publisher : Springer Science & Business Media
ISBN 13 : 1475726023
Total Pages : 417 pages
Book Rating : 4.4/5 (757 download)
Download or read book Analog Circuit Design written by Rudy J. van de Plassche and published by Springer Science & Business Media. This book was released on 2013-03-09 with total page 417 pages. Available in PDF, EPUB and Kindle. Book excerpt: Today digital signal processing systems use advanced CMOS technologies requiring the analog-to-digital converter to be implemented in the same (digital) technology. Such an implementation requires special circuit techniques. Furthermore the susceptibility of converters to ground bounce or digital noise is an important design criterion. In this part different converters and conversion techniques are described that are optimized for receiver applications. Part II, Sensor and Actuator Interfaces, interfaces for sensors and actuators shape the gates through which information is acquired from the real world into digital information systems, and vice versa. The interfaces should include analog signal conditioning, analog-to-digital conversion, digital bus interfaces and data-acquisition networks. To simplify the use of data-acquisition systems additional features should be incorporated, like self-test, and calibration
Author : Bharat Bhushan
Publisher : Springer Science & Business Media
ISBN 13 : 3540012184
Total Pages : 1232 pages
Book Rating : 4.5/5 (4 download)
Download or read book Springer Handbook of Nanotechnology written by Bharat Bhushan and published by Springer Science & Business Media. This book was released on 2004-01-19 with total page 1232 pages. Available in PDF, EPUB and Kindle. Book excerpt: This major work has established itself as the definitive reference in the nanoscience and nanotechnology area in one volume. In presents nanostructures, micro/nanofabrication, and micro/nanodevices. Special emphasis is on scanning probe microscopy, nanotribology and nanomechanics, molecularly thick films, industrial applications and microdevice reliability, and on social aspects. Reflecting further developments, the new edition has grown from six to eight parts. The latest information is added to fields such as bionanotechnology, nanorobotics, and NEMS/MEMS reliability. This classic reference book is orchestrated by a highly experienced editor and written by a team of distinguished experts for those learning about the field of nanotechnology.
Author : Henry Baltes
Publisher : John Wiley & Sons
ISBN 13 : 352767506X
Total Pages : 610 pages
Book Rating : 4.5/5 (276 download)
Download or read book CMOS - MEMS written by Henry Baltes and published by John Wiley & Sons. This book was released on 2013-03-26 with total page 610 pages. Available in PDF, EPUB and Kindle. Book excerpt: This edition of 'CMOS-MEMS' was originally published in the successful series 'Advanced Micro & Nanosystems'. Here, the combination of the globally established, billion dollar chip mass fabrication technology CMOS with the fascinating and commercially promising new world of MEMS is covered from all angles. The book introduces readers to this fi eld and takes them from fabrication technologies and material charaterization aspects to the actual applications of CMOS-MEMS - a wide range of miniaturized physical, chemical and biological sensors and RF systems. Vital knowledge on circuit and system integration issues concludes this in-depth treatise, illustrating the advantages of combining CMOS and MEMS in the first place, rather than having a hybrid solution.
Author : Marc J. Madou
Publisher : CRC Press
ISBN 13 : 142005516X
Total Pages : 652 pages
Book Rating : 4.4/5 (2 download)
Download or read book From MEMS to Bio-MEMS and Bio-NEMS written by Marc J. Madou and published by CRC Press. This book was released on 2011-06-13 with total page 652 pages. Available in PDF, EPUB and Kindle. Book excerpt: From MEMS to Bio-MEMS and Bio-NEMS: Manufacturing Techniques and Applications details manufacturing techniques applicable to bionanotechnology. After reviewing MEMS techniques, materials, and modeling, the author covers nanofabrication, genetically engineered proteins, artificial cells, nanochemistry, and self-assembly. He also discusses scaling laws in MEMS and NEMS, actuators, fluidics, and power and brains in miniature devices. He concludes with coverage of various MEMS and NEMS applications. Fully illustrated in color, the text contains end-of-chapter problems, worked examples, extensive references for further reading, and an extensive glossary of terms. Details the Nanotechnology, Biology, and Manufacturing Techniques Applicable to Bionanotechnology Topics include: Nonlithography manufacturing techniques with lithography-based methods Nature as an engineering guide and contrasts top-down and bottom-up approaches Packaging, assembly, and self-assembly from ICs to DNA and biological cells Selected new MEMS and NEMS processes and materials, metrology techniques, and modeling Scaling laws, actuators, power generation, and the implementation of brains in miniaturizes devices Different strategies for making micromachines smarter The transition out of the laboratory and into the marketplace The third volume in Fundamentals of Microfabrication and Nanotechnology, Third Edition, Three-Volume Set, the book discusses top-down and bottom-up manufacturing methods and explains how to use nature as a guide. It provides a better understanding of how to match different manufacturing options with a given application that students can use to identify additional killer MEMS and NEMS applications. Other volumes in the set include: Solid-State Physics, Fluidics, and Analytical Techniques in Micro- and Nanotechnology Manufacturing Techniques for Microfabrication and Nanotechnology
Author : Cornelius T. Leondes
Publisher : Springer Science & Business Media
ISBN 13 : 0387257861
Total Pages : 2142 pages
Book Rating : 4.3/5 (872 download)
Download or read book Mems/Nems written by Cornelius T. Leondes and published by Springer Science & Business Media. This book was released on 2007-10-08 with total page 2142 pages. Available in PDF, EPUB and Kindle. Book excerpt: This significant and uniquely comprehensive five-volume reference is a valuable source for research workers, practitioners, computer scientists, students, and technologists. It covers all of the major topics within the subject and offers a comprehensive treatment of MEMS design, fabrication techniques, and manufacturing methods. It also includes current medical applications of MEMS technology and provides applications of MEMS to opto-electronic devices. It is clearly written, self-contained, and accessible, with helpful standard features including an introduction, summary, extensive figures and design examples with comprehensive reference lists.
