Ieee 20th International Conference On Micro Electro Mechanical Systems 2007

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EKC2008 Proceedings of the EU-Korea Conference on Science and Technology

Author : Seung-Deog Yoo
Publisher : Springer Science & Business Media
ISBN 13 : 3540851909
Total Pages : 514 pages
Book Rating : 4.5/5 (48 download)

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Book Synopsis EKC2008 Proceedings of the EU-Korea Conference on Science and Technology by : Seung-Deog Yoo

Download or read book EKC2008 Proceedings of the EU-Korea Conference on Science and Technology written by Seung-Deog Yoo and published by Springer Science & Business Media. This book was released on 2008-10-14 with total page 514 pages. Available in PDF, EPUB and Kindle. Book excerpt: Current research fields in science and technology were presented and discussed at the EKC2008, informing about the interests and directions of the scientists and engineers in EU countries and Korea. The Conference has emerged from the idea of bringing together EU and Korea to get to know each other better, especially in fields of science and technology. The focus of the conference is put on the topics: Computational Fluid Dynamics; Mechatronics and Mechanical Engineering; Information and Communications Technology; Life and Natural Sciences; Energy and Environmental Technology.

Electromechanics and MEMS

Author : Thomas B. Jones
Publisher : Cambridge University Press
ISBN 13 : 0521764831
Total Pages : 581 pages
Book Rating : 4.5/5 (217 download)

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Book Synopsis Electromechanics and MEMS by : Thomas B. Jones

Download or read book Electromechanics and MEMS written by Thomas B. Jones and published by Cambridge University Press. This book was released on 2013-05-02 with total page 581 pages. Available in PDF, EPUB and Kindle. Book excerpt: A comprehensive MEMS textbook, with worked examples and numerous homework problems.

Emerging Nanoelectronic Devices

Author : An Chen
Publisher : John Wiley & Sons
ISBN 13 : 1118447743
Total Pages : 570 pages
Book Rating : 4.1/5 (184 download)

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Book Synopsis Emerging Nanoelectronic Devices by : An Chen

Download or read book Emerging Nanoelectronic Devices written by An Chen and published by John Wiley & Sons. This book was released on 2015-01-27 with total page 570 pages. Available in PDF, EPUB and Kindle. Book excerpt: Emerging Nanoelectronic Devices focuses on the future direction of semiconductor and emerging nanoscale device technology. As the dimensional scaling of CMOS approaches its limits, alternate information processing devices and microarchitectures are being explored to sustain increasing functionality at decreasing cost into the indefinite future. This is driving new paradigms of information processing enabled by innovative new devices, circuits, and architectures, necessary to support an increasingly interconnected world through a rapidly evolving internet. This original title provides a fresh perspective on emerging research devices in 26 up to date chapters written by the leading researchers in their respective areas. It supplements and extends the work performed by the Emerging Research Devices working group of the International Technology Roadmap for Semiconductors (ITRS). Key features: • Serves as an authoritative tutorial on innovative devices and architectures that populate the dynamic world of “Beyond CMOS” technologies. • Provides a realistic assessment of the strengths, weaknesses and key unknowns associated with each technology. • Suggests guidelines for the directions of future development of each technology. • Emphasizes physical concepts over mathematical development. • Provides an essential resource for students, researchers and practicing engineers.

MEMS-based Circuits and Systems for Wireless Communication

Author : Christian C Enz
Publisher : Springer Science & Business Media
ISBN 13 : 1441987983
Total Pages : 334 pages
Book Rating : 4.4/5 (419 download)

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Book Synopsis MEMS-based Circuits and Systems for Wireless Communication by : Christian C Enz

Download or read book MEMS-based Circuits and Systems for Wireless Communication written by Christian C Enz and published by Springer Science & Business Media. This book was released on 2012-08-21 with total page 334 pages. Available in PDF, EPUB and Kindle. Book excerpt: MEMS-based Circuits and Systems for Wireless Communications provides comprehensive coverage of RF-MEMS technology from device to system level. This edited volume places emphasis on how system performance for radio frequency applications can be leveraged by Micro-Electro-Mechanical Systems (MEMS). Coverage also extends to innovative MEMS-aware radio architectures that push the potential of MEMS technology further ahead. This work presents a broad overview of the technology from MEMS devices (mainly BAW and Si MEMS resonators) to basic circuits, such as oscillators and filters, and finally complete systems such as ultra-low-power MEMS-based radios. Contributions from leading experts around the world are organized in three parts. Part I introduces RF-MEMS technology, devices and modeling and includes a prospective outlook on ongoing developments towards Nano-Electro-Mechanical Systems (NEMS) and phononic crystals. Device properties and models are presented in a circuit oriented perspective. Part II focusses on design of electronic circuits incorporating MEMS. Circuit design techniques specific to MEMS resonators are applied to oscillators and active filters. In Part III contributors discuss how MEMS can advantageously be used in radios to increase their miniaturization and reduce their power consumption. RF systems built around MEMS components such as MEMS-based frequency synthesis including all-digital PLLs, ultra-low power MEMS-based communication systems and a MEMS-based automotive wireless sensor node are described.

Resonant MEMS

Author : Oliver Brand
Publisher : John Wiley & Sons
ISBN 13 : 3527335455
Total Pages : 512 pages
Book Rating : 4.5/5 (273 download)

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Book Synopsis Resonant MEMS by : Oliver Brand

Download or read book Resonant MEMS written by Oliver Brand and published by John Wiley & Sons. This book was released on 2015-06-08 with total page 512 pages. Available in PDF, EPUB and Kindle. Book excerpt: Part of the AMN book series, this book covers the principles, modeling and implementation as well as applications of resonant MEMS from a unified viewpoint. It starts out with the fundamental equations and phenomena that govern the behavior of resonant MEMS and then gives a detailed overview of their implementation in capacitive, piezoelectric, thermal and organic devices, complemented by chapters addressing the packaging of the devices and their stability. The last part of the book is devoted to the cutting-edge applications of resonant MEMS such as inertial, chemical and biosensors, fluid properties sensors, timing devices and energy harvesting systems.

Microactuators, Microsensors and Micromechanisms

Author : Ashok Kumar Pandey
Publisher : Springer Nature
ISBN 13 : 3031203534
Total Pages : 379 pages
Book Rating : 4.0/5 (312 download)

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Book Synopsis Microactuators, Microsensors and Micromechanisms by : Ashok Kumar Pandey

Download or read book Microactuators, Microsensors and Micromechanisms written by Ashok Kumar Pandey and published by Springer Nature. This book was released on 2022-11-20 with total page 379 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book brings together investigations which combine theoretical and experimental results related to such systems as flexure hinges and compliant mechanisms for precision applications, the non-linear analytical modeling of compliant mechanisms, mechanical systems using compliance as a bipedal robot and reconfigurable tensegrity systems and micro-electro-mechanical systems (MEMS) as energy efficient micro-robots, microscale force compensation, magnetoelectric micro-sensors, acoustical actuators and the wafer bonding as a key technology for the MEMS fabrication. The volume gathers the contributions presented at the 6th Conference on Microactuators, Microsensors and Micromechanisms (MAMM), held in Hyderabad, India in December 2022. The aim of the conference was to provide a special opportunity for a know-how exchange and collaboration in various disciplines concerning systems pertaining to micro-technology. The conference was organized under the patronage of IFToMM (International Federation for the Promotion of Mechanism and Machine Science).

Frontiers in Sensing

Author : Friedrich G. Barth
Publisher : Springer Science & Business Media
ISBN 13 : 3211997482
Total Pages : 426 pages
Book Rating : 4.2/5 (119 download)

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Book Synopsis Frontiers in Sensing by : Friedrich G. Barth

Download or read book Frontiers in Sensing written by Friedrich G. Barth and published by Springer Science & Business Media. This book was released on 2011-09-29 with total page 426 pages. Available in PDF, EPUB and Kindle. Book excerpt: Biological sensory systems, fine-tuned to their specific tasks with remarkable perfection, have an enormous potential for technical, industrial, and medical applications. This applies to sensors specialized for a wide range of energy forms such as optical, mechanical, electrical, and magnetic, to name just a few. This book brings together first-hand knowledge from the frontiers of different fields of research in sensing. It aims to promote the interaction between biologists, engineers, physicists, and mathematicians and to pave the way for innovative lines of research and cross-disciplinary approaches. The topics presented cover a broad spectrum ranging from energy transformation and transduction processes in animal sensing systems to the fabrication and application of bio-inspired synthetic sensor arrays. The various contributions are linked by the similarity of what sensing has to accomplish in both biology and engineering.

Microfluidics and Nanofluidics Handbook, 2 Volume Set

Author : Sushanta K. Mitra
Publisher : CRC Press
ISBN 13 : 1466515740
Total Pages : 1767 pages
Book Rating : 4.4/5 (665 download)

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Book Synopsis Microfluidics and Nanofluidics Handbook, 2 Volume Set by : Sushanta K. Mitra

Download or read book Microfluidics and Nanofluidics Handbook, 2 Volume Set written by Sushanta K. Mitra and published by CRC Press. This book was released on 2011-09-20 with total page 1767 pages. Available in PDF, EPUB and Kindle. Book excerpt: A comprehensive, two-volume handbook on Microfluidics and Nanofluidics, this text covers fundamental aspects, fabrication techniques, introductory materials on microbiology and chemistry, measurement techniques, and applications with special emphasis on the energy sector. Each chapter begins with introductory coverage to a subject and then narrows in on advanced techniques and concepts, thus making it valuable to students and practitioners. The author pays special attention to applications of microfluidics in the energy sector and provides insight into the world of opportunities nanotechnology has to offer. Figures, tables, and equations to illustrate concepts.

Microfluidics and Nanofluidics Handbook

Author : Sushanta K. Mitra
Publisher : CRC Press
ISBN 13 : 1439816735
Total Pages : 642 pages
Book Rating : 4.4/5 (398 download)

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Book Synopsis Microfluidics and Nanofluidics Handbook by : Sushanta K. Mitra

Download or read book Microfluidics and Nanofluidics Handbook written by Sushanta K. Mitra and published by CRC Press. This book was released on 2016-04-19 with total page 642 pages. Available in PDF, EPUB and Kindle. Book excerpt: This comprehensive handbook presents fundamental aspects, fabrication techniques, introductory materials on microbiology and chemistry, measurement techniques, and applications of microfluidics and nanofluidics. The second volume focuses on topics related to experimental and numerical methods. It also covers fabrication and applications in a variety of areas, from aerospace to biological systems. Reflecting the inherent nature of microfluidics and nanofluidics, the book includes as much interdisciplinary knowledge as possible. It provides the fundamental science background for newcomers and advanced techniques and concepts for experienced researchers and professionals.

Thin Film Processes

Author : Jagannathan Thirumalai
Publisher : BoD – Books on Demand
ISBN 13 : 9535130676
Total Pages : 222 pages
Book Rating : 4.5/5 (351 download)

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Book Synopsis Thin Film Processes by : Jagannathan Thirumalai

Download or read book Thin Film Processes written by Jagannathan Thirumalai and published by BoD – Books on Demand. This book was released on 2017-04-12 with total page 222 pages. Available in PDF, EPUB and Kindle. Book excerpt: The book Thin Film Processes - Artifacts on Surface Phenomena and Technological Facets presents topics on global advancements in theoretical and experimental facts, instrumentation and practical applications of thin-film material perspectives and its applications. The aspect of this book is associated with the thin-film physics, the methods of deposition, optimization parameters and its wide technological applications. This book is divided into three main sections: Thin Film Deposition Methods: A Synthesis Perspective; Optimization Parameters in the Thin Film Science and Application of Thin Films: A Synergistic Outlook. Collected chapters provide applicable knowledge for a wide range of readers: common men, students and researchers. It was constructed by experts in diverse fields of thin-film science and technology from over 15 research institutes across the globe.

Poly-SiGe for MEMS-above-CMOS Sensors

Author : Pilar Gonzalez Ruiz
Publisher : Springer Science & Business Media
ISBN 13 : 9400767994
Total Pages : 210 pages
Book Rating : 4.4/5 (7 download)

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Book Synopsis Poly-SiGe for MEMS-above-CMOS Sensors by : Pilar Gonzalez Ruiz

Download or read book Poly-SiGe for MEMS-above-CMOS Sensors written by Pilar Gonzalez Ruiz and published by Springer Science & Business Media. This book was released on 2013-07-17 with total page 210 pages. Available in PDF, EPUB and Kindle. Book excerpt: Polycrystalline SiGe has emerged as a promising MEMS (Microelectromechanical Systems) structural material since it provides the desired mechanical properties at lower temperatures compared to poly-Si, allowing the direct post-processing on top of CMOS. This CMOS-MEMS monolithic integration can lead to more compact MEMS with improved performance. The potential of poly-SiGe for MEMS above-aluminum-backend CMOS integration has already been demonstrated. However, aggressive interconnect scaling has led to the replacement of the traditional aluminum metallization by copper (Cu) metallization, due to its lower resistivity and improved reliability. Poly-SiGe for MEMS-above-CMOS sensors demonstrates the compatibility of poly-SiGe with post-processing above the advanced CMOS technology nodes through the successful fabrication of an integrated poly-SiGe piezoresistive pressure sensor, directly fabricated above 0.13 m Cu-backend CMOS. Furthermore, this book presents the first detailed investigation on the influence of deposition conditions, germanium content and doping concentration on the electrical and piezoresistive properties of boron-doped poly-SiGe. The development of a CMOS-compatible process flow, with special attention to the sealing method, is also described. Piezoresistive pressure sensors with different areas and piezoresistor designs were fabricated and tested. Together with the piezoresistive pressure sensors, also functional capacitive pressure sensors were successfully fabricated on the same wafer, proving the versatility of poly-SiGe for MEMS sensor applications. Finally, a detailed analysis of the MEMS processing impact on the underlying CMOS circuit is also presented.

MEMS

Author : Vikas Choudhary
Publisher : CRC Press
ISBN 13 : 135183228X
Total Pages : 481 pages
Book Rating : 4.3/5 (518 download)

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Book Synopsis MEMS by : Vikas Choudhary

Download or read book MEMS written by Vikas Choudhary and published by CRC Press. This book was released on 2017-12-19 with total page 481 pages. Available in PDF, EPUB and Kindle. Book excerpt: The microelectromechanical systems (MEMS) industry has experienced explosive growth over the last decade. Applications range from accelerometers and gyroscopes used in automotive safety to high-precision on-chip integrated oscillators for reference generation and mobile phones. MEMS: Fundamental Technology and Applications brings together groundbreaking research in MEMS technology and explores an eclectic set of novel applications enabled by the technology. The book features contributions by top experts from industry and academia from around the world. The contributors explain the theoretical background and supply practical insights on applying the technology. From the historical evolution of nano micro systems to recent trends, they delve into topics including: Thin-film integrated passives as an alternative to discrete passives The possibility of piezoelectric MEMS Solutions for MEMS gyroscopes Advanced interconnect technologies Ambient energy harvesting Bulk acoustic wave resonators Ultrasonic receiver arrays using MEMS sensors Optical MEMS-based spectrometers The integration of MEMS resonators with conventional circuitry A wearable inertial and magnetic MEMS sensor assembly to estimate rigid body movement patterns Wireless microactuators to enable implantable MEMS devices for drug delivery MEMS technologies for tactile sensing and actuation in robotics MEMS-based micro hot-plate devices Inertial measurement units with integrated wireless circuitry to enable convenient, continuous monitoring Sensors using passive acousto-electric devices in wired and wireless systems Throughout, the contributors identify challenges and pose questions that need to be resolved, paving the way for new applications. Offering a wide view of the MEMS landscape, this is an invaluable resource for anyone working to develop and commercialize MEMS applications.

Handbook of Silicon Based MEMS Materials and Technologies

Author : Markku Tilli
Publisher : Elsevier
ISBN 13 : 012817787X
Total Pages : 1028 pages
Book Rating : 4.1/5 (281 download)

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Book Synopsis Handbook of Silicon Based MEMS Materials and Technologies by : Markku Tilli

Download or read book Handbook of Silicon Based MEMS Materials and Technologies written by Markku Tilli and published by Elsevier. This book was released on 2020-04-17 with total page 1028 pages. Available in PDF, EPUB and Kindle. Book excerpt: Handbook of Silicon Based MEMS Materials and Technologies, Third Edition is a comprehensive guide to MEMS materials, technologies, and manufacturing with a particular emphasis on silicon as the most important starting material used in MEMS. The book explains the fundamentals, properties (mechanical, electrostatic, optical, etc.), materials selection, preparation, modeling, manufacturing, processing, system integration, measurement, and materials characterization techniques of MEMS structures. The third edition of this book provides an important up-to-date overview of the current and emerging technologies in MEMS making it a key reference for MEMS professionals, engineers, and researchers alike, and at the same time an essential education material for undergraduate and graduate students. - Provides comprehensive overview of leading-edge MEMS manufacturing technologies through the supply chain from silicon ingot growth to device fabrication and integration with sensor/actuator controlling circuits - Explains the properties, manufacturing, processing, measuring and modeling methods of MEMS structures - Reviews the current and future options for hermetic encapsulation and introduces how to utilize wafer level packaging and 3D integration technologies for package cost reduction and performance improvements - Geared towards practical applications presenting several modern MEMS devices including inertial sensors, microphones, pressure sensors and micromirrors

Optical Nano and Micro Actuator Technology

Author : George K. Knopf
Publisher : CRC Press
ISBN 13 : 1351833510
Total Pages : 666 pages
Book Rating : 4.3/5 (518 download)

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Book Synopsis Optical Nano and Micro Actuator Technology by : George K. Knopf

Download or read book Optical Nano and Micro Actuator Technology written by George K. Knopf and published by CRC Press. This book was released on 2017-12-19 with total page 666 pages. Available in PDF, EPUB and Kindle. Book excerpt: In Optical Nano and Micro Actuator Technology, leading engineers, material scientists, chemists, physicists, laser scientists, and manufacturing specialists offer an in-depth, wide-ranging look at the fundamental and unique characteristics of light-driven optical actuators. They discuss how light can initiate physical movement and control a variety of mechanisms that perform mechanical work at the micro- and nanoscale. The book begins with the scientific background necessary for understanding light-driven systems, discussing the nature of light and the interaction between light and NEMS/MEMS devices. It then covers innovative optical actuator technologies that have been developed for many applications. The book examines photoresponsive materials that enable the design of optically driven structures and mechanisms and describes specific light-driven technologies that permit the manipulation of micro- and nanoscale objects. It also explores applications in optofluidics, bioMEMS and biophotonics, medical device design, and micromachine control. Inspiring the next generation of scientists and engineers to advance light-driven technologies, this book gives readers a solid grounding in this emerging interdisciplinary area. It thoroughly explains the scientific language and fundamental principles, provides a holistic view of optical nano and micro actuator systems, and illustrates current and potential applications of light-driven systems.

Photovoltaics for Space

Author : Sheila G. Bailey
Publisher : Elsevier
ISBN 13 : 012823301X
Total Pages : 536 pages
Book Rating : 4.1/5 (282 download)

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Book Synopsis Photovoltaics for Space by : Sheila G. Bailey

Download or read book Photovoltaics for Space written by Sheila G. Bailey and published by Elsevier. This book was released on 2022-10-26 with total page 536 pages. Available in PDF, EPUB and Kindle. Book excerpt: PV has traditionally been used for electric power in space. Solar panels on spacecraft are usually the sole source of power to run the sensors, active heating and cooling, and communications. Photovoltaics for Space: Key Issues, Missions and Alternative Technologies provides an overview of the challenges to efficiently produce solar power in near-Earth space and beyond: the materials and device architectures that have been developed to surmount these environmental and mission-specific barriers. The book is organized in four sections consisting of detailed introductory and background content as well as a collection of in-depth space environment, materials processing, technology, and mission overviews by international experts. This book will detail how to design and optimize a space power system's performance for power-to-weight ratio, effectiveness at end of operational life (EOL) compared to beginning of operational life (BOL), and specific mission objectives and goals. This book outlines the knowledge required for practitioners and advanced students interested in learning about the background, materials, devices, environmental challenges, missions, and future for photovoltaics for space exploration. - Provides an update to state-of-the-art and emerging solar cell technologies - Features comprehensive coverage of solar cells for space exploration and materials/device technology options available - Explains the extreme conditions and mission challenges to overcome when using photovoltaics in space

Piezoelectric MEMS Resonators

Author : Harmeet Bhugra
Publisher : Springer
ISBN 13 : 3319286889
Total Pages : 423 pages
Book Rating : 4.3/5 (192 download)

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Book Synopsis Piezoelectric MEMS Resonators by : Harmeet Bhugra

Download or read book Piezoelectric MEMS Resonators written by Harmeet Bhugra and published by Springer. This book was released on 2017-01-09 with total page 423 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book introduces piezoelectric microelectromechanical (pMEMS) resonators to a broad audience by reviewing design techniques including use of finite element modeling, testing and qualification of resonators, and fabrication and large scale manufacturing techniques to help inspire future research and entrepreneurial activities in pMEMS. The authors discuss the most exciting developments in the area of materials and devices for the making of piezoelectric MEMS resonators, and offer direct examples of the technical challenges that need to be overcome in order to commercialize these types of devices. Some of the topics covered include: Widely-used piezoelectric materials, as well as materials in which there is emerging interest Principle of operation and design approaches for the making of flexural, contour-mode, thickness-mode, and shear-mode piezoelectric resonators, and examples of practical implementation of these devices Large scale manufacturing approaches, with a focus on the practical aspects associated with testing and qualification Examples of commercialization paths for piezoelectric MEMS resonators in the timing and the filter markets ...and more! The authors present industry and academic perspectives, making this book ideal for engineers, graduate students, and researchers.

Micro and Nano Scale NMR

Author : Jens Anders
Publisher : John Wiley & Sons
ISBN 13 : 3527340564
Total Pages : 446 pages
Book Rating : 4.5/5 (273 download)

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Book Synopsis Micro and Nano Scale NMR by : Jens Anders

Download or read book Micro and Nano Scale NMR written by Jens Anders and published by John Wiley & Sons. This book was released on 2018-08-20 with total page 446 pages. Available in PDF, EPUB and Kindle. Book excerpt: This must-have book is the first self-contained summary of recent developments in the field of microscale nuclear magnetic resonance hardware, covering the entire technology from miniaturized detectors, the signal processing chain, and detection sequences. Chapters cover the latest advances in interventional NMR and implantable NMR sensors, as well as in using CMOS technology to manufacture miniaturized, highly scalable NMR detectors for NMR microscopy and high-throughput arrays of NMR spectroscopy detectors.