Handbook of VLSI Microlithography, 2nd Edition

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Author :
Publisher : Cambridge University Press
ISBN 13 : 0080946801
Total Pages : 1026 pages
Book Rating : 4.0/5 (89 download)

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Book Synopsis Handbook of VLSI Microlithography, 2nd Edition by : John N. Helbert

Download or read book Handbook of VLSI Microlithography, 2nd Edition written by John N. Helbert and published by Cambridge University Press. This book was released on 2001-04 with total page 1026 pages. Available in PDF, EPUB and Kindle. Book excerpt: This handbook gives readers a close look at the entire technology of printing very high resolution and high density integrated circuit (IC) patterns into thin resist process transfer coatingsùincluding optical lithography, electron beam, ion beam, and x-ray lithography. The book's main theme is the special printing process needed to achieve volume high density IC chip production, especially in the Dynamic Random Access Memory (DRAM) industry. The book leads off with a comparison of various lithography methods, covering the three major patterning parameters of line/space, resolution, line edge and pattern feature dimension control. The book's explanation of resist and resist process equipment technology may well be the first practical description of the relationship between the resist process and equipment parameters. The basics of resist technology are completely coveredùincluding an entire chapter on resist process defectivity and the potential yield limiting effect on device production. Each alternative lithographic technique and testing method is considered and evaluated: basic metrology including optical, scanning-electron-microscope (SEM) techniques and electrical test devices, along with explanations of actual printing tools and their design, construction and performance. The editor devotes an entire chapter to today's sophisticated, complex electron-beam printers, and to the emerging x-ray printing technology now used in high-density CMOS devices. Energetic ion particle printing is a controllable, steerable technology that does not rely on resist, and occupies a final section of the handbook.

Handbook of VLSI Microlithography

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Author :
Publisher : William Andrew
ISBN 13 : 1437728227
Total Pages : 671 pages
Book Rating : 4.4/5 (377 download)

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Book Synopsis Handbook of VLSI Microlithography by : William B. Glendinning

Download or read book Handbook of VLSI Microlithography written by William B. Glendinning and published by William Andrew. This book was released on 2012-12-02 with total page 671 pages. Available in PDF, EPUB and Kindle. Book excerpt: This handbook gives readers a close look at the entire technology of printing very high resolution and high density integrated circuit (IC) patterns into thin resist process transfer coatings-- including optical lithography, electron beam, ion beam, and x-ray lithography. The book's main theme is the special printing process needed to achieve volume high density IC chip production, especially in the Dynamic Random Access Memory (DRAM) industry. The book leads off with a comparison of various lithography methods, covering the three major patterning parameters of line/space, resolution, line edge and pattern feature dimension control. The book's explanation of resist and resist process equipment technology may well be the first practical description of the relationship between the resist process and equipment parameters. The basics of resist technology are completely covered -- including an entire chapter on resist process defectivity and the potential yield limiting effect on device production. Each alternative lithographic technique and testing method is considered and evaluated: basic metrology including optical, scanning-electron-microscope (SEM) techniques and electrical test devices, along with explanations of actual printing tools and their design, construction and performance. The editor devotes an entire chapter to today's sophisticated, complex electron-beam printers, and to the emerging x-ray printing technology now used in high-density CMOS devices. Energetic ion particle printing is a controllable, steerable technology that does not rely on resist, and occupies a final section of the handbook.

Handbook Of Vlsi Microlithography

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Author :
Publisher :
ISBN 13 : 9788179924754
Total Pages : 1022 pages
Book Rating : 4.9/5 (247 download)

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Book Synopsis Handbook Of Vlsi Microlithography by : Editor - John N. Helbert

Download or read book Handbook Of Vlsi Microlithography written by Editor - John N. Helbert and published by . This book was released on 2005-01-01 with total page 1022 pages. Available in PDF, EPUB and Kindle. Book excerpt: The Handbook of VLSI Microlithography gives engineers, scientists and technical workers in the Very Large Scale Integrated Circuit (VLSI) industry a close look at the entire technology of printing high resolution and high density integrated circuit (IC) patterns into thin resist process pattern transfer coatings including optical lithography, electron-beam, ion-beam, and X-ray lithography. The Handbook s main focus is the special printing process needed to achieve volume high density IC chip production, especially in the Dynamic Random Access Memory (DRAM) industry.The 13 contributors compare various lithography methods, including the three major patterning parameters of line/space, resolution, line edge and pattern feature dimension control. They explore the basics of resist technology including the first practical description of the relationship between the resist process and equipment parameters.The Handbook includes evaluations of alternative lithographic techniques and testing methods, including optical, scanning-electron-micro-scope (SEM) techniques and electrical test devices, along with explanations of actual printing tools and their design, construction and performance. The editor devotes an entire chapter to today s sophisticated, complex electron-beam printers, and to the emerging X-ray printing technology now used in high-density CMOS devices. Energetic ion particle printing is a controllable, steerable technology that does not rely on resist, and occupies a final section of the Handbook.

Handbook Of Vlsi Microlithography

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Author :
Publisher :
ISBN 13 :
Total Pages : 0 pages
Book Rating : 4.:/5 (14 download)

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Book Synopsis Handbook Of Vlsi Microlithography by : W.B. Glendinning

Download or read book Handbook Of Vlsi Microlithography written by W.B. Glendinning and published by . This book was released on with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Handbook of Microlithography, Micromachining, and Microfabrication: Microlithography

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Author :
Publisher : SPIE Press
ISBN 13 : 9780819423788
Total Pages : 780 pages
Book Rating : 4.4/5 (237 download)

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Book Synopsis Handbook of Microlithography, Micromachining, and Microfabrication: Microlithography by : P. Rai-Choudhury

Download or read book Handbook of Microlithography, Micromachining, and Microfabrication: Microlithography written by P. Rai-Choudhury and published by SPIE Press. This book was released on 1997 with total page 780 pages. Available in PDF, EPUB and Kindle. Book excerpt: The dynamic field of lithography demands an authoritative handbook for process development and production, and to aid in the training of scientists and engineers. It contains process details, recipes, tables, charts, etc., and is useful as a reference book or as a textbook. Copublished with IEE.

Handbook of Microlithography, Micromachining, and Microfabrication: Micromachining and microfabrication

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Author :
Publisher : IET
ISBN 13 : 9780852969113
Total Pages : 716 pages
Book Rating : 4.9/5 (691 download)

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Book Synopsis Handbook of Microlithography, Micromachining, and Microfabrication: Micromachining and microfabrication by : P. Rai-Choudhury

Download or read book Handbook of Microlithography, Micromachining, and Microfabrication: Micromachining and microfabrication written by P. Rai-Choudhury and published by IET. This book was released on 1997 with total page 716 pages. Available in PDF, EPUB and Kindle. Book excerpt: Contains useful process details, recipes, tables, charts and includes numerous device applications.

Handbook of Microlithography, Micromachining, and Microfabrication: Microlithography

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Author :
Publisher : IET
ISBN 13 : 9780852969069
Total Pages : 784 pages
Book Rating : 4.9/5 (69 download)

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Book Synopsis Handbook of Microlithography, Micromachining, and Microfabrication: Microlithography by : P. Rai-Choudhury

Download or read book Handbook of Microlithography, Micromachining, and Microfabrication: Microlithography written by P. Rai-Choudhury and published by IET. This book was released on 1997 with total page 784 pages. Available in PDF, EPUB and Kindle. Book excerpt: Focusing on the use of microlithography techniques in microelectronics manufacturing, this volume is one of a series addressing a rapidly growing field affecting the integrated circuit industry. New applications in such areas as sensors, actuators and biomedical devices, are described.

VLSI Handbook

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Author :
Publisher : Academic Press
ISBN 13 : 0323141994
Total Pages : 929 pages
Book Rating : 4.3/5 (231 download)

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Book Synopsis VLSI Handbook by : Norman Einspruch

Download or read book VLSI Handbook written by Norman Einspruch and published by Academic Press. This book was released on 2012-12-02 with total page 929 pages. Available in PDF, EPUB and Kindle. Book excerpt: VLSI Handbook is a reference guide on very large scale integration (VLSI) microelectronics and its aspects such as circuits, fabrication, and systems applications. This handbook readily answers specific questions and presents a systematic compilation of information regarding the VLSI technology. There are a total of 52 chapters in this book and are grouped according to the fields of design, materials and processes, and examples of specific system applications. Some of the chapters under fields of design are design automation for integrated circuits and computer tools for integrated circuit design. For the materials and processes, there are many chapters that discuss this aspect. Some of them are manufacturing process technology for metal-oxide semiconductor (MOS) VLSI; MOS VLSI circuit technology; and facilities for VLSI circuit fabrication. Other concepts and materials discussed in the book are the use of silicon material in different processes of VLSI, nitrides, silicides, metallization, and plasma. This handbook is very useful to students of engineering and physics. Also, researchers (in physics and chemistry of materials and processes), device designers, and system designers can also benefit from this book.

Scientific Photography and Applied Imaging

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Publisher : CRC Press
ISBN 13 : 1136094385
Total Pages : 559 pages
Book Rating : 4.1/5 (36 download)

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Book Synopsis Scientific Photography and Applied Imaging by : Sidney Ray

Download or read book Scientific Photography and Applied Imaging written by Sidney Ray and published by CRC Press. This book was released on 1999-08-02 with total page 559 pages. Available in PDF, EPUB and Kindle. Book excerpt: WINNER OF THE 2001 KRASZNA-KRAUSZ PHOTOGRAPHY BOOK AWARD (Technical Photography category) The only definitive book to fully encompass the use of photography and imaging as tools in science, technology and medicine. It describes in one single volume the basic theory, techniques, materials, special equipment and applications for a wide variety of uses of photography, including: close up photography and photomacrography to spectral recording, surveillance systems, radiography and micro-imaging. This extensively illustrated photography 'bible' contains all the information you need, whether you are a scientist wishing to use photography for a specialist application, a professional needing to extend technical expertise, or a student wanting to broaden your knowledge of the applications of photography. The contents are arranged in three sections: · General Section, detailing the elements of the image capture process · Major Applications, describing the major applications of imaging · Specialist Applications, presenting an eclectic selection of more specialised but increasingly important applications Each subject is introduced with an outline of its development and contemporary importance, followed by explanations of essential theory and an overview of techniques and equipment. Mathematics is only used where necessary. Numerous applications and case studies are described. Comprehensive bibliographies and references are provided for further study.

VLSI Technology

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Author :
Publisher : Springer Science & Business Media
ISBN 13 : 3642691927
Total Pages : 464 pages
Book Rating : 4.6/5 (426 download)

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Book Synopsis VLSI Technology by : Yasuo Tarui

Download or read book VLSI Technology written by Yasuo Tarui and published by Springer Science & Business Media. This book was released on 2013-03-12 with total page 464 pages. Available in PDF, EPUB and Kindle. Book excerpt: The origin of the development of integrated circuits up to VLSI is found in the invention of the transistor, which made it possible to achieve the ac tion of a vacuum tube in a semiconducting solid. The structure of the tran sistor can be constructed by a manufacturing technique such as the intro duction of a small amount of an impurity into a semiconductor and, in ad dition, most transistor characteristics can be improved by a reduction of dimensions. These are all important factors in the development. Actually, the microfabrication of the integrated circuit can be used for two purposes, namely to increase the integration density and to obtain an improved perfor mance, e. g. a high speed. When one of these two aims is pursued, the result generally satisfies both. We use the Engl ish translation "very large scale integration (VLSIl" for "Cho LSI" in Japanese. In the United States of America, however, similar technology is bei ng developed under the name "very hi gh speed integrated circuits (VHSIl". This also originated from the nature of the integrated circuit which satisfies both purposes. Fortunately, the Japanese word "Cho LSI" has a wider meani ng than VLSI, so it can be used ina broader area. However, VLSI has a larger industrial effect than VHSI.

Program Management for System on Chip Platforms

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Publisher : First Books
ISBN 13 : 1592994830
Total Pages : 314 pages
Book Rating : 4.5/5 (929 download)

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Book Synopsis Program Management for System on Chip Platforms by : Whitson G. Waldo

Download or read book Program Management for System on Chip Platforms written by Whitson G. Waldo and published by First Books. This book was released on 2010-09 with total page 314 pages. Available in PDF, EPUB and Kindle. Book excerpt: A Fully Integrated Presentation of New Hardware and Software Product Introductions Using Program Management Methodologies for System on Chip Platforms If you're an executive, manager, or engineer in the semiconductor, software, or systems industries, this book provides conceptual views ranging from the design of integrated circuits or systems on a chip, through fabrication, to integration of chips onto boards, and through development of enablement and runtime software for system and platform deliveries. Special features included this book are: - Program management methodologies - General management fundamentals - An overview of leadership principles - Basic discrete device technology - Internal structure and operation of some common logic gates - Basic integrated circuit design concepts, building blocks, and flow - Chip packaging technologies - Details of the fabrication process for integrated circuits - Printed circuit board design, manufacture, and test - Software design, development, and test - Integrated circuit test, silicon validation, and device qualification - Program management applications bringing it all together The book explores interactions and dependencies of technologies that impact systems and platforms. This is a valuable resource to learn these technologies or to use as a reference.

Resolution Enhancement Techniques in Optical Lithography

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Publisher : SPIE Press
ISBN 13 : 9780819439956
Total Pages : 238 pages
Book Rating : 4.4/5 (399 download)

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Book Synopsis Resolution Enhancement Techniques in Optical Lithography by : Alfred Kwok-Kit Wong

Download or read book Resolution Enhancement Techniques in Optical Lithography written by Alfred Kwok-Kit Wong and published by SPIE Press. This book was released on 2001 with total page 238 pages. Available in PDF, EPUB and Kindle. Book excerpt: Ever-smaller IC devices are pushing the optical lithography envelope, increasing the importance of resolution enhancement techniques. This tutorial encompasses two decades of research. It discusses theoretical and practical aspects of commonly used techniques, including optical imaging and resolution, modified illumination, optical proximity correction, alternating and attenuating phase-shifting masks, selecting RETs, and second-generation RETs. Useful for students and practicing lithographers

Direct-Write Technologies for Rapid Prototyping Applications

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Publisher : Elsevier
ISBN 13 : 0080504647
Total Pages : 754 pages
Book Rating : 4.0/5 (85 download)

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Book Synopsis Direct-Write Technologies for Rapid Prototyping Applications by : Alberto Pique

Download or read book Direct-Write Technologies for Rapid Prototyping Applications written by Alberto Pique and published by Elsevier. This book was released on 2001-11-20 with total page 754 pages. Available in PDF, EPUB and Kindle. Book excerpt: Direct-Write Technologies covers applications, materials, and the techniques in using direct-write technologies. This book provides an overview of the different direct write techniques currently available, as well as a comparison between the strengths and special attributes for each of the techniques. The techniques described open the door for building prototypes and testing materials. The book also provides an overview of the state-of-the-art technology involved in this field. Basic academic researchers and industrial development engineers who pattern thin film materials will want to have this text on their shelves as a resource for specific applications. Others in this or related fields will want the book to read the introductory material summarizing isuses common to all approaches, in order to compare and contrast different techniques. Everyday applications include electronic components and sensors, especially chemical and biosensors. There is a wide range of research and development problems requiring state-of-the-art direct write tools. This book will appeal to basic researchers and development engineers in university engineering departments and at industrial and national research laboratories. This text should appeal equally well in the United States, Asia, and Europe. Both basic academic researchers and industrial development engineers who pattern thin film materials will want to have this text on their shelves as a resource for specific applications. An overview of the different direct write techniques currently available A comparison between the strengths and special attributes for each of the techniques An overview of the state-of-the-art technology involved in this field

Handbook of Microlithography, Micromachining, and Microfabrication

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Author :
Publisher : INSPEC, Incorporated
ISBN 13 : 9780852969106
Total Pages : 0 pages
Book Rating : 4.9/5 (691 download)

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Book Synopsis Handbook of Microlithography, Micromachining, and Microfabrication by : P. Rai-Choudhury

Download or read book Handbook of Microlithography, Micromachining, and Microfabrication written by P. Rai-Choudhury and published by INSPEC, Incorporated. This book was released on 1997 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Handbook of Hydrothermal Technology

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Author :
Publisher : Cambridge University Press
ISBN 13 : 008094681X
Total Pages : 898 pages
Book Rating : 4.0/5 (89 download)

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Book Synopsis Handbook of Hydrothermal Technology by : K. Byrappa

Download or read book Handbook of Hydrothermal Technology written by K. Byrappa and published by Cambridge University Press. This book was released on 2008-12-10 with total page 898 pages. Available in PDF, EPUB and Kindle. Book excerpt: Quartz, zeolites, gemstones, perovskite type oxides, ferrite, carbon allotropes, complex coordinated compounds and many moreùall products now being produced using hydrothermal technology. Handbook of Hydrothermal Technology brings together the latest techniques in this rapidly advancing field in one exceptionally useful, long-needed volume. The handbook provides a single source for understanding how aqueous solvents or mineralizers work under temperature and pressure to dissolve and recrystallize normally insoluble materials, and decompose or recycle any waste material. The result, as the authors show in the book, is technologically the most efficient method in crystal growth, materials processing, and waste treatment. The book gives scientists and technologists an overview of the entire subject including: ò Evolution of the technology from geology to widespread industrial use. ò Descriptions of equipment used in the process and how it works. ò Problems involved with the growth of crystals, processing of technological materials, environmental and safety issues. ò Analysis of the direction of today's technology. In addition, readers get a close look at the hydrothermal synthesis of zeolites, fluorides, sulfides, tungstates, and molybdates, as well as native elements and simple oxides. Delving into the commercial production of various types, the authors clarify the effects of temperature, pressure, solvents, and various other chemical components on the hydrothermal processes.

Nanolithography

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Author :
Publisher : Woodhead Publishing
ISBN 13 : 0857098756
Total Pages : 599 pages
Book Rating : 4.8/5 (57 download)

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Book Synopsis Nanolithography by : M Feldman

Download or read book Nanolithography written by M Feldman and published by Woodhead Publishing. This book was released on 2014-02-13 with total page 599 pages. Available in PDF, EPUB and Kindle. Book excerpt: Integrated circuits, and devices fabricated using the techniques developed for integrated circuits, have steadily gotten smaller, more complex, and more powerful. The rate of shrinking is astonishing – some components are now just a few dozen atoms wide. This book attempts to answer the questions, “What comes next? and “How do we get there? Nanolithography outlines the present state of the art in lithographic techniques, including optical projection in both deep and extreme ultraviolet, electron and ion beams, and imprinting. Special attention is paid to related issues, such as the resists used in lithography, the masks (or lack thereof), the metrology needed for nano-features, modeling, and the limitations caused by feature edge roughness. In addition emerging technologies are described, including the directed assembly of wafer features, nanostructures and devices, nano-photonics, and nano-fluidics. This book is intended as a guide to the researcher new to this field, reading related journals or facing the complexities of a technical conference. Its goal is to give enough background information to enable such a researcher to understand, and appreciate, new developments in nanolithography, and to go on to make advances of his/her own. Outlines the current state of the art in alternative nanolithography technologies in order to cope with the future reduction in size of semiconductor chips to nanoscale dimensions Covers lithographic techniques, including optical projection, extreme ultraviolet (EUV), nanoimprint, electron beam and ion beam lithography Describes the emerging applications of nanolithography in nanoelectronics, nanophotonics and microfluidics

Handbook of Microlithography, Micromachining, and Microfabrication

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Author :
Publisher :
ISBN 13 :
Total Pages : 692 pages
Book Rating : 4.:/5 (874 download)

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Book Synopsis Handbook of Microlithography, Micromachining, and Microfabrication by : P. Rai-Choudhury

Download or read book Handbook of Microlithography, Micromachining, and Microfabrication written by P. Rai-Choudhury and published by . This book was released on 1997 with total page 692 pages. Available in PDF, EPUB and Kindle. Book excerpt: