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Author : Todd M. Bauer
Publisher :
ISBN 13 :
Total Pages : 430 pages
Book Rating : 4.:/5 (497 download)
Download or read book Fluorocarbon Radical Density Measurements in an Inductively Coupled Plasma Reactor written by Todd M. Bauer and published by . This book was released on 2001 with total page 430 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Xiaomei Wu
Publisher :
ISBN 13 :
Total Pages : 354 pages
Book Rating : 4.:/5 (557 download)
Download or read book Study of Rotational Temperature and Loss Mechanisms of Fluorocarbon Radicals in an Inductively Coupled Plasma Reactor written by Xiaomei Wu and published by . This book was released on 2003 with total page 354 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author :
Publisher :
ISBN 13 :
Total Pages : 558 pages
Book Rating : 4.X/5 (6 download)
Download or read book JJAP written by and published by . This book was released on 2003 with total page 558 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author :
Publisher :
ISBN 13 :
Total Pages : 934 pages
Book Rating : 4.3/5 (91 download)
Download or read book Japanese Journal of Applied Physics written by and published by . This book was released on 2002 with total page 934 pages. Available in PDF, EPUB and Kindle. Book excerpt:
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Publisher : Elsevier
ISBN 13 : 0080526055
Total Pages : 329 pages
Book Rating : 4.0/5 (85 download)
Download or read book Advances in Atomic, Molecular, and Optical Physics written by and published by Elsevier. This book was released on 2000-10-11 with total page 329 pages. Available in PDF, EPUB and Kindle. Book excerpt: This series, established in 1965, is concerned with recent developments in the general area of atomic, molecular, and optical physics. The field is in a state of rapid growth, as new experimental and theoretical techniques are used on many old and new problems. Topics covered also include related applied areas, such asatmospheric science, astrophysics, surface physics, and laser physics. Articles are written by distinguished experts who are active in their research fields. The articles contain both relevant review material as well as detailed descriptions of important recent developments.
Author : J. Leon Shohet
Publisher : CRC Press
ISBN 13 : 1351204939
Total Pages : 3082 pages
Book Rating : 4.3/5 (512 download)
Download or read book Encyclopedia of Plasma Technology - Two Volume Set written by J. Leon Shohet and published by CRC Press. This book was released on 2016-12-12 with total page 3082 pages. Available in PDF, EPUB and Kindle. Book excerpt: Technical plasmas have a wide range of industrial applications. The Encyclopedia of Plasma Technology covers all aspects of plasma technology from the fundamentals to a range of applications across a large number of industries and disciplines. Topics covered include nanotechnology, solar cell technology, biomedical and clinical applications, electronic materials, sustainability, and clean technologies. The book bridges materials science, industrial chemistry, physics, and engineering, making it a must have for researchers in industry and academia, as well as those working on application-oriented plasma technologies. Also Available Online This Taylor & Francis encyclopedia is also available through online subscription, offering a variety of extra benefits for researchers, students, and librarians, including: Citation tracking and alerts Active reference linking Saved searches and marked lists HTML and PDF format options Contact Taylor and Francis for more information or to inquire about subscription options and print/online combination packages. US: (Tel) 1.888.318.2367; (E-mail) [email protected] International: (Tel) +44 (0) 20 7017 6062; (E-mail) [email protected]
Author : Riccardo d'Agostino
Publisher : John Wiley & Sons
ISBN 13 : 3527605576
Total Pages : 545 pages
Book Rating : 4.5/5 (276 download)
Download or read book Plasma Processes and Polymers written by Riccardo d'Agostino and published by John Wiley & Sons. This book was released on 2006-03-06 with total page 545 pages. Available in PDF, EPUB and Kindle. Book excerpt: This volume compiles essential contributions to the most innovative fields of Plasma Processes and Polymers. High-quality contributions cover the fields of plasma deposition, plasma treatment of polymers and other organic compounds, plasma processes under partial vacuum and at atmospheric pressure, biomedical, textile, automotive, and optical applications as well as surface treatment of bulk materials, clusters, particles and powders. This unique collection of refereed papers is based on the best contributions presented at the 16th International Symposium on Plasma Chemistry in Taormina, Italy (ISPC-16, June 2003). A high class reference of relevance to a large audience in plasma community as well as in the area of its industrial applications.
Author : Sanket Prakash Sant
Publisher :
ISBN 13 :
Total Pages : 374 pages
Book Rating : 4.:/5 (81 download)
Download or read book Understanding the Complex Chemistry of Fluorocarbon Plasmas in a Long Residence Time ICP Reactor written by Sanket Prakash Sant and published by . This book was released on 2006 with total page 374 pages. Available in PDF, EPUB and Kindle. Book excerpt: The motivation behind this research is to understand the influence of plasma surface interactions on the gas phase chemistry and surface kinetics of polymerizing fluorocarbon plasmas. In order to achieve this, a modified GEC reference ICP reactor is used with in situ diagnostic tools like multipass Fourier transformed infrared (FTIR) spectroscopy, optical emission spectroscopy (OES) used in an actinometry mode, ellipsometry and self bias probe. A long residence time of 5.2 s was employed to maximize plasma surface interactions and electron impact collisions. This research is divided into three interdependent sections. In the first section a global gas phase model illustrating the gain and loss mechanisms of different fluorocarbon radicals and neutrals qualitatively and quantitatively as a function of source to chuck gap and feed gas stoichiometry has been developed. No bias is applied in that study. An upper bound translational temperature model is also developed. In the second section, a global model describing deposition and etch mechanisms has been developed which is further used to understand surface kinetics on SiO 2 substrate as a function of ion energy, ion flux and feed gas stoichiometry. Influence of surface kinetics on gas phase chemistry of different neutrals and radicals is shown at two different bias powers (0 and 200 W). In the third section, upper bound sticking coefficients for different radicals are developed on the surface. Collectively, this research is an effort to understand the interdependence between gas phase chemistry and surface kinetics in a long residence time fluorocarbon inductively coupled plasma.
Author :
Publisher :
ISBN 13 :
Total Pages : 562 pages
Book Rating : 4.3/5 (91 download)
Download or read book JJAP Letters written by and published by . This book was released on 1994 with total page 562 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Electrochemical Society. Meeting
Publisher :
ISBN 13 :
Total Pages : 1674 pages
Book Rating : 4.:/5 (318 download)
Download or read book Meeting Abstracts written by Electrochemical Society. Meeting and published by . This book was released on 1997 with total page 1674 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author :
Publisher :
ISBN 13 :
Total Pages : 470 pages
Book Rating : 4.0/5 ( download)
Download or read book 29th Plasmadynamics and Lasers Conference written by and published by . This book was released on 1998 with total page 470 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author :
Publisher :
ISBN 13 :
Total Pages : 896 pages
Book Rating : 4.F/5 ( download)
Download or read book Dissertation Abstracts International written by and published by . This book was released on 2002 with total page 896 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Sergey V. Vladimirov
Publisher : Imperial College Press
ISBN 13 : 1860947387
Total Pages : 458 pages
Book Rating : 4.8/5 (69 download)
Download or read book Physics and Applications of Complex Plasmas written by Sergey V. Vladimirov and published by Imperial College Press. This book was released on 2005 with total page 458 pages. Available in PDF, EPUB and Kindle. Book excerpt: At the frontiers of physics and chemistry lies the new and rapidly emerging area of complex plasma systems. The study of complex plasma systems that contain colloid nano/microscopic particles is now actively pursued in a diverse range of scientific fields OCo from plasma and gas discharge physics, to astrophysics, materials science and engineering. This book highlights, in a systematic, insightful, and perceptive way, the fundamental physics and industrial applications of complex plasmas, with emphasis on the conditions relevant to laboratory gas discharges and industrial plasma reactors. It provides a specialized and comprehensive description of the most recent theoretical, experimental, and modeling efforts to understand the unique properties of complex plasma systems involving the stability, dynamics, and self-organization of colloid particles and their associations. Special attention is focused on the physical understanding of up-to-date developments in major technological applications of micron and nano-sized particles. Each chapter is presented in a concise and comprehensive manner, with a categorized overview of the underlying physics followed by an in-depth description. The book will appeal to scientists and researchers as well as undergraduate and graduate students wishing to explore the flourishing interdisciplinary field of complex plasma systems."
Author :
Publisher :
ISBN 13 :
Total Pages : 618 pages
Book Rating : 4.3/5 (91 download)
Download or read book Diagnostic Techniques for Semiconductor Materials Processing written by and published by . This book was released on 1996 with total page 618 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Stella W. Pang
Publisher :
ISBN 13 :
Total Pages : 616 pages
Book Rating : 4.:/5 (318 download)
Download or read book Diagnostic Techniques for Semiconductor Materials Processing: Volume 406 written by Stella W. Pang and published by . This book was released on 1996-03-18 with total page 616 pages. Available in PDF, EPUB and Kindle. Book excerpt: The fabrication of Si- and compound semiconductor-based devices involves a number of steps ranging from material growth to pattern definition by lithography, and ultimately, pattern transfer by etching/deposition. The key to device manufacturing, however, is reproducibility, low cost and high yield. Diagnostic techniques allow correlation between processing and actual device performance to be established. Researchers from universities, industry and government come together in this book to examine the advances in diagnostic techniques that provide critical information on structural, optical and electrical properties of semiconductor devices, as well as monitoring techniques for equipment/processes for control and feedback. The overriding goal is for rapid, accurate materials characterization, both in situ and ex situ. Topics include: in situ diagnostics; proximal probe microscopies; optical probes of devices and device properties; spectroscopic ellipsometry/structural diagnostics; and material analysis - X-ray techniques, strain measurements and passivation.
Author : Ljupco Hadzievski
Publisher : American Institute of Physics
ISBN 13 :
Total Pages : 544 pages
Book Rating : 4.3/5 (91 download)
Download or read book The Physics of Ionized Gases written by Ljupco Hadzievski and published by American Institute of Physics. This book was released on 2004-12-14 with total page 544 pages. Available in PDF, EPUB and Kindle. Book excerpt: The very nature of the Symposium on the Physics of Ionized Gases (SPIG) is to have four different fields that converge into one multidisciplinary field of the physics of ionized gases: gas phase and binary collisions, collisions with surfaces, low temperature plasmas, and collective phenomena. These four fields have strong interactions in numerous applications. However, due to the development of specialized international conferences, it has become increasingly rare that such a wide range of topics is covered at a single conference. As the four fields often overlap and merge in numerous fundamental studies and more importantly applications, SPIG serves as a venue for exchanging ideas in the four related fields. This volume contains the invited lectures, topical invited lectures, and progress reports presented at the 22nd Summer School and International Symposium on the Physics of Ionized Gases - SPIG 2004. The papers were peer reviewed by the scientific committee.
Author :
Publisher :
ISBN 13 :
Total Pages : 888 pages
Book Rating : 4.5/5 (918 download)
Download or read book Physics written by and published by . This book was released on 2001 with total page 888 pages. Available in PDF, EPUB and Kindle. Book excerpt:
