Fabrication Of High Aspect Ratio Silicon Nanostructure Arrays By Metal Assisted Etching

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Micro- and Nano-Fabrication by Metal Assisted Chemical Etching

Author : Lucia Romano
Publisher : MDPI
ISBN 13 : 303943845X
Total Pages : 106 pages
Book Rating : 4.0/5 (394 download)

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Book Synopsis Micro- and Nano-Fabrication by Metal Assisted Chemical Etching by : Lucia Romano

Download or read book Micro- and Nano-Fabrication by Metal Assisted Chemical Etching written by Lucia Romano and published by MDPI. This book was released on 2021-01-13 with total page 106 pages. Available in PDF, EPUB and Kindle. Book excerpt: Metal-assisted chemical etching (MacEtch) has recently emerged as a new etching technique capable of fabricating high aspect ratio nano- and microstructures in a few semiconductors substrates—Si, Ge, poly-Si, GaAs, and SiC—and using different catalysts—Ag, Au, Pt, Pd, Cu, Ni, and Rh. Several shapes have been demonstrated with a high anisotropy and feature size in the nanoscale—nanoporous films, nanowires, 3D objects, and trenches, which are useful components of photonic devices, microfluidic devices, bio-medical devices, batteries, Vias, MEMS, X-ray optics, etc. With no limitations of large-areas and low-cost processing, MacEtch can open up new opportunities for several applications where high precision nano- and microfabrication is required. This can make semiconductor manufacturing more accessible to researchers in various fields, and accelerate innovation in electronics, bio-medical engineering, energy, and photonics. Accordingly, this Special Issue seeks to showcase research papers, short communications, and review articles that focus on novel methodological developments in MacEtch, and its use for various applications.

Handbook of Porous Silicon

Author : Leigh Canham
Publisher : Springer
ISBN 13 : 9783319045085
Total Pages : 1000 pages
Book Rating : 4.0/5 (45 download)

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Book Synopsis Handbook of Porous Silicon by : Leigh Canham

Download or read book Handbook of Porous Silicon written by Leigh Canham and published by Springer. This book was released on 2021-01-14 with total page 1000 pages. Available in PDF, EPUB and Kindle. Book excerpt: The Handbook of Porous Silicon brings together the expertise of a large, international team of almost 100 academic researchers, engineers, and product developers from industry across electronics, medicine, nutrition and consumer care to summarize the field in its entirity with 150 chapters and 5000 references. The volume presents 5 parts which cover fabrication techniques, material properties, characterization techniques, processing and applications. Much attention was given in the the past to its luminescent properties, but increasingly it is the biodegradability, mechanical, thermal and sensing capabilities that are attracting attention. The volume is divided into focussed data reviews with, wherever possible, quantitative rather than qualitative descriptions of both properties and performance. The book is targeted at undergraduates, postgraduates, and experienced researchers.

Photovoltaic Manufacturing

Author : Monika Freunek Muller
Publisher : John Wiley & Sons
ISBN 13 : 1119242010
Total Pages : 154 pages
Book Rating : 4.1/5 (192 download)

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Book Synopsis Photovoltaic Manufacturing by : Monika Freunek Muller

Download or read book Photovoltaic Manufacturing written by Monika Freunek Muller and published by John Wiley & Sons. This book was released on 2021-08-16 with total page 154 pages. Available in PDF, EPUB and Kindle. Book excerpt: PHOTOVOLTAIC MANUFACTURING This book covers the state-of-the-art and the fundamentals of silicon wafer solar cells manufacturing, written by world-class researchers and experts in the field. High quality and economic photovoltaic manufacturing is central to realizing reliable photovoltaic power supplies at reasonable cost. While photovoltaic silicon wafer manufacturing is at a mature, industrial and mass production stage, knowing and applying the fundamentals in solar manufacturing is essential to anyone working in this field. This is the first book on photovoltaic wet processing for silicon wafers, both mono- and multi-crystalline. The comprehensive book provides information for process, equipment, and device engineers and researchers in the solar manufacturing field. The authors of the chapters are world-class researchers and experts in their field of endeavor. The fundamentals of wet processing chemistry are introduced, covering etching, texturing, cleaning and metrology. New developments, innovative approaches, as well as current challenges are presented. Benefits of reading the book include: The book includes a detailed discussion of the important new development of black silicon, which is considered to have started a new wave in photovoltaics and become the new standard while substantially lowering the cost. Photovoltaics are central to any country’s “New Green Deal” and this book shows how to manufacture competitively. The book’s central goal is to show photovoltaic manufacturing can be done with enhanced quality and lowering costs. Audience Engineers, chemists, physicists, process technologists, in both academia and industry, that work with photovoltaics and their manufacture.

Capacitive Silicon Resonators

Author : Nguyen Van Toan
Publisher : CRC Press
ISBN 13 : 0429560990
Total Pages : 159 pages
Book Rating : 4.4/5 (295 download)

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Book Synopsis Capacitive Silicon Resonators by : Nguyen Van Toan

Download or read book Capacitive Silicon Resonators written by Nguyen Van Toan and published by CRC Press. This book was released on 2019-07-10 with total page 159 pages. Available in PDF, EPUB and Kindle. Book excerpt: Microfabricated resonators play an essential role in a variety of applications, including mass sensing, timing reference applications, and filtering applications. Many transduction mechanisms including piezoelectric, piezoresistive, and capacitive mechanisms, have been studied to induce and detect the motion of resonators. This book is meant to introduce and suggest several technological approaches together with design considerations for performance enhancement of capacitive silicon resonators, and will be useful for those working in field of micro and nanotechnology. Features Introduces and suggests several technological approaches together with design considerations for performance enhancement of capacitive silicon resonators Provides information on the various fabrication technologies and design considerations that can be employed to improve the performance capacitive silicon resonator which is one of the promising options to replace the quartz crystal resonator. Discusses several technological approaches including hermetic packaging based on the LTCC substrate, deep reactive ion etching, neutral beam etching technology, and metal-assisted chemical etching, as well as design considerations for mechanically coupled, selective vibration of high-order mode, movable electrode structures, and piezoresistive heat engines were investigated to achieve small motional resistance, low insertion loss, and high quality factor. Focusses on a capacitive sensing method based on the measurement of the change in capacitance between a sensing electrode and the resonant body. Reviews recent progress in performance enhancement methods for capacitive silicon resonator, which are mainly based on the works of the authors.

LIGA and its Applications

Author : Volker Saile
Publisher : John Wiley & Sons
ISBN 13 : 3527316981
Total Pages : 491 pages
Book Rating : 4.5/5 (273 download)

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Book Synopsis LIGA and its Applications by : Volker Saile

Download or read book LIGA and its Applications written by Volker Saile and published by John Wiley & Sons. This book was released on 2009-01-07 with total page 491 pages. Available in PDF, EPUB and Kindle. Book excerpt: Covering technological aspects as well as the suitability and applicability of various kinds of uses, this handbook shows optimization strategies, techniques and assembly pathways to achieve the combination of complex, even three-dimensional structures with simple manufacturing steps. The authors provide information on markets, commercialization opportunities and aspects of mass or large-scale production as well as design tools, experimental techniques, novel materials, and ideas for future improvements. Not only do they weigh up cost versus quantity, they also consider CMOS and LIGA strategies. Of interest to physicists, electronics engineers, materials scientists, institutional and industrial libraries as well as graduate students of the relevant disciplines.

Nanofabrication

Author : Zheng Cui
Publisher : Springer
ISBN 13 : 3319393618
Total Pages : 442 pages
Book Rating : 4.3/5 (193 download)

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Book Synopsis Nanofabrication by : Zheng Cui

Download or read book Nanofabrication written by Zheng Cui and published by Springer. This book was released on 2016-08-10 with total page 442 pages. Available in PDF, EPUB and Kindle. Book excerpt: This second edition of Nanofabrication is one of the most comprehensive introductions on nanofabrication technologies and processes. A practical guide and reference, this book introduces readers to all of the developed technologies that are capable of making structures below 100nm. The principle of each technology is introduced and illustrated with minimum mathematics involved. Also analyzed are the capabilities of each technology in making sub-100nm structures, and the limits of preventing a technology from going further down the dimensional scale. This book provides readers with a toolkit that will help with any of their nanofabrication challenges.

Nanowires for Energy Applications

Author :
Publisher : Academic Press
ISBN 13 : 0128151404
Total Pages : 550 pages
Book Rating : 4.1/5 (281 download)

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Book Synopsis Nanowires for Energy Applications by :

Download or read book Nanowires for Energy Applications written by and published by Academic Press. This book was released on 2018-06-05 with total page 550 pages. Available in PDF, EPUB and Kindle. Book excerpt: Nanowires for Energy Applications, Volume 98, covers the latest breakthrough research and exciting developments in nanowires for energy applications. This volume focuses on various aspects of Nanowires for Energy Applications, presenting interesting sections on Electrospun semiconductor metal oxide nanowires for energy and sensing applications, Integration into flexible and functional materials, Nanowire Based Bulk Heterojunction Solar Cells, Semiconductor Nanowires for Thermoelectric Generation, Energy Scavenging: Mechanical, Thermoelectric, and Nanowire synthesis/growth methods, and more. - Features the latest breakthroughs and research and development in nanowires for energy applications - Covers a broad range of topics, including a wide variety of materials and many important aspects of solar fuels - Includes in-depth discussions on materials design, growth and synthesis, engineering, characterization and photoelectrochemical studies

Nanomaterials for Thermoelectric Devices

Author : Yong X. Gan
Publisher : CRC Press
ISBN 13 : 0429949758
Total Pages : 319 pages
Book Rating : 4.4/5 (299 download)

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Book Synopsis Nanomaterials for Thermoelectric Devices by : Yong X. Gan

Download or read book Nanomaterials for Thermoelectric Devices written by Yong X. Gan and published by CRC Press. This book was released on 2018-10-03 with total page 319 pages. Available in PDF, EPUB and Kindle. Book excerpt: With the increaseing global demand for energy, we are facing a huge challenge of energy sustainability. Renewable energy has attracted an immense amount of interest with regard to solving the sustainbility issue. Among the various renewable energy sources, solar heat and waste heat energy has significant advantages due to its availability. Thermoelectric nanomaterials play an indispensable role in heat-to-electricity energy conversion. A high energy conversion efficiency is critical for practical applications of thermoelectric energy conversion systems, and understanding the fundamentals of energy conversion mechanisms is essential. This book details thermoelectric energy conversion nanomaterials and the related manufacturing processes. It also introduces the latest research progress in thermoelectric energy conversion nanomaterials. It is a great reference for readers from both academia and industry.

Silicon Nanomaterials Sourcebook

Author : Klaus D. Sattler
Publisher : CRC Press
ISBN 13 : 1351649590
Total Pages : 1133 pages
Book Rating : 4.3/5 (516 download)

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Book Synopsis Silicon Nanomaterials Sourcebook by : Klaus D. Sattler

Download or read book Silicon Nanomaterials Sourcebook written by Klaus D. Sattler and published by CRC Press. This book was released on 2017-07-28 with total page 1133 pages. Available in PDF, EPUB and Kindle. Book excerpt: This comprehensive tutorial guide to silicon nanomaterials spans from fundamental properties, growth mechanisms, and processing of nanosilicon to electronic device, energy conversion and storage, biomedical, and environmental applications. It also presents core knowledge with basic mathematical equations, tables, and graphs in order to provide the reader with the tools necessary to understand the latest technology developments. From low-dimensional structures, quantum dots, and nanowires to hybrid materials, arrays, networks, and biomedical applications, this Sourcebook is a complete resource for anyone working with this materials: Covers fundamental concepts, properties, methods, and practical applications. Focuses on one important type of silicon nanomaterial in every chapter. Discusses formation, properties, and applications for each material. Written in a tutorial style with basic equations and fundamentals included in an extended introduction. Highlights materials that show exceptional properties as well as strong prospects for future applications. Klaus D. Sattler is professor physics at the University of Hawaii, Honolulu, having earned his PhD at the Swiss Federal Institute of Technology (ETH) in Zurich. He was honored with the Walter Schottky Prize from the German Physical Society, and is the editor of the sister work also published by Taylor & Francis, Carbon Nanomaterials Sourcebook, as well as the acclaimed multi-volume Handbook of Nanophysics.

Low-Dimensional and Nanostructured Materials and Devices

Author : Hilmi Ünlü
Publisher : Springer
ISBN 13 : 3319253409
Total Pages : 688 pages
Book Rating : 4.3/5 (192 download)

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Book Synopsis Low-Dimensional and Nanostructured Materials and Devices by : Hilmi Ünlü

Download or read book Low-Dimensional and Nanostructured Materials and Devices written by Hilmi Ünlü and published by Springer. This book was released on 2015-12-01 with total page 688 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book focuses on the fundamental phenomena at nanoscale. It covers synthesis, properties, characterization and computer modelling of nanomaterials, nanotechnologies, bionanotechnology, involving nanodevices. Further topics are imaging, measuring, modeling and manipulating of low dimensional matter at nanoscale. The topics covered in the book are of vital importance in a wide range of modern and emerging technologies employed or to be employed in most industries, communication, healthcare, energy, conservation , biology, medical science, food, environment, and education, and consequently have great impact on our society.

Women in Microelectronics

Author : Alice Cline Parker
Publisher : Springer Nature
ISBN 13 : 303046377X
Total Pages : 270 pages
Book Rating : 4.0/5 (34 download)

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Book Synopsis Women in Microelectronics by : Alice Cline Parker

Download or read book Women in Microelectronics written by Alice Cline Parker and published by Springer Nature. This book was released on 2020-07-16 with total page 270 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book contains stories of women engineers’ paths through the golden age of microelectronics, stemming from the invention of the transistor in 1947. These stories, like the biographies of Marie Curie and the National Geographic’s stories of Jane Goodall’s research that inspired the authors will inspire and guide readers along unconventional pathways to contributions to microelectronics that we can only begin to imagine. The book explores why and how the women writing here chose their career paths and how they navigated their careers. This topic is of interest to a vast audience, from students to professionals to university advisers to industry CEOs, who can imagine the advantages of a future with a diverse work force. Provides insight into women’s early contributions to the field of microelectronics and celebrates the challenges they overcame; Presents compelling innovations from academia, research, and industry into advances, applications, and the future of microelectronics; Includes a fascinating look into topics such as nanotechnologies, video games, analog electronics, design automation, and neuromorphic circuits.

Recent Advances in Nanofabrication Techniques and Applications

Author : Bo Cui
Publisher : BoD – Books on Demand
ISBN 13 : 953307602X
Total Pages : 630 pages
Book Rating : 4.5/5 (33 download)

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Book Synopsis Recent Advances in Nanofabrication Techniques and Applications by : Bo Cui

Download or read book Recent Advances in Nanofabrication Techniques and Applications written by Bo Cui and published by BoD – Books on Demand. This book was released on 2011-12-02 with total page 630 pages. Available in PDF, EPUB and Kindle. Book excerpt: Nanotechnology has experienced a rapid growth in the past decade, largely owing to the rapid advances in nanofabrication techniques employed to fabricate nano-devices. Nanofabrication can be divided into two categories: "bottom up" approach using chemical synthesis or self assembly, and "top down" approach using nanolithography, thin film deposition and etching techniques. Both topics are covered, though with a focus on the second category. This book contains twenty nine chapters and aims to provide the fundamentals and recent advances of nanofabrication techniques, as well as its device applications. Most chapters focus on in-depth studies of a particular research field, and are thus targeted for researchers, though some chapters focus on the basics of lithographic techniques accessible for upper year undergraduate students. Divided into five parts, this book covers electron beam, focused ion beam, nanoimprint, deep and extreme UV, X-ray, scanning probe, interference, two-photon, and nanosphere lithography.

GaN and Related Materials

Author : Stephen J. Pearton
Publisher : CRC Press
ISBN 13 : 1000448428
Total Pages : 556 pages
Book Rating : 4.0/5 (4 download)

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Book Synopsis GaN and Related Materials by : Stephen J. Pearton

Download or read book GaN and Related Materials written by Stephen J. Pearton and published by CRC Press. This book was released on 2021-10-08 with total page 556 pages. Available in PDF, EPUB and Kindle. Book excerpt: Presents views on current developments in heat and mass transfer research related to the modern development of heat exchangers. Devotes special attention to the different modes of heat and mass transfer mechanisms in relation to the new development of heat exchangers design. Dedicates particular attention to the future needs and demands for further development in heat and mass transfer. GaN and related materials are attracting tremendous interest for their applications to high-density optical data storage, blue/green diode lasers and LEDs, high-temperature electronics for high-power microwave applications, electronics for aerospace and automobiles, and stable passivation films for semiconductors. In addition, there is great scientific interest in the nitrides, because they appear to form the first semiconductor system in which extended defects do not severely affect the optical properties of devices. This series provides a forum for the latest research in this rapidly-changing field, offering readers a basic understanding of new developments in recent research. Series volumes feature a balance between original theoretical and experimental research in basic physics, device physics, novel materials and quantum structures, processing, and systems.

Electrochemically Engineered Nanoporous Materials

Author : Dusan Losic
Publisher : Springer
ISBN 13 : 3319203460
Total Pages : 377 pages
Book Rating : 4.3/5 (192 download)

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Book Synopsis Electrochemically Engineered Nanoporous Materials by : Dusan Losic

Download or read book Electrochemically Engineered Nanoporous Materials written by Dusan Losic and published by Springer. This book was released on 2015-07-18 with total page 377 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book provides in-depth knowledge about the fabrications, structures, properties and applications of three outstanding electrochemically engineered nanoporous materials including porous silicon, nanoporous alumina and nanotubular titania. The book integrates three major themes describing these materials. The first theme is on porous silicon reviewing the methods for preparation by electrochemical etching, properties and methods for surface functionalization relevant for biosensing applications. Biomedical applications of porous silicon are major focus, described in several chapters reviewing recent developments on bioanalysis, emerging capture probes and drug delivery. The second theme on nanoporous alumina starts with describing the concept of self-organized electrochemical process used for synthesis nanopore and nanotube structures of valve metal oxides and reviewing recent development and progress on this field. The following chapters are focused mainly on optical properties and biosensing application of nanoporous alumina providing the reader with the depth of understanding of the structure controlled optical and photonic properties and design of optical biosensing devices using different detection principles such as photoluminescence, surface plasmon resonance, reflective spectrometry, wave guiding, Raman scattering etc. The third theme is focused on nanotubular titania reviewing three key applications including photocatalysis, solar cells and drug delivery. The book represents an important resource for academics, researchers, industry professionals, post-graduate and high-level undergraduate students providing them with both an overview of the current state-of-the-art on these materials and their future developments.

Polymer-Engineered Nanostructures for Advanced Energy Applications

Author : Zhiqun Lin
Publisher : Springer
ISBN 13 : 331957003X
Total Pages : 717 pages
Book Rating : 4.3/5 (195 download)

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Book Synopsis Polymer-Engineered Nanostructures for Advanced Energy Applications by : Zhiqun Lin

Download or read book Polymer-Engineered Nanostructures for Advanced Energy Applications written by Zhiqun Lin and published by Springer. This book was released on 2017-06-16 with total page 717 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book provides a comprehensive overview of engineering nanostructures mediated by functional polymers in combination with optimal synthesis and processing techniques. The focus is on polymer-engineered nanostructures for advanced energy applications. It discusses a variety of polymers that function as precursors, templates, nano-reactors, surfactants, stabilizers, modifiers, dopants, and spacers for directing self-assembly, assisting organization, and templating growth of numerous diverse nanostructures. It also presents a wide range of polymer processing techniques that enable the efficient design and optimal fabrication of nanostructured polymers, inorganics, and organic–inorganic nanocomposites using in-situ hybridization and/or ex-situ recombination methodologies. Combining state-of-the-art knowledge from polymer-guided fabrication of advanced nanostructures and their unique properties, it especially highlights the new, cutting-edge breakthroughs, future horizons, and insights into such nanostructured materials in applications such as photovoltaics, fuel cells, thermoelectrics, piezoelectrics, ferroelectrics, batteries, supercapacitors, photocatalysis, and hydrogen generation and storage. It offers an instructive and approachable guide to polymer-engineered nanostructures for further development of advanced energy materials to meet ever-increasing global energy demands. Interdisciplinary and broad perspectives from internationally respected contributors ensure this book serves as a valuable reference source for scientists, students, and engineers working in polymer science, renewable energy materials, materials engineering, chemistry, physics, surface/interface science, and nanotechnology. It is also suitable as a textbook for universities, institutes, and industrial institutions.

Advances in Porous Semiconductor Research

Author : Thierry Djenizian
Publisher : Frontiers Media SA
ISBN 13 : 2889636496
Total Pages : 183 pages
Book Rating : 4.8/5 (896 download)

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Book Synopsis Advances in Porous Semiconductor Research by : Thierry Djenizian

Download or read book Advances in Porous Semiconductor Research written by Thierry Djenizian and published by Frontiers Media SA. This book was released on 2020-03-30 with total page 183 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Dry Etching Technology for Semiconductors

Author : Kazuo Nojiri
Publisher : Springer
ISBN 13 : 3319102958
Total Pages : 126 pages
Book Rating : 4.3/5 (191 download)

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Book Synopsis Dry Etching Technology for Semiconductors by : Kazuo Nojiri

Download or read book Dry Etching Technology for Semiconductors written by Kazuo Nojiri and published by Springer. This book was released on 2014-10-25 with total page 126 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book is a must-have reference to dry etching technology for semiconductors, which will enable engineers to develop new etching processes for further miniaturization and integration of semiconductor integrated circuits. The author describes the device manufacturing flow, and explains in which part of the flow dry etching is actually used. The content is designed as a practical guide for engineers working at chip makers, equipment suppliers and materials suppliers, and university students studying plasma, focusing on the topics they need most, such as detailed etching processes for each material (Si, SiO2, Metal etc) used in semiconductor devices, etching equipment used in manufacturing fabs, explanation of why a particular plasma source and gas chemistry are used for the etching of each material, and how to develop etching processes. The latest, key technologies are also described, such as 3D IC Etching, Dual Damascene Etching, Low-k Etching, Hi-k/Metal Gate Etching, FinFET Etching, Double Patterning etc.