Fabrication and Design of Resonant Microdevices

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Author :
Publisher : William Andrew
ISBN 13 : 9780815515777
Total Pages : 181 pages
Book Rating : 4.5/5 (157 download)

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Book Synopsis Fabrication and Design of Resonant Microdevices by : Behraad Bahreyni

Download or read book Fabrication and Design of Resonant Microdevices written by Behraad Bahreyni and published by William Andrew. This book was released on 2008 with total page 181 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book discusses the main issues on fabrication, design, and applications of micromachined resonant devices as well as techniques that are commonly used for processing the output signal of resonant micro-electro-mechanical systems (MEMS). After a brief introduction to the concepts of resonance, an overview of the fabrication techniques for micromachined devices will be given. This section is a necessary part of the book as the options during the design of a resonant device strongly depend on how the device is going to be fabricated. Resonant devices are generally two port systems: an input port to excite the structure and cause the resonance and an output port to monitor the behavior of the device. The next two chapters of the book are dedicated to excitation and signal detection methods. An analytic model of the device behavior is one of the most valuable design tools. A chapter is dedicated to this important issue followed by numerical simulation techniques. The book also covers the issues of damping and noise for resonant MEMS. These two topics are of particular importance for high-Q devices. Electronic interfacing and packaging issues are also discussed in separate chapters. The book concludes by giving numerous examples of resonant MEMS from the academia and industry with a brief analysis of them using the material that was presented in the earlier chapters. * Offers numerous academic and industrial examples of resonant MEMS * Provides an analytic model of device behavior * Explains two-port systems in detail * Devotes ample space to excitation and signal detection methods * Covers issues of damping and noise for resonant MEMS, two topics of particular importance for high-Q devices

Fabrication and Design of Resonant Microdevices

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Author :
Publisher : William Andrew
ISBN 13 : 0815519710
Total Pages : 234 pages
Book Rating : 4.8/5 (155 download)

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Book Synopsis Fabrication and Design of Resonant Microdevices by : Behraad Bahreyni

Download or read book Fabrication and Design of Resonant Microdevices written by Behraad Bahreyni and published by William Andrew. This book was released on 2008-10-20 with total page 234 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book discusses the main issues of fabrication and design, and applications of micromachined resonant devices, including techniques commonly used for processing the output signal of resonant micro-electro-mechanical systems (MEMS). Concepts of resonance are introduced, with an overview of fabrication techniques for micromachined devices – important to understand as design options will depend on how the device will be fabricated. Also explained: excitation and signal detection methods; an analytic model of device behavior (a valuable design tool); numerical simulation techniques; issues of damping and noise for resonant MEMS; electronic interfacing; packaging issues; and numerous examples of resonant MEMS from academia and industry. Offers numerous academic and industrial examples of resonant MEMS Provides an analytic model of device behaviour Explains two-port systems in detail Devotes ample space to excitation and signal detection methods Covers issues of damping and noise for resonant MEMS, two topics of particular importance for high-Q devices

Micromachined Circuits and Devices

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Author :
Publisher : Springer Nature
ISBN 13 : 9811694435
Total Pages : 386 pages
Book Rating : 4.8/5 (116 download)

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Book Synopsis Micromachined Circuits and Devices by : Shiban Kishen Koul

Download or read book Micromachined Circuits and Devices written by Shiban Kishen Koul and published by Springer Nature. This book was released on 2022-02-07 with total page 386 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book presents the design of different switching and resonant devices using the present state-of-the-art radio frequency (RF) micromachining (MEMS) technology. Different topologies of MEMS switches have been discussed considering optimum performances over microwave to millimeter wave frequency range. Wide varieties of micromachined switching networks starting from single-pole-double-throw (SPDT) to single-pole-fourteen-throw (SP14T) are discussed utilizing vertical and lateral actuation movements of the switch. Different transduction mechanisms of micromachined resonators are highlighted that includes capacitive, piezoelectric, and piezoresistive types. The book provides major design guidelines for the development of MEMS-based digital phase shifters, tunable filters, and antennas with extensive measurement data. Apart from the radio frequency (RF) requirements, an extensive guideline is given for the improvement of the reliability of micromachined switches and digital phase shifters where multiple switches are operating simultaneously. It takes multiple iterations and extensive characterizations to conclude with a reliable MEMS digital phase shifter, and these aspects are given one of the prime attentions in this book. Detailed performance analysis of metamaterial inspired MEMS switches is then discussed for application in millimeter wave frequency bands up to about 170 GHz. The book concludes with future research activities of RF MEMS technology and its potential in space, defense, sensors, and biomedical applications.

Integrated Microsystems

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Author :
Publisher : CRC Press
ISBN 13 : 1351833561
Total Pages : 762 pages
Book Rating : 4.3/5 (518 download)

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Book Synopsis Integrated Microsystems by : Krzysztof Iniewski

Download or read book Integrated Microsystems written by Krzysztof Iniewski and published by CRC Press. This book was released on 2017-12-19 with total page 762 pages. Available in PDF, EPUB and Kindle. Book excerpt: As rapid technological developments occur in electronics, photonics, mechanics, chemistry, and biology, the demand for portable, lightweight integrated microsystems is relentless. These devices are getting exponentially smaller, increasingly used in everything from video games, hearing aids, and pacemakers to more intricate biomedical engineering and military applications. Edited by Kris Iniewski, a revolutionary in the field of advanced semiconductor materials, Integrated Microsystems: Electronics, Photonics, and Biotechnology focuses on techniques for optimized design and fabrication of these intelligent miniaturized devices and systems. Composed of contributions from experts in academia and industry around the world, this reference covers processes compatible with CMOS integrated circuits, which combine computation, communications, sensing, and actuation capabilities. Light on math and physics, with a greater emphasis on microsystem design and configuration and electrical engineering, this book is organized in three sections—Microelectronics and Biosystems, Photonics and Imaging, and Biotechnology and MEMs. It addresses key topics, including physical and chemical sensing, imaging, smart actuation, and data fusion and management. Using tables, figures, and equations to help illustrate concepts, contributors examine and explain the potential of emerging applications for areas including biology, nanotechnology, micro-electromechanical systems (MEMS), microfluidics, and photonics.

Micromixers

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Author :
Publisher : William Andrew
ISBN 13 : 0815518366
Total Pages : 329 pages
Book Rating : 4.8/5 (155 download)

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Book Synopsis Micromixers by : Nam-Trung Nguyen

Download or read book Micromixers written by Nam-Trung Nguyen and published by William Andrew. This book was released on 2008-05-07 with total page 329 pages. Available in PDF, EPUB and Kindle. Book excerpt: A wide range of applications in chemistry and biochemistry are driving the rapid development of microfluidics. This book focuses its attention on an important subtopic of microfluidics; mixing in microscale. It provides the fundamentals of transport effects in microscale including molecular diffusion, convection, and chaotic advection.The science and technology of microfluidics cover a wide spectrum and the science of mixing in microscale has evolved from reports on fabricated devices to an extensive collection of established knowledge. The focal point of Micromixers: Fundamentals, Design, and Fabrication is the current applicable knowledge and practical issues in designing, fabricating, and characterizing micromixers in the chemical and biochemical industries. Based on scaling law, it recommends practical micromixer designs utilizing the advantages of the microscale effects. The book is intended for practicing engineers and for upper-level undergraduate and graduate level students. Provides the basic terminology and fundamental physics of transport effects used for designing micromixers Highlights the challenges and advantages of miniaturization in mixing Outlines currently available microtechnologies for fabricating micromixers Discusses current applications including lab-on-a-chip for chemical/biochemical analysis, and chemical production Defines concepts such as electrohydrodynamic, dielectrophoretic, electrokinetic, magneto hydrodynamic, acoustic and thermal effects and their implementation in micromixers

Magnetic Sensors

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Author :
Publisher : BoD – Books on Demand
ISBN 13 : 953510232X
Total Pages : 164 pages
Book Rating : 4.5/5 (351 download)

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Book Synopsis Magnetic Sensors by : Kevin Kuang

Download or read book Magnetic Sensors written by Kevin Kuang and published by BoD – Books on Demand. This book was released on 2012-03-09 with total page 164 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book provides an introductory overview of the research done in recent years in the area of magnetic sensors. The topics presented in this book range from fundamental theories and properties of magnets and their sensing applications in areas such as biomedicine, microelectromechanical systems, nano-satellites and pedestrian tracking. Written for the readers who wished to obtain a basic understanding of the research area as well as to explore other potential areas of applications for magnetic sensors, this book presents exciting developments in the field in a highly readable manner.

Micro and Nano Machined Electrometers

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Author :
Publisher : Springer Nature
ISBN 13 : 9811332479
Total Pages : 222 pages
Book Rating : 4.8/5 (113 download)

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Book Synopsis Micro and Nano Machined Electrometers by : Yong Zhu

Download or read book Micro and Nano Machined Electrometers written by Yong Zhu and published by Springer Nature. This book was released on 2020-02-13 with total page 222 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book reviews advances in cutting-edge micro-/nano-electrometers, and discusses the technological challenges involved in their practical implementation. The detection of electrostatic charge has a wide range of applications in ionization chambers, bio-analyte and aerosol particle instruments, mass spectrometers, scanning tunneling microscopes, and even quantum computers. Designing micro-/nano-electrometers (also known as charge sensors) for electrometry is considered vital because of the charge sensitivity and resolution issues at micro-/nano-scales. The remarkably dynamic microelectromechanical systems (MEMSs)/nanoelectromechanical systems (NEMSs), and advances in solid-state electronics, hold considerable potential for the design and fabrication of extremely sensitive charge sensors.

Emerging Nanotechnologies for Manufacturing

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Author :
Publisher : William Andrew
ISBN 13 : 0815519788
Total Pages : 413 pages
Book Rating : 4.8/5 (155 download)

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Book Synopsis Emerging Nanotechnologies for Manufacturing by : Waqar Ahmed

Download or read book Emerging Nanotechnologies for Manufacturing written by Waqar Ahmed and published by William Andrew. This book was released on 2009-11-24 with total page 413 pages. Available in PDF, EPUB and Kindle. Book excerpt: Nanotechnology is a technology on the verge of commercialization. In this important work, an unrivalled team of international experts provides an exploration of the emerging nanotechnologies that are poised to make the nano-revolution a reality in the manufacturing sector. From their different perspectives, the contributors explore how developments in nanotechnology are transforming areas as diverse as medicine, advanced materials, energy, electronics and agriculture. Key topics covered include: Characterization of nanostructures Bionanotechnology Nanoelectronics Micro- and nanomachining Self-assembly techniques New applications of carbon nanotubes Environmental and health impacts This book provides an important and in-depth guide to the applications and impact of nanotechnology to different manufacturing sectors. As such, it will find a broad readership, from R&D scientists and engineers to venture capitalists. About the Authors Waqar Ahmed is Chair of Nanotechnology & Advanced Manufacturing and the Director of the Institute of Advanced Manufacturing and Innovation at the University of Central Lancashire, UK. He has contributed to the wider industrial adoption of surface coating solutions through fundamental research and modeling of gas phase processes in CVD and studies of tribological behavior. Mark J. Jackson is a Professor at the Birck Nanotechnology Center and Center for Advanced Manufacturing, College of Technology at Purdue University. Dr Jackson is active in research work concerned with understanding the properties of materials in the field of microscale metal cutting, micro- and nanoabrasive machining, and laser micromachining. He is also involved in developing next generation manufacturing processes and biomedical engineering. Explains how to use biological pathways to produce nanoelectric devices Presents data on new, experimental designs Discusses the history of carbon nanotubes and how they are synthesized to fabricate novel nanostructures (incl. data on laser ablation) Extensive use of illustrations, tables, and figures throughout

Handbook of Silicon Based MEMS Materials and Technologies

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Author :
Publisher : William Andrew
ISBN 13 : 0323312233
Total Pages : 827 pages
Book Rating : 4.3/5 (233 download)

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Book Synopsis Handbook of Silicon Based MEMS Materials and Technologies by : Markku Tilli

Download or read book Handbook of Silicon Based MEMS Materials and Technologies written by Markku Tilli and published by William Andrew. This book was released on 2015-09-02 with total page 827 pages. Available in PDF, EPUB and Kindle. Book excerpt: The Handbook of Silicon Based MEMS Materials and Technologies, Second Edition, is a comprehensive guide to MEMS materials, technologies, and manufacturing that examines the state-of-the-art with a particular emphasis on silicon as the most important starting material used in MEMS. The book explains the fundamentals, properties (mechanical, electrostatic, optical, etc.), materials selection, preparation, manufacturing, processing, system integration, measurement, and materials characterization techniques, sensors, and multi-scale modeling methods of MEMS structures, silicon crystals, and wafers, also covering micromachining technologies in MEMS and encapsulation of MEMS components. Furthermore, it provides vital packaging technologies and process knowledge for silicon direct bonding, anodic bonding, glass frit bonding, and related techniques, shows how to protect devices from the environment, and provides tactics to decrease package size for a dramatic reduction in costs. Provides vital packaging technologies and process knowledge for silicon direct bonding, anodic bonding, glass frit bonding, and related techniques Shows how to protect devices from the environment and decrease package size for a dramatic reduction in packaging costs Discusses properties, preparation, and growth of silicon crystals and wafers Explains the many properties (mechanical, electrostatic, optical, etc.), manufacturing, processing, measuring (including focused beam techniques), and multiscale modeling methods of MEMS structures Geared towards practical applications rather than theory

Green Materials for Electronics

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Publisher : John Wiley & Sons
ISBN 13 : 3527692932
Total Pages : 350 pages
Book Rating : 4.5/5 (276 download)

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Book Synopsis Green Materials for Electronics by : Mihai Irimia-Vladu

Download or read book Green Materials for Electronics written by Mihai Irimia-Vladu and published by John Wiley & Sons. This book was released on 2017-09-12 with total page 350 pages. Available in PDF, EPUB and Kindle. Book excerpt: Combining the materials science, technological, and device aspects of organic bioelectronics based on green materials, this is the first overview of the emerging concepts involving fabrication techniques for sustainable electronics with low energy and material consumption. With contributions from top-notch editors and authors, in one focus, the book covers a collection of natural materials suited for electronics applications such as paper, silk, melanin, DNA and nucleobases, resins, gums, saccharides, cellulose, gelatine and peptides. In another thrust, the book focuses on device fabrication based on these materials, including processing aspects, and applications such as sensors, signal transducers, transient, implantable and digestible electronics. With its interdisciplinary approach this text will appeal to the chemistry, physics, materials science, and engineering communities.

Microfabrication for Industrial Applications

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Author :
Publisher : William Andrew
ISBN 13 : 081551977X
Total Pages : 312 pages
Book Rating : 4.8/5 (155 download)

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Book Synopsis Microfabrication for Industrial Applications by : Regina Luttge

Download or read book Microfabrication for Industrial Applications written by Regina Luttge and published by William Andrew. This book was released on 2011-08-31 with total page 312 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book focuses on the industrial perspective for micro- and nanofabrication methods including large-scale manufacturing, transfer of concepts from lab to factory, process tolerance, yield, robustness, and cost. It gives a history of miniaturization, micro- and nanofabrication, and surveys industrial fields of application, illustrating fabrication processes of relevant micro and nano devices. Concerning sub-micron feature manufacture, the book explains: the philosophy of micro/ nanofabrication for integrated circuit industry; thin film deposition; (waveguide, plastic, semiconductor) material processing; packaging; interconnects; stress (e.g., thin film residual); economic; and environmental aspects. Micro/nanomechanical sensors and actuators are explained in depth with information on applications, materials (incl. functional polymers), methods, testing, fabrication, integration, reliability, magnetic microstructures, etc. Shows engineers & students how to evaluate the potential value of current and nearfuture manufacturing processes for miniaturized systems in industrial environments Explains the top-down and bottom up approaches to nanotechnology, nanostructures fabricated with beams, nano imprinting methods, nanoparticle manufacturing (and their health aspects), nanofeature analysis, and connecting nano to micro to macro Discusses issues for practical application cases; possibilities of dimension precision; large volume manufacturing of micro- & nanostructures (machines, materials, costs) Explains applications of Microsystems for information technology, e.g.: data recording (camera, microphone), storage (memories, CDs), communication; computing; and displays (beamers, LCD, TFT) Case studies are given for sensors, resonators, probes, transdermal medical systems, micro- pumps & valves, inkjets, DNA-analysis, lab-on-a-chip, & micro-cooling

Nanotechnology for Bioapplications

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Author :
Publisher : Springer Nature
ISBN 13 : 9813361581
Total Pages : 293 pages
Book Rating : 4.8/5 (133 download)

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Book Synopsis Nanotechnology for Bioapplications by : Bong-Hyun Jun

Download or read book Nanotechnology for Bioapplications written by Bong-Hyun Jun and published by Springer Nature. This book was released on 2021-03-29 with total page 293 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book documents the tremendous progress in the use of nanotechnology for a range of bioapplications with the aim of providing students, researchers, technicians, and other professionals with an up-to-date overview of the field. After a general introduction to the surface modifications of nanoparticles required for different biological applications, and to the properties of the modified nanoparticles, a series of chapters describe the state of the art in respect of different types of nanoparticle, including silica nanoparticles, fluorescent nanomaterials, metal nanoparticles, magnetic nanoparticles, carbon-based nanostructures, and other novel nanomaterials. Detailed information is supplied on methods of preparation, chemical and physical properties, and current and potential applications. The closing chapters discuss lithography methods for the top-down approach to nanoparticle synthesis and the use of spectroscopic studies as a tool for the characterization of each nanoparticle. Future prospects and challenges for the development of further nanomaterials with bioapplications are also covered.

Micromanufacturing Engineering and Technology

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Author :
Publisher : William Andrew
ISBN 13 : 081551980X
Total Pages : 429 pages
Book Rating : 4.8/5 (155 download)

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Book Synopsis Micromanufacturing Engineering and Technology by : Yi Qin

Download or read book Micromanufacturing Engineering and Technology written by Yi Qin and published by William Andrew. This book was released on 2010-07-02 with total page 429 pages. Available in PDF, EPUB and Kindle. Book excerpt: Micromanufacturing Engineering and Technology presents applicable knowledge of technology, equipment and applications, and the core economic issues of micromanufacturing for anyone with a basic understanding of manufacturing, material, or product engineering. It explains micro-engineering issues (design, systems, materials, market and industrial development), technologies, facilities, organization, competitiveness, and innovation with an analysis of future potential. The machining, forming, and joining of miniature / micro-products are all covered in depth, covering: grinding/milling, laser applications, and photo chemical etching; embossing (hot & UV), injection molding and forming (bulk, sheet, hydro, laser); mechanical assembly, laser joining, soldering, and packaging. Presents case studies, material and design considerations, working principles, process configurations, and information on tools, equipment, parameters and control Explains the many facets of recently emerging additive / hybrid technologies and systems, incl: photo-electric-forming, liga, surface treatment, and thin film fabrication Outlines system engineering issues pertaining to handling, metrology, testing, integration and software Explains widely used micro parts in bio / medical industry, information technology and automotive engineering Covers technologies in high demand, such as: micro-mechanical-cutting, lasermachining, micro-forming, micro-EDM, micro-joining, photo-chemical-etching, photo-electro-forming, and micro-packaging

Introduction to Graphene-Based Nanomaterials

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Author :
Publisher : Cambridge University Press
ISBN 13 : 1107030838
Total Pages : 425 pages
Book Rating : 4.1/5 (7 download)

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Book Synopsis Introduction to Graphene-Based Nanomaterials by : Luis E. F. Foa Torres

Download or read book Introduction to Graphene-Based Nanomaterials written by Luis E. F. Foa Torres and published by Cambridge University Press. This book was released on 2014-01-23 with total page 425 pages. Available in PDF, EPUB and Kindle. Book excerpt: A detailed primer describing the most effective theoretical and computational methods and tools for simulating graphene-based systems.

Capacitive Silicon Resonators

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Publisher : CRC Press
ISBN 13 : 0429556527
Total Pages : 177 pages
Book Rating : 4.4/5 (295 download)

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Book Synopsis Capacitive Silicon Resonators by : Nguyen Van Toan

Download or read book Capacitive Silicon Resonators written by Nguyen Van Toan and published by CRC Press. This book was released on 2019-07-10 with total page 177 pages. Available in PDF, EPUB and Kindle. Book excerpt: Microfabricated resonators play an essential role in a variety of applications, including mass sensing, timing reference applications, and filtering applications. Many transduction mechanisms including piezoelectric, piezoresistive, and capacitive mechanisms, have been studied to induce and detect the motion of resonators. This book is meant to introduce and suggest several technological approaches together with design considerations for performance enhancement of capacitive silicon resonators, and will be useful for those working in field of micro and nanotechnology. Features Introduces and suggests several technological approaches together with design considerations for performance enhancement of capacitive silicon resonators Provides information on the various fabrication technologies and design considerations that can be employed to improve the performance capacitive silicon resonator which is one of the promising options to replace the quartz crystal resonator. Discusses several technological approaches including hermetic packaging based on the LTCC substrate, deep reactive ion etching, neutral beam etching technology, and metal-assisted chemical etching, as well as design considerations for mechanically coupled, selective vibration of high-order mode, movable electrode structures, and piezoresistive heat engines were investigated to achieve small motional resistance, low insertion loss, and high quality factor. Focusses on a capacitive sensing method based on the measurement of the change in capacitance between a sensing electrode and the resonant body. Reviews recent progress in performance enhancement methods for capacitive silicon resonator, which are mainly based on the works of the authors.

Piezoelectric MEMS Resonators

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Author :
Publisher : Springer
ISBN 13 : 3319286889
Total Pages : 423 pages
Book Rating : 4.3/5 (192 download)

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Book Synopsis Piezoelectric MEMS Resonators by : Harmeet Bhugra

Download or read book Piezoelectric MEMS Resonators written by Harmeet Bhugra and published by Springer. This book was released on 2017-01-09 with total page 423 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book introduces piezoelectric microelectromechanical (pMEMS) resonators to a broad audience by reviewing design techniques including use of finite element modeling, testing and qualification of resonators, and fabrication and large scale manufacturing techniques to help inspire future research and entrepreneurial activities in pMEMS. The authors discuss the most exciting developments in the area of materials and devices for the making of piezoelectric MEMS resonators, and offer direct examples of the technical challenges that need to be overcome in order to commercialize these types of devices. Some of the topics covered include: Widely-used piezoelectric materials, as well as materials in which there is emerging interest Principle of operation and design approaches for the making of flexural, contour-mode, thickness-mode, and shear-mode piezoelectric resonators, and examples of practical implementation of these devices Large scale manufacturing approaches, with a focus on the practical aspects associated with testing and qualification Examples of commercialization paths for piezoelectric MEMS resonators in the timing and the filter markets ...and more! The authors present industry and academic perspectives, making this book ideal for engineers, graduate students, and researchers.

Design, Growth and Fabrication of Resonant Tunneling Devices

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Author :
Publisher :
ISBN 13 :
Total Pages : 354 pages
Book Rating : 4.E/5 ( download)

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Book Synopsis Design, Growth and Fabrication of Resonant Tunneling Devices by : Xiao Jue Song

Download or read book Design, Growth and Fabrication of Resonant Tunneling Devices written by Xiao Jue Song and published by . This book was released on 1991 with total page 354 pages. Available in PDF, EPUB and Kindle. Book excerpt: