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Etude Et Caracterisation Avancees Des Procedes Plasma Pour Les Technologies Sub 01 Um
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Book Synopsis Etude et caractérisation avancées des procédés plasma pour les technologies sub-0.1 um by : David Fuard
Download or read book Etude et caractérisation avancées des procédés plasma pour les technologies sub-0.1 um written by David Fuard and published by . This book was released on 2003 with total page 211 pages. Available in PDF, EPUB and Kindle. Book excerpt: L'accroissement des densités d'intégration dans les circuits intégrés nécessite l'utilisation d'isolants (appelés ±low-Kα) à plus faible constante diélectrique (er) que celle de l'oxyde de silicium (er = 4.4). Dans ce cadre, la gravure plasma d'un nouveau polymère hydrocarboné, le SiLK (er = 2.65), a été étudiée : Le problème technologique majeur rencontré avec ces nouveaux matériaux demeure leur très faible seuil de gravure ionique réactive, qui conduit inévitablement à une forte déformation des profils de gravure (±bowα). Un moyen d'obtenir une gravure anisotrope est de déposer une couche de passivation sur les flancs des motifs gravés au cours du procédé plasma. Dans le cas du SiLK, il a été démontré qu'il existe une très forte corrélation entre : la formation et la présence de résidus de gravure peu volatils dans la phase gazeuse du plasma, l'obtention de profils de gravure plus anisotropes, et la détection d'une couche SiLK graphitée (matériau carboné amorphe pauvre en hydrogène) à la fois sur les flancs, les sommets et au fond des structures gravées. D'autres sources de carbone, comme la présence d'un masque résine ou l'ajout de méthane au mélange gazeux, peuvent être utilisées pour améliorer l'anisotropie de gravure. Ce travail a aussi permis de développer une technique d'analyse topographique chimique avec une orientation du substrat (par rapport aux angles d'irradiation X et de collection des photo-électrons) adaptée à l'analyse de structures totalement isolantes. Par la suite, une recherche de l'origine de la déflexion des ions sur les flancs (responsable de la déformation des profils de gravure au cours du procédé plasma) a été menée parmi les trois phénomènes connus potentiellement responsables du ± bow α : i.e. la réflexion des ions sur la facette du masque, la température transverse des ions ou la présence de charges électrostatiques dans les structures en cours de gravure.
Download or read book ICREEC 2019 written by Ahmed Belasri and published by Springer Nature. This book was released on 2020-06-10 with total page 659 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book highlights peer reviewed articles from the 1st International Conference on Renewable Energy and Energy Conversion, ICREEC 2019, held at Oran in Algeria. It presents recent advances, brings together researchers and professionals in the area and presents a platform to exchange ideas and establish opportunities for a sustainable future. Topics covered in this proceedings, but not limited to, are photovoltaic systems, bioenergy, laser and plasma technology, fluid and flow for energy, software for energy and impact of energy on the environment.
Author :North Atlantic Treaty Organization. Advisory Group for Aerospace Research and Development Publisher : ISBN 13 :9789283600046 Total Pages : pages Book Rating :4.6/5 ( download)
Book Synopsis AGARD Conference Proceedings by : North Atlantic Treaty Organization. Advisory Group for Aerospace Research and Development
Download or read book AGARD Conference Proceedings written by North Atlantic Treaty Organization. Advisory Group for Aerospace Research and Development and published by . This book was released on 1994 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Model Cellulosic Surfaces by : Maren Roman
Download or read book Model Cellulosic Surfaces written by Maren Roman and published by OUP USA. This book was released on 2010-04-08 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book provides an overview of the different methods of model cellulosic surface preparation and presents recent studies on the properties of these surfaces. The topics covered are considered relatively new and would serve as the launch pad for further research in this area.
Book Synopsis Dromadaires et chameaux, animaux laitiers by : Pascal Bonnet
Download or read book Dromadaires et chameaux, animaux laitiers written by Pascal Bonnet and published by Editions Quae. This book was released on 1998 with total page 318 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book THERMEC 2018 written by R. Shabadi and published by Trans Tech Publications Ltd. This book was released on 2018-12-26 with total page 2604 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book presents the proceedings of the THERMEC2018: 10th International Conference on Processing and Manufacturing of Advanced Materials, which took place between July 09 and July 13, 2018 in Paris, France, under the co-sponsorship of Universite de Lille, MINES ParisTech, PSL and Universite de Tours, France. The presented book will be useful for many researchers and engineers/technologists working in different aspects of processing and fabrication of materials, structure/property evaluation and applications of both ferrous and nonferrous materials including biomaterials, smart materials as well as the advanced measurement techniques in the materials science.
Book Synopsis Natural Gas Conversion by : A. Holmen
Download or read book Natural Gas Conversion written by A. Holmen and published by Elsevier. This book was released on 1991-05-27 with total page 585 pages. Available in PDF, EPUB and Kindle. Book excerpt: These proceedings reflect the extensive fundamental and applied research efforts that are currently being made on the conversion of gas, in particular on the direct conversion of methane. The Symposium in Oslo focused on the following topics: Direct conversion of methane, Fischer-Tropsch chemistry, methanol conversion and natural gas conversion processes. The main aim was to present the state-of-the-art and progress currently being made within each of these areas. The book contains the papers presented and includes plenary lectures, short communications and posters. The papers will be of interest to scientists and engineers working in the field of gas conversion, transportation fuels, primary petrochemicals and catalysis.
Author :Food and Agriculture Organization of the United Nations Publisher :Food & Agriculture Org. ISBN 13 :9789251045411 Total Pages :20 pages Book Rating :4.0/5 (454 download)
Book Synopsis What is the Code of Conduct for Responsible Fisheries? by : Food and Agriculture Organization of the United Nations
Download or read book What is the Code of Conduct for Responsible Fisheries? written by Food and Agriculture Organization of the United Nations and published by Food & Agriculture Org.. This book was released on 2001 with total page 20 pages. Available in PDF, EPUB and Kindle. Book excerpt: The actual Code of conduct is also available (1996) (ISBN 9251038341).
Book Synopsis Physicochemical Methods in the Study of Biomembranes by : Herwig J. Hilderson
Download or read book Physicochemical Methods in the Study of Biomembranes written by Herwig J. Hilderson and published by Springer. This book was released on 2012-10-24 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt: In mammalian cells many physiological processes rely on the dynamics of the organization of lipids and proteins in biological membranes. The topics in this volume deal with physicochemical methods in the study of biomembranes. Some of them have a long and respectable history in the study of soluble proteins and have only recently been applied to the study of membranes. Some have tradi tionally been applied to studies of model systems of lipids of well-defined com position, as well as to intact membranes. Other methods, by their very nature, apply to organized bilayers comprised of both protein and lipid. Van Meer and van Genderen provide us with an introduction to the field (Chapter I). From their personal perspective regarding the distribution, trans port, and sorting of membrane lipids, they formulate a number of biologically relevant questions and show that the physicochemical methods described in this book may contribute in great measure to solving these issues. The methods of analytical ultracentrifugation have served faithfully for 60 years in the study of water-soluble proteins. The use of detergent extraction of membrane proteins, and the manipulation of density with H20/D20 mixtures, has extended this technique to the study of proteins, and in particular their interactions, from biological membranes. As described by Morris and Ralston in Chapter 2, this technique can be used to determine a number of important properties of proteins.
Download or read book ZnO Thin Films written by Paolo Mele and published by . This book was released on 2019 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt: Zinc oxide (ZnO) is an n-type semiconductor with versatile applications such as optical devices in ultraviolet region, piezoelectric transducers, transparent electrode for solar cells and gas sensors. This book "ZnO Thin Films: Properties, Performance and Applications" gives a deep insight in the intriguing science of zinc oxide thin films. It is devoted to cover the most recent advances and reviews the state of the art of ZnO thin films applications involving energy harvesting, microelectronics, magnetic devices, photocatalysis, photovoltaics, optics, thermoelectricity, piezoelectricity, electrochemistry, temperature sensing. It serves as a fundamental information source on the techniques and methodologies involved in zinc oxide thin films growth, characterization, post-deposition plasma treatments and device processing. This book will be invaluable to the experts to consolidate their knowledge and provide insight and inspiration to beginners wishing to learn about zinc oxide thin films.
Author :Food and Agriculture Organization of the United Nations Publisher :Food & Agriculture Org. ISBN 13 :9789251039717 Total Pages :52 pages Book Rating :4.0/5 (397 download)
Book Synopsis Aquaculture Development by : Food and Agriculture Organization of the United Nations
Download or read book Aquaculture Development written by Food and Agriculture Organization of the United Nations and published by Food & Agriculture Org.. This book was released on 1997 with total page 52 pages. Available in PDF, EPUB and Kindle. Book excerpt: Provides annotations to the Principles of Article 9 of the Code of Conduct for Responsible Fisheries. These annotations are meant to serve as general guidance, and should be taken as suggestions or observations intended to assist those interested in identifying their own criteria and options for actions, as well as partners for collaboration, in support of sustainable aquaculture development.
Book Synopsis Advanced Microscopy in Mycology by : Tanya E. S. Dahms
Download or read book Advanced Microscopy in Mycology written by Tanya E. S. Dahms and published by Springer. This book was released on 2015-11-06 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt: The aim of this volume is to describe the latest advances in microscopic methods, including integrated techniques, as applied to mycology. Each chapter will provide a brief overview of a particular microscopic method with associated advantages and limitations, the research questions that can be appropriately addressed using these microscopic methods, how it has been successfully applied to address mycological research questions, including supporting and complimentary techniques, and which future questions can be addressed.
