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Author : Keith Thompson
Publisher :
ISBN 13 :
Total Pages : 144 pages
Book Rating : 4.:/5 (89 download)
Download or read book Electromagnetic Fast-firing for the Rapid Thermal Processing of Silicon written by Keith Thompson and published by . This book was released on 2003 with total page 144 pages. Available in PDF, EPUB and Kindle. Book excerpt:
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ISBN 13 :
Total Pages : 1102 pages
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ISBN 13 :
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ISBN 13 :
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Author : Richard B. Fair
Publisher : Academic Press
ISBN 13 : 0323139809
Total Pages : 441 pages
Book Rating : 4.3/5 (231 download)
Download or read book Rapid Thermal Processing written by Richard B. Fair and published by Academic Press. This book was released on 2012-12-02 with total page 441 pages. Available in PDF, EPUB and Kindle. Book excerpt: This is the first definitive book on rapid thermal processing (RTP), an essential namufacturing technology for single-wafer processing in highly controlled environments. Written and edited by nine experts in the field, this book covers a range of topics for academics and engineers alike, moving from basic theory to advanced technology for wafer manufacturing. The book also provides new information on the suitability or RTP for thin film deposition, junction formation, silicides, epitaxy, and in situ processing. Complete discussions on equipment designs and comparisons between RTP and other processing approaches also make this book useful for supplemental information on silicon processing, VLSI processing, and integrated circuit engineering.
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Total Pages : 1860 pages
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