Electroceramic Based Mems

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Electroceramic-Based MEMS

Author : Nava Setter
Publisher : Springer Science & Business Media
ISBN 13 : 0387233199
Total Pages : 416 pages
Book Rating : 4.3/5 (872 download)

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Book Synopsis Electroceramic-Based MEMS by : Nava Setter

Download or read book Electroceramic-Based MEMS written by Nava Setter and published by Springer Science & Business Media. This book was released on 2006-03-30 with total page 416 pages. Available in PDF, EPUB and Kindle. Book excerpt: The book is focused on the use of functional oxide and nitride films to enlarge the application range of MEMS (microelectromechanical systems), including micro-sensors, micro-actuators, transducers, and electronic components for microwaves and optical communications systems. Applications, emerging applications, fabrication technology and functioning issues are presented and discussed. The book covers the following topics: Part A: Applications and devices with electroceramic-based MEMS: Chemical microsensors Microactuators based on thin films Micromachined ultrasonic transducers Thick-film piezoelectric and magnetostrictive devices Pyroelectric microsystems RF bulk acoustic wave resonators and filters High frequency tunable devices MEMS for optical functionality Part B: Materials, fabrication technology, and functionality: Ceramic thick films for MEMS Piezoelectric thin films for MEMS Materials and technology in thin films for tunable high frequency devices Permittivity, tunability and loss in ferroelectrics for reconfigurable high frequency electronics Microfabrication of piezoelectric MEMS Nano patterning methods for electroceramics Soft lithography emerging techniques The book is addressed to engineers, scientists and researchers of various disciplines, device engineers, materials engineers, chemists, physicists and microtechnologists who are working and/or interested in this fast growing and highly promising field. The publication of this book follows a Special Issue on electroceramic-based MEMS that was published in the Journal of Electroceramics at the beginning of 2004. The ten invited papers of that special issue were adapted by the authors into chapters of the present book and five additional chapters were added.

MEMS Materials and Processes Handbook

Author : Reza Ghodssi
Publisher : Springer Science & Business Media
ISBN 13 : 0387473181
Total Pages : 1211 pages
Book Rating : 4.3/5 (874 download)

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Book Synopsis MEMS Materials and Processes Handbook by : Reza Ghodssi

Download or read book MEMS Materials and Processes Handbook written by Reza Ghodssi and published by Springer Science & Business Media. This book was released on 2011-03-18 with total page 1211 pages. Available in PDF, EPUB and Kindle. Book excerpt: MEMs Materials and Processes Handbook" is a comprehensive reference for researchers searching for new materials, properties of known materials, or specific processes available for MEMS fabrication. The content is separated into distinct sections on "Materials" and "Processes". The extensive Material Selection Guide" and a "Material Database" guides the reader through the selection of appropriate materials for the required task at hand. The "Processes" section of the book is organized as a catalog of various microfabrication processes, each with a brief introduction to the technology, as well as examples of common uses in MEMs.

Printed Films

Author : Maria Prudenziati
Publisher : Elsevier
ISBN 13 : 0857096214
Total Pages : 609 pages
Book Rating : 4.8/5 (57 download)

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Book Synopsis Printed Films by : Maria Prudenziati

Download or read book Printed Films written by Maria Prudenziati and published by Elsevier. This book was released on 2012-08-30 with total page 609 pages. Available in PDF, EPUB and Kindle. Book excerpt: Whilst printed films are currently used in varied devices across a wide range of fields, research into their development and properties is increasingly uncovering even greater potential. Printed films provides comprehensive coverage of the most significant recent developments in printed films and their applications.Materials and properties of printed films are the focus of part one, beginning with a review of the concepts, technologies and materials involved in their production and use. Printed films as electrical components and silicon metallization for solar cells are discussed, as are conduction mechanisms in printed film resistors, and thick films in packaging and microelectronics. Part two goes on to review the varied applications of printed films in devices. Printed resistive sensors are considered, as is the role of printed films in capacitive, piezoelectric and pyroelectric sensors, mechanical micro-systems and gas sensors. The applications of printed films in biosensors, actuators, heater elements, varistors and polymer solar cells are then explored, followed by a review of screen printing for the fabrication of solid oxide fuel cells and laser printed micro- and meso-scale power generating devices.With its distinguished editors and international team of expert contributors, Printed films is a key text for anyone working in such fields as microelectronics, fuel cell and sensor technology in both industry and academia. Provides a comprehensive analysis of the most significant recent developments in printed films and their applications Reviews the concepts, properties, technologies and materials involved in the production and use of printed films Analyses the varied applications of printed films in devices, including printed restrictive sensors for physical quantities and printed thick film mechanical micro-systems (MEMS), among others

Ferroelectrics in Microwave Devices, Circuits and Systems

Author : Spartak Gevorgian
Publisher : Springer Science & Business Media
ISBN 13 : 1848825072
Total Pages : 405 pages
Book Rating : 4.8/5 (488 download)

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Book Synopsis Ferroelectrics in Microwave Devices, Circuits and Systems by : Spartak Gevorgian

Download or read book Ferroelectrics in Microwave Devices, Circuits and Systems written by Spartak Gevorgian and published by Springer Science & Business Media. This book was released on 2009-05-30 with total page 405 pages. Available in PDF, EPUB and Kindle. Book excerpt: Today’s wireless communications and information systems are heavily based on microwave technology. Current trends indicate that in the future along with - crowaves, the millimeter wave and Terahertz technologies will be used to meet the growing bandwidth and overall performance requirements. Moreover, motivated by the needs of the society, new industry sectors are gaining ground; such as wi- less sensor networks, safety and security systems, automotive, medical, envir- mental/food monitoring, radio tags etc. Furthermore, the progress and the pr- lems in the modern society indicate that in the future these systems have to be more user/consumer friendly, i. e. adaptable, reconfigurable and cost effective. The mobile phone is a typical example which today is much more than just a phone; it includes a range of new functionalities such as Internet, GPS, TV, etc. To handle, in a cost effective way, all available and new future standards, the growing n- ber of the channels and bandwidth both the mobile handsets and the associated systems have to be agile (adaptable/reconfigurable). The complex societal needs have initiated considerable activities in the field of cognitive and software defined radios and triggered extensive research in adequate components and technology platforms. To meet the stringent requirements of these systems, especially in ag- ity and cost, new components with enhanced performances and new functionalities are needed. In this sense the components based on ferroelectrics have greater - tential and already are gaining ground.

Ferroelectrics

Author : Ashim Kumar Bain
Publisher : John Wiley & Sons
ISBN 13 : 3527342141
Total Pages : 326 pages
Book Rating : 4.5/5 (273 download)

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Book Synopsis Ferroelectrics by : Ashim Kumar Bain

Download or read book Ferroelectrics written by Ashim Kumar Bain and published by John Wiley & Sons. This book was released on 2017-06-19 with total page 326 pages. Available in PDF, EPUB and Kindle. Book excerpt: Combining both fundamental principles and real-life applications in a single volume, this book discusses the latest research results in ferroelectrics, including many new ferroelectric materials for the latest technologies, such as capacitors, transducers and memories. The first two chapters introduce dielectrics and microscopic materials properties, while the following chapter discusses pyroelectricity and piezoelectricity. The larger part of the text is devoted to ferroelectricity and ferroelectric ceramics, with not only their fundamentals but also applications discussed. The book concludes with a look at the future for laser printed materials and applications. With over 600 references to recent publications on piezoelectric and ferroelectric materials, this is an invaluable reference for physicists, materials scientists and engineers.

Solid State Circuits Technologies

Author : Jacobus Swart
Publisher : BoD – Books on Demand
ISBN 13 : 9533070455
Total Pages : 476 pages
Book Rating : 4.5/5 (33 download)

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Book Synopsis Solid State Circuits Technologies by : Jacobus Swart

Download or read book Solid State Circuits Technologies written by Jacobus Swart and published by BoD – Books on Demand. This book was released on 2010-01-01 with total page 476 pages. Available in PDF, EPUB and Kindle. Book excerpt: The evolution of solid-state circuit technology has a long history within a relatively short period of time. This technology has lead to the modern information society that connects us and tools, a large market, and many types of products and applications. The solid-state circuit technology continuously evolves via breakthroughs and improvements every year. This book is devoted to review and present novel approaches for some of the main issues involved in this exciting and vigorous technology. The book is composed of 22 chapters, written by authors coming from 30 different institutions located in 12 different countries throughout the Americas, Asia and Europe. Thus, reflecting the wide international contribution to the book. The broad range of subjects presented in the book offers a general overview of the main issues in modern solid-state circuit technology. Furthermore, the book offers an in depth analysis on specific subjects for specialists. We believe the book is of great scientific and educational value for many readers. I am profoundly indebted to the support provided by all of those involved in the work. First and foremost I would like to acknowledge and thank the authors who worked hard and generously agreed to share their results and knowledge. Second I would like to express my gratitude to the Intech team that invited me to edit the book and give me their full support and a fruitful experience while working together to combine this book.

Inkjet Technology for Digital Fabrication

Author : Ian M. Hutchings
Publisher : John Wiley & Sons
ISBN 13 : 0470681985
Total Pages : 417 pages
Book Rating : 4.4/5 (76 download)

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Book Synopsis Inkjet Technology for Digital Fabrication by : Ian M. Hutchings

Download or read book Inkjet Technology for Digital Fabrication written by Ian M. Hutchings and published by John Wiley & Sons. This book was released on 2012-12-26 with total page 417 pages. Available in PDF, EPUB and Kindle. Book excerpt: Whilst inkjet technology is well-established on home and small office desktops and is now having increasing impact in commercial printing, it can also be used to deposit materials other than ink as individual droplets at a microscopic scale. This allows metals, ceramics, polymers and biological materials (including living cells) to be patterned on to substrates under precise digital control. This approach offers huge potential advantages for manufacturing, since inkjet methods can be used to generate structures and functions which cannot be attained in other ways. Beginning with an overview of the fundamentals, this bookcovers the key components, for example piezoelectric print-heads and fluids for inkjet printing, and the processes involved. It goes on to describe specific applications, e.g. MEMS, printed circuits, active and passive electronics, biopolymers and living cells, and additive manufacturing. Detailed case studies are included on flat-panel OLED displays, RFID (radio-frequency identification) manufacturing and tissue engineering, while a comprehensive examination of the current technologies and future directions of inkjet technology completes the coverage. With contributions from both academic researchers and leading names in the industry, Inkjet Technology for Digital Fabrication is a comprehensive resource for technical development engineers, researchers and students in inkjet technology and system development, and will also appeal to researchers in chemistry, physics, engineering, materials science and electronics.

Novel Advances in Microsystems Technologies and Their Applications

Author : Laurent A. Francis
Publisher : CRC Press
ISBN 13 : 1466560665
Total Pages : 637 pages
Book Rating : 4.4/5 (665 download)

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Book Synopsis Novel Advances in Microsystems Technologies and Their Applications by : Laurent A. Francis

Download or read book Novel Advances in Microsystems Technologies and Their Applications written by Laurent A. Francis and published by CRC Press. This book was released on 2013-07-26 with total page 637 pages. Available in PDF, EPUB and Kindle. Book excerpt: Microsystems technologies have found their way into an impressive variety of applications, from mobile phones, computers, and displays to smart grids, electric cars, and space shuttles. This multidisciplinary field of research extends the current capabilities of standard integrated circuits in terms of materials and designs and complements them by creating innovative components and smaller systems that require lower power consumption and display better performance. Novel Advances in Microsystems Technologies and their Applications delves into the state of the art and the applications of microsystems and microelectronics-related technologies. Featuring contributions by academic and industrial researchers from around the world, this book: Examines organic and flexible electronics, from polymer solar cell to flexible interconnects for the co-integration of micro-electromechanical systems (MEMS) with complementary metal oxide semiconductors (CMOS) Discusses imaging and display technologies, including MEMS technology in reflective displays, the fabrication of thin-film transistors on glass substrates, and new techniques to display and quickly transmit high-quality images Explores sensor technologies for sensing electrical currents and temperature, monitoring structural health and critical industrial processes, and more Covers biomedical microsystems, including biosensors, point-of-care devices, neural stimulation and recording, and ultra-low-power biomedical systems Written for researchers, engineers, and graduate students in electrical and biomedical engineering, this book reviews groundbreaking technology, trends, and applications in microelectronics. Its coverage of the latest research serves as a source of inspiration for anyone interested in further developing microsystems technologies and creating new applications.

Thermal Infrared Sensors

Author : Helmut Budzier
Publisher : John Wiley & Sons
ISBN 13 : 0470976756
Total Pages : 280 pages
Book Rating : 4.4/5 (79 download)

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Book Synopsis Thermal Infrared Sensors by : Helmut Budzier

Download or read book Thermal Infrared Sensors written by Helmut Budzier and published by John Wiley & Sons. This book was released on 2011-03-29 with total page 280 pages. Available in PDF, EPUB and Kindle. Book excerpt: The problems involved in designing optimal infrared (IR) measuring systems under given conditions are commensurately complex. The optical set-up and radiation conditions, the interaction between sensor and irradiation and the sensor itself, determine the operation of the sensor system. Simple calculations for solving these problems without any understanding of the causal relationships are not possible. Thermal Infrared Sensors offers a concise explanation of the basic physical and photometric fundamentals needed for the consideration of these interactions. It depicts the basics of thermal IR sensor systems and explains the manifold causal relationships between the most important effects and influences, describing the relationships between sensor parameters such as thermal and special resolution, and application conditions. This book covers: various types of thermal sensors, like thermoelectric sensor, pyroelectric sensors, microbolometers, micro-Golay cells and bimorphous sensors; basic applications for thermal sensors; noise - a limiting factor for thermal resolution and detectivity - including an outline of the mathematics and noise sources in thermal infrared sensors; the properties of IR sensor systems in conjunction with the measurement environment and application conditions; 60 examples showing calculations of real problems with real numbers, as they occur in many practical applications. This is an essential reference for practicing design and optical engineers and users of infrared sensors and infrared cameras. With this book they will be able to transform the demonstrated solutions to their own problems, find ways to match their commercial IR sensors and cameras to their measurement conditions, and to tailor and optimise sensors and set-ups to particular IR measurement problems. The basic knowledge outlined in this book will give advanced undergraduate and graduate students a thorough grounding in this technology.

Silicon Photonics for Telecommunications and Biomedicine

Author : Sasan Fathpour
Publisher : CRC Press
ISBN 13 : 1439806381
Total Pages : 436 pages
Book Rating : 4.4/5 (398 download)

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Book Synopsis Silicon Photonics for Telecommunications and Biomedicine by : Sasan Fathpour

Download or read book Silicon Photonics for Telecommunications and Biomedicine written by Sasan Fathpour and published by CRC Press. This book was released on 2016-04-19 with total page 436 pages. Available in PDF, EPUB and Kindle. Book excerpt: Given silicon's versatile material properties, use of low-cost silicon photonics continues to move beyond light-speed data transmission through fiber-optic cables and computer chips. Its application has also evolved from the device to the integrated-system level. A timely overview of this impressive growth, Silicon Photonics for Telecommunications

Proceedings of the 1st Conference of the European Association on Quality Control of Bridges and Structures

Author : Carlo Pellegrino
Publisher : Springer Nature
ISBN 13 : 3030918777
Total Pages : 1454 pages
Book Rating : 4.0/5 (39 download)

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Book Synopsis Proceedings of the 1st Conference of the European Association on Quality Control of Bridges and Structures by : Carlo Pellegrino

Download or read book Proceedings of the 1st Conference of the European Association on Quality Control of Bridges and Structures written by Carlo Pellegrino and published by Springer Nature. This book was released on 2021-12-11 with total page 1454 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book gathers the latest advances and innovations in the field of quality control and improvement of bridges and structures, as presented by international researchers and engineers at the 1st Conference of the European Association on Quality Control of Bridges and Structures (EUROSTRUCT 2021), held in Padua, Italy on August 29 – September 1, 2021. Contributions include a wide range of topics such as testing and advanced diagnostic techniques for damage detection; SHM and AI, IoT and machine learning for data analysis of bridges and structures; fiberoptics and smart sensors for long-term SHM; structural reliability, risk, robustness, redundancy and resilience for bridges; corrosion models, fatigue analysis and impact of hazards on infrastructure components; bridge and asset management systems, and decision-making models; Life-Cycle Analysis, retrofit and service-life extension, risk management protocols; quality control plans, sustainability and green materials.

Issues in Materials and Manufacturing Research: 2012 Edition

Author :
Publisher : ScholarlyEditions
ISBN 13 : 1481645293
Total Pages : 1446 pages
Book Rating : 4.4/5 (816 download)

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Book Synopsis Issues in Materials and Manufacturing Research: 2012 Edition by :

Download or read book Issues in Materials and Manufacturing Research: 2012 Edition written by and published by ScholarlyEditions. This book was released on 2013-01-10 with total page 1446 pages. Available in PDF, EPUB and Kindle. Book excerpt: Issues in Materials and Manufacturing Research: 2012 Edition is a ScholarlyEditions™ eBook that delivers timely, authoritative, and comprehensive information about Molecular Modeling. The editors have built Issues in Materials and Manufacturing Research: 2012 Edition on the vast information databases of ScholarlyNews.™ You can expect the information about Molecular Modeling in this eBook to be deeper than what you can access anywhere else, as well as consistently reliable, authoritative, informed, and relevant. The content of Issues in Materials and Manufacturing Research: 2012 Edition has been produced by the world’s leading scientists, engineers, analysts, research institutions, and companies. All of the content is from peer-reviewed sources, and all of it is written, assembled, and edited by the editors at ScholarlyEditions™ and available exclusively from us. You now have a source you can cite with authority, confidence, and credibility. More information is available at http://www.ScholarlyEditions.com/.

Introduction to Nano

Author : Amretashis Sengupta
Publisher : Springer
ISBN 13 : 3662473143
Total Pages : 226 pages
Book Rating : 4.6/5 (624 download)

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Book Synopsis Introduction to Nano by : Amretashis Sengupta

Download or read book Introduction to Nano written by Amretashis Sengupta and published by Springer. This book was released on 2015-07-01 with total page 226 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book covers the basics of nanotechnology and provides a solid understanding of the subject. Starting from a brush-up of the basic quantum mechanics and materials science, the book helps to gradually build up understanding of the various effects of quantum confinement, optical-electronic properties of nanoparticles and major nanomaterials. The book covers the various physical, chemical and hybrid methods of nanomaterial synthesis and nanofabrication as well as advanced characterization techniques. It includes chapters on the various applications of nanoscience and nanotechnology. It is written in a simple form, making it useful for students of physical and material sciences.

Capacity and Transport in Contrast Composite Structures

Author : A. A. Kolpakov
Publisher : CRC Press
ISBN 13 : 9781439801765
Total Pages : 335 pages
Book Rating : 4.8/5 (17 download)

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Book Synopsis Capacity and Transport in Contrast Composite Structures by : A. A. Kolpakov

Download or read book Capacity and Transport in Contrast Composite Structures written by A. A. Kolpakov and published by CRC Press. This book was released on 2009-11-24 with total page 335 pages. Available in PDF, EPUB and Kindle. Book excerpt: Is it possible to apply a network model to composites with conical inclusions? How does the energy pass through contrast composites? Devoted to the analysis of transport problems for systems of densely packed, high-contrast composite materials, Capacity and Transport in Contrast Composite Structures: Asymptotic Analysis and Applications answers questions such as these and presents new and modified asymptotic methods for real-world applications in composite materials development. A mathematical discussion of phenomena related to natural sciences and engineering, this book covers historical developments and new progress in mathematical calculations, computer techniques, finite element computer programs, and presentation of results of numerical computations. The "transport problem"—which is described with scalar linear elliptic equations—implies problems of thermoconductivity, diffusion, and electrostatics. To address this "problem," the authors cover asymptotic analysis of partial differential equations, material science, and the analysis of effective properties of electroceramics. Providing numerical calculations of modern composite materials that take into account nonlinear effects, the book also: Presents results of numerical analysis, demonstrating specific properties of distributions of local fields in high-contrast composite structures and systems of closely placed bodies Assesses whether total flux, energy, and capacity exhaust characteristics of the original continuum model Illustrates the expansion of the method for systems of bodies to highly filled contrast composites This text addresses the problem of loss of high-contrast composites, as well as transport and elastic properties of thin layers that cover or join solid bodies. The material presented will be particularly useful for applied mathematicians interested in new methods, and engineers dealing with prospective materials and design methods.

Fundamentals of Electroceramics

Author : R. K. Pandey
Publisher : John Wiley & Sons
ISBN 13 : 1119057353
Total Pages : 304 pages
Book Rating : 4.1/5 (19 download)

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Book Synopsis Fundamentals of Electroceramics by : R. K. Pandey

Download or read book Fundamentals of Electroceramics written by R. K. Pandey and published by John Wiley & Sons. This book was released on 2018-12-13 with total page 304 pages. Available in PDF, EPUB and Kindle. Book excerpt: The first textbook to provide in-depth treatment of electroceramics with emphasis on applications in microelectronics, magneto-electronics, spintronics, energy storage and harvesting, sensors and detectors, magnetics, and in electro-optics and acousto-optics Electroceramics is a class of ceramic materials used primarily for their electrical properties. This book covers the important topics relevant to this growing field and places great emphasis on devices and applications. It provides sufficient background in theory and mathematics so that readers can gain insight into phenomena that are unique to electroceramics. Each chapter has its own brief introduction with an explanation of how the said content impacts technology. Multiple examples are provided to reinforce the content as well as numerous end-of-chapter problems for students to solve and learn. The book also includes suggestions for advanced study and key words relevant to each chapter. Fundamentals of Electroceramics: Materials, Devices and Applications offers eleven chapters covering: 1.Nature and types of solid materials; 2. Processing of Materials; 3. Methods for Materials Characterization; 4. Binding Forces in Solids and Essential Elements of Crystallography; 5. Dominant Forces and Effects in Electroceramics; 6. Coupled Nonlinear Effects in Electroceramics; 7. Elements of Semiconductor; 8. Electroceramic Semiconductor Devices; 9. Electroceramics and Green Energy; 10.Electroceramic Magnetics; and 11. Electro-optics and Acousto-optics. Provides an in-depth treatment of electroceramics with the emphasis on fundamental theoretical concepts, devices, and applications with focus on non-linear dielectrics Emphasizes applications in microelectronics, magneto-electronics, spintronics, energy storage and harvesting, sensors and detectors, magnetics and in electro-optics and acousto-optics Introductory textbook for students to learn and make an impact on technology Motivates students to get interested in research on various aspects of electroceramics at undergraduate and graduate levels leading to a challenging career path. Includes examples and problem questions within every chapter that prepare students well for independent thinking and learning. Fundamentals of Electroceramics: Materials, Devices and Applications is an invaluable academic textbook that will benefit all students, professors, researchers, scientists, engineers, and teachers of ceramic engineering, electrical engineering, applied physics, materials science, and engineering.

Silicon Sensors and Actuators

Author : Benedetto Vigna
Publisher : Springer Nature
ISBN 13 : 3030801357
Total Pages : 988 pages
Book Rating : 4.0/5 (38 download)

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Book Synopsis Silicon Sensors and Actuators by : Benedetto Vigna

Download or read book Silicon Sensors and Actuators written by Benedetto Vigna and published by Springer Nature. This book was released on 2022-04-12 with total page 988 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book thoroughly reviews the present knowledge on silicon micromechanical transducers and addresses emerging and future technology challenges. Readers will acquire a solid theoretical and practical background that will allow them to analyze the key performance aspects of devices, critically judge a fabrication process, and then conceive and design new ones for future applications. Envisioning a future complex versatile microsystem, the authors take inspiration from Richard Feynman’s visionary talk “There is Plenty of Room at the Bottom” to propose that the time has come to see silicon sensors as part of a “Feynman Roadmap” instead of the “More-than-Moore” technology roadmap. The sharing of the author’s industrially proven track record of development, design, and manufacturing, along with their visionary approach to the technology, will allow readers to jump ahead in their understanding of the core of the topic in a very effective way. Students, researchers, engineers, and technologists involved in silicon-based sensor and actuator research and development will find a wealth of useful and groundbreaking information in this book.

2018 IEEE Micro Electro Mechanical Systems (MEMS)

Author : IEEE Staff
Publisher :
ISBN 13 : 9781538647837
Total Pages : pages
Book Rating : 4.6/5 (478 download)

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Book Synopsis 2018 IEEE Micro Electro Mechanical Systems (MEMS) by : IEEE Staff

Download or read book 2018 IEEE Micro Electro Mechanical Systems (MEMS) written by IEEE Staff and published by . This book was released on 2018-01-21 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: The major areas of activity in the development of MEMS and NEMS solicited and expected at this conference include but are not limited to materials, design, simulation, fabrication, assembly, packaging, experimental verification and analysis of micro and nanocomponents