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Electrical Properties Of Sputtered Aluminum Oxide Films
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Book Synopsis Reactive Sputter Deposition by : Diederik Depla
Download or read book Reactive Sputter Deposition written by Diederik Depla and published by Springer Science & Business Media. This book was released on 2008-06-24 with total page 584 pages. Available in PDF, EPUB and Kindle. Book excerpt: In this valuable work, all aspects of the reactive magnetron sputtering process, from the discharge up to the resulting thin film growth, are described in detail, allowing the reader to understand the complete process. Hence, this book gives necessary information for those who want to start with reactive magnetron sputtering, understand and investigate the technique, control their sputtering process and tune their existing process, obtaining the desired thin films.
Book Synopsis Alumina Chemicals by : LeRoy D. Hart
Download or read book Alumina Chemicals written by LeRoy D. Hart and published by John Wiley & Sons. This book was released on 1990-05-28 with total page 642 pages. Available in PDF, EPUB and Kindle. Book excerpt: The world's experts on alumina are united in this effort to provide a comprehensive reference on the science and technology of alumina chemicals. Fifty-seven authors, representing 34 industrial firms, government agencies and universities, contributed to this book. This book covers the entire gamut of subjects relating to alumina from fundamental chemistry and material properties to applications and future uses. It includes a glossary and brief biographies of each author, detailing their experiences with alumina.
Book Synopsis Nanostructured Surfaces and Thin Films Synthesis by Physical Vapor Deposition by : Rafael Alvarez
Download or read book Nanostructured Surfaces and Thin Films Synthesis by Physical Vapor Deposition written by Rafael Alvarez and published by MDPI. This book was released on 2021-04-22 with total page 178 pages. Available in PDF, EPUB and Kindle. Book excerpt: This Special Issue deals with the synthesis of nanostructured surfaces and thin films by means of physical vapor deposition techniques such as pulsed laser deposition, magnetron sputtering, HiPIMS, or e-beam evaporation, among others. The nanostructuration of the surface modifies the way a material interacts with the environment, changing its optical, mechanical, electrical, tribological, or chemical properties. This can be applied in the development of photovoltaic cells, tribological coatings, optofluidic sensors, or biotechnology to name a few. This issue includes research presenting novel or improved applications of nanostructured thin films, such as photovoltaic solar cells, thin-film transistors, antibacterial coatings or chemical and biological sensors, while also studying the nanostructuration mechanisms, from a fundamental point of view, that produce rods, columns, helixes or hexagonal grids at the nanoscale.
Book Synopsis Electronic Properties of Materials by : D.L. Grigsby
Download or read book Electronic Properties of Materials written by D.L. Grigsby and published by Springer Science & Business Media. This book was released on 2013-11-21 with total page 1816 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Sputtering Materials for VLSI and Thin Film Devices by : Jaydeep Sarkar
Download or read book Sputtering Materials for VLSI and Thin Film Devices written by Jaydeep Sarkar and published by William Andrew. This book was released on 2010-12-13 with total page 614 pages. Available in PDF, EPUB and Kindle. Book excerpt: An important resource for students, engineers and researchers working in the area of thin film deposition using physical vapor deposition (e.g. sputtering) for semiconductor, liquid crystal displays, high density recording media and photovoltaic device (e.g. thin film solar cell) manufacturing. This book also reviews microelectronics industry topics such as history of inventions and technology trends, recent developments in sputtering technologies, manufacturing steps that require sputtering of thin films, the properties of thin films and the role of sputtering target performance on overall productivity of various processes. Two unique chapters of this book deal with productivity and troubleshooting issues. The content of the book has been divided into two sections: (a) the first section (Chapter 1 to Chapter 3) has been prepared for the readers from a range of disciplines (e.g. electrical, chemical, chemistry, physics) trying to get an insight into use of sputtered films in various devices (e.g. semiconductor, display, photovoltaic, data storage), basic of sputtering and performance of sputtering target in relation to productivity, and (b) the second section (Chapter 4 to Chapter 8) has been prepared for readers who already have background knowledge of sputter deposition of thin films, materials science principles and interested in the details of sputtering target manufacturing methods, sputtering behavior and thin film properties specific to semiconductor, liquid crystal display, photovoltaic and magnetic data storage applications. In Chapters 5 to 8, a general structure has been used, i.e. a description of the applications of sputtered thin films, sputtering target manufacturing methods (including flow charts), sputtering behavior of targets (e.g. current - voltage relationship, deposition rate) and thin film properties (e.g. microstructure, stresses, electrical properties, in-film particles). While discussing these topics, attempts have been made to include examples from the actual commercial processes to highlight the increased complexity of the commercial processes with the growth of advanced technologies. In addition to personnel working in industry setting, university researchers with advanced knowledge of sputtering would also find discussion of such topics (e.g. attributes of target design, chamber design, target microstructure, sputter surface characteristics, various troubleshooting issues) useful. . - Unique coverage of sputtering target manufacturing methods in the light of semiconductor, displays, data storage and photovoltaic industry requirements - Practical information on technology trends, role of sputtering and major OEMs - Discussion on properties of a wide variety of thin films which include silicides, conductors, diffusion barriers, transparent conducting oxides, magnetic films etc. - Practical case-studies on target performance and troubleshooting - Essential technological information for students, engineers and scientists working in the semiconductor, display, data storage and photovoltaic industry
Book Synopsis Manufacturing Techniques for Microfabrication and Nanotechnology by : Marc J. Madou
Download or read book Manufacturing Techniques for Microfabrication and Nanotechnology written by Marc J. Madou and published by CRC Press. This book was released on 2011-06-13 with total page 672 pages. Available in PDF, EPUB and Kindle. Book excerpt: Designed for science and engineering students, this text focuses on emerging trends in processes for fabricating MEMS and NEMS devices. The book reviews different forms of lithography, subtractive material removal processes, and additive technologies. Both top-down and bottom-up fabrication processes are exhaustively covered and the merits of the different approaches are compared. Students can use this color volume as a guide to help establish the appropriate fabrication technique for any type of micro- or nano-machine.
Book Synopsis Metallic Oxynitride Thin Films by Reactive Sputtering and Related Deposition Methods: Processes, Properties and Applications by : Filipe Vaz
Download or read book Metallic Oxynitride Thin Films by Reactive Sputtering and Related Deposition Methods: Processes, Properties and Applications written by Filipe Vaz and published by Bentham Science Publishers. This book was released on 2013-06-21 with total page 363 pages. Available in PDF, EPUB and Kindle. Book excerpt: Oxynitride thin film technology is rapidly impacting a broad spectrum of applications, ranging from decorative functions (through optoelectronics) to corrosion resistance. Developing a better understanding of the relationships between deposition processes, structure and composition of the deposited films is critical to the continued evolution of these applications. This e-book provides valuable information about the process modeling, fabrication and characterization of metallic oxynitride-based thin films produced by reactive sputtering and some related deposition processes. Its contents are spread in twelve main and concise chapters through which the book thoroughly reviews the bases of oxynitride thin film technology and deposition processes, sputtering processes and the resulting behaviors of these oxynitride thin films. More importantly, the solutions for the growth of oxynitride technology are given in detail with an emphasis on some particular compounds. This is a valuable resource for academic learners studying materials science and industrial coaters, who are concerned not only about fundamental aspects of oxynitride synthesis, but also by their innate material characteristics.
Book Synopsis New Perspectives on Surface Passivation: Understanding the Si-Al2O3 Interface by : Lachlan E. Black
Download or read book New Perspectives on Surface Passivation: Understanding the Si-Al2O3 Interface written by Lachlan E. Black and published by Springer. This book was released on 2016-04-15 with total page 222 pages. Available in PDF, EPUB and Kindle. Book excerpt: The book addresses the problem of passivation at the surface of crystalline silicon solar cells. More specifically, it reports on a high-throughput, industrially compatible deposition method for Al2O3, enabling its application to commercial solar cells. One of the main focus is on the analysis of the physics of Al2O3 as a passivating dielectric for silicon surfaces. This is accomplished through a comprehensive study, which moves from the particular, the case of aluminium oxide on silicon, to the general, the physics of surface recombination, and is able to connect theory with practice, highlighting relevant commercial applications.
Book Synopsis Laser Induced Damage in Optical Materials, 1984 by :
Download or read book Laser Induced Damage in Optical Materials, 1984 written by and published by . This book was released on 1986 with total page 460 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Nanomaterials-Based Composites for Energy Applications by : Keka Talukdar
Download or read book Nanomaterials-Based Composites for Energy Applications written by Keka Talukdar and published by CRC Press. This book was released on 2019-12-11 with total page 343 pages. Available in PDF, EPUB and Kindle. Book excerpt: This volume, Nanomaterials-Based Composites for Energy Applications: Emerging Technology and Trends, covers the importance of nanomaterials-based composites for renewable and alternative energy applications. Taking a multidisciplinary approach, it looks at using composites without losing the extraordinary strength of the nanomaterials, preparing new composites with high dielectric permittivity, improving load-carrying capacity, and more. Simulation and experimental work is included, providing a current view of the research that is going on in laboratories all over the world. The book will be a rich reference for professors and instructors, professionals, researchers, and engineering students interested in applying the emerging field of nanoscience and nanotechnology to energy applications.
Book Synopsis High Power Impulse Magnetron Sputtering by : Daniel Lundin
Download or read book High Power Impulse Magnetron Sputtering written by Daniel Lundin and published by Elsevier. This book was released on 2019-08-28 with total page 400 pages. Available in PDF, EPUB and Kindle. Book excerpt: High Power Impulse Magnetron Sputtering: Fundamentals, Technologies, Challenges and Applications is an in-depth introduction to HiPIMS that emphasizes how this novel sputtering technique differs from conventional magnetron processes in terms of both discharge physics and the resulting thin film characteristics. Ionization of sputtered atoms is discussed in detail for various target materials. In addition, the role of self-sputtering, secondary electron emission and the importance of controlling the process gas dynamics, both inert and reactive gases, are examined in detail with an aim to generate stable HiPIMS processes. Lastly, the book also looks at how to characterize the HiPIMS discharge, including essential diagnostic equipment. Experimental results and simulations based on industrially relevant material systems are used to illustrate mechanisms controlling nucleation kinetics, column formation and microstructure evolution. - Includes a comprehensive description of the HiPIMS process from fundamental physics to applications - Provides a distinctive link between the process plasma and thin film communities - Discusses the industrialization of HiPIMS and its real world applications
Book Synopsis Organic Light-Emitting Materials and Devices by : Zhigang Li
Download or read book Organic Light-Emitting Materials and Devices written by Zhigang Li and published by CRC Press. This book was released on 2006-09-12 with total page 692 pages. Available in PDF, EPUB and Kindle. Book excerpt: New advances offer flexible, low-cost fabrication methods for light-emitting materials, particularly in display technologies. As researchers continue to develop novel applications for these materials, feasible solutions for large-scale manufacturing are increasingly important. Organic Light-Emitting Materials and Devices covers all aspects o
Book Synopsis Laser Induced Damage in Optical Materials by :
Download or read book Laser Induced Damage in Optical Materials written by and published by . This book was released on 1986 with total page 460 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Functional Oxide Based Thin-Film Materials by : Dong-Sing Wuu
Download or read book Functional Oxide Based Thin-Film Materials written by Dong-Sing Wuu and published by MDPI. This book was released on 2020-05-29 with total page 160 pages. Available in PDF, EPUB and Kindle. Book excerpt: This Special Issue on Functional Oxide-Based Thin-Film Materials touches on the latest advancements in several aspects related to material science: the synthesis of novel oxide, photoluminescence characteristics, photocatalytic ability, energy storage, light emitter studies, low-emissivity glass coatings, and investigations of both nanostructure and thin-film properties. It represents an amalgamation of specialists working with device applications and shedding light on the properties and behavior of thin-film oxides (e.g., GaOx, Ga2O3, HfO2, LiNbO3, and doped ZnO, among numerous others). The papers cover many aspects of thin-film science and technology, from thin film to nanostructure and from material properties to optoelectronic applications, thus reflecting the many interests of the community of scientists active in the field.
Book Synopsis Materials Science Research Trends by : Lawrence V. Olivante
Download or read book Materials Science Research Trends written by Lawrence V. Olivante and published by Nova Publishers. This book was released on 2008 with total page 370 pages. Available in PDF, EPUB and Kindle. Book excerpt: Materials science includes those parts of chemistry and physics that deal with the properties of materials. It encompasses four classes of materials, the study of each of which may be considered a separate field: metals; ceramics; polymers and composites. Materials science is often referred to as materials science and engineering because it has many applications. Industrial applications of materials science include processing techniques (casting, rolling, welding, ion implantation, crystal growth, thin-film deposition, sintering, glassblowing, etc), analytical techniques (electron microscopy, x-ray diffraction, calorimetry, nuclear microscopy (HEFIB) etc.), materials design, and cost/benefit tradeoffs in industrial production of materials. This new book presents new leading-edge research in the field.
Book Synopsis Pulsed and Pulsed Bias Sputtering by : Edward V. Barnat
Download or read book Pulsed and Pulsed Bias Sputtering written by Edward V. Barnat and published by Springer Science & Business Media. This book was released on 2013-11-27 with total page 151 pages. Available in PDF, EPUB and Kindle. Book excerpt: Diffusion Barrier Stack - 5 nm -3 nm -2 nm :. . . -. . . . : . . O. 21-lm Figure 2: Schematic representing a cross-sectional view of the topography that is encountered in the processing of integrated circuits. (Not to scale) these sub-micron sized features is depicted in Fig. 2. The role of the diffusion barrier is to prevent the diffusion of metallic ions into the interlayer dielectric (lLD). Depending on the technology, in particular the choice of the ILD and the metal interconnect, the diffusion barrier may be Ti, Ta, TiN, TaN, or a multi-layered structure of these materials. The adhesion of the barrier to the dielectric, the conformality of the barrier to the feature, the physical structure of the film, and the chemical composition of the film are key issues that are determined in part by the nature of the deposition process. Likewise, after the growth of the barrier, a conducting layer (the seed layer) is needed for subsequent filling of the trench by electrochemical deposition. Again, the growth process must be able to deposit a film that is continuous along the topography of the sub-micron sized features. Other factors of concern are the purity and the texture of the seed layer, as both of these factors influence the final resistivity of the metallic interconnect. Sputter-deposited coatings are also commonly employed for their electro-optical properties. For example, an electrochromic glazing is used to control the flux of light that is transmitted through a glazed material.
Book Synopsis Organic Light-Emitting Materials and Devices by : Zhigang Rick Li
Download or read book Organic Light-Emitting Materials and Devices written by Zhigang Rick Li and published by CRC Press. This book was released on 2017-12-19 with total page 813 pages. Available in PDF, EPUB and Kindle. Book excerpt: Organic Light-Emitting Materials and Devices provides a single source of information covering all aspects of OLEDs, including the systematic investigation of organic light-emitting materials, device physics and engineering, and manufacturing and performance measurement techniques. This Second Edition is a compilation of the advances made in recent years and of the challenges facing the future development of OLED technology. Featuring chapters authored by internationally recognized academic and industrial experts, this authoritative text: Introduces the history, fundamental physics, and potential applications of OLEDs Reviews the synthesis, properties, and device performance of electroluminescent materials used in OLEDs Reflects the current state of molecular design, exemplifying more than 600 light-emitting polymers and highlighting the most efficient materials and devices Explores small molecules-based OLEDs, detailing hole- and electron-injection and electron-transport materials, electron- and hole-blocking materials, sensitizers, and fluorescent and phosphorescent light-emitting materials Describes solution-processable phosphorescent polymer LEDs, energy transfer processes, polarized OLEDs, anode materials, and vapor deposition manufacturing techniques employed in OLED fabrication Discusses flexible display, the backplane circuit technology for organic light-emitting displays, and the latest microstructural characterization and performance measurement techniques Contains abundant diagrams, device configurations, and molecular structures clearly illutrating the presented ideas Organic Light-Emitting Materials and Devices, Second Edition offers a comprehensive overview of the OLED field and can serve as a primary reference for those needing additional information in any particular subarea of organic electroluminescence. This book should attract the attention of materials scientists, synthetic chemists, solid-state physicists, and electronic device engineers, as well as industrial managers and patent lawyers engaged in OLED-related business areas.
