Effects of deposition parameters on properties of rf sputtered molybdenum films

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ISBN 13 :
Total Pages : 0 pages
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Book Synopsis Effects of deposition parameters on properties of rf sputtered molybdenum films by : R. S. Nowicki

Download or read book Effects of deposition parameters on properties of rf sputtered molybdenum films written by R. S. Nowicki and published by . This book was released on 1974 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt:

The Effect of RF Sputtering Deposition Parameters on the Functional Properties of Chrom Ium Oxide Thin Films

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ISBN 13 :
Total Pages : pages
Book Rating : 4.:/5 (861 download)

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Book Synopsis The Effect of RF Sputtering Deposition Parameters on the Functional Properties of Chrom Ium Oxide Thin Films by : John Gerald Kavanagh

Download or read book The Effect of RF Sputtering Deposition Parameters on the Functional Properties of Chrom Ium Oxide Thin Films written by John Gerald Kavanagh and published by . This book was released on 2012 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: An investigation was made into the effect of rf magnetron deposition parameters on the resulting properties of chromium oxide thin films. The films were sputtered in an argon/ oxygen plasma environment with the main deposition parameters being the argon and oxygen flow rate, chamber pressure, deposition-time and the deposition power (forward and back). Tire effect of the sputter deposition regime which is controlled by the sputtering hysteresis phenomenon i.e. the reactive and metallic regimes, are expected to have a significant effect on the properties of the sputtered films and will have to be taken into account. The films were deposited on a range of substrates such as silicon, glass micro-slides and stainless steel 304 and the composition of the mainly amorphous sputtered films was determined through XPS, EDX and XRD. Optical characterisation and determination of optical constants was undertaken by transmission/reflection spectrophotometry, ellipsometry and Raman and FTIR analysis. Two designs of a solar thermal absorber (multilayer interference and tandem absorber) were designed and fabricated based on the optical constants measured by the methods previously stated and their performance analysed. The surface energy was calculated through measurement of the contact angle with three different liquids and the corrosion resistance of the films measured by OCP, linear sweep and EIS analysis in 3.5wt% NaCI solution. The mechanical properties were measured by nanoindentation, from which the hardness and elastic modulus of the samples could be obtained. The electrical properties were measured using a four point probe to calculate the thin film resistivity and the Kelvin probe analysis was used to measure the work function of the samples.

The Effect of Deposition Conditions on the Properties of RF Sputtered Silicon Films

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ISBN 13 :
Total Pages : pages
Book Rating : 4.:/5 (599 download)

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Book Synopsis The Effect of Deposition Conditions on the Properties of RF Sputtered Silicon Films by : Ali M. A. Qudah

Download or read book The Effect of Deposition Conditions on the Properties of RF Sputtered Silicon Films written by Ali M. A. Qudah and published by . This book was released on 1990 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:

Nuclear Science Abstracts

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ISBN 13 :
Total Pages : 1146 pages
Book Rating : 4.3/5 (91 download)

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Book Synopsis Nuclear Science Abstracts by :

Download or read book Nuclear Science Abstracts written by and published by . This book was released on 1975 with total page 1146 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Deposition & Characterization of Molybdenum Thin Films:

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Publisher : LAP Lambert Academic Publishing
ISBN 13 : 9783659176630
Total Pages : 96 pages
Book Rating : 4.1/5 (766 download)

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Book Synopsis Deposition & Characterization of Molybdenum Thin Films: by : Majid Khan

Download or read book Deposition & Characterization of Molybdenum Thin Films: written by Majid Khan and published by LAP Lambert Academic Publishing. This book was released on 2012-07 with total page 96 pages. Available in PDF, EPUB and Kindle. Book excerpt: The objective of this work is to prepare Molybdenum thin films to be used as efficient back contact materials and utilize characterization techniques for the investigation of the growth as well the physical properties of Mo thin films deposited through DC-plasma magnetron sputtering on soda lime glass substrate. The effects of process parameters, such as Ar pressure, deposition power and substrate temperature, on the properties of the deposited films have been studied. These process parameters were optimized to get high conductivity Mo thin films to be used in CIGS based thin films solar cells as a back contact.

Nuclear Power Reactor Instrumentation Systems Handbook

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Publisher :
ISBN 13 : 9780870790058
Total Pages : 1052 pages
Book Rating : 4.7/5 (9 download)

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Book Synopsis Nuclear Power Reactor Instrumentation Systems Handbook by : Joseph M. Harrer

Download or read book Nuclear Power Reactor Instrumentation Systems Handbook written by Joseph M. Harrer and published by . This book was released on 1973 with total page 1052 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Backscattering Spectrometry

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Publisher : Elsevier
ISBN 13 : 0323152058
Total Pages : 401 pages
Book Rating : 4.3/5 (231 download)

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Book Synopsis Backscattering Spectrometry by : Wei-Kan Chu

Download or read book Backscattering Spectrometry written by Wei-Kan Chu and published by Elsevier. This book was released on 2012-12-02 with total page 401 pages. Available in PDF, EPUB and Kindle. Book excerpt: Backscattering Spectrometry reviews developments in backscattering spectrometry and covers topics ranging from instrumentation and experimental techniques to beam parameters and energy loss measurements. Backscattering spectrometry of thin films is also considered, and examples of backscattering analysis are given. This book is comprised of 10 chapters and begins with an introduction to backscattering spectrometry, what it can and what it cannot accomplish, and some ""rules of thumb"" for interpreting or reading spectra. The relative strengths and weaknesses of backscattering spectrometry in the framework of materials analysis are outlined. The following chapters focus on kinematics, scattering cross sections, energy loss, and energy straggling; backscattering analysis of thin films of various degrees of complications; the influence of beam parameters; and mass and depth resolutions and their relationships to the mass and energy of projectiles. Many examples of backscattering analysis are also presented to illustrate the capability and limitation of backscattering. Backscattering applications when combined with channeling effects are considered as well. The final chapter provides a list of references on the applications of backscattering spectrometry. This monograph will be a useful resource for physicists.

Relationship Between Deposition Parameters and the Properties of RF-magnetron Sputter Deposited Zirconia Thin Films [microform]

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Publisher : Ann Arbor, Mich. : University Microfilms International
ISBN 13 :
Total Pages : 380 pages
Book Rating : 4.:/5 (517 download)

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Book Synopsis Relationship Between Deposition Parameters and the Properties of RF-magnetron Sputter Deposited Zirconia Thin Films [microform] by : Ruddell, David Edward

Download or read book Relationship Between Deposition Parameters and the Properties of RF-magnetron Sputter Deposited Zirconia Thin Films [microform] written by Ruddell, David Edward and published by Ann Arbor, Mich. : University Microfilms International. This book was released on 2003 with total page 380 pages. Available in PDF, EPUB and Kindle. Book excerpt:

The Effect of Deposition Pressure on Stress in Sputtered Molybdenum Thin Films

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ISBN 13 :
Total Pages : 0 pages
Book Rating : 4.:/5 (138 download)

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Book Synopsis The Effect of Deposition Pressure on Stress in Sputtered Molybdenum Thin Films by : Scott Sheppard

Download or read book The Effect of Deposition Pressure on Stress in Sputtered Molybdenum Thin Films written by Scott Sheppard and published by . This book was released on 1998 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt: It is known that deposition parameters such as pressure, geometry, and deposition device affect the state of stress in a thin film (Thornton and Hoffman). We decided to find the stress vs. deposition pressure curve for a sputtered metal thin film. All other deposition variables remained the same for each film deposited. We looked at measuring the stress incurred in the thin film by x-ray diffraction and geometrical techniques. Measuring this stress dependence on pressure for sputtered thin films has been done for many metals already. It has been found that at low sputter pressures the stress tends to be compressive. As the sputter pressure is increased the stress gradually approaches the critical pressure. i.e, the pressure at which the thin film has zero stress. The stress then becomes tensile as the pressure is increased beyond the critical pressure. The tensile stress will peak at a certain pressure and eventually level off at a low tensile stress as the pressure is increased further. We are attempting to find this curve for a metal this hasn't been done for yet. A new technique for measuring the stress by geometrical optics is also being tested by comparing the results to x-ray stress measurements.

Deposition Technologies for Films and Coatings

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Publisher : William Andrew
ISBN 13 :
Total Pages : 620 pages
Book Rating : 4.3/5 (91 download)

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Book Synopsis Deposition Technologies for Films and Coatings by : Rointan Framroze Bunshah

Download or read book Deposition Technologies for Films and Coatings written by Rointan Framroze Bunshah and published by William Andrew. This book was released on 1982 with total page 620 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Proceedings of the Symposium on Electron and Ion Beam Science and Technology; International Conference

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ISBN 13 :
Total Pages : 1048 pages
Book Rating : 4.:/5 (31 download)

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Book Synopsis Proceedings of the Symposium on Electron and Ion Beam Science and Technology; International Conference by :

Download or read book Proceedings of the Symposium on Electron and Ion Beam Science and Technology; International Conference written by and published by . This book was released on 1972 with total page 1048 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Handbook of Sputter Deposition Technology

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Publisher : William Andrew
ISBN 13 : 1437734839
Total Pages : 658 pages
Book Rating : 4.4/5 (377 download)

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Book Synopsis Handbook of Sputter Deposition Technology by : Kiyotaka Wasa

Download or read book Handbook of Sputter Deposition Technology written by Kiyotaka Wasa and published by William Andrew. This book was released on 2012-11-20 with total page 658 pages. Available in PDF, EPUB and Kindle. Book excerpt: This thoroughly updated new edition includes an entirely new team of contributing authors with backgrounds specializing in the various new applications of sputtering technology. It forms a bridge between fundamental theory and practical application, giving an insight into innovative new materials, devices and systems. Organized into three parts for ease of use, this Handbook introduces the fundamentals of thin films and sputtering deposition, explores the theory and practices of this field, and also covers new technology such as nano-functional materials and MEMS. Wide varieties of functional thin film materials and processing are described, and experimental data is provided with detailed examples and theoretical descriptions. A strong applications focus, covering current and emerging technologies, including nano-materials and MEMS (microelectrolmechanical systems) for energy, environments, communications, and/or bio-medical field. New chapters on computer simulation of sputtering and MEMS completes the update and insures that the new edition includes the most current and forward-looking coverage available All applications discussed are supported by theoretical discussions, offering readers both the "how" and the "why" of each technique 40% revision: the new edition includes an entirely new team of contributing authors with backgrounds specializing in the various new applications that are covered in the book and providing the most up-to-date coverage available anywhere

Reactive Sputter Deposition

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Publisher : Springer Science & Business Media
ISBN 13 : 3540766642
Total Pages : 584 pages
Book Rating : 4.5/5 (47 download)

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Book Synopsis Reactive Sputter Deposition by : Diederik Depla

Download or read book Reactive Sputter Deposition written by Diederik Depla and published by Springer Science & Business Media. This book was released on 2008-06-24 with total page 584 pages. Available in PDF, EPUB and Kindle. Book excerpt: In this valuable work, all aspects of the reactive magnetron sputtering process, from the discharge up to the resulting thin film growth, are described in detail, allowing the reader to understand the complete process. Hence, this book gives necessary information for those who want to start with reactive magnetron sputtering, understand and investigate the technique, control their sputtering process and tune their existing process, obtaining the desired thin films.

Novel Nanocomposite Coatings

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Publisher : CRC Press
ISBN 13 : 9814411183
Total Pages : 336 pages
Book Rating : 4.8/5 (144 download)

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Book Synopsis Novel Nanocomposite Coatings by : Rostislav Daniel

Download or read book Novel Nanocomposite Coatings written by Rostislav Daniel and published by CRC Press. This book was released on 2014-12-16 with total page 336 pages. Available in PDF, EPUB and Kindle. Book excerpt: Nanocomposite materials as a special class of nanostructured materials have recently attracted great interest due to their extraordinary mechanical properties as well as thermal stability and oxidation resistance. The unique structure and exceptional properties make nanocomposite materials a possible alternative to traditional polycrystalline mater

Metallurgical Coatings and Thin Films 1992

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Publisher : Elsevier
ISBN 13 : 0444596887
Total Pages : 638 pages
Book Rating : 4.4/5 (445 download)

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Book Synopsis Metallurgical Coatings and Thin Films 1992 by : G.E. McGuire

Download or read book Metallurgical Coatings and Thin Films 1992 written by G.E. McGuire and published by Elsevier. This book was released on 2012-12-02 with total page 638 pages. Available in PDF, EPUB and Kindle. Book excerpt: One of the increasingly important requirements for high technology materials is that they possess near-surface properties different to their bulk properties. Specific surface properties are generally achieved through the use of these films or coatings or by modifying the structure or composition of the near surface. This two-volume work contains 157 papers covering a wide range of topics involving films, coatings, and modified surfaces. All aspects of the development of deposition technologies are addressed including basic research, applied research, applications development and full scale industrial production. The work will be of interest to materials scientists, physicists, electronic, chemical and mechanical engineers, and chemists.

Deposition of Sputtered Molybdenum Disulfide Films and Friction Characteristics of Such Films in Vacuum

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Publisher :
ISBN 13 :
Total Pages : 18 pages
Book Rating : 4.:/5 (31 download)

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Book Synopsis Deposition of Sputtered Molybdenum Disulfide Films and Friction Characteristics of Such Films in Vacuum by : Talivaldis Spalvins

Download or read book Deposition of Sputtered Molybdenum Disulfide Films and Friction Characteristics of Such Films in Vacuum written by Talivaldis Spalvins and published by . This book was released on 1967 with total page 18 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Density Profiles in Sputtered Molybdenum Thin Films and Their Effects on Sodium Diffusion in Cu(InxGa1-x)Se2 Photovoltaics

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ISBN 13 :
Total Pages : 4 pages
Book Rating : 4.:/5 (743 download)

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Book Synopsis Density Profiles in Sputtered Molybdenum Thin Films and Their Effects on Sodium Diffusion in Cu(InxGa1-x)Se2 Photovoltaics by :

Download or read book Density Profiles in Sputtered Molybdenum Thin Films and Their Effects on Sodium Diffusion in Cu(InxGa1-x)Se2 Photovoltaics written by and published by . This book was released on 2011 with total page 4 pages. Available in PDF, EPUB and Kindle. Book excerpt: Molybdenum (Mo) thin films were sputtered onto soda lime glass (SLG) substrates. The main variable in the deposition parameters, the argon (Ar) pressure pAr, was varied in the range of 6 - 20 mTorr. Ex situ spectroscopic ellipsometry (SE) was performed to find out that the dielectric functions of the Mo films were strongly dependent on pAr, indicating a consistent and significant decrease in the Mo film density pMo with increasing pAr. This trend was confirmed by high-angle-annular-dark-field scanning transmission electron microscopy. Dielectric functions of Mo were then found to be correlated with secondary ion mass spectroscopy profiles of Sodium (Na) in the Cu(InxGa1-x)Se2 (CIGS) layer grown on top of Mo/SLG. Therefore, in situ optical diagnostics can be applied for process monitoring and optimization in the deposition of Mo for CIGS solar cells. Such capability is demonstrated with simulated optical transmission and reflectance of variously polarized incident light, using dielectric functions deduced from SE.