Dynamics of Microelectromechanical Systems

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Publisher : Springer Science & Business Media
ISBN 13 : 0387681957
Total Pages : 411 pages
Book Rating : 4.3/5 (876 download)

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Book Synopsis Dynamics of Microelectromechanical Systems by : Nicolae Lobontiu

Download or read book Dynamics of Microelectromechanical Systems written by Nicolae Lobontiu and published by Springer Science & Business Media. This book was released on 2014-07-08 with total page 411 pages. Available in PDF, EPUB and Kindle. Book excerpt: Here is a textbook for senior undergraduate and graduate level students that offers a novel and systematic look into the dynamics of MEMS. It includes numerous solved examples together with the proposed problems. The material to be found here will also be of interest to researchers with a non-mechanical background. The book focuses on the mechanical domain, specifically the dynamic sub-domain, and provides an in-depth treatment of problems that involve reliable modeling, analysis and design.

Mechanics of Microelectromechanical Systems

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Author :
Publisher : Springer Science & Business Media
ISBN 13 : 0387230378
Total Pages : 415 pages
Book Rating : 4.3/5 (872 download)

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Book Synopsis Mechanics of Microelectromechanical Systems by : Nicolae Lobontiu

Download or read book Mechanics of Microelectromechanical Systems written by Nicolae Lobontiu and published by Springer Science & Business Media. This book was released on 2006-01-16 with total page 415 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book offers a comprehensive coverage to the mechanics of microelectromechanical systems (MEMS), which are analyzed from a mechanical engineer’s viewpoint as devices that transform an input form of energy, such as thermal, electrostatic, electromagnetic or optical, into output mechanical motion (in the case of actuation) or that can operate with the reversed functionality (as in sensors) and convert an external stimulus, such as mechanical motion, into (generally) electric energy. The impetus of this proposal stems from the perception that such an approach might contribute to a more solid understanding of the principles governing the mechanics of MEMS, and would hopefully enhance the efficiency of modeling and designing reliable and desirably-optimized microsystems. The work represents an attempt at both extending and deepening the mechanical-based approach to MEMS in the static domain by providing simple, yet reliable tools that are applicable to micromechanism design through current fabrication technologies. Lumped-parameter stiffness and compliance properties of flexible components are derived both analytically (as closed-form solutions) and as simplified (engineering) formulas. Also studied are the principal means of actuation/sensing and their integration into the overall microsystem. Various examples of MEMS are studied in order to better illustrate the presentation of the different modeling principles and algorithms. Through its objective, approach and scope, this book offers a novel and systematic insight into the MEMS domain and complements existing work in the literature addressing part of the material developed herein.

Microsystems Dynamics

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Publisher : Springer Science & Business Media
ISBN 13 : 9048197015
Total Pages : 222 pages
Book Rating : 4.0/5 (481 download)

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Book Synopsis Microsystems Dynamics by : Vytautas Ostasevicius

Download or read book Microsystems Dynamics written by Vytautas Ostasevicius and published by Springer Science & Business Media. This book was released on 2010-11-01 with total page 222 pages. Available in PDF, EPUB and Kindle. Book excerpt: In recent years microelectromechanical systems (MEMS) have emerged as a new technology with enormous application potential. MEMS manufacturing techniques are essentially the same as those used in the semiconductor industry, therefore they can be produced in large quantities at low cost. The added benefits of lightweight, miniature size and low energy consumption make MEMS commercialization very attractive. Modeling and simulation is an indispensable tool in the process of studying these new dynamic phenomena, development of new microdevices and improvement of the existing designs. MEMS technology is inherently multidisciplinary since operation of microdevices involves interaction of several energy domains of different physical nature, for example, mechanical, fluidic and electric forces. Dynamic behavior of contact-type electrostatic microactuators, such as a microswitches, is determined by nonlinear fluidic-structural, electrostatic-structural and vibro-impact interactions. The latter is particularly important: Therefore it is crucial to develop accurate computational models for numerical analysis of the aforementioned interactions in order to better understand coupled-field effects, study important system dynamic characteristics and thereby formulate guidelines for the development of more reliable microdevices with enhanced performance, reliability and functionality.

Analysis and Design Principles of MEMS Devices

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Author :
Publisher : Elsevier
ISBN 13 : 008045562X
Total Pages : 327 pages
Book Rating : 4.0/5 (84 download)

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Book Synopsis Analysis and Design Principles of MEMS Devices by : Minhang Bao

Download or read book Analysis and Design Principles of MEMS Devices written by Minhang Bao and published by Elsevier. This book was released on 2005-04-12 with total page 327 pages. Available in PDF, EPUB and Kindle. Book excerpt: Sensors and actuators are now part of our everyday life and appear in many appliances, such as cars, vending machines and washing machines. MEMS (Micro Electro Mechanical Systems) are micro systems consisting of micro mechanical sensors, actuators and micro electronic circuits. A variety of MEMS devices have been developed and many mass produced, but the information on these is widely dispersed in the literature. This book presents the analysis and design principles of MEMS devices. The information is comprehensive, focusing on microdynamics, such as the mechanics of beam and diaphragm structures, air damping and its effect on the motion of mechanical structures. Using practical examples, the author examines problems associated with analysis and design, and solutions are included at the back of the book. The ideal advanced level textbook for graduates, Analysis and Design Principles of MEMS Devices is a suitable source of reference for researchers and engineers in the field.* Presents the analysis and design principles of MEMS devices more systematically than ever before.* Includes the theories essential for the analysis and design of MEMS includes the dynamics of micro mechanical structures* A problem section is included at the end of each chapter with answers provided at the end of the book.

MEMS Linear and Nonlinear Statics and Dynamics

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Publisher : Springer Science & Business Media
ISBN 13 : 1441960201
Total Pages : 463 pages
Book Rating : 4.4/5 (419 download)

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Book Synopsis MEMS Linear and Nonlinear Statics and Dynamics by : Mohammad I. Younis

Download or read book MEMS Linear and Nonlinear Statics and Dynamics written by Mohammad I. Younis and published by Springer Science & Business Media. This book was released on 2011-06-27 with total page 463 pages. Available in PDF, EPUB and Kindle. Book excerpt: MEMS Linear and Nonlinear Statics and Dynamics presents the necessary analytical and computational tools for MEMS designers to model and simulate most known MEMS devices, structures, and phenomena. This book also provides an in-depth analysis and treatment of the most common static and dynamic phenomena in MEMS that are encountered by engineers. Coverage also includes nonlinear modeling approaches to modeling various MEMS phenomena of a nonlinear nature, such as those due to electrostatic forces, squeeze-film damping, and large deflection of structures. The book also: Includes examples of numerous MEMS devices and structures that require static or dynamic modeling Provides code for programs in Matlab, Mathematica, and ANSYS for simulating the behavior of MEMS structures Provides real world problems related to the dynamics of MEMS such as dynamics of electrostatically actuated devices, stiction and adhesion of microbeams due to electrostatic and capillary forces MEMS Linear and Nonlinear Statics and Dynamics is an ideal volume for researchers and engineers working in MEMS design and fabrication.

Advances in Multiphysics Simulation and Experimental Testing of Mems

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Author :
Publisher : Imperial College Press
ISBN 13 : 1860948634
Total Pages : 504 pages
Book Rating : 4.8/5 (69 download)

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Book Synopsis Advances in Multiphysics Simulation and Experimental Testing of Mems by : Attilio Frangi

Download or read book Advances in Multiphysics Simulation and Experimental Testing of Mems written by Attilio Frangi and published by Imperial College Press. This book was released on 2008 with total page 504 pages. Available in PDF, EPUB and Kindle. Book excerpt: This volume takes a much needed multiphysical approach to the numerical and experimental evaluation of the mechanical properties of MEMS and NEMS. The contributed chapters present many of the most recent developments in fields ranging from microfluids and damping to structural analysis, topology optimization and nanoscale simulations. The book responds to a growing need emerging in academia and industry to merge different areas of expertise towards a unified design and analysis of MEMS and NEMS.

Principles of Microelectromechanical Systems

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Author :
Publisher : John Wiley & Sons
ISBN 13 : 111810224X
Total Pages : 552 pages
Book Rating : 4.1/5 (181 download)

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Book Synopsis Principles of Microelectromechanical Systems by : Ki Bang Lee

Download or read book Principles of Microelectromechanical Systems written by Ki Bang Lee and published by John Wiley & Sons. This book was released on 2011-03-21 with total page 552 pages. Available in PDF, EPUB and Kindle. Book excerpt: The building blocks of MEMS design through closed-form solutions Microelectromechanical Systems, or MEMS, is the technology of very small systems; it is found in everything from inkjet printers and cars to cell phones, digital cameras, and medical equipment. This book describes the principles of MEMS via a unified approach and closed-form solutions to micromechanical problems, which have been recently developed by the author and go beyond what is available in other texts. The closed-form solutions allow the reader to easily understand the linear and nonlinear behaviors of MEMS and their design applications. Beginning with an overview of MEMS, the opening chapter also presents dimensional analysis that provides basic dimensionless parameters existing in large- and small-scale worlds. The book then explains microfabrication, which presents knowledge on the common fabrication process to design realistic MEMS. From there, coverage includes: Statics/force and moment acting on mechanical structures in static equilibrium Static behaviors of structures consisting of mechanical elements Dynamic responses of the mechanical structures by the solving of linear as well as nonlinear governing equations Fluid flow in MEMS and the evaluation of damping force acting on the moving structures Basic equations of electromagnetics that govern the electrical behavior of MEMS Combining the MEMS building blocks to form actuators and sensors for a specific purpose All chapters from first to last use a unified approach in which equations in previous chapters are used in the derivations of closed-form solutions in later chapters. This helps readers to easily understand the problems to be solved and the derived solutions. In addition, theoretical models for the elements and systems in the later chapters are provided, and solutions for the static and dynamic responses are obtained in closed-forms. This book is designed for senior or graduate students in electrical and mechanical engineering, researchers in MEMS, and engineers from industry. It is ideal for radio frequency/electronics/sensor specialists who, for design purposes, would like to forego numerical nonlinear mechanical simulations. The closed-form solution approach will also appeal to device designers interested in performing large-scale parametric analysis.

Coupled Dynamics of Thin Micro Electro Mechanical Systems

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Publisher :
ISBN 13 :
Total Pages : 0 pages
Book Rating : 4.:/5 (671 download)

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Book Synopsis Coupled Dynamics of Thin Micro Electro Mechanical Systems by : Ranajay Ghosh

Download or read book Coupled Dynamics of Thin Micro Electro Mechanical Systems written by Ranajay Ghosh and published by . This book was released on 2010 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt: Microelectromechanical systems (MEMS) combine high levels sensitivity and multifunctionality with small size and low power consumption. The major prime mover for MEMS industry in the past has been automobiles whereas consumer electronics (E.g. iPhones and Nintendo Wii) is the most important sector for growth now. With new focus on small scale energy harvesting from ambient vibration and air flow, MEMS have definitely entered a new generation. A significant factor propelling design and manufacturing is the need for reliable and robust computational tools. The basic skeleton of MEMS still remain suspended or anchored beams and plates actuated by electrical, electrostatic, thermal, magnetic or photonic mechanisms. This dissertation describes the simulation of coupled dynamics of thin MEMS actuated electrostatically and vibrating in a fluid medium. Although, only micro-beams are addressed here, the computational structure developed here can be directly used to address other forms of actuation or medium. A fully Lagrangian approach is developed to couple the electrostatic, fluidic and mechanical problem which is then solved using Newton's method. This approach eliminates the problems arising from remeshing and computing of derivatives of integrals over changing domain shapes. The mechanical problem is solved using finite element method (FEM) whereas the fluidic and electrostatic problems are tackled using the boundary element method (BEM). Severe numerical issues arise when dealing with very thin microstruc- tures (very high aspect ratio) for the BEM problem due to nearly singular integrals. A special BEM which addresses these problems has been developed for both the electrostatic and the fluidic problem. A singularity of mathematical nature arises at the free edge for the electrostatic BEM problem when dealing with cantilevers. This problem is solved by incorporating a singular element formulation for the electrostatic BEM. The resulting solution is compared with the case of simple extrapolation for some typical performance parameters. Finally, several possible extensions of current work like adapting the algorithm for nanoelectromechanical systems (NEMS), computational acceleration using the fast multipole method (FMM) and quantifying uncertainty has been explained in the concluding chapter.

Mechanics of Microsystems

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Publisher : John Wiley & Sons
ISBN 13 : 1119053838
Total Pages : 332 pages
Book Rating : 4.1/5 (19 download)

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Book Synopsis Mechanics of Microsystems by : Alberto Corigliano

Download or read book Mechanics of Microsystems written by Alberto Corigliano and published by John Wiley & Sons. This book was released on 2018-04-02 with total page 332 pages. Available in PDF, EPUB and Kindle. Book excerpt: Mechanics of Microsystems Alberto Corigliano, Raffaele Ardito, Claudia Comi, Attilio Frangi, Aldo Ghisi and Stefano Mariani, Politecnico di Milano, Italy A mechanical approach to microsystems, covering fundamental concepts including MEMS design, modelling and reliability Mechanics of Microsystems takes a mechanical approach to microsystems and covers fundamental concepts including MEMS design, modelling and reliability. The book examines the mechanical behaviour of microsystems from a ‘design for reliability’ point of view and includes examples of applications in industry. Mechanics of Microsystems is divided into two main parts. The first part recalls basic knowledge related to the microsystems behaviour and offers an overview on microsystems and fundamental design and modelling tools from a mechanical point of view, together with many practical examples of real microsystems. The second part covers the mechanical characterization of materials at the micro-scale and considers the most important reliability issues (fracture, fatigue, stiction, damping phenomena, etc) which are fundamental to fabricate a real working device. Key features: Provides an overview of MEMS, with special focus on mechanical-based Microsystems and reliability issues. Includes examples of applications in industry. Accompanied by a website hosting supplementary material. The book provides essential reading for researchers and practitioners working with MEMS, as well as graduate students in mechanical, materials and electrical engineering.

Microfluid Mechanics

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Publisher : McGraw Hill Professional
ISBN 13 : 0071588884
Total Pages : 369 pages
Book Rating : 4.0/5 (715 download)

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Book Synopsis Microfluid Mechanics by : William Liou

Download or read book Microfluid Mechanics written by William Liou and published by McGraw Hill Professional. This book was released on 2005-09-07 with total page 369 pages. Available in PDF, EPUB and Kindle. Book excerpt: Publisher's Note: Products purchased from Third Party sellers are not guaranteed by the publisher for quality, authenticity, or access to any online entitlements included with the product. The rapid progress in fabricating and utilizing microelectromechanical (MEMS) systems during the last decade is not matched by corresponding understanding of the unconventional fluid flow involved in the operation and manufacture of these small devices. Providing such understanding is crucial to designing, optimizing, fabricating and operating improved MEMS devices. Microfluid Mechanics: Principles and Modeling is a rigorous reference that begins with the fundamental principles governing microfluid mechanics and progresses to more complex mathematical models, which will allow research engineers to better measure and predict reactions of gaseous and liquids in microenvironments.

An Efficient Method for Modelling Multibody System Dynamics with Many Unilateral Constraints (and Its Application to Microelectromechanical Systems (MEMS)).

Download An Efficient Method for Modelling Multibody System Dynamics with Many Unilateral Constraints (and Its Application to Microelectromechanical Systems (MEMS)). PDF Online Free

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Publisher :
ISBN 13 : 9780542252556
Total Pages : 130 pages
Book Rating : 4.2/5 (525 download)

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Book Synopsis An Efficient Method for Modelling Multibody System Dynamics with Many Unilateral Constraints (and Its Application to Microelectromechanical Systems (MEMS)). by : Michael John Sadowski

Download or read book An Efficient Method for Modelling Multibody System Dynamics with Many Unilateral Constraints (and Its Application to Microelectromechanical Systems (MEMS)). written by Michael John Sadowski and published by . This book was released on 2005 with total page 130 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Resonant MEMS

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Publisher : John Wiley & Sons
ISBN 13 : 352767635X
Total Pages : 512 pages
Book Rating : 4.5/5 (276 download)

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Book Synopsis Resonant MEMS by : Oliver Brand

Download or read book Resonant MEMS written by Oliver Brand and published by John Wiley & Sons. This book was released on 2015-04-22 with total page 512 pages. Available in PDF, EPUB and Kindle. Book excerpt: Part of the AMN book series, this book covers the principles, modeling and implementation as well as applications of resonant MEMS from a unified viewpoint. It starts out with the fundamental equations and phenomena that govern the behavior of resonant MEMS and then gives a detailed overview of their implementation in capacitive, piezoelectric, thermal and organic devices, complemented by chapters addressing the packaging of the devices and their stability. The last part of the book is devoted to the cutting-edge applications of resonant MEMS such as inertial, chemical and biosensors, fluid properties sensors, timing devices and energy harvesting systems.

System Dynamics for Engineering Students

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Publisher : Academic Press
ISBN 13 : 0124172091
Total Pages : 786 pages
Book Rating : 4.1/5 (241 download)

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Book Synopsis System Dynamics for Engineering Students by : Nicolae Lobontiu

Download or read book System Dynamics for Engineering Students written by Nicolae Lobontiu and published by Academic Press. This book was released on 2017-08-29 with total page 786 pages. Available in PDF, EPUB and Kindle. Book excerpt: Engineering system dynamics focuses on deriving mathematical models based on simplified physical representations of actual systems, such as mechanical, electrical, fluid, or thermal, and on solving these models for analysis or design purposes. System Dynamics for Engineering Students: Concepts and Applications features a classical approach to system dynamics and is designed to be utilized as a one-semester system dynamics text for upper-level undergraduate students with emphasis on mechanical, aerospace, or electrical engineering. It is the first system dynamics textbook to include examples from compliant (flexible) mechanisms and micro/nano electromechanical systems (MEMS/NEMS). This new second edition has been updated to provide more balance between analytical and computational approaches; introduces additional in-text coverage of Controls; and includes numerous fully solved examples and exercises. - Features a more balanced treatment of mechanical, electrical, fluid, and thermal systems than other texts - Introduces examples from compliant (flexible) mechanisms and MEMS/NEMS - Includes a chapter on coupled-field systems - Incorporates MATLAB® and Simulink® computational software tools throughout the book - Supplements the text with extensive instructor support available online: instructor's solution manual, image bank, and PowerPoint lecture slides NEW FOR THE SECOND EDITION - Provides more balance between analytical and computational approaches, including integration of Lagrangian equations as another modelling technique of dynamic systems - Includes additional in-text coverage of Controls, to meet the needs of schools that cover both controls and system dynamics in the course - Features a broader range of applications, including additional applications in pneumatic and hydraulic systems, and new applications in aerospace, automotive, and bioengineering systems, making the book even more appealing to mechanical engineers - Updates include new and revised examples and end-of-chapter exercises with a wider variety of engineering applications

Micro Electro Mechanical System Design

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Author :
Publisher : CRC Press
ISBN 13 : 1420027751
Total Pages : 492 pages
Book Rating : 4.4/5 (2 download)

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Book Synopsis Micro Electro Mechanical System Design by : James J. Allen

Download or read book Micro Electro Mechanical System Design written by James J. Allen and published by CRC Press. This book was released on 2005-07-08 with total page 492 pages. Available in PDF, EPUB and Kindle. Book excerpt: It is challenging at best to find a resource that provides the breadth of information necessary to develop a successful micro electro mechanical system (MEMS) design. Micro Electro Mechanical System Design is that resource. It is a comprehensive, single-source guide that explains the design process by illustrating the full range of issues involved,

Structural Nonlinear Dynamics and Diagnosis

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Publisher : Springer
ISBN 13 : 3319198513
Total Pages : 511 pages
Book Rating : 4.3/5 (191 download)

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Book Synopsis Structural Nonlinear Dynamics and Diagnosis by : Mohamed Belhaq

Download or read book Structural Nonlinear Dynamics and Diagnosis written by Mohamed Belhaq and published by Springer. This book was released on 2015-08-13 with total page 511 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book, which presents the peer-reviewed post-proceedings of CSNDD 2012 and CSNDD 2014, addresses the important role that relevant concepts and tools from nonlinear and complex dynamics could play in present and future engineering applications. It includes 22 chapters contributed by outstanding researchers and covering various aspects of applications, including: structural health monitoring, diagnosis and damage detection, experimental methodologies, active vibration control and smart structures, passive control of structures using nonlinear energy sinks, vibro-impact dynamic MEMS/NEMS/AFM, energy-harvesting materials and structures, and time-delayed feedback control, as well as aspects of deterministic versus stochastic dynamics and control of nonlinear phenomena in physics. Researchers and engineers interested in the challenges posed and opportunities offered by nonlinearities in the development of passive and active control strategies, energy harvesting, novel design criteria, modeling and characterization will find the book to be an outstanding introduction.

Global Nonlinear Dynamics for Engineering Design and System Safety

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Author :
Publisher : Springer
ISBN 13 : 3319997106
Total Pages : 327 pages
Book Rating : 4.3/5 (199 download)

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Book Synopsis Global Nonlinear Dynamics for Engineering Design and System Safety by : Stefano Lenci

Download or read book Global Nonlinear Dynamics for Engineering Design and System Safety written by Stefano Lenci and published by Springer. This book was released on 2018-09-24 with total page 327 pages. Available in PDF, EPUB and Kindle. Book excerpt: This is the first book which exploits concepts and tools of global nonlinear dynamics for bridging the gap between theoretical and practical stability of systems/structures, and for possibly enhancing the engineering design in macro-, micro- and nano-mechanics. Addressed topics include complementing theoretical and practical stability to achieve load carrying capacity; dynamical integrity for analyzing global dynamics, for interpreting/predicting experimental behavior, for getting hints towards engineering design; techniques for control of chaos; response of uncontrolled and controlled system/models in applied mechanics and structural dynamics by also considerung the effect of system imperfections; from relatively simple systems to multidimensional models representative of real world applications; potential and expected impact of global dynamics for engineering design.

Tribology and Dynamics of Engine and Powertrain

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Author :
Publisher : Elsevier
ISBN 13 : 1845699939
Total Pages : 1059 pages
Book Rating : 4.8/5 (456 download)

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Book Synopsis Tribology and Dynamics of Engine and Powertrain by : Homer Rahnejat

Download or read book Tribology and Dynamics of Engine and Powertrain written by Homer Rahnejat and published by Elsevier. This book was released on 2010-09-30 with total page 1059 pages. Available in PDF, EPUB and Kindle. Book excerpt: Tribology, the science of friction, wear and lubrication, is one of the cornerstones of engineering's quest for efficiency and conservation of resources. Tribology and dynamics of engine and powertrain: fundamentals, applications and future trends provides an authoritative and comprehensive overview of the disciplines of dynamics and tribology using a multi-physics and multi-scale approach to improve automotive engine and powertrain technology.Part one reviews the fundamental aspects of the physics of motion, particularly the multi-body approach to multi-physics, multi-scale problem solving in tribology. Fundamental issues in tribology are then described in detail,from surface phenomena in thin-film tribology, to impact dynamics, fluid film and elastohydrodynamic lubrication means of measurement and evaluation. These chapters provide an understanding of the theoretical foundation for Part II which includes many aspects of the physics of motion at a multitude of interaction scales from large displacement dynamics to noise and vibration tribology, all of which affect engines and powertrains. Many chapters are contributed by well-established practitioners disseminating their valuable knowledge and expertise on specific engine and powertrain sub-systems. These include overviews of engine and powertrain issues, engine bearings, piston systems, valve trains, transmission and many aspects of drivetrain systems. The final part of the book considers the emerging areas of microengines and gears as well as nano-scale surface engineering.With its distinguished editor and international team of academic and industry contributors, Tribology and dynamics of engine and powertrain is a standard work for automotive engineers and all those researching NVH and tribological issues in engineering. - Reviews fundamental aspects of physics in motion, specifically the multi-body approach to multi physics - Describes essential issues in tribology from surface phenomena in thin film tribology to impact dynamics - Examines specific engine and powertrain sub-systems including engine bearings, piston systems and value trains