MEMS Materials and Processes Handbook

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Publisher : Springer Science & Business Media
ISBN 13 : 0387473181
Total Pages : 1211 pages
Book Rating : 4.3/5 (874 download)

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Book Synopsis MEMS Materials and Processes Handbook by : Reza Ghodssi

Download or read book MEMS Materials and Processes Handbook written by Reza Ghodssi and published by Springer Science & Business Media. This book was released on 2011-03-18 with total page 1211 pages. Available in PDF, EPUB and Kindle. Book excerpt: MEMs Materials and Processes Handbook" is a comprehensive reference for researchers searching for new materials, properties of known materials, or specific processes available for MEMS fabrication. The content is separated into distinct sections on "Materials" and "Processes". The extensive Material Selection Guide" and a "Material Database" guides the reader through the selection of appropriate materials for the required task at hand. The "Processes" section of the book is organized as a catalog of various microfabrication processes, each with a brief introduction to the technology, as well as examples of common uses in MEMs.

Micromanufacturing and Nanotechnology

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Publisher : Springer Science & Business Media
ISBN 13 : 3540293396
Total Pages : 478 pages
Book Rating : 4.5/5 (42 download)

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Book Synopsis Micromanufacturing and Nanotechnology by : Nitaigour P. Mahalik

Download or read book Micromanufacturing and Nanotechnology written by Nitaigour P. Mahalik and published by Springer Science & Business Media. This book was released on 2006-01-16 with total page 478 pages. Available in PDF, EPUB and Kindle. Book excerpt: Micromanufacturing and Nanotechnology is an emerging technological infrastructure and process that involves manufacturing of products and systems at the micro and nano scale levels. Development of micro and nano scale products and systems are underway due to the reason that they are faster, accurate and less expensive. Moreover, the basic functional units of such systems possesses remarkable mechanical, electronic and chemical properties compared to the macro-scale counterparts. Since this infrastructure has already become the prefered choice for the design and development of next generation products and systems it is now necessary to disseminate the conceptual and practical phenomenological know-how in a broader context. This book incorporates a selection of research and development papers. Its scope is the history and background, underlynig design methodology, application domains and recent developments.

Fundamentals of Microfabrication and Nanotechnology, Three-Volume Set

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Author :
Publisher : CRC Press
ISBN 13 : 1482274663
Total Pages : 1983 pages
Book Rating : 4.4/5 (822 download)

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Book Synopsis Fundamentals of Microfabrication and Nanotechnology, Three-Volume Set by : Marc J. Madou

Download or read book Fundamentals of Microfabrication and Nanotechnology, Three-Volume Set written by Marc J. Madou and published by CRC Press. This book was released on 2018-12-14 with total page 1983 pages. Available in PDF, EPUB and Kindle. Book excerpt: Now in its third edition, Fundamentals of Microfabrication and Nanotechnology continues to provide the most complete MEMS coverage available. Thoroughly revised and updated the new edition of this perennial bestseller has been expanded to three volumes, reflecting the substantial growth of this field. It includes a wealth of theoretical and practical information on nanotechnology and NEMS and offers background and comprehensive information on materials, processes, and manufacturing options. The first volume offers a rigorous theoretical treatment of micro- and nanosciences, and includes sections on solid-state physics, quantum mechanics, crystallography, and fluidics. The second volume presents a very large set of manufacturing techniques for micro- and nanofabrication and covers different forms of lithography, material removal processes, and additive technologies. The third volume focuses on manufacturing techniques and applications of Bio-MEMS and Bio-NEMS. Illustrated in color throughout, this seminal work is a cogent instructional text, providing classroom and self-learners with worked-out examples and end-of-chapter problems. The author characterizes and defines major research areas and illustrates them with examples pulled from the most recent literature and from his own work.

Analysis and Design Principles of MEMS Devices

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Publisher : Elsevier
ISBN 13 : 008045562X
Total Pages : 327 pages
Book Rating : 4.0/5 (84 download)

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Book Synopsis Analysis and Design Principles of MEMS Devices by : Minhang Bao

Download or read book Analysis and Design Principles of MEMS Devices written by Minhang Bao and published by Elsevier. This book was released on 2005-04-12 with total page 327 pages. Available in PDF, EPUB and Kindle. Book excerpt: Sensors and actuators are now part of our everyday life and appear in many appliances, such as cars, vending machines and washing machines. MEMS (Micro Electro Mechanical Systems) are micro systems consisting of micro mechanical sensors, actuators and micro electronic circuits. A variety of MEMS devices have been developed and many mass produced, but the information on these is widely dispersed in the literature. This book presents the analysis and design principles of MEMS devices. The information is comprehensive, focusing on microdynamics, such as the mechanics of beam and diaphragm structures, air damping and its effect on the motion of mechanical structures. Using practical examples, the author examines problems associated with analysis and design, and solutions are included at the back of the book. The ideal advanced level textbook for graduates, Analysis and Design Principles of MEMS Devices is a suitable source of reference for researchers and engineers in the field.* Presents the analysis and design principles of MEMS devices more systematically than ever before.* Includes the theories essential for the analysis and design of MEMS includes the dynamics of micro mechanical structures* A problem section is included at the end of each chapter with answers provided at the end of the book.

Interconnect-Centric Design for Advanced SOC and NOC

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Publisher : Springer Science & Business Media
ISBN 13 : 9781402078354
Total Pages : 474 pages
Book Rating : 4.0/5 (783 download)

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Book Synopsis Interconnect-Centric Design for Advanced SOC and NOC by : Jari Nurmi

Download or read book Interconnect-Centric Design for Advanced SOC and NOC written by Jari Nurmi and published by Springer Science & Business Media. This book was released on 2004-07-20 with total page 474 pages. Available in PDF, EPUB and Kindle. Book excerpt: In Interconnect-centric Design for Advanced SoC and NoC, we have tried to create a comprehensive understanding about on-chip interconnect characteristics, design methodologies, layered views on different abstraction levels and finally about applying the interconnect-centric design in system-on-chip design. Traditionally, on-chip communication design has been done using rather ad-hoc and informal approaches that fail to meet some of the challenges posed by next-generation SOC designs, such as performance and throughput, power and energy, reliability, predictability, synchronization, and management of concurrency. To address these challenges, it is critical to take a global view of the communication problem, and decompose it along lines that make it more tractable. We believe that a layered approach similar to that defined by the communication networks community should also be used for on-chip communication design. The design issues are handled on physical and circuit layer, logic and architecture layer, and from system design methodology and tools point of view. Formal communication modeling and refinement is used to bridge the communication layers, and network-centric modeling of multiprocessor on-chip networks and socket-based design will serve the development of platforms for SoC and NoC integration. Interconnect-centric Design for Advanced SoC and NoC is concluded by two application examples: interconnect and memory organization in SoCs for advanced set-top boxes and TV, and a case study in NoC platform design for more generic applications.

Microsystem Design

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Publisher : Springer Science & Business Media
ISBN 13 : 0306476010
Total Pages : 699 pages
Book Rating : 4.3/5 (64 download)

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Book Synopsis Microsystem Design by : Stephen D. Senturia

Download or read book Microsystem Design written by Stephen D. Senturia and published by Springer Science & Business Media. This book was released on 2005-12-20 with total page 699 pages. Available in PDF, EPUB and Kindle. Book excerpt: It is a real pleasure to write the Foreword for this book, both because I have known and respected its author for many years and because I expect this book’s publication will mark an important milestone in the continuing worldwide development of microsystems. By bringing together all aspects of microsystem design, it can be expected to facilitate the training of not only a new generation of engineers, but perhaps a whole new type of engineer – one capable of addressing the complex range of problems involved in reducing entire systems to the micro- and nano-domains. This book breaks down disciplinary barriers to set the stage for systems we do not even dream of today. Microsystems have a long history, dating back to the earliest days of mic- electronics. While integrated circuits developed in the early 1960s, a number of laboratories worked to use the same technology base to form integrated sensors. The idea was to reduce cost and perhaps put the sensors and circuits together on the same chip. By the late-60s, integrated MOS-photodiode arrays had been developed for visible imaging, and silicon etching was being used to create thin diaphragms that could convert pressure into an electrical signal. By 1970, selective anisotropic etching was being used for diaphragm formation, retaining a thick silicon rim to absorb package-induced stresses. Impurity- and electrochemically-based etch-stops soon emerged, and "bulk micromachining" came into its own.

Mems for Automotive and Aerospace Applications

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Publisher : Elsevier
ISBN 13 : 0857096486
Total Pages : 358 pages
Book Rating : 4.8/5 (57 download)

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Book Synopsis Mems for Automotive and Aerospace Applications by : Michael Kraft

Download or read book Mems for Automotive and Aerospace Applications written by Michael Kraft and published by Elsevier. This book was released on 2013-01-02 with total page 358 pages. Available in PDF, EPUB and Kindle. Book excerpt: MEMS for automotive and aerospace applications reviews the use of Micro-Electro-Mechanical-Systems (MEMS) in developing solutions to the unique challenges presented by the automotive and aerospace industries.Part one explores MEMS for a variety of automotive applications. The role of MEMS in passenger safety and comfort, sensors for automotive vehicle stability control applications and automotive tire pressure monitoring systems are considered, along with pressure and flow sensors for engine management, and RF MEMS for automotive radar sensors. Part two then goes on to explore MEMS for aerospace applications, including devices for active drag reduction in aerospace applications, inertial navigation and structural health monitoring systems, and thrusters for nano- and pico-satellites. A selection of case studies are used to explore MEMS for harsh environment sensors in aerospace applications, before the book concludes by considering the use of MEMS in space exploration and exploitation.With its distinguished editors and international team of expert contributors, MEMS for automotive and aerospace applications is a key tool for MEMS manufacturers and all scientists, engineers and academics working on MEMS and intelligent systems for transportation. - Chapters consider the role of MEMS in a number of automotive applications, including passenger safety and comfort, vehicle stability and control - MEMS for aerospace applications are also discussed, including active drag reduction, inertial navigation and structural health monitoring systems - Presents a number of case studies exploring MEMS for harsh environment sensors in aerospace

Fabrication and Design of Resonant Microdevices

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Author :
Publisher : William Andrew
ISBN 13 : 0815519710
Total Pages : 234 pages
Book Rating : 4.8/5 (155 download)

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Book Synopsis Fabrication and Design of Resonant Microdevices by : Behraad Bahreyni

Download or read book Fabrication and Design of Resonant Microdevices written by Behraad Bahreyni and published by William Andrew. This book was released on 2008-10-20 with total page 234 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book discusses the main issues of fabrication and design, and applications of micromachined resonant devices, including techniques commonly used for processing the output signal of resonant micro-electro-mechanical systems (MEMS). Concepts of resonance are introduced, with an overview of fabrication techniques for micromachined devices – important to understand as design options will depend on how the device will be fabricated. Also explained: excitation and signal detection methods; an analytic model of device behavior (a valuable design tool); numerical simulation techniques; issues of damping and noise for resonant MEMS; electronic interfacing; packaging issues; and numerous examples of resonant MEMS from academia and industry. - Offers numerous academic and industrial examples of resonant MEMS - Provides an analytic model of device behaviour - Explains two-port systems in detail - Devotes ample space to excitation and signal detection methods - Covers issues of damping and noise for resonant MEMS, two topics of particular importance for high-Q devices

Manufacturing Techniques for Microfabrication and Nanotechnology

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Author :
Publisher : CRC Press
ISBN 13 : 1420055194
Total Pages : 672 pages
Book Rating : 4.4/5 (2 download)

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Book Synopsis Manufacturing Techniques for Microfabrication and Nanotechnology by : Marc J. Madou

Download or read book Manufacturing Techniques for Microfabrication and Nanotechnology written by Marc J. Madou and published by CRC Press. This book was released on 2011-06-13 with total page 672 pages. Available in PDF, EPUB and Kindle. Book excerpt: Designed for science and engineering students, this text focuses on emerging trends in processes for fabricating MEMS and NEMS devices. The book reviews different forms of lithography, subtractive material removal processes, and additive technologies. Both top-down and bottom-up fabrication processes are exhaustively covered and the merits of the different approaches are compared. Students can use this color volume as a guide to help establish the appropriate fabrication technique for any type of micro- or nano-machine.

Handbook of Silicon Based MEMS Materials and Technologies

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Publisher : Elsevier
ISBN 13 : 0815519885
Total Pages : 670 pages
Book Rating : 4.8/5 (155 download)

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Book Synopsis Handbook of Silicon Based MEMS Materials and Technologies by : Markku Tilli

Download or read book Handbook of Silicon Based MEMS Materials and Technologies written by Markku Tilli and published by Elsevier. This book was released on 2009-12-08 with total page 670 pages. Available in PDF, EPUB and Kindle. Book excerpt: A comprehensive guide to MEMS materials, technologies and manufacturing, examining the state of the art with a particular emphasis on current and future applications. Key topics covered include: - Silicon as MEMS material - Material properties and measurement techniques - Analytical methods used in materials characterization - Modeling in MEMS - Measuring MEMS - Micromachining technologies in MEMS - Encapsulation of MEMS components - Emerging process technologies, including ALD and porous silicon Written by 73 world class MEMS contributors from around the globe, this volume covers materials selection as well as the most important process steps in bulk micromachining, fulfilling the needs of device design engineers and process or development engineers working in manufacturing processes. It also provides a comprehensive reference for the industrial R&D and academic communities. - Veikko Lindroos is Professor of Physical Metallurgy and Materials Science at Helsinki University of Technology, Finland. - Markku Tilli is Senior Vice President of Research at Okmetic, Vantaa, Finland. - Ari Lehto is Professor of Silicon Technology at Helsinki University of Technology, Finland. - Teruaki Motooka is Professor at the Department of Materials Science and Engineering, Kyushu University, Japan. - Provides vital packaging technologies and process knowledge for silicon direct bonding, anodic bonding, glass frit bonding, and related techniques - Shows how to protect devices from the environment and decrease package size for dramatic reduction of packaging costs - Discusses properties, preparation, and growth of silicon crystals and wafers - Explains the many properties (mechanical, electrostatic, optical, etc), manufacturing, processing, measuring (incl. focused beam techniques), and multiscale modeling methods of MEMS structures

Networks on Chip

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Publisher : Springer Science & Business Media
ISBN 13 : 0306487276
Total Pages : 304 pages
Book Rating : 4.3/5 (64 download)

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Book Synopsis Networks on Chip by : Axel Jantsch

Download or read book Networks on Chip written by Axel Jantsch and published by Springer Science & Business Media. This book was released on 2007-05-08 with total page 304 pages. Available in PDF, EPUB and Kindle. Book excerpt: As the number of processor cores and IP blocks integrated on a single chip is steadily growing, a systematic approach to design the communication infrastructure becomes necessary. Different variants of packed switched on-chip networks have been proposed by several groups during the past two years. This book summarizes the state of the art of these efforts and discusses the major issues from the physical integration to architecture to operating systems and application interfaces. It also provides a guideline and vision about the direction this field is moving to. Moreover, the book outlines the consequences of adopting design platforms based on packet switched network. The consequences may in fact be far reaching because many of the topics of distributed systems, distributed real-time systems, fault tolerant systems, parallel computer architecture, parallel programming as well as traditional system-on-chip issues will appear relevant but within the constraints of a single chip VLSI implementation.

Diamond-like Carbon Films

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Publisher : Nova Biomedical Books
ISBN 13 : 9781613247914
Total Pages : 0 pages
Book Rating : 4.2/5 (479 download)

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Book Synopsis Diamond-like Carbon Films by : Yuto S. Tanaka

Download or read book Diamond-like Carbon Films written by Yuto S. Tanaka and published by Nova Biomedical Books. This book was released on 2012-02 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book presents current research from across the globe in the study of diamond-like carbon films. Topics discussed include the peculiarities of ion-beam synthesis of carbon-based phases; electron field emission properties of non-metal and metal doped diamond like carbon; internal stress and its reduction of hydrogenated diamond-like carbon thin films deposited by plasma CVD methods; incorporating crystalline diamond particles in diamond-like carbon films to improve their properties and diamond-like carbon films applied as an alignment layer for LCDs.

Solid-State Physics, Fluidics, and Analytical Techniques in Micro- and Nanotechnology

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Publisher : CRC Press
ISBN 13 : 1420055119
Total Pages : 658 pages
Book Rating : 4.4/5 (2 download)

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Book Synopsis Solid-State Physics, Fluidics, and Analytical Techniques in Micro- and Nanotechnology by : Marc J. Madou

Download or read book Solid-State Physics, Fluidics, and Analytical Techniques in Micro- and Nanotechnology written by Marc J. Madou and published by CRC Press. This book was released on 2011-06-13 with total page 658 pages. Available in PDF, EPUB and Kindle. Book excerpt: Providing a clear theoretical understanding of MEMS and NEMS, Solid-State Physics, Fluidics, and Analytical Techniques in Micro- and Nanotechnology focuses on nanotechnology and the science behind it, including solid-state physics. It provides a clear understanding of the electronic, mechanical, and optical properties of solids relied on in integrated circuits (ICs), MEMS, and NEMS. After exploring the rise of Si, MEMS, and NEMS in a historical context, the text discusses crystallography, quantum mechanics, the band theory of solids, and the silicon single crystal. It concludes with coverage of photonics, the quantum hall effect, and superconductivity. Fully illustrated in color, the text offers end-of-chapter problems, worked examples, extensive references, and a comprehensive glossary of terms. Topics include: Crystallography and the crystalline materials used in many semiconductor devices Quantum mechanics, the band theory of solids, and the relevance of quantum mechanics in the context of ICs and NEMS Single crystal Si properties that conspire to make Si so important Optical properties of bulk 3D metals, insulators, and semiconductors Effects of electron and photon confinement in lower dimensional structures How evanescent fields on metal surfaces enable the guiding of light below the diffraction limit in plasmonics Metamaterials and how they could make for perfect lenses, changing the photonic field forever Fluidic propulsion mechanisms and the influence of miniaturization on fluid behavior Electromechanical and optical analytical processes in miniaturized components and systems The first volume in Fundamentals of Microfabrication and Nanotechnology, Third Edition, Three-Volume Set, the book presents the electronic, mechanical, and optical properties of solids that are used in integrated circuits, MEMS, and NEMS and covers quantum mechanics, electrochemistry, fluidics, and photonics. It lays the foundation for a qualitative and quantitative theoretical understanding of MEMS and NEMS.

From MEMS to Bio-MEMS and Bio-NEMS Manufacturing Techniques and Applications

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Author :
Publisher : CRC Press
ISBN 13 : 9780429109218
Total Pages : 650 pages
Book Rating : 4.1/5 (92 download)

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Book Synopsis From MEMS to Bio-MEMS and Bio-NEMS Manufacturing Techniques and Applications by : Marc J. Madou

Download or read book From MEMS to Bio-MEMS and Bio-NEMS Manufacturing Techniques and Applications written by Marc J. Madou and published by CRC Press. This book was released on 2011 with total page 650 pages. Available in PDF, EPUB and Kindle. Book excerpt: From MEMS to Bio-MEMS and Bio-NEMS: Manufacturing Techniques and Applications details manufacturing techniques applicable to bionanotechnology. After reviewing MEMS techniques, materials, and modeling, the author covers nanofabrication, genetically engineered proteins, artificial cells, nanochemistry, and self-assembly. He also discusses scaling laws in MEMS and NEMS, actuators, fluidics, and power and brains in miniature devices. He concludes with coverage of various MEMS and NEMS applications. Fully illustrated in color, the text contains end-of-chapter problems, worked examples, extensive references for further reading, and an extensive glossary of terms.

Magnetism

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Publisher : John Wiley & Sons
ISBN 13 : 3527604502
Total Pages : 395 pages
Book Rating : 4.5/5 (276 download)

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Book Synopsis Magnetism by : Joel S. Miller

Download or read book Magnetism written by Joel S. Miller and published by John Wiley & Sons. This book was released on 2006-03-06 with total page 395 pages. Available in PDF, EPUB and Kindle. Book excerpt: Combining the contemporary knowledge from widely scattered sources, this is a much-needed and comprehensive overview of the field. In maintaining a balance between theory and experiment, the book guides both advanced students and specialists to this research area. Topical reviews written by the foremost scientists explain recent trends and advances, focusing on the correlations between electronic structure and magnetic properties. The book spans recent trends in magnetism for molecules -- as well as inorganic-based materials, with an emphasis on new phenomena being explored from both experimental and theoretical viewpoints with the aim of understanding magnetism on the atomic scale. The volume helps readers evaluate their own experimental observations and serves as a basis for the design of new magnetic materials. Topics covered include: * Metallocenium Salts of Radical Anion Bis-(dichalcogenate) metalates * Chiral Molecule-Based Magnets * Cooperative Magnetic Behavior in Metal-Dicyanamide Complexes * Lanthanide Ions in Molecular Exchange Coupled Systems * Monte Carlo Simulation * Metallocene-Based Magnets * Magnetic Nanoporous Molecular Materials A unique reference work, indispensable for everyone concerned with the phenomena of magnetism.

Magnetism and Structure in Functional Materials

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Publisher : Springer Science & Business Media
ISBN 13 : 3540316310
Total Pages : 261 pages
Book Rating : 4.5/5 (43 download)

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Book Synopsis Magnetism and Structure in Functional Materials by : Antoni Planes

Download or read book Magnetism and Structure in Functional Materials written by Antoni Planes and published by Springer Science & Business Media. This book was released on 2010-02-11 with total page 261 pages. Available in PDF, EPUB and Kindle. Book excerpt: Magnetism and Structure in Functional Materials addresses three distinct but related topics: (i) magnetoelastic materials such as magnetic martensites and magnetic shape memory alloys, (ii) the magnetocaloric effect related to magnetostructural transitions, and (iii) colossal magnetoresistance (CMR) and related manganites. The goal is to identify common underlying principles in these classes of materials that are relevant for optimizing various functionalities. The emergence of apparently different magnetic/structural phenomena in disparate classes of materials clearly points to a need for common concepts in order to achieve a broader understanding of the interplay between magnetism and structure in this general class of new functional materials exhibiting ever more complex microstructure and function. The topic is interdisciplinary in nature and the contributors correspondingly include physicists, materials scientists and engineers. Likewise the book will appeal to scientists from all these areas.

Comprehensive Microsystems

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Publisher :
ISBN 13 : 9780444521910
Total Pages : 0 pages
Book Rating : 4.5/5 (219 download)

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Book Synopsis Comprehensive Microsystems by : Yogesh B. Gianchandani

Download or read book Comprehensive Microsystems written by Yogesh B. Gianchandani and published by . This book was released on 2008 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt: The only comprehensive reference available on Microelectromechanical Systems (MEMS). This set provides an exhaustive overview of the wide range of topics which comprise the microsystems field. This is essential reference for both academics and professionals in the field.