Design Of A Monolithic 3dof Mems Capacitive Accelerometer

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Design of a Monolithic 3dof Mems Capacitive Accelerometer

Author : Muhammad Shuja Khan
Publisher : LAP Lambert Academic Publishing
ISBN 13 : 9783845409528
Total Pages : 92 pages
Book Rating : 4.4/5 (95 download)

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Book Synopsis Design of a Monolithic 3dof Mems Capacitive Accelerometer by : Muhammad Shuja Khan

Download or read book Design of a Monolithic 3dof Mems Capacitive Accelerometer written by Muhammad Shuja Khan and published by LAP Lambert Academic Publishing. This book was released on 2011-07 with total page 92 pages. Available in PDF, EPUB and Kindle. Book excerpt: Sensors and devices, based on micromachining technology, known as micro-electro-mechanicalsystems or MEMS, have been received increasing attention so far in recent years. Micromachined inertial sensors, consisting of accelerometers and gyroscopes, are one of the most important types of silicon-based sensor. MEMS capacitive accelerometers have been extensively used in automobiles, inertial navigation systems, earth quake detection and many other bio-medical applications. This book deals with the design of a monolithic 3DOF MEMS capacitive accelerometer using both analytical and numerical techniques. Monolithic accelerometer is a single structure having three individual single axis Accelerometers on a single substrate and utilizes a surface micromachining technology using standard PolyMUMPs process. The designed accelerometer is 3mmx3.1mm in size, has low mechanical noise floor, high sense capacitance and high sensitivity along in-plane (x and y) and out-of-plane (z) axes. Performing a detailed finite element analysis in ANSYS 11.o, physical level simulation has been done to verify the deflection for x, y and z axes with respect to the applied acceleration (g).

MEMS Silicon Oscillating Accelerometers and Readout Circuits

Author : Xu, Yong Ping
Publisher : River Publishers
ISBN 13 : 877022045X
Total Pages : 312 pages
Book Rating : 4.7/5 (72 download)

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Book Synopsis MEMS Silicon Oscillating Accelerometers and Readout Circuits by : Xu, Yong Ping

Download or read book MEMS Silicon Oscillating Accelerometers and Readout Circuits written by Xu, Yong Ping and published by River Publishers. This book was released on 2019-02-12 with total page 312 pages. Available in PDF, EPUB and Kindle. Book excerpt: Most MEMS accelerometers on the market today are capacitive accelerometers that are based on the displacement sensing mechanism. This book is intended to cover recent developments of MEMS silicon oscillating accelerometers (SOA), also referred to as MEMS resonant accelerometer. As contrast to the capacitive accelerometer, the MEMS SOA is based on the force sensing mechanism, where the input acceleration is converted to a frequency output. MEMS Silicon Oscillating Accelerometers and Readout Circuits consists of six chapters and covers both MEMS sensor and readout circuit, and provides an in-depth coverage on the design and modelling of the MEMS SOA with several recently reported prototypes. The book is not only useful to researchers and engineers who are familiar with the topic, but also appeals to those who have general interests in MEMS inertial sensors. The book includes extensive references that provide further information on this topic.

MEMS Accelerometers

Author : Mahmoud Rasras
Publisher : MDPI
ISBN 13 : 3038974145
Total Pages : 252 pages
Book Rating : 4.0/5 (389 download)

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Book Synopsis MEMS Accelerometers by : Mahmoud Rasras

Download or read book MEMS Accelerometers written by Mahmoud Rasras and published by MDPI. This book was released on 2019-05-27 with total page 252 pages. Available in PDF, EPUB and Kindle. Book excerpt: Micro-electro-mechanical system (MEMS) devices are widely used for inertia, pressure, and ultrasound sensing applications. Research on integrated MEMS technology has undergone extensive development driven by the requirements of a compact footprint, low cost, and increased functionality. Accelerometers are among the most widely used sensors implemented in MEMS technology. MEMS accelerometers are showing a growing presence in almost all industries ranging from automotive to medical. A traditional MEMS accelerometer employs a proof mass suspended to springs, which displaces in response to an external acceleration. A single proof mass can be used for one- or multi-axis sensing. A variety of transduction mechanisms have been used to detect the displacement. They include capacitive, piezoelectric, thermal, tunneling, and optical mechanisms. Capacitive accelerometers are widely used due to their DC measurement interface, thermal stability, reliability, and low cost. However, they are sensitive to electromagnetic field interferences and have poor performance for high-end applications (e.g., precise attitude control for the satellite). Over the past three decades, steady progress has been made in the area of optical accelerometers for high-performance and high-sensitivity applications but several challenges are still to be tackled by researchers and engineers to fully realize opto-mechanical accelerometers, such as chip-scale integration, scaling, low bandwidth, etc. This Special Issue on "MEMS Accelerometers" seeks to highlight research papers, short communications, and review articles that focus on: Novel designs, fabrication platforms, characterization, optimization, and modeling of MEMS accelerometers. Alternative transduction techniques with special emphasis on opto-mechanical sensing. Novel applications employing MEMS accelerometers for consumer electronics, industries, medicine, entertainment, navigation, etc. Multi-physics design tools and methodologies, including MEMS-electronics co-design. Novel accelerometer technologies and 9DoF IMU integration. Multi-accelerometer platforms and their data fusion.

Design of Monolithic CMOS-MEMS Accelerometer with Integrated Temperature Compensation and DC-offset Cancellation Circuit

Author :
Publisher :
ISBN 13 :
Total Pages : pages
Book Rating : 4.:/5 (93 download)

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Book Synopsis Design of Monolithic CMOS-MEMS Accelerometer with Integrated Temperature Compensation and DC-offset Cancellation Circuit by :

Download or read book Design of Monolithic CMOS-MEMS Accelerometer with Integrated Temperature Compensation and DC-offset Cancellation Circuit written by and published by . This book was released on 2014 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:

Analysis and Design Principles of MEMS Devices

Author : Minhang Bao
Publisher : Elsevier
ISBN 13 : 008045562X
Total Pages : 327 pages
Book Rating : 4.0/5 (84 download)

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Book Synopsis Analysis and Design Principles of MEMS Devices by : Minhang Bao

Download or read book Analysis and Design Principles of MEMS Devices written by Minhang Bao and published by Elsevier. This book was released on 2005-04-12 with total page 327 pages. Available in PDF, EPUB and Kindle. Book excerpt: Sensors and actuators are now part of our everyday life and appear in many appliances, such as cars, vending machines and washing machines. MEMS (Micro Electro Mechanical Systems) are micro systems consisting of micro mechanical sensors, actuators and micro electronic circuits. A variety of MEMS devices have been developed and many mass produced, but the information on these is widely dispersed in the literature. This book presents the analysis and design principles of MEMS devices. The information is comprehensive, focusing on microdynamics, such as the mechanics of beam and diaphragm structures, air damping and its effect on the motion of mechanical structures. Using practical examples, the author examines problems associated with analysis and design, and solutions are included at the back of the book. The ideal advanced level textbook for graduates, Analysis and Design Principles of MEMS Devices is a suitable source of reference for researchers and engineers in the field. * Presents the analysis and design principles of MEMS devices more systematically than ever before. * Includes the theories essential for the analysis and design of MEMS includes the dynamics of micro mechanical structures * A problem section is included at the end of each chapter with answers provided at the end of the book.

Monolithic Accelerometer and Front-end Circuit Design with Standard 0.18um Mixed-signal MEMS Process

Author : Chun-Kai Wang
Publisher :
ISBN 13 :
Total Pages : pages
Book Rating : 4.:/5 (126 download)

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Book Synopsis Monolithic Accelerometer and Front-end Circuit Design with Standard 0.18um Mixed-signal MEMS Process by : Chun-Kai Wang

Download or read book Monolithic Accelerometer and Front-end Circuit Design with Standard 0.18um Mixed-signal MEMS Process written by Chun-Kai Wang and published by . This book was released on 2011 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:

Modeling and simulation of the capacitive accelerometer

Author : Tan Tran Duc
Publisher : GRIN Verlag
ISBN 13 : 3640249593
Total Pages : 83 pages
Book Rating : 4.6/5 (42 download)

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Book Synopsis Modeling and simulation of the capacitive accelerometer by : Tan Tran Duc

Download or read book Modeling and simulation of the capacitive accelerometer written by Tan Tran Duc and published by GRIN Verlag. This book was released on 2009-01-19 with total page 83 pages. Available in PDF, EPUB and Kindle. Book excerpt: Diploma Thesis from the year 2005 in the subject Electrotechnology, grade: Master 9.8/10, , language: English, abstract: Microelectromechanical systems (MEMS) are collection of microsensors and actuators that have the ability to sense its environment and react to changes in that environment with the use of a microcircuit control. They also include the conventional microelectronics packaging, integrating antenna structures for command signals into microelectromechanical structures for desired sensing and actuating functions. The system may also need micropower supply, microrelay, and microsignal processing units. Microcomponents make the system faster, more reliable, cheaper, and capable of incorporating more complex functions. In the beginning of 1990s, MEMS appeared with the aid of the development of integrated circuit fabrication processes, in which sensors, actuators, and control functions are co-fabricated in silicon [1]. Since then, remarkable research progresses have been achieved in MEMS under the strong promotions from both government and industries. In addition to the commercialization of some less integrated MEMS devices, such as microaccelerometers, inkjet printer head, micromirrors for projection, etc., the concepts and feasibility of more complex MEMS devices have been proposed and demonstrated for the applications in such varied fields as microfluidics, aerospace, biomedical, chemical analysis, wireless communications, data storage, display, optics, etc. Some branches of MEMS, appearing as microoptoelectromechanical systems (MOEMS), micro total analysis systems, etc., have attracted a great research since their potential applications’ market.

Design of Two-axis Capacitive Accelerometer Using MEMS

Author :
Publisher :
ISBN 13 :
Total Pages : 43 pages
Book Rating : 4.:/5 (587 download)

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Book Synopsis Design of Two-axis Capacitive Accelerometer Using MEMS by :

Download or read book Design of Two-axis Capacitive Accelerometer Using MEMS written by and published by . This book was released on 2004 with total page 43 pages. Available in PDF, EPUB and Kindle. Book excerpt: MEMS technology is rapidly taking an important role in today's and future military systems. MEMS are able to lower the device size from millimeter to micrometer and maintain and sometimes surpass the performance of conventional devices. This thesis encompasses the knowledge acquired throughout the MEMS courses to design a two-axis capacitive accelerometer. The required acceleration and operating temperature range were ł50g in each axis and -40ʻC to +80 ʻC, respectively. The accelerometer was also needed to survive within a dynamic shocking environment with accelerations of up to 225g. The parameters of the accelerometer to achieve above specifications were calculated using lumped element approximation and the results were used for initial layout of it. A finite element analysis code (ANSYS) was used to perform simulations of the accelerometer under various operating conditions and to determine the optimum configuration. The simulated results were found to be within about 5% of the calculations indicating the validity of lumped element approach. The response of the designed accelerometer was 7 mV/g and with sensitivity of 1.3g at 3dB. It was also found that the accelerometer was stable in the desired range of operation including under the shock. Two axes sensing can be achieved using two identical accelerometers having their sensing axes perpendicular to each other.

Design of a Power Scalable Capacitive MEMS Accelerometer Front End

Author : Colin Tse
Publisher :
ISBN 13 :
Total Pages : pages
Book Rating : 4.:/5 (13 download)

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Book Synopsis Design of a Power Scalable Capacitive MEMS Accelerometer Front End by : Colin Tse

Download or read book Design of a Power Scalable Capacitive MEMS Accelerometer Front End written by Colin Tse and published by . This book was released on 2013 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:

Design, Prototyping and Testing of Biaxial MEMS Accelerometers for Rigid-body Pose-and-twist Estimation

Author : Xiaowei Shan
Publisher :
ISBN 13 :
Total Pages : pages
Book Rating : 4.:/5 (1 download)

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Book Synopsis Design, Prototyping and Testing of Biaxial MEMS Accelerometers for Rigid-body Pose-and-twist Estimation by : Xiaowei Shan

Download or read book Design, Prototyping and Testing of Biaxial MEMS Accelerometers for Rigid-body Pose-and-twist Estimation written by Xiaowei Shan and published by . This book was released on 2017 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: "The reported research work aims to develop a novel class of accelerometers applicable to the high-accuracy estimation of rigid-body pose and twist. These accelerometers, based on a monolithic biaxial architecture, dubbed Orchid, were designed for fabrication as MEMS (microelectromechanical system) with isotropic stiffness in the sensitive plane and high frequency ratios between the insensitive and sensitive directions. The architecture is intended to accommodate any regular polygonal shape with a suspension that allows for an in-plane translation of the proof-mass with respect to the frame. Structural optimization is conducted to yield high frequency ratios and a high degree of compliance in the suspension, for low-g applications and planar excitation. Lamé curves are introduced in the fillets to relieve the stress concentration. The elastically isotropic structure in the sensitive plane is analyzed symbolically and validated numerically and experimentally. The microfabrication process was then devised and conducted with high precision for triangular and square Orchid structures. Techniques and recipes were studied to solve the wafer bonding problem with large cavities, adhesive influence on structural etching and reflectivity adjustment of the sample surface. Vibration tests were conducted in the MEMS prototypes to validate the isotropic sensitivity of the biaxial architecture. In light of the isotropic Orchid architecture, a novel biaxial MEMS accelerometer, W30P4, was designed, fabricated and tested for low-g applications. The accelerometer monolithic structure was optimally designed based on a fully symmetric architecture with a high frequency ratio between the insensitive and sensitive axes. To facilitate the utilization of the proposed architecture, an analysis environment is developed for the modal and static analyses of user-defined structural parameters. The sensing substructure was designed with a configurable comb-structure for simultaneous biaxial capacitive sensing. This accelerometer was fabricated with high precision and tested under 1-g acceleration, both statically and dynamically. Test results validate the isotropy of the Orchid architecture and the high signal-to-noise ratio of the W30P4 biaxial accelerometer. Finally, an accelerometer strapdown was designed and configured using the W30P4 accelerometers, based on an octahedron frame inscribing the tetrahedron strapdown. An embedded microsystem was devised and coded inside the accelerometer strapdown to convert and transmit the signals wirelessly to a host computer. Moreover, the mathematical and simulation models were established to estimate rigid-body pose and twist using this accelerometer strapdown. Test results on a haptic manipulator validate the effectiveness of its position estimation and provide insight into the hardware improvement." --

Design of Two-Axis Capacitive Accelerater Using MEMS.

Author :
Publisher :
ISBN 13 :
Total Pages : 59 pages
Book Rating : 4.:/5 (742 download)

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Book Synopsis Design of Two-Axis Capacitive Accelerater Using MEMS. by :

Download or read book Design of Two-Axis Capacitive Accelerater Using MEMS. written by and published by . This book was released on 2004 with total page 59 pages. Available in PDF, EPUB and Kindle. Book excerpt: MEMS technology is rapidly taking an important role in today's and future military systems. MEMS are able to lower the device size from millimeter to micrometer and maintain and sometimes surpass the performance of conventional devices. This thesis encompasses the knowledge acquired throughout the MEMS courses to design a two-axis capacitive accelerometer. The required acceleration and operating temperature range were 50g in each axis and -40 C to +80 C, respectively. The accelerometer was also needed to survive within a dynamic shocking environment with accelerations of up to 225g. The parameters of the accelerometer to achieve above specifications were calculated using lumped element approximation and the results were used for initial layout of it. A finite element analysis code (ANSYS) was used to perform simulations of the accelerometer under various operating conditions and to determine the optimum configuration. The simulated results were found to be within about 5% of the calculations indicating the validity of lumped element approach. The response of the designed accelerometer was 7 mV/g and with sensitivity of 1.3g at 3dB. It was also found that the accelerometer was stable in the desired range of operation including under the shock. Two axes sensing can be achieved using two identical accelerometers having their sensing axes perpendicular to each other.

Design and Fabrication of Self-packaged, Flexible MEMs Accelerometer and Aluminum Nitride Tactile Sensors

Author : Md Sohel Mahmood
Publisher :
ISBN 13 :
Total Pages : 156 pages
Book Rating : 4.:/5 (132 download)

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Book Synopsis Design and Fabrication of Self-packaged, Flexible MEMs Accelerometer and Aluminum Nitride Tactile Sensors by : Md Sohel Mahmood

Download or read book Design and Fabrication of Self-packaged, Flexible MEMs Accelerometer and Aluminum Nitride Tactile Sensors written by Md Sohel Mahmood and published by . This book was released on 2019 with total page 156 pages. Available in PDF, EPUB and Kindle. Book excerpt: The work presented in this dissertation describes the design, fabrication and characterization of a Micro Electro Mechanical System (MEMS) capacitive accelerometer on a flexible substrate. To facilitate the bending of the accelerometers and make them mountable on a curved surface, polyimide was used as a flexible substrate. Considering its high glass transition temperature and low thermal expansion coefficient, PI5878G was chosen as the underlying flexible substrate. Three different sizes of accelerometers were designed in CoventorWare® software which utilizes Finite Element Method (FEM) to numerically perform various analyses. Capacitance simulation under acceleration, modal analysis, stress and pull-in study were performed in CoventorWare®. A double layer UV-LIGA technique was deployed to electroplate the proof mass for increased sensitivity. The proof mass of the accelerometers was perforated to lower the damping force as well as to facilitate the ashing process of the underlying sacrificial layer. Three different sizes of accelerometers were fabricated and subsequently characterized. The largest accelerometer demonstrated a sensitivity of 187 fF/g at its resonant frequency of 800 Hz. It also showed excellent noise performance with a signal to noise ratio (SNR) of 100:1. The accelerometers were also placed on curved surfaces having radii of 3.8 cm, 2.5 cm and 2.0 cm for flexibility analysis. The sensitivity of the largest device was obtained to be 168 fF/g on a curved surface of 2.0 cm radius. The radii of robotic index and thumb fingertips are 1.0 cm and 3.5 cm, respectively. Therefore, these accelerometers are fully compatible with robotics as well as prosthetics. The accelerometers were later encapsulated by Kapton® superstrate in vacuum environment. Kapton® is a polyimide film which possesses similar glass transition temperature and thermal expansion coefficient to that of the underlying substrate PI5878G. The thickness of the superstrate was optimized to place the intermediate accelerometer on a plane of zero stress. The Kapton® films were pre-etched before bonding to the device wafer, thus avoiding spin-coating a photoresist layer at high rpm and possibly damaging the already released micro-accelerometers in the device wafer. The packaged accelerometers were characterized in the same way the open accelerometers were characterized on both flat and curved surfaces. After encapsulation, the sensitivity of the largest accelerometer on a flat and a curved surface with 2.0 cm radius were obtained to be 195 fF/g and 174 fF/f, respectively. All three accelerometers demonstrated outstanding noise performance after vacuum packaging with an SNR of 100:1. Further analysis showed that the contribution from the readout circuitry is the most dominant noise component followed by the Brownian noise of the accelerometers. The developed stresses in different layers of the accelerometers upon bending the substrates were analyzed. The stresses in all cases were below the yield strength of the respective layer materials. AlN cantilevers as tactile sensors were also fabricated and characterized on a flexible substrate. Ti was utilized as the bottom and the top electrode for its smaller lattice mismatch to AlN compared to Pt and Al. The piezoelectric layer of AlN was annealed after sputtering which resulted in excellent crystalline orientation. The XRD peak corresponding to AlN (002) plane was obtained at 36.54o. The fabricated AlN cantilevers were capable of sensing pressures from 100 kPa to 850 kPa which includes soft touching of human index finger and grasping of an object. The sensitivities of the cantilevers were between 1.90 × 10-4 V/kPa and 2.04 × 10-4 V/kPa. The stresses inside the AlN and Ti layer, developed upon full bending, were below the yield strength of the respective layer materials.

Characterization and Measurement Circuit Design for a Novel Low Noise and High Sensitivity MEMS Capacitive Accelerometer

Author : Nicolas Wood
Publisher :
ISBN 13 :
Total Pages : 0 pages
Book Rating : 4.:/5 (133 download)

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Book Synopsis Characterization and Measurement Circuit Design for a Novel Low Noise and High Sensitivity MEMS Capacitive Accelerometer by : Nicolas Wood

Download or read book Characterization and Measurement Circuit Design for a Novel Low Noise and High Sensitivity MEMS Capacitive Accelerometer written by Nicolas Wood and published by . This book was released on 2018 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt:

MEMS Lorentz Force Magnetometers

Author : Cesare Buffa
Publisher : Springer
ISBN 13 : 3319594125
Total Pages : 139 pages
Book Rating : 4.3/5 (195 download)

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Book Synopsis MEMS Lorentz Force Magnetometers by : Cesare Buffa

Download or read book MEMS Lorentz Force Magnetometers written by Cesare Buffa and published by Springer. This book was released on 2017-07-04 with total page 139 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book deals with compasses for consumer applications realized in MEMS technology, to support location-based and orientation-based services in addition to ‘traditional’ functionalities based on navigation. Navigation is becoming a must-have feature in portable devices and the presence of a compass also makes location-based augmented reality emerge, where a street map or a camera image could be overlaid with highly detailed information about what is in front of the user. To make these features possible both industries and scientific research focus on three axis magnetometers. The author describes a full path from specifications (driven by customers’ needs/desires) to prototype and preparing the way to industrialization and commercialization. The presentation includes an overview of all the major steps of this research and development process, highlighting critical points and potential pitfalls, as well as how to forecast or mitigate them. Coverage includes system design, specifications fulfillment, design strategy and project development methodology, in addition to traditional topics such as microelectronics design, sensor design, development of an experimental setup and characterization. The author uses a practical approach, including pragmatic guidelines and design choices, while maintaining focus on the final target, prototyping in the direction of industrialization and mass production.

Transducers ’01 Eurosensors XV

Author : Ernst Obermeier
Publisher : Springer
ISBN 13 : 3642594972
Total Pages : 1763 pages
Book Rating : 4.6/5 (425 download)

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Book Synopsis Transducers ’01 Eurosensors XV by : Ernst Obermeier

Download or read book Transducers ’01 Eurosensors XV written by Ernst Obermeier and published by Springer. This book was released on 2016-05-12 with total page 1763 pages. Available in PDF, EPUB and Kindle. Book excerpt: The Conference is the premier international meeting for the presentation of original work addressing all aspects of the theory, design, fabrication, assembly, packaging, testing and application of solid-state sensors, actuators, MEMS, and microsystems.

Precision Sensors, Actuators and Systems

Author : Hornsen Tzou
Publisher : Springer Science & Business Media
ISBN 13 : 9780792320159
Total Pages : 490 pages
Book Rating : 4.3/5 (21 download)

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Book Synopsis Precision Sensors, Actuators and Systems by : Hornsen Tzou

Download or read book Precision Sensors, Actuators and Systems written by Hornsen Tzou and published by Springer Science & Business Media. This book was released on 1992-11-30 with total page 490 pages. Available in PDF, EPUB and Kindle. Book excerpt: Research into and development of high-precision systems, microelectromechanical systems, distributed sensors/actuators, smart structural systems, high-precision controls, etc. have drawn much attention in recent years. These new devices and systems will bring about a new technical revolution in modern industries and impact future human life. This book presents a unique overview of these technologies such as silicon based sensors/actuators and control piezoelectric micro sensors/actuators, micro actuation and control, micro sensor applications in robot control, optical fiber sensors/systems, etc. These are four essential subjects emphasized in the book: 1. Survey of the (current) research and development; 2. Fundamental theories and tools; 3. Practical applications. 4. Outlining future research and development.

Piezoresistor Design and Applications

Author : Joseph C. Doll
Publisher : Springer Science & Business Media
ISBN 13 : 1461485177
Total Pages : 252 pages
Book Rating : 4.4/5 (614 download)

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Book Synopsis Piezoresistor Design and Applications by : Joseph C. Doll

Download or read book Piezoresistor Design and Applications written by Joseph C. Doll and published by Springer Science & Business Media. This book was released on 2013-10-30 with total page 252 pages. Available in PDF, EPUB and Kindle. Book excerpt: Piezoresistor Design and Applications provides an overview of these MEMS devices and related physics. The text demonstrates how MEMS allows miniaturization and integration of sensing as well as efficient packaging and signal conditioning. This text for engineers working in MEMS design describes the piezoresistive phenomenon and optimization in several applications. Includes detailed discussion of such topics as; coupled models of mechanics, materials and electronic behavior in a variety of common geometric implementations including strain gages, beam bending, and membrane loading. The text concludes with an up-to-date discussion of the need for integrated MEMS design and opportunities to leverage new materials, processes and MEMS technology. Piezoresistor Design and Applications is an ideal book for design engineers, process engineers and researchers.