Design And Modeling Of A Mems Based Accelerometer With Pull In Analysis

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Design and Modeling of a MEMS-based Accelerometer with Pull in Analysis

Author :
Publisher :
ISBN 13 :
Total Pages : pages
Book Rating : 4.:/5 (68 download)

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Book Synopsis Design and Modeling of a MEMS-based Accelerometer with Pull in Analysis by :

Download or read book Design and Modeling of a MEMS-based Accelerometer with Pull in Analysis written by and published by . This book was released on 2002 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: This thesis reports the design and modelling of a MEMS (Micro Electro Mechanical system) based inertial accelerometer. The main motivation to design a differential type of accelerometer is that such a kind of structure allows differential electrostatic actuation and capacitive sensing. They can be operated at the border of stability also so that the "pull in" operation mode can be explored. Such kinds of structures have a wide range of applications because of their high sensitivity. One is in the field of minimally invasive surgery where accelerometers will be combined with gyroscopes to be used in the navigation of surgical tools as a inertial micro unit (IMU). The choice for the design of a structure with 1 Degree ofFreedom(DOF), instead of a 2-DOF device was instigated by the simplicity of the design and by a more efficient 1-DOF dynamic model. The accelerometers were designed and optimized using the MATLAB simulator and COVENTORWARE simulation tool. First set of devices is fabricated using a commercial foundry process called SOIMUMPs. The simulation tests show that the SOl accelerometer system yields 8.8kHz resonant frequency, with a quality factor of 10 and 2.l2mV/g sensitivity. To characterize the accelerometer a new semi automatic tool was formulated for the noise analysis and noise based optimization of the accelerometer design and the analysis estimation shows that there is a trade off between the SIN ratio and the sensitivity and for the given design could be made much better in terms of SIN by tuning its resonant frequency.

MEMS Accelerometers

Author : Mahmoud Rasras
Publisher : MDPI
ISBN 13 : 3038974145
Total Pages : 252 pages
Book Rating : 4.0/5 (389 download)

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Book Synopsis MEMS Accelerometers by : Mahmoud Rasras

Download or read book MEMS Accelerometers written by Mahmoud Rasras and published by MDPI. This book was released on 2019-05-27 with total page 252 pages. Available in PDF, EPUB and Kindle. Book excerpt: Micro-electro-mechanical system (MEMS) devices are widely used for inertia, pressure, and ultrasound sensing applications. Research on integrated MEMS technology has undergone extensive development driven by the requirements of a compact footprint, low cost, and increased functionality. Accelerometers are among the most widely used sensors implemented in MEMS technology. MEMS accelerometers are showing a growing presence in almost all industries ranging from automotive to medical. A traditional MEMS accelerometer employs a proof mass suspended to springs, which displaces in response to an external acceleration. A single proof mass can be used for one- or multi-axis sensing. A variety of transduction mechanisms have been used to detect the displacement. They include capacitive, piezoelectric, thermal, tunneling, and optical mechanisms. Capacitive accelerometers are widely used due to their DC measurement interface, thermal stability, reliability, and low cost. However, they are sensitive to electromagnetic field interferences and have poor performance for high-end applications (e.g., precise attitude control for the satellite). Over the past three decades, steady progress has been made in the area of optical accelerometers for high-performance and high-sensitivity applications but several challenges are still to be tackled by researchers and engineers to fully realize opto-mechanical accelerometers, such as chip-scale integration, scaling, low bandwidth, etc. This Special Issue on "MEMS Accelerometers" seeks to highlight research papers, short communications, and review articles that focus on: Novel designs, fabrication platforms, characterization, optimization, and modeling of MEMS accelerometers. Alternative transduction techniques with special emphasis on opto-mechanical sensing. Novel applications employing MEMS accelerometers for consumer electronics, industries, medicine, entertainment, navigation, etc. Multi-physics design tools and methodologies, including MEMS-electronics co-design. Novel accelerometer technologies and 9DoF IMU integration. Multi-accelerometer platforms and their data fusion.

Modeling and simulation of the capacitive accelerometer

Author : Tan Tran Duc
Publisher : GRIN Verlag
ISBN 13 : 3640249593
Total Pages : 83 pages
Book Rating : 4.6/5 (42 download)

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Book Synopsis Modeling and simulation of the capacitive accelerometer by : Tan Tran Duc

Download or read book Modeling and simulation of the capacitive accelerometer written by Tan Tran Duc and published by GRIN Verlag. This book was released on 2009-01-19 with total page 83 pages. Available in PDF, EPUB and Kindle. Book excerpt: Diploma Thesis from the year 2005 in the subject Electrotechnology, grade: Master 9.8/10, , language: English, abstract: Microelectromechanical systems (MEMS) are collection of microsensors and actuators that have the ability to sense its environment and react to changes in that environment with the use of a microcircuit control. They also include the conventional microelectronics packaging, integrating antenna structures for command signals into microelectromechanical structures for desired sensing and actuating functions. The system may also need micropower supply, microrelay, and microsignal processing units. Microcomponents make the system faster, more reliable, cheaper, and capable of incorporating more complex functions. In the beginning of 1990s, MEMS appeared with the aid of the development of integrated circuit fabrication processes, in which sensors, actuators, and control functions are co-fabricated in silicon [1]. Since then, remarkable research progresses have been achieved in MEMS under the strong promotions from both government and industries. In addition to the commercialization of some less integrated MEMS devices, such as microaccelerometers, inkjet printer head, micromirrors for projection, etc., the concepts and feasibility of more complex MEMS devices have been proposed and demonstrated for the applications in such varied fields as microfluidics, aerospace, biomedical, chemical analysis, wireless communications, data storage, display, optics, etc. Some branches of MEMS, appearing as microoptoelectromechanical systems (MOEMS), micro total analysis systems, etc., have attracted a great research since their potential applications’ market.

Design and Fabrication of Self-packaged, Flexible MEMs Accelerometer and Aluminum Nitride Tactile Sensors

Author : Md Sohel Mahmood
Publisher :
ISBN 13 :
Total Pages : 156 pages
Book Rating : 4.:/5 (132 download)

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Book Synopsis Design and Fabrication of Self-packaged, Flexible MEMs Accelerometer and Aluminum Nitride Tactile Sensors by : Md Sohel Mahmood

Download or read book Design and Fabrication of Self-packaged, Flexible MEMs Accelerometer and Aluminum Nitride Tactile Sensors written by Md Sohel Mahmood and published by . This book was released on 2019 with total page 156 pages. Available in PDF, EPUB and Kindle. Book excerpt: The work presented in this dissertation describes the design, fabrication and characterization of a Micro Electro Mechanical System (MEMS) capacitive accelerometer on a flexible substrate. To facilitate the bending of the accelerometers and make them mountable on a curved surface, polyimide was used as a flexible substrate. Considering its high glass transition temperature and low thermal expansion coefficient, PI5878G was chosen as the underlying flexible substrate. Three different sizes of accelerometers were designed in CoventorWare® software which utilizes Finite Element Method (FEM) to numerically perform various analyses. Capacitance simulation under acceleration, modal analysis, stress and pull-in study were performed in CoventorWare®. A double layer UV-LIGA technique was deployed to electroplate the proof mass for increased sensitivity. The proof mass of the accelerometers was perforated to lower the damping force as well as to facilitate the ashing process of the underlying sacrificial layer. Three different sizes of accelerometers were fabricated and subsequently characterized. The largest accelerometer demonstrated a sensitivity of 187 fF/g at its resonant frequency of 800 Hz. It also showed excellent noise performance with a signal to noise ratio (SNR) of 100:1. The accelerometers were also placed on curved surfaces having radii of 3.8 cm, 2.5 cm and 2.0 cm for flexibility analysis. The sensitivity of the largest device was obtained to be 168 fF/g on a curved surface of 2.0 cm radius. The radii of robotic index and thumb fingertips are 1.0 cm and 3.5 cm, respectively. Therefore, these accelerometers are fully compatible with robotics as well as prosthetics. The accelerometers were later encapsulated by Kapton® superstrate in vacuum environment. Kapton® is a polyimide film which possesses similar glass transition temperature and thermal expansion coefficient to that of the underlying substrate PI5878G. The thickness of the superstrate was optimized to place the intermediate accelerometer on a plane of zero stress. The Kapton® films were pre-etched before bonding to the device wafer, thus avoiding spin-coating a photoresist layer at high rpm and possibly damaging the already released micro-accelerometers in the device wafer. The packaged accelerometers were characterized in the same way the open accelerometers were characterized on both flat and curved surfaces. After encapsulation, the sensitivity of the largest accelerometer on a flat and a curved surface with 2.0 cm radius were obtained to be 195 fF/g and 174 fF/f, respectively. All three accelerometers demonstrated outstanding noise performance after vacuum packaging with an SNR of 100:1. Further analysis showed that the contribution from the readout circuitry is the most dominant noise component followed by the Brownian noise of the accelerometers. The developed stresses in different layers of the accelerometers upon bending the substrates were analyzed. The stresses in all cases were below the yield strength of the respective layer materials. AlN cantilevers as tactile sensors were also fabricated and characterized on a flexible substrate. Ti was utilized as the bottom and the top electrode for its smaller lattice mismatch to AlN compared to Pt and Al. The piezoelectric layer of AlN was annealed after sputtering which resulted in excellent crystalline orientation. The XRD peak corresponding to AlN (002) plane was obtained at 36.54o. The fabricated AlN cantilevers were capable of sensing pressures from 100 kPa to 850 kPa which includes soft touching of human index finger and grasping of an object. The sensitivities of the cantilevers were between 1.90 × 10-4 V/kPa and 2.04 × 10-4 V/kPa. The stresses inside the AlN and Ti layer, developed upon full bending, were below the yield strength of the respective layer materials.

MEMS Silicon Oscillating Accelerometers and Readout Circuits

Author : Yong Ping Xu
Publisher : CRC Press
ISBN 13 : 1000793737
Total Pages : 312 pages
Book Rating : 4.0/5 (7 download)

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Book Synopsis MEMS Silicon Oscillating Accelerometers and Readout Circuits by : Yong Ping Xu

Download or read book MEMS Silicon Oscillating Accelerometers and Readout Circuits written by Yong Ping Xu and published by CRC Press. This book was released on 2022-09-01 with total page 312 pages. Available in PDF, EPUB and Kindle. Book excerpt: Most MEMS accelerometers on the market today are capacitive accelerometers that are based on the displacement sensing mechanism. This book is intended to cover recent developments of MEMS silicon oscillating accelerometers (SOA), also referred to as MEMS resonant accelerometer. As contrast to the capacitive accelerometer, the MEMS SOA is based on the force sensing mechanism, where the input acceleration is converted to a frequency output. MEMS Silicon Oscillating Accelerometers and Readout Circuits consists of six chapters and covers both MEMS sensor and readout circuit, and provides an in-depth coverage on the design and modelling of the MEMS SOA with several recently reported prototypes. The book is not only useful to researchers and engineers who are familiar with the topic, but also appeals to those who have general interests in MEMS inertial sensors. The book includes extensive references that provide further information on this topic.

System-level Modeling of MEMS

Author : Oliver Brand
Publisher : John Wiley & Sons
ISBN 13 : 3527647120
Total Pages : 562 pages
Book Rating : 4.5/5 (276 download)

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Book Synopsis System-level Modeling of MEMS by : Oliver Brand

Download or read book System-level Modeling of MEMS written by Oliver Brand and published by John Wiley & Sons. This book was released on 2012-12-20 with total page 562 pages. Available in PDF, EPUB and Kindle. Book excerpt: System-level modeling of MEMS - microelectromechanical systems - comprises integrated approaches to simulate, understand, and optimize the performance of sensors, actuators, and microsystems, taking into account the intricacies of the interplay between mechanical and electrical properties, circuitry, packaging, and design considerations. Thereby, system-level modeling overcomes the limitations inherent to methods that focus only on one of these aspects and do not incorporate their mutual dependencies. The book addresses the two most important approaches of system-level modeling, namely physics-based modeling with lumped elements and mathematical modeling employing model order reduction methods, with an emphasis on combining single device models to entire systems. At a clearly understandable and sufficiently detailed level the readers are made familiar with the physical and mathematical underpinnings of MEMS modeling. This enables them to choose the adequate methods for the respective application needs. This work is an invaluable resource for all materials scientists, electrical engineers, scientists working in the semiconductor and/or sensor industry, physicists, and physical chemists.

Design, Fabrication, and Dynamic Modeling of a Printed Circuit Based MEMS Accelerometer

Author :
Publisher :
ISBN 13 :
Total Pages : 76 pages
Book Rating : 4.:/5 (244 download)

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Book Synopsis Design, Fabrication, and Dynamic Modeling of a Printed Circuit Based MEMS Accelerometer by :

Download or read book Design, Fabrication, and Dynamic Modeling of a Printed Circuit Based MEMS Accelerometer written by and published by . This book was released on 2007 with total page 76 pages. Available in PDF, EPUB and Kindle. Book excerpt:

MEMS Linear and Nonlinear Statics and Dynamics

Author : Mohammad I. Younis
Publisher : Springer Science & Business Media
ISBN 13 : 1441960201
Total Pages : 463 pages
Book Rating : 4.4/5 (419 download)

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Book Synopsis MEMS Linear and Nonlinear Statics and Dynamics by : Mohammad I. Younis

Download or read book MEMS Linear and Nonlinear Statics and Dynamics written by Mohammad I. Younis and published by Springer Science & Business Media. This book was released on 2011-06-27 with total page 463 pages. Available in PDF, EPUB and Kindle. Book excerpt: MEMS Linear and Nonlinear Statics and Dynamics presents the necessary analytical and computational tools for MEMS designers to model and simulate most known MEMS devices, structures, and phenomena. This book also provides an in-depth analysis and treatment of the most common static and dynamic phenomena in MEMS that are encountered by engineers. Coverage also includes nonlinear modeling approaches to modeling various MEMS phenomena of a nonlinear nature, such as those due to electrostatic forces, squeeze-film damping, and large deflection of structures. The book also: Includes examples of numerous MEMS devices and structures that require static or dynamic modeling Provides code for programs in Matlab, Mathematica, and ANSYS for simulating the behavior of MEMS structures Provides real world problems related to the dynamics of MEMS such as dynamics of electrostatically actuated devices, stiction and adhesion of microbeams due to electrostatic and capillary forces MEMS Linear and Nonlinear Statics and Dynamics is an ideal volume for researchers and engineers working in MEMS design and fabrication.

Mems Accelerometer Modelling and Noise Analysis

Author : Biter Boga Inaltekin
Publisher : LAP Lambert Academic Publishing
ISBN 13 : 9783846505847
Total Pages : 132 pages
Book Rating : 4.5/5 (58 download)

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Book Synopsis Mems Accelerometer Modelling and Noise Analysis by : Biter Boga Inaltekin

Download or read book Mems Accelerometer Modelling and Noise Analysis written by Biter Boga Inaltekin and published by LAP Lambert Academic Publishing. This book was released on 2011-09 with total page 132 pages. Available in PDF, EPUB and Kindle. Book excerpt: Micro Electro Mechanical Systems (MEMS) have an extensive use in different areas of technology. Inertial sensors (accelerometers and gyroscopes) are one of the most widely used devices fabricated using MEMS technology. MEMS accelerometers play an important role in different application areas such as automotive, inertial navigation, guidance, industry, space applications etc. because of low cost, small size, low power, and high reliability. This book presents a detailed SIMULINK model for a conventional capacitive sigma-delta accelerometer system consisting of a MEMS accelerometer, closed-loop readout electronics, and signal processing units (e.g. decimation filters). By using this model, it is possible to estimate the performance of the full accelerometer system including individual noise components, operation range, open loop sensitivity, scale factor, etc. The developed model has been verified through test results using a capacitive MEMS accelerometer, full-custom designed readout electronics, and signal processing unit implemented on a FPGA.

Mems Silicon Oscillating Accelerometers and Readout Circuits

Author : Yong Ping Xu
Publisher : River Publishers
ISBN 13 : 9788770229661
Total Pages : 0 pages
Book Rating : 4.2/5 (296 download)

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Book Synopsis Mems Silicon Oscillating Accelerometers and Readout Circuits by : Yong Ping Xu

Download or read book Mems Silicon Oscillating Accelerometers and Readout Circuits written by Yong Ping Xu and published by River Publishers. This book was released on 2023-05-31 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt: Most MEMS accelerometers on the market today are capacitive accelerometers that are based on the displacement sensing mechanism. This book is intended to cover recent developments of MEMS silicon oscillating accelerometers (SOA), also referred to as MEMS resonant accelerometer. As contrast to the capacitive accelerometer, the MEMS SOA is based on the force sensing mechanism, where the input acceleration is converted to a frequency output. MEMS Silicon Oscillating Accelerometers and Readout Circuits consists of six chapters and covers both MEMS sensor and readout circuit, and provides an in-depth coverage on the design and modelling of the MEMS SOA with several recently reported prototypes. The book is not only useful to researchers and engineers who are familiar with the topic, but also appeals to those who have general interests in MEMS inertial sensors. The book includes extensive references that provide further information on this topic.

IoT and Analytics for Sensor Networks

Author : Padmalaya Nayak
Publisher : Springer Nature
ISBN 13 : 9811629196
Total Pages : 502 pages
Book Rating : 4.8/5 (116 download)

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Book Synopsis IoT and Analytics for Sensor Networks by : Padmalaya Nayak

Download or read book IoT and Analytics for Sensor Networks written by Padmalaya Nayak and published by Springer Nature. This book was released on 2021-09-11 with total page 502 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book includes high-quality research papers presented at the 1st International Conference on Wireless Sensor Networks, Ubiquitous Computing and Applications (ICWSNUCA, 2021), which is held at Gokaraju Rangaraju Institute of Engineering and Technology, Hyderabad, India, during 26–27 February, 2021. This volume focuses on the applications, use-cases, architectures, deployments, and recent advances of wireless sensor networks as well as ubiquious computing. Different research topics are illustrated in this book, like wireless sensor networks for the Internet of Things; IoT applications for eHealth; smart cities; architectures for WSNs and IoT, WSNs hardware and new devices; low-power wireless technologies; wireless ad hoc sensor networks; routing and data transfer in WSNs; multicast communication in WSNs; security management in WSNs and in IoT systems; and power consumption optimization in WSNs.

Sensing and Control of MEMS Accelerometers Using Kalman Filter

Author : Kai Zhang
Publisher :
ISBN 13 :
Total Pages : 77 pages
Book Rating : 4.:/5 (698 download)

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Book Synopsis Sensing and Control of MEMS Accelerometers Using Kalman Filter by : Kai Zhang

Download or read book Sensing and Control of MEMS Accelerometers Using Kalman Filter written by Kai Zhang and published by . This book was released on 2010 with total page 77 pages. Available in PDF, EPUB and Kindle. Book excerpt: Surface micromachined low-capacitance MEMS capacitive accelerometers which integrated CMOS readout circuit generally have a noise above 0.02g. Force-to-rebalance feedback control that is commonly used in MEMS accelerometers can improve the performances of accelerometers such as increasing their stability, bandwidth and dynamic range. However, the controller also increases the noise floor. There are two major sources of the noise in MEMS accelerometer. They are electronic noise from the CMOS readout circuit and thermal-mechanical Brownian noise caused by damping. Kalman filter is an effective solution to the problem of reducing the effects of the noises through estimating and canceling the states contaminated by noise. The design and implementation of a Kalman filter for a MEMS capacitive accelerometer is presented in the thesis in order to filter out the noise mentioned above while keeping its good performance under feedback control. The dynamic modeling of the MEMS accelerometer system and the controller design based on the model are elaborated in the thesis. Simulation results show the Kalman filter gives an excellent noise reduction, increases the dynamic range of the accelerometer, and reduces the displacement of the mass under a closed-loop structure.

Design of a Monolithic 3dof Mems Capacitive Accelerometer

Author : Muhammad Shuja Khan
Publisher : LAP Lambert Academic Publishing
ISBN 13 : 9783845409528
Total Pages : 92 pages
Book Rating : 4.4/5 (95 download)

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Book Synopsis Design of a Monolithic 3dof Mems Capacitive Accelerometer by : Muhammad Shuja Khan

Download or read book Design of a Monolithic 3dof Mems Capacitive Accelerometer written by Muhammad Shuja Khan and published by LAP Lambert Academic Publishing. This book was released on 2011-07 with total page 92 pages. Available in PDF, EPUB and Kindle. Book excerpt: Sensors and devices, based on micromachining technology, known as micro-electro-mechanicalsystems or MEMS, have been received increasing attention so far in recent years. Micromachined inertial sensors, consisting of accelerometers and gyroscopes, are one of the most important types of silicon-based sensor. MEMS capacitive accelerometers have been extensively used in automobiles, inertial navigation systems, earth quake detection and many other bio-medical applications. This book deals with the design of a monolithic 3DOF MEMS capacitive accelerometer using both analytical and numerical techniques. Monolithic accelerometer is a single structure having three individual single axis Accelerometers on a single substrate and utilizes a surface micromachining technology using standard PolyMUMPs process. The designed accelerometer is 3mmx3.1mm in size, has low mechanical noise floor, high sense capacitance and high sensitivity along in-plane (x and y) and out-of-plane (z) axes. Performing a detailed finite element analysis in ANSYS 11.o, physical level simulation has been done to verify the deflection for x, y and z axes with respect to the applied acceleration (g).

IoT and Analytics for Sensor Networks

Author : Padmalaya Nayak
Publisher : Springer
ISBN 13 : 9789811629181
Total Pages : 508 pages
Book Rating : 4.6/5 (291 download)

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Book Synopsis IoT and Analytics for Sensor Networks by : Padmalaya Nayak

Download or read book IoT and Analytics for Sensor Networks written by Padmalaya Nayak and published by Springer. This book was released on 2021-09-12 with total page 508 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book includes high-quality research papers presented at the 1st International Conference on Wireless Sensor Networks, Ubiquitous Computing and Applications (ICWSNUCA, 2021), which is held at Gokaraju Rangaraju Institute of Engineering and Technology, Hyderabad, India, during 26–27 February, 2021. This volume focuses on the applications, use-cases, architectures, deployments, and recent advances of wireless sensor networks as well as ubiquious computing. Different research topics are illustrated in this book, like wireless sensor networks for the Internet of Things; IoT applications for eHealth; smart cities; architectures for WSNs and IoT, WSNs hardware and new devices; low-power wireless technologies; wireless ad hoc sensor networks; routing and data transfer in WSNs; multicast communication in WSNs; security management in WSNs and in IoT systems; and power consumption optimization in WSNs.

MEMS Accelerometers

Author : Ibrahim (Abe) M. Elfadel
Publisher :
ISBN 13 : 9783038974154
Total Pages : 1 pages
Book Rating : 4.9/5 (741 download)

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Book Synopsis MEMS Accelerometers by : Ibrahim (Abe) M. Elfadel

Download or read book MEMS Accelerometers written by Ibrahim (Abe) M. Elfadel and published by . This book was released on 2019 with total page 1 pages. Available in PDF, EPUB and Kindle. Book excerpt: Micro-electro-mechanical system (MEMS) devices are widely used for inertia, pressure, and ultrasound sensing applications. Research on integrated MEMS technology has undergone extensive development driven by the requirements of a compact footprint, low cost, and increased functionality. Accelerometers are among the most widely used sensors implemented in MEMS technology. MEMS accelerometers are showing a growing presence in almost all industries ranging from automotive to medical. A traditional MEMS accelerometer employs a proof mass suspended to springs, which displaces in response to an external acceleration. A single proof mass can be used for one- or multi-axis sensing. A variety of transduction mechanisms have been used to detect the displacement. They include capacitive, piezoelectric, thermal, tunneling, and optical mechanisms. Capacitive accelerometers are widely used due to their DC measurement interface, thermal stability, reliability, and low cost. However, they are sensitive to electromagnetic field interferences and have poor performance for high-end applications (e.g., precise attitude control for the satellite). Over the past three decades, steady progress has been made in the area of optical accelerometers for high-performance and high-sensitivity applications but several challenges are still to be tackled by researchers and engineers to fully realize opto-mechanical accelerometers, such as chip-scale integration, scaling, low bandwidth, etc. This Special Issue on "MEMS Accelerometers" seeks to highlight research papers, short communications, and review articles that focus on: Novel designs, fabrication platforms, characterization, optimization, and modeling of MEMS accelerometers. Alternative transduction techniques with special emphasis on opto-mechanical sensing. Novel applications employing MEMS accelerometers for consumer electronics, industries, medicine, entertainment, navigation, etc. Multi-physics design tools and methodologies, including MEMS-electronics co-design. Novel accelerometer technologies and 9DoF IMU integration. Multi-accelerometer platforms and their data fusion.

Analysis and Design Principles of MEMS Devices

Author : Minhang Bao
Publisher : Elsevier
ISBN 13 : 008045562X
Total Pages : 327 pages
Book Rating : 4.0/5 (84 download)

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Book Synopsis Analysis and Design Principles of MEMS Devices by : Minhang Bao

Download or read book Analysis and Design Principles of MEMS Devices written by Minhang Bao and published by Elsevier. This book was released on 2005-04-12 with total page 327 pages. Available in PDF, EPUB and Kindle. Book excerpt: Sensors and actuators are now part of our everyday life and appear in many appliances, such as cars, vending machines and washing machines. MEMS (Micro Electro Mechanical Systems) are micro systems consisting of micro mechanical sensors, actuators and micro electronic circuits. A variety of MEMS devices have been developed and many mass produced, but the information on these is widely dispersed in the literature. This book presents the analysis and design principles of MEMS devices. The information is comprehensive, focusing on microdynamics, such as the mechanics of beam and diaphragm structures, air damping and its effect on the motion of mechanical structures. Using practical examples, the author examines problems associated with analysis and design, and solutions are included at the back of the book. The ideal advanced level textbook for graduates, Analysis and Design Principles of MEMS Devices is a suitable source of reference for researchers and engineers in the field. * Presents the analysis and design principles of MEMS devices more systematically than ever before. * Includes the theories essential for the analysis and design of MEMS includes the dynamics of micro mechanical structures * A problem section is included at the end of each chapter with answers provided at the end of the book.

Design, Prototyping and Testing of Biaxial MEMS Accelerometers for Rigid-body Pose-and-twist Estimation

Author : Xiaowei Shan
Publisher :
ISBN 13 :
Total Pages : pages
Book Rating : 4.:/5 (1 download)

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Book Synopsis Design, Prototyping and Testing of Biaxial MEMS Accelerometers for Rigid-body Pose-and-twist Estimation by : Xiaowei Shan

Download or read book Design, Prototyping and Testing of Biaxial MEMS Accelerometers for Rigid-body Pose-and-twist Estimation written by Xiaowei Shan and published by . This book was released on 2017 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: "The reported research work aims to develop a novel class of accelerometers applicable to the high-accuracy estimation of rigid-body pose and twist. These accelerometers, based on a monolithic biaxial architecture, dubbed Orchid, were designed for fabrication as MEMS (microelectromechanical system) with isotropic stiffness in the sensitive plane and high frequency ratios between the insensitive and sensitive directions. The architecture is intended to accommodate any regular polygonal shape with a suspension that allows for an in-plane translation of the proof-mass with respect to the frame. Structural optimization is conducted to yield high frequency ratios and a high degree of compliance in the suspension, for low-g applications and planar excitation. Lamé curves are introduced in the fillets to relieve the stress concentration. The elastically isotropic structure in the sensitive plane is analyzed symbolically and validated numerically and experimentally. The microfabrication process was then devised and conducted with high precision for triangular and square Orchid structures. Techniques and recipes were studied to solve the wafer bonding problem with large cavities, adhesive influence on structural etching and reflectivity adjustment of the sample surface. Vibration tests were conducted in the MEMS prototypes to validate the isotropic sensitivity of the biaxial architecture. In light of the isotropic Orchid architecture, a novel biaxial MEMS accelerometer, W30P4, was designed, fabricated and tested for low-g applications. The accelerometer monolithic structure was optimally designed based on a fully symmetric architecture with a high frequency ratio between the insensitive and sensitive axes. To facilitate the utilization of the proposed architecture, an analysis environment is developed for the modal and static analyses of user-defined structural parameters. The sensing substructure was designed with a configurable comb-structure for simultaneous biaxial capacitive sensing. This accelerometer was fabricated with high precision and tested under 1-g acceleration, both statically and dynamically. Test results validate the isotropy of the Orchid architecture and the high signal-to-noise ratio of the W30P4 biaxial accelerometer. Finally, an accelerometer strapdown was designed and configured using the W30P4 accelerometers, based on an octahedron frame inscribing the tetrahedron strapdown. An embedded microsystem was devised and coded inside the accelerometer strapdown to convert and transmit the signals wirelessly to a host computer. Moreover, the mathematical and simulation models were established to estimate rigid-body pose and twist using this accelerometer strapdown. Test results on a haptic manipulator validate the effectiveness of its position estimation and provide insight into the hardware improvement." --