Design And Implementation Of A Low Pressure Chemical Vapor Deposition System For Polysilicon And Silicon Nitride

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Masters Theses in the Pure and Applied Sciences

Author : Wade H. Shafer
Publisher : Springer Science & Business Media
ISBN 13 : 1461524539
Total Pages : 391 pages
Book Rating : 4.4/5 (615 download)

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Book Synopsis Masters Theses in the Pure and Applied Sciences by : Wade H. Shafer

Download or read book Masters Theses in the Pure and Applied Sciences written by Wade H. Shafer and published by Springer Science & Business Media. This book was released on 2012-12-06 with total page 391 pages. Available in PDF, EPUB and Kindle. Book excerpt: Masters Theses in the Pure and Applied Sciences was first conceived, published, and disseminated by the Center for Information and Numerical Data Analysis and Synthesis (CINDAS)* at Purdue University in 1957, starting its coverage of theses with the academic year 1955. Beginning with Volume 13, the printing and dis semination phases of the activity were transferred to University Microfilms/Xerox of Ann Arbor, Michigan, with the though that such an arrangement would be more beneficial to the academic and general scientific and technical community. After five years of this joint undertaking we had concluded that it was in the interest of all concerned if the printing and distribution of the volumes were handled by an international publishing house to assure improved service and broader dissemi nation. Hence, starting with Volume 18, Masters Theses in the Pure and Applied Sciences has been disseminated on a worldwide basis by Plenum Publishing Corporation of New York, and in the same year the coverage was broadened to include Canadian universities. All back issues can also be ordered from Plenum. We have reported in Volume 37 (thesis year 1992) a total of 12,549 thesis titles from 25 Canadian and 153 United States universities. We are sure that this broader base for these titles reported will greatly enhance the value of this impor tant annual reference work. While Volume 37 reports theses submitted in 1992, on occasion, certain uni versities do report theses submitted in previous years but not reported at the time.

Proceedings of the Sixth International Conference on Chemical Vapor Deposition, 1977

Author : Lee F. Donaghey
Publisher :
ISBN 13 :
Total Pages : 564 pages
Book Rating : 4.:/5 (319 download)

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Book Synopsis Proceedings of the Sixth International Conference on Chemical Vapor Deposition, 1977 by : Lee F. Donaghey

Download or read book Proceedings of the Sixth International Conference on Chemical Vapor Deposition, 1977 written by Lee F. Donaghey and published by . This book was released on 1977 with total page 564 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Microsystems and Nanotechnology

Author : Zhaoying Zhou
Publisher : Springer Science & Business Media
ISBN 13 : 3642182933
Total Pages : 1011 pages
Book Rating : 4.6/5 (421 download)

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Book Synopsis Microsystems and Nanotechnology by : Zhaoying Zhou

Download or read book Microsystems and Nanotechnology written by Zhaoying Zhou and published by Springer Science & Business Media. This book was released on 2012-08-30 with total page 1011 pages. Available in PDF, EPUB and Kindle. Book excerpt: “Microsystems and Nanotechnology” presents the latest science and engineering research and achievements in the fields of microsystems and nanotechnology, bringing together contributions by authoritative experts from the United States, Germany, Great Britain, Japan and China to discuss the latest advances in microelectromechanical systems (MEMS) technology and micro/nanotechnology. The book is divided into five parts – the fundamentals of microsystems and nanotechnology, microsystems technology, nanotechnology, application issues, and the developments and prospects – and is a valuable reference for students, teachers and engineers working with the involved technologies. Professor Zhaoying Zhou is a professor at the Department of Precision Instruments & Mechanology , Tsinghua University , and the Chairman of the MEMS & NEMS Society of China. Dr. Zhonglin Wang is the Director of the Center for Nanostructure Characterization, Georgia Tech, USA. Dr. Liwei Lin is a Professor at the Department of Mechanical Engineering, University of California at Berkeley, USA.

Masters Theses in the Pure and Applied Sciences

Author : W. H. Shafer
Publisher : Springer Science & Business Media
ISBN 13 : 9780306447112
Total Pages : 410 pages
Book Rating : 4.4/5 (471 download)

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Book Synopsis Masters Theses in the Pure and Applied Sciences by : W. H. Shafer

Download or read book Masters Theses in the Pure and Applied Sciences written by W. H. Shafer and published by Springer Science & Business Media. This book was released on 1994 with total page 410 pages. Available in PDF, EPUB and Kindle. Book excerpt: Volume 37 (thesis year 1992) reports a total of 12,549 thesis titles from 25 Canadian and 153 US universities (theses submitted in previous years but only now reported are indicated by the thesis year shown in parenthesis). The organization, like that of past years, consists of thesis titles arrange

Micro Electro Mechanical System Design

Author : James J. Allen
Publisher : CRC Press
ISBN 13 : 1420027751
Total Pages : 492 pages
Book Rating : 4.4/5 (2 download)

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Book Synopsis Micro Electro Mechanical System Design by : James J. Allen

Download or read book Micro Electro Mechanical System Design written by James J. Allen and published by CRC Press. This book was released on 2005-07-08 with total page 492 pages. Available in PDF, EPUB and Kindle. Book excerpt: It is challenging at best to find a resource that provides the breadth of information necessary to develop a successful micro electro mechanical system (MEMS) design. Micro Electro Mechanical System Design is that resource. It is a comprehensive, single-source guide that explains the design process by illustrating the full range of issues involved,

Microengineering Aerospace Systems

Author : Henry Helvajian
Publisher : AIAA
ISBN 13 : 9781884989032
Total Pages : 748 pages
Book Rating : 4.9/5 (89 download)

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Book Synopsis Microengineering Aerospace Systems by : Henry Helvajian

Download or read book Microengineering Aerospace Systems written by Henry Helvajian and published by AIAA. This book was released on 1999 with total page 748 pages. Available in PDF, EPUB and Kindle. Book excerpt: Microengineering Aerospace Systems is a textbook tutorial encompassing MEMS (micro-electromechanical systems), nanoelectronics, packaging, processing, and materials characterization for developing miniaturized smart instruments for aerospace systems (i.e., ASIM application-specific integrated microinstrument), satellites, and satellite subsystems. Third in a series of Aerospace Press publications covering this rapidly advancing technology, this work presents fundamental aspects of the technology and specific aerospace systems applications through worked examples.

MEMS Materials and Processes Handbook

Author : Reza Ghodssi
Publisher : Springer Science & Business Media
ISBN 13 : 0387473181
Total Pages : 1211 pages
Book Rating : 4.3/5 (874 download)

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Book Synopsis MEMS Materials and Processes Handbook by : Reza Ghodssi

Download or read book MEMS Materials and Processes Handbook written by Reza Ghodssi and published by Springer Science & Business Media. This book was released on 2011-03-18 with total page 1211 pages. Available in PDF, EPUB and Kindle. Book excerpt: MEMs Materials and Processes Handbook" is a comprehensive reference for researchers searching for new materials, properties of known materials, or specific processes available for MEMS fabrication. The content is separated into distinct sections on "Materials" and "Processes". The extensive Material Selection Guide" and a "Material Database" guides the reader through the selection of appropriate materials for the required task at hand. The "Processes" section of the book is organized as a catalog of various microfabrication processes, each with a brief introduction to the technology, as well as examples of common uses in MEMs.

Scientific and Technical Aerospace Reports

Author :
Publisher :
ISBN 13 :
Total Pages : 602 pages
Book Rating : 4.:/5 (3 download)

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Book Synopsis Scientific and Technical Aerospace Reports by :

Download or read book Scientific and Technical Aerospace Reports written by and published by . This book was released on 1995 with total page 602 pages. Available in PDF, EPUB and Kindle. Book excerpt: Lists citations with abstracts for aerospace related reports obtained from world wide sources and announces documents that have recently been entered into the NASA Scientific and Technical Information Database.

Silicon Sensors and Actuators

Author : Benedetto Vigna
Publisher : Springer Nature
ISBN 13 : 3030801357
Total Pages : 988 pages
Book Rating : 4.0/5 (38 download)

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Book Synopsis Silicon Sensors and Actuators by : Benedetto Vigna

Download or read book Silicon Sensors and Actuators written by Benedetto Vigna and published by Springer Nature. This book was released on 2022-04-12 with total page 988 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book thoroughly reviews the present knowledge on silicon micromechanical transducers and addresses emerging and future technology challenges. Readers will acquire a solid theoretical and practical background that will allow them to analyze the key performance aspects of devices, critically judge a fabrication process, and then conceive and design new ones for future applications. Envisioning a future complex versatile microsystem, the authors take inspiration from Richard Feynman’s visionary talk “There is Plenty of Room at the Bottom” to propose that the time has come to see silicon sensors as part of a “Feynman Roadmap” instead of the “More-than-Moore” technology roadmap. The sharing of the author’s industrially proven track record of development, design, and manufacturing, along with their visionary approach to the technology, will allow readers to jump ahead in their understanding of the core of the topic in a very effective way. Students, researchers, engineers, and technologists involved in silicon-based sensor and actuator research and development will find a wealth of useful and groundbreaking information in this book.

MEMS and NEMS

Author : Sergey Edward Lyshevski
Publisher : CRC Press
ISBN 13 : 1420040510
Total Pages : 461 pages
Book Rating : 4.4/5 (2 download)

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Book Synopsis MEMS and NEMS by : Sergey Edward Lyshevski

Download or read book MEMS and NEMS written by Sergey Edward Lyshevski and published by CRC Press. This book was released on 2018-10-03 with total page 461 pages. Available in PDF, EPUB and Kindle. Book excerpt: The development of micro- and nano-mechanical systems (MEMS and NEMS) foreshadows momentous changes not only in the technological world, but in virtually every aspect of human life. The future of the field is bright with opportunities, but also riddled with challenges, ranging from further theoretical development through advances in fabrication technologies, to developing high-performance nano- and microscale systems, devices, and structures, including transducers, switches, logic gates, actuators and sensors. MEMS and NEMS: Systems, Devices, and Structures is designed to help you meet those challenges and solve fundamental, experimental, and applied problems. Written from a multi-disciplinary perspective, this book forms the basis for the synthesis, modeling, analysis, simulation, control, prototyping, and fabrication of MEMS and NEMS. The author brings together the various paradigms, methods, and technologies associated with MEMS and NEMS to show how to synthesize, analyze, design, and fabricate them. Focusing on the basics, he illustrates the development of NEMS and MEMS architectures, physical representations, structural synthesis, and optimization. The applications of MEMS and NEMS in areas such as biotechnology, medicine, avionics, transportation, and defense are virtually limitless. This book helps prepare you to take advantage of their inherent opportunities and effectively solve problems related to their configurations, systems integration, and control.

Electrochemical Sensors, Biosensors and their Biomedical Applications

Author : Xueji Zhang
Publisher : Academic Press
ISBN 13 : 008055489X
Total Pages : 625 pages
Book Rating : 4.0/5 (85 download)

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Book Synopsis Electrochemical Sensors, Biosensors and their Biomedical Applications by : Xueji Zhang

Download or read book Electrochemical Sensors, Biosensors and their Biomedical Applications written by Xueji Zhang and published by Academic Press. This book was released on 2011-04-28 with total page 625 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book broadly reviews the modem techniques and significant applications of chemical sensors and biosensors. Chapters are written by experts in the field – including Professor Joseph Wang, the most cited scientist in the world and renowned expert on sensor science who is also co-editor. Each chapter provides technical details beyond the level found in typical journal articles, and explores the application of chemical sensors and biosensors to a significant problem in biomedical science, also providing a prospectus for the future.This book compiles the expert knowledge of many specialists in the construction and use of chemical sensors and biosensors including nitric oxide sensors, glucose sensors, DNA sensors, hydrogen sulfide sensors, oxygen sensors, superoxide sensors, immuno sensors, lab on chip, implatable microsensors, et al. Emphasis is laid on practical problems, ranging from chemical application to biomedical monitoring and from in vitro to in vivo, from single cell to animal to human measurement. This provides the unique opportunity of exchanging and combining the expertise of otherwise apparently unrelated disciplines of chemistry, biological engineering, and electronic engineering, medical, physiological. - Provides user-oriented guidelines for the proper choice and application of new chemical sensors and biosensors - Details new methodological advancements related to and correlated with the measurement of interested species in biomedical samples - Contains many case studies to illustrate the range of application and importance of the chemical sensors and biosensors

Chemical Vapour Deposition (CVD)

Author : Kwang-Leong Choy
Publisher : CRC Press
ISBN 13 : 1000691071
Total Pages : 501 pages
Book Rating : 4.0/5 (6 download)

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Book Synopsis Chemical Vapour Deposition (CVD) by : Kwang-Leong Choy

Download or read book Chemical Vapour Deposition (CVD) written by Kwang-Leong Choy and published by CRC Press. This book was released on 2019-06-07 with total page 501 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book offers a timely and complete overview on chemical vapour deposition (CVD) and its variants for the processing of nanoparticles, nanowires, nanotubes, nanocomposite coatings, thin and thick films, and composites. Chapters discuss key aspects, from processing, material structure and properties to practical use, cost considerations, versatility, and sustainability. The author presents a comprehensive overview of CVD and its potential in producing high performance, cost-effective nanomaterials and thin and thick films. Features Provides an up-to-date introduction to CVD technology for the fabrication of nanomaterials, nanostructured films, and composite coatings Discusses processing, structure, functionalization, properties, and use in clean energy, engineering, and biomedical grand challenges Covers thin and thick films and composites Compares CVD with other processing techniques in terms of structure/properties, cost, versatility, and sustainability Kwang-Leong Choy is the Director of the UCL Centre for Materials Discovery and Professor of Materials Discovery in the Institute for Materials Discovery at the University College London. She earned her D.Phil. from the University of Oxford, and is the recipient of numerous honors including the Hetherington Prize, Oxford Metallurgical Society Award, and Grunfeld Medal and Prize from the Institute of Materials (UK). She is an elected fellow of the Institute of Materials, Minerals and Mining, and the Royal Society of Chemistry.

MEMS

Author : Mohamed Gad-el-Hak
Publisher : CRC Press
ISBN 13 : 1420036564
Total Pages : 678 pages
Book Rating : 4.4/5 (2 download)

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Book Synopsis MEMS by : Mohamed Gad-el-Hak

Download or read book MEMS written by Mohamed Gad-el-Hak and published by CRC Press. This book was released on 2005-11-29 with total page 678 pages. Available in PDF, EPUB and Kindle. Book excerpt: Thoroughly revised and updated, the new edition of the best-selling MEMS Handbook is now presented as a three-volume set that offers state-of-the-art coverage of microelectromechanical systems. Through chapters contributed by top experts and pioneers in the field, MEMS: Design and Fabrication presents a comprehensive look at the materials, procedures, tools, and techniques of MEMS fabrication. New chapters in this edition examine the materials and fabrication of polymer microsystems and optical diagnostics for investigating the entrance length in microchannels. Rigorous yet accessible, this volume provides the practical knowledge needed for work in cutting-edge MEMS applications.

Dynamics and Control of Chemical Reactors, Distillation Columns and Batch Processes (DYCORD+ '92)

Author : J.G. Balchen
Publisher : Elsevier
ISBN 13 : 1483298779
Total Pages : 387 pages
Book Rating : 4.4/5 (832 download)

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Book Synopsis Dynamics and Control of Chemical Reactors, Distillation Columns and Batch Processes (DYCORD+ '92) by : J.G. Balchen

Download or read book Dynamics and Control of Chemical Reactors, Distillation Columns and Batch Processes (DYCORD+ '92) written by J.G. Balchen and published by Elsevier. This book was released on 2014-05-23 with total page 387 pages. Available in PDF, EPUB and Kindle. Book excerpt: In addition to the three main themes: chemical reactors, distillation columns, and batch processes this volume also addresses some of the new trends in dynamics and control methodology such as model based predictive control, new methods for identification of dynamic models, nonlinear control theory and the application of neural networks to identification and control. Provides a useful reference source of the major advances in the field.

Extended Abstracts

Author : Electrochemical Society
Publisher :
ISBN 13 :
Total Pages : 1262 pages
Book Rating : 4.0/5 ( download)

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Book Synopsis Extended Abstracts by : Electrochemical Society

Download or read book Extended Abstracts written by Electrochemical Society and published by . This book was released on 1991 with total page 1262 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Rapid Thermal Processing and beyond: Applications in Semiconductor Processing

Author : Wielfried Lerch
Publisher : Trans Tech Publications Ltd
ISBN 13 : 3038131733
Total Pages : 427 pages
Book Rating : 4.0/5 (381 download)

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Book Synopsis Rapid Thermal Processing and beyond: Applications in Semiconductor Processing by : Wielfried Lerch

Download or read book Rapid Thermal Processing and beyond: Applications in Semiconductor Processing written by Wielfried Lerch and published by Trans Tech Publications Ltd. This book was released on 2008-03-24 with total page 427 pages. Available in PDF, EPUB and Kindle. Book excerpt: Special topic volume with invited papers only

Sensor Technologies for Civil Infrastructures

Author : Jerome P. Lynch
Publisher : Woodhead Publishing
ISBN 13 : 0081026978
Total Pages : 678 pages
Book Rating : 4.0/5 (81 download)

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Book Synopsis Sensor Technologies for Civil Infrastructures by : Jerome P. Lynch

Download or read book Sensor Technologies for Civil Infrastructures written by Jerome P. Lynch and published by Woodhead Publishing. This book was released on 2022-07-19 with total page 678 pages. Available in PDF, EPUB and Kindle. Book excerpt: Sensor Technologies for Civil Infrastructure, Volume 1: Sensing Hardware and Data Collection Methods for Performance Assessment, Second Edition, provides an overview of sensor hardware and its use in data collection. The first chapters provide an introduction to sensing for structural performance assessment and health monitoring, and an overview of commonly used sensors and their data acquisition systems. Further chapters address different types of sensor including piezoelectric transducers, fiber optic sensors, acoustic emission sensors, and electromagnetic sensors, and the use of these sensors for assessing and monitoring civil infrastructures. The new edition now includes chapters on machine learning methods and reliability analysis for structural health monitoring. All chapters have been revised to include the latest advances in materials (such as piezoelectric and mechanoluminescent materials), technologies (such as LIDAR), and applications. - Describes sensing hardware and data collection, covering a variety of sensors including LIDAR - Examines fiber optic systems, acoustic emission, piezoelectric sensors, electromagnetic sensors, terahertz technologies, ultrasonic methods, and radar and millimeter wave technology - Covers strain gauges, micro-electro-mechanical systems (MEMS), multifunctional materials and nanotechnology for sensing, and vision-based sensing and lasers - Includes new chapters on machine learning methods and reliability analysis