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Design And Development Of A Silicon Carbide Chemical Vapor Deposition Reactor
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Book Synopsis Design and Development of a Silicon Carbide Chemical Vapor Deposition Reactor by : Matthew T. Smith
Download or read book Design and Development of a Silicon Carbide Chemical Vapor Deposition Reactor written by Matthew T. Smith and published by . This book was released on 2003 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: ABSTRACT: The design and development of a reactor to make this process controlled and repeatable can be accomplished using theoretical and empirical tools. Fluid flow modeling, reactor sizing, low-pressure pumping and control are engineering concepts that were explored. Work on the design and development of an atmospheric pressure cold-wall CVD (APCVD) reactor will be presented. A detailed discussion of modifications to this reactor to permit hot-wall, low-pressure CVD (LPCVD) operation will then be presented. The consequences of this process variable change will be discussed as well as the necessary design parameters. Computational fluid dynamic (CFD) calculations, which predict the flow patterns of gases in the reaction tube, will be presented. Feasible CVD reactor design that results in laminar fluid flow control is a function of the prior mentioned techniques and will be presented.
Book Synopsis Design and Development of a Low Pressure Chemical Vapor Deposition Reactor for Growth of Cubic (3C) Silicon Carbide by : Michael Peter Orthner
Download or read book Design and Development of a Low Pressure Chemical Vapor Deposition Reactor for Growth of Cubic (3C) Silicon Carbide written by Michael Peter Orthner and published by . This book was released on 2006 with total page 248 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Design and Development of a SiC Chemical Vapor Deposition Reactor by : Matthew T. Smith
Download or read book Design and Development of a SiC Chemical Vapor Deposition Reactor written by Matthew T. Smith and published by . This book was released on 2002 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Chemical Vapour Deposition by : Xiu-Tian Yan
Download or read book Chemical Vapour Deposition written by Xiu-Tian Yan and published by Springer Science & Business Media. This book was released on 2010-03-23 with total page 352 pages. Available in PDF, EPUB and Kindle. Book excerpt: "Chemical Vapour Deposition: An Integrated Engineering Design for Advanced Materials" focuses on the application of this technology to engineering coatings and, in particular, to the manufacture of high performance materials, such as fibre reinforced ceramic composite materials, for structural applications at high temperatures. This book aims to provide a thorough exploration of the design and applications of advanced materials, and their manufacture in engineering. From physical fundamentals and principles, to optimization of processing parameters and other current practices, this book is designed to guide readers through the development of both high performance materials and the design of CVD systems to manufacture such materials. "Chemical Vapour Deposition: An Integrated Engineering Design for Advanced Materials" introduces integrated design and manufacture of advanced materials to researchers, industrial practitioners, postgraduates and senior undergraduate students.
Book Synopsis Development of a Polysilicon Process Based on Chemical Vapor Deposition (phase 1) by : Hemlock Semiconductor Corporation
Download or read book Development of a Polysilicon Process Based on Chemical Vapor Deposition (phase 1) written by Hemlock Semiconductor Corporation and published by . This book was released on 1980 with total page 62 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Surface Engineering Series Volume 2: Chemical Vapor Deposition by : Edited by Jong-Hee Park and T.S. Sudarshan
Download or read book Surface Engineering Series Volume 2: Chemical Vapor Deposition written by Edited by Jong-Hee Park and T.S. Sudarshan and published by ASM International. This book was released on 2000-05-01 with total page 478 pages. Available in PDF, EPUB and Kindle. Book excerpt: This handbook provides guidelines and practical information on the chemical vapor deposition (CVD) process for surface engineering design, product development, and manufacturing. The first of the 14 chapters discuss the basic principles of CVD thermodynamics and kinetics, stresses and mechanical sta
Book Synopsis Application of Chemical Vapour Deposition in Catalyst Design by : Robert Moene
Download or read book Application of Chemical Vapour Deposition in Catalyst Design written by Robert Moene and published by Coronet Books. This book was released on 1995-10-01 with total page 201 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Re-determination of the Reaction Path Parameters of Silicon Deposition for Aerospace Silicon Carbide Composites Via Chemical Vapor Deposition by : Sandeep D. Chandrasekaram
Download or read book Re-determination of the Reaction Path Parameters of Silicon Deposition for Aerospace Silicon Carbide Composites Via Chemical Vapor Deposition written by Sandeep D. Chandrasekaram and published by . This book was released on 2016 with total page 70 pages. Available in PDF, EPUB and Kindle. Book excerpt: Development of air travel technology is always increasing and fuel efficiency is one of the most important factors that’s being looked into. For a 25% increase in fuel efficiency in the future aeroplanes, reduction in the weight of the engine is one of the factors that should be addressed while increasing the strength and power generated. For this purpose, General Electric Aviation has chosen Silicon Carbide as the material to build the turbine blades of its engines. Silicon carbide works best as it is strong, can withstand high temperature and lightweight. The downside of this material is that it reacts with water vapor at temperatures greater than 2700°F to form volatile Silicon hydroxide from Silicon dioxide, its protective layer; and furthermore it reduces to Silicon monoxide that vaporizes. To counter this problem, scientists at the National Aeronautics & Space Administration (NASA) have found that a rare earth silicate could be used as an environmental barrier coating (EBC) to prevent the exposure of Silicon Carbide to water vapor. The EBC can’t be directly coated on the Silicon Carbide surface as it isn’t chemically adhesive enough, therefore Silicon was chosen to act as the bond coat between the Silicon Carbide and EBC. The goal of this research is to design a reactor for the composites to be coated with Silicon using the reaction and diffusion kinetics determined at higher temperatures and different partial pressures compared to the standard electronics industry. Chemical Vapor Deposition is the technique that will be used in determining the necessary parameters. The findings from this research can be further used in optimizing the utilization of the reagents and optimizing the process economically.
Book Synopsis Simulation-based Design, Optimization, and Control of Silicon Carbide and Gallium Nitride Thin Film Chemical Vapor Deposition Reactor Systems by : Rinku Pankaj Parikh
Download or read book Simulation-based Design, Optimization, and Control of Silicon Carbide and Gallium Nitride Thin Film Chemical Vapor Deposition Reactor Systems written by Rinku Pankaj Parikh and published by . This book was released on 2006 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Development of a Polysilicon Process Based on Chemical Vapor Deposition (phase 1) by : Hemlock Semiconductor Corporation
Download or read book Development of a Polysilicon Process Based on Chemical Vapor Deposition (phase 1) written by Hemlock Semiconductor Corporation and published by . This book was released on 1980 with total page 60 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Chemical Vapor Deposition of Silicon Carbide in a Hot Wall Reactor by : Feng Gao
Download or read book Chemical Vapor Deposition of Silicon Carbide in a Hot Wall Reactor written by Feng Gao and published by . This book was released on 1993 with total page 161 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Design, Development, and Applications of Engineering Ceramics and Composites by : Dileep Singh
Download or read book Design, Development, and Applications of Engineering Ceramics and Composites written by Dileep Singh and published by John Wiley & Sons. This book was released on 2010-07-23 with total page 352 pages. Available in PDF, EPUB and Kindle. Book excerpt: This compilation of proceedings covering the latest scientific and technological developments in design, development, and applications of engineering ceramics and composites provides a useful one-stop resource for understanding the most important issues in design, development, and applications of engineering ceramics and composites. Logically organized and carefully selected articles give insight into design, development, and applications of engineering ceramics and composites and incorporates the latest developments related to design, development, and applications of engineering ceramics and composites including developments in engineering ceramics, advanced ceramic coatings, and geopolymers.
Book Synopsis Chemical Vapor Deposition of Silicon Carbide on Graphite and Titanium Using a Combined Hot Wall and Heated Substrate Reactor by : Robert M. Galasso
Download or read book Chemical Vapor Deposition of Silicon Carbide on Graphite and Titanium Using a Combined Hot Wall and Heated Substrate Reactor written by Robert M. Galasso and published by . This book was released on 1994 with total page 60 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Modeling of Chemical Vapor Deposition Reactors for Silicon Carbide and Diamond Growth by : Maria Ann Kuczmarski
Download or read book Modeling of Chemical Vapor Deposition Reactors for Silicon Carbide and Diamond Growth written by Maria Ann Kuczmarski and published by . This book was released on 1992 with total page 254 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis One-dimensional Numerical Investigation of the Chemical Vapor Deposition of Silicon Carbide in a Vertical Disk Reactor by : Chigozie Mbeledogu
Download or read book One-dimensional Numerical Investigation of the Chemical Vapor Deposition of Silicon Carbide in a Vertical Disk Reactor written by Chigozie Mbeledogu and published by . This book was released on 1989 with total page 188 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis One-dimensional Numerical Investigation of the Chemical Vapor Deposition of Silicon Carbide in a Vertifcal Disk Reactor by : Chigozie Mbeledogu
Download or read book One-dimensional Numerical Investigation of the Chemical Vapor Deposition of Silicon Carbide in a Vertifcal Disk Reactor written by Chigozie Mbeledogu and published by . This book was released on 1989 with total page 188 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Hydrogen Chloride Enhanced Growth of Silicon Carbide by Chemical Vapor Deposition in a Vertical Cold Wall Reactor by : Christopher Ian Thomas
Download or read book Hydrogen Chloride Enhanced Growth of Silicon Carbide by Chemical Vapor Deposition in a Vertical Cold Wall Reactor written by Christopher Ian Thomas and published by . This book was released on 2009 with total page 218 pages. Available in PDF, EPUB and Kindle. Book excerpt:
