Handbook of Silicon Based MEMS Materials and Technologies

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Publisher : Elsevier
ISBN 13 : 012817787X
Total Pages : 1028 pages
Book Rating : 4.1/5 (281 download)

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Book Synopsis Handbook of Silicon Based MEMS Materials and Technologies by : Markku Tilli

Download or read book Handbook of Silicon Based MEMS Materials and Technologies written by Markku Tilli and published by Elsevier. This book was released on 2020-04-17 with total page 1028 pages. Available in PDF, EPUB and Kindle. Book excerpt: Handbook of Silicon Based MEMS Materials and Technologies, Third Edition is a comprehensive guide to MEMS materials, technologies, and manufacturing with a particular emphasis on silicon as the most important starting material used in MEMS. The book explains the fundamentals, properties (mechanical, electrostatic, optical, etc.), materials selection, preparation, modeling, manufacturing, processing, system integration, measurement, and materials characterization techniques of MEMS structures. The third edition of this book provides an important up-to-date overview of the current and emerging technologies in MEMS making it a key reference for MEMS professionals, engineers, and researchers alike, and at the same time an essential education material for undergraduate and graduate students. - Provides comprehensive overview of leading-edge MEMS manufacturing technologies through the supply chain from silicon ingot growth to device fabrication and integration with sensor/actuator controlling circuits - Explains the properties, manufacturing, processing, measuring and modeling methods of MEMS structures - Reviews the current and future options for hermetic encapsulation and introduces how to utilize wafer level packaging and 3D integration technologies for package cost reduction and performance improvements - Geared towards practical applications presenting several modern MEMS devices including inertial sensors, microphones, pressure sensors and micromirrors

Micro and Nano Fabrication

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Publisher : Springer
ISBN 13 : 3662443953
Total Pages : 537 pages
Book Rating : 4.6/5 (624 download)

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Book Synopsis Micro and Nano Fabrication by : Hans H. Gatzen

Download or read book Micro and Nano Fabrication written by Hans H. Gatzen and published by Springer. This book was released on 2015-01-02 with total page 537 pages. Available in PDF, EPUB and Kindle. Book excerpt: For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book provides a comprehensive insight into the tools necessary for fabricating MEMS/NEMS and the process technologies applied. Besides, it describes enabling technologies which are necessary for a successful production, i.e., wafer planarization and bonding, as well as contamination control.

Handbook of Humidity Measurement, Volume 3

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Publisher : CRC Press
ISBN 13 : 1351056492
Total Pages : 503 pages
Book Rating : 4.3/5 (51 download)

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Book Synopsis Handbook of Humidity Measurement, Volume 3 by : Ghenadii Korotcenkov

Download or read book Handbook of Humidity Measurement, Volume 3 written by Ghenadii Korotcenkov and published by CRC Press. This book was released on 2020-01-24 with total page 503 pages. Available in PDF, EPUB and Kindle. Book excerpt: Because of unique water properties, humidity affects materials and many living organisms, including humans. Humidity control is important in various fields, from production management to creating a comfortable living environment. The range of materials that can be used in the development of humidity sensors is very broad, and the third volume of the Handbook of Humidity Measurement offers an analysis on various humidity-sensitive materials and sensor technologies used in the fabrication of humidity sensors and methods acceptable for their testing. Additional features include: numerous strategies for the fabrication and characterization of humidity-sensitive materials and sensing structures used in sensor applications, methods and properties to develop smaller, cheaper, more robust, and accurate devices with better sensitivity and stability, a guide to sensor selection and an overview of the humidity sensor market, and new technology solutions for integration, miniaturization, and specificity of the humidity sensor calibration. Handbook of Humidity Measurement, Volume 3: Sensing Materials and Technologies provides valuable information for practicing engineers, measurement experts, laboratory technicians, project managers in industries and national laboratories, and university students and professors interested in solutions to humidity measurement tasks. Despite the fact that this book is devoted to the humidity sensors, it can be used as a basis for understanding fundamentals of any gas sensor operation and development.

Springer Handbook of Experimental Solid Mechanics

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Publisher : Springer Science & Business Media
ISBN 13 : 0387268839
Total Pages : 1100 pages
Book Rating : 4.3/5 (872 download)

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Book Synopsis Springer Handbook of Experimental Solid Mechanics by : William N. Sharpe, Jr.

Download or read book Springer Handbook of Experimental Solid Mechanics written by William N. Sharpe, Jr. and published by Springer Science & Business Media. This book was released on 2008-12-04 with total page 1100 pages. Available in PDF, EPUB and Kindle. Book excerpt: The Springer Handbook of Experimental Solid Mechanics documents both the traditional techniques as well as the new methods for experimental studies of materials, components, and structures. The emergence of new materials and new disciplines, together with the escalating use of on- and off-line computers for rapid data processing and the combined use of experimental and numerical techniques have greatly expanded the capabilities of experimental mechanics. New exciting topics are included on biological materials, MEMS and NEMS, nanoindentation, digital photomechanics, photoacoustic characterization, and atomic force microscopy in experimental solid mechanics. Presenting complete instructions to various areas of experimental solid mechanics, guidance to detailed expositions in important references, and a description of state-of-the-art applications in important technical areas, this thoroughly revised and updated edition is an excellent reference to a widespread academic, industrial, and professional engineering audience.

System on Package

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Publisher : McGraw Hill Professional
ISBN 13 : 0071593322
Total Pages : 807 pages
Book Rating : 4.0/5 (715 download)

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Book Synopsis System on Package by : Rao Tummala

Download or read book System on Package written by Rao Tummala and published by McGraw Hill Professional. This book was released on 2007-07-22 with total page 807 pages. Available in PDF, EPUB and Kindle. Book excerpt: System-on-Package (SOP) is an emerging microelectronic technology that places an entire system on a single chip-size package. Where “systems” used to be bulky boxes housing hundreds of components, SOP saves interconnection time and heat generation by keep a full system with computing, communications, and consumer functions all in a single chip. Written by the Georgia Tech developers of the technology, this book explains the basic parameters, design functions, and manufacturing issues, showing electronic designers how this radical new packaging technology can be used to solve pressing electronics design challenges.

Chemical Abstracts

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Publisher :
ISBN 13 :
Total Pages : 2540 pages
Book Rating : 4.3/5 (91 download)

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Book Synopsis Chemical Abstracts by :

Download or read book Chemical Abstracts written by and published by . This book was released on 2002 with total page 2540 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Coplanar Waveguide Circuits, Components, and Systems

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Publisher : John Wiley & Sons
ISBN 13 : 0471463930
Total Pages : 461 pages
Book Rating : 4.4/5 (714 download)

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Book Synopsis Coplanar Waveguide Circuits, Components, and Systems by : Rainee N. Simons

Download or read book Coplanar Waveguide Circuits, Components, and Systems written by Rainee N. Simons and published by John Wiley & Sons. This book was released on 2004-04-07 with total page 461 pages. Available in PDF, EPUB and Kindle. Book excerpt: Up-to-date coverage of the analysis and applications of coplanar waveguides to microwave circuits and antennas The unique feature of coplanar waveguides, as opposed to more conventional waveguides, is their uniplanar construction, in which all of the conductors are aligned on the same side of the substrate. This feature simplifies manufacturing and allows faster and less expensive characterization using on-wafer techniques. Coplanar Waveguide Circuits, Components, and Systems is an engineer's complete resource, collecting all of the available data on the subject. Rainee Simons thoroughly discusses propagation parameters for conventional coplanar waveguides and includes valuable details such as the derivation of the fundamental equations, physical explanations, and numerical examples. Coverage also includes: Discontinuities and circuit elements Transitions to other transmission media Directional couplers, hybrids, and magic T Microelectromechanical systems based switches and phase shifters Tunable devices using ferroelectric materials Photonic bandgap structures Printed circuit antennas

Ultra-thin Chip Technology and Applications

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Publisher : Springer Science & Business Media
ISBN 13 : 1441972765
Total Pages : 471 pages
Book Rating : 4.4/5 (419 download)

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Book Synopsis Ultra-thin Chip Technology and Applications by : Joachim Burghartz

Download or read book Ultra-thin Chip Technology and Applications written by Joachim Burghartz and published by Springer Science & Business Media. This book was released on 2010-11-18 with total page 471 pages. Available in PDF, EPUB and Kindle. Book excerpt: Ultra-thin chips are the "smart skin" of a conventional silicon chip. This book shows how very thin and flexible chips can be fabricated and used in many new applications in microelectronics, Microsystems, biomedical and other fields. It provides a comprehensive reference to the fabrication technology, post processing, characterization and the applications of ultra-thin chips.

Silicon Micromachining

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Publisher : Cambridge University Press
ISBN 13 : 9780521607674
Total Pages : 424 pages
Book Rating : 4.6/5 (76 download)

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Book Synopsis Silicon Micromachining by : Miko Elwenspoek

Download or read book Silicon Micromachining written by Miko Elwenspoek and published by Cambridge University Press. This book was released on 2004-08-19 with total page 424 pages. Available in PDF, EPUB and Kindle. Book excerpt: A comprehensive overview of the key techniques used in the fabrication of micron-scale structures in silicon; for graduate students and researchers.

Fabrication Engineering at the Micro and Nanoscale

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Author :
Publisher : OUP USA
ISBN 13 : 9780195320176
Total Pages : 0 pages
Book Rating : 4.3/5 (21 download)

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Book Synopsis Fabrication Engineering at the Micro and Nanoscale by : Stephen A. Campbell

Download or read book Fabrication Engineering at the Micro and Nanoscale written by Stephen A. Campbell and published by OUP USA. This book was released on 2008-01-10 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt: Designed for advanced undergraduate or first-year graduate courses in semiconductor or microelectronic fabrication, the third edition of Fabrication Engineering at the Micro and Nanoscale provides a thorough and accessible introduction to all fields of micro and nano fabrication.

Labs on Chip

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Publisher : CRC Press
ISBN 13 : 1466560738
Total Pages : 1178 pages
Book Rating : 4.4/5 (665 download)

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Book Synopsis Labs on Chip by : Eugenio Iannone

Download or read book Labs on Chip written by Eugenio Iannone and published by CRC Press. This book was released on 2018-09-03 with total page 1178 pages. Available in PDF, EPUB and Kindle. Book excerpt: Labs on Chip: Principles, Design and Technology provides a complete reference for the complex field of labs on chip in biotechnology. Merging three main areas— fluid dynamics, monolithic micro- and nanotechnology, and out-of-equilibrium biochemistry—this text integrates coverage of technology issues with strong theoretical explanations of design techniques. Analyzing each subject from basic principles to relevant applications, this book: Describes the biochemical elements required to work on labs on chip Discusses fabrication, microfluidic, and electronic and optical detection techniques Addresses planar technologies, polymer microfabrication, and process scalability to huge volumes Presents a global view of current lab-on-chip research and development Devotes an entire chapter to labs on chip for genetics Summarizing in one source the different technical competencies required, Labs on Chip: Principles, Design and Technology offers valuable guidance for the lab-on-chip design decision-making process, while exploring essential elements of labs on chip useful both to the professional who wants to approach a new field and to the specialist who wants to gain a broader perspective.

Modern Electroplating

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Publisher : John Wiley & Sons
ISBN 13 : 1118063147
Total Pages : 755 pages
Book Rating : 4.1/5 (18 download)

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Book Synopsis Modern Electroplating by : Mordechay Schlesinger

Download or read book Modern Electroplating written by Mordechay Schlesinger and published by John Wiley & Sons. This book was released on 2011-02-14 with total page 755 pages. Available in PDF, EPUB and Kindle. Book excerpt: The definitive resource for electroplating, now completely up to date With advances in information-age technologies, the field of electroplating has seen dramatic growth in the decade since the previous edition of Modern Electroplating was published. This expanded new edition addresses these developments, providing a comprehensive, one-stop reference to the latest methods and applications of electroplating of metals, alloys, semiconductors, and conductive polymers. With special emphasis on electroplating and electrochemical plating in nanotechnologies, data storage, and medical applications, the Fifth Edition boasts vast amounts of new and revised material, unmatched in breadth and depth by any other book on the subject. It includes: Easily accessible, self-contained contributions by over thirty experts Five completely new chapters and hundreds of additional pages A cutting-edge look at applications in nanoelectronics Coverage of the formation of nanoclusters and quantum dots using scanning tunneling microscopy (STM) An important discussion of the physical properties of metal thin films Chapters devoted to methods, tools, control, and environmental issues And much more A must-have for anyone in electroplating, including technicians, platers, plating researchers, and metal finishers, Modern Electroplating, Fifth Edition is also an excellent reference for electrical engineers and researchers in the automotive, data storage, and medical industries.

CRC Handbook of Metal Etchants

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Publisher : CRC Press
ISBN 13 : 9781439822531
Total Pages : 1434 pages
Book Rating : 4.8/5 (225 download)

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Book Synopsis CRC Handbook of Metal Etchants by : Perrin Walker

Download or read book CRC Handbook of Metal Etchants written by Perrin Walker and published by CRC Press. This book was released on 1990-12-11 with total page 1434 pages. Available in PDF, EPUB and Kindle. Book excerpt: This publication presents cleaning and etching solutions, their applications, and results on inorganic materials. It is a comprehensive collection of etching and cleaning solutions in a single source. Chemical formulas are presented in one of three standard formats - general, electrolytic or ionized gas formats - to insure inclusion of all necessary operational data as shown in references that accompany each numbered formula. The book describes other applications of specific solutions, including their use on other metals or metallic compounds. Physical properties, association of natural and man-made minerals, and materials are shown in relationship to crystal structure, special processing techniques and solid state devices and assemblies fabricated. This publication also presents a number of organic materials which are widely used in handling and general processing...waxes, plastics, and lacquers for example. It is useful to individuals involved in study, development, and processing of metals and metallic compounds. It is invaluable for readers from the college level to industrial R & D and full-scale device fabrication, testing and sales. Scientific disciplines, work areas and individuals with great interest include: chemistry, physics, metallurgy, geology, solid state, ceramic and glass, research libraries, individuals dealing with chemical processing of inorganic materials, societies and schools.

Plasma Processing of Semiconductors

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Publisher : Springer Science & Business Media
ISBN 13 : 9780792345671
Total Pages : 634 pages
Book Rating : 4.3/5 (456 download)

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Book Synopsis Plasma Processing of Semiconductors by : Paul Williams

Download or read book Plasma Processing of Semiconductors written by Paul Williams and published by Springer Science & Business Media. This book was released on 1997-05-31 with total page 634 pages. Available in PDF, EPUB and Kindle. Book excerpt: Plasma Processing of Semiconductors contains 28 contributions from 18 experts and covers plasma etching, plasma deposition, plasma-surface interactions, numerical modelling, plasma diagnostics, less conventional processing applications of plasmas, and industrial applications. Audience: Coverage ranges from introductory to state of the art, thus the book is suitable for graduate-level students seeking an introduction to the field as well as established workers wishing to broaden or update their knowledge.

Handbook of Silicon Based MEMS Materials and Technologies

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Author :
Publisher : Elsevier
ISBN 13 : 0815519885
Total Pages : 670 pages
Book Rating : 4.8/5 (155 download)

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Book Synopsis Handbook of Silicon Based MEMS Materials and Technologies by : Markku Tilli

Download or read book Handbook of Silicon Based MEMS Materials and Technologies written by Markku Tilli and published by Elsevier. This book was released on 2009-12-08 with total page 670 pages. Available in PDF, EPUB and Kindle. Book excerpt: A comprehensive guide to MEMS materials, technologies and manufacturing, examining the state of the art with a particular emphasis on current and future applications. Key topics covered include: - Silicon as MEMS material - Material properties and measurement techniques - Analytical methods used in materials characterization - Modeling in MEMS - Measuring MEMS - Micromachining technologies in MEMS - Encapsulation of MEMS components - Emerging process technologies, including ALD and porous silicon Written by 73 world class MEMS contributors from around the globe, this volume covers materials selection as well as the most important process steps in bulk micromachining, fulfilling the needs of device design engineers and process or development engineers working in manufacturing processes. It also provides a comprehensive reference for the industrial R&D and academic communities. - Veikko Lindroos is Professor of Physical Metallurgy and Materials Science at Helsinki University of Technology, Finland. - Markku Tilli is Senior Vice President of Research at Okmetic, Vantaa, Finland. - Ari Lehto is Professor of Silicon Technology at Helsinki University of Technology, Finland. - Teruaki Motooka is Professor at the Department of Materials Science and Engineering, Kyushu University, Japan. - Provides vital packaging technologies and process knowledge for silicon direct bonding, anodic bonding, glass frit bonding, and related techniques - Shows how to protect devices from the environment and decrease package size for dramatic reduction of packaging costs - Discusses properties, preparation, and growth of silicon crystals and wafers - Explains the many properties (mechanical, electrostatic, optical, etc), manufacturing, processing, measuring (incl. focused beam techniques), and multiscale modeling methods of MEMS structures

MEMS Materials and Processes Handbook

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Publisher : Springer Science & Business Media
ISBN 13 : 0387473181
Total Pages : 1211 pages
Book Rating : 4.3/5 (874 download)

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Book Synopsis MEMS Materials and Processes Handbook by : Reza Ghodssi

Download or read book MEMS Materials and Processes Handbook written by Reza Ghodssi and published by Springer Science & Business Media. This book was released on 2011-03-18 with total page 1211 pages. Available in PDF, EPUB and Kindle. Book excerpt: MEMs Materials and Processes Handbook" is a comprehensive reference for researchers searching for new materials, properties of known materials, or specific processes available for MEMS fabrication. The content is separated into distinct sections on "Materials" and "Processes". The extensive Material Selection Guide" and a "Material Database" guides the reader through the selection of appropriate materials for the required task at hand. The "Processes" section of the book is organized as a catalog of various microfabrication processes, each with a brief introduction to the technology, as well as examples of common uses in MEMs.

Physics Briefs

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Publisher :
ISBN 13 :
Total Pages : 1212 pages
Book Rating : 4.3/5 (91 download)

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Book Synopsis Physics Briefs by :

Download or read book Physics Briefs written by and published by . This book was released on 1993 with total page 1212 pages. Available in PDF, EPUB and Kindle. Book excerpt: