Copper Interconnects, New Contact Metallurgies/structures, and Low-k Interlevel Dielectrics

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Author :
Publisher : The Electrochemical Society
ISBN 13 : 9781566772945
Total Pages : 262 pages
Book Rating : 4.7/5 (729 download)

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Book Synopsis Copper Interconnects, New Contact Metallurgies/structures, and Low-k Interlevel Dielectrics by : G. S. Mathad

Download or read book Copper Interconnects, New Contact Metallurgies/structures, and Low-k Interlevel Dielectrics written by G. S. Mathad and published by The Electrochemical Society. This book was released on 2001 with total page 262 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Copper Interconnects, New Contact Metallurgies/structures, and Low-k Interlevel Dielectrics II

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Author :
Publisher : The Electrochemical Society
ISBN 13 : 9781566773904
Total Pages : 290 pages
Book Rating : 4.7/5 (739 download)

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Book Synopsis Copper Interconnects, New Contact Metallurgies/structures, and Low-k Interlevel Dielectrics II by : G. S. Mathad

Download or read book Copper Interconnects, New Contact Metallurgies/structures, and Low-k Interlevel Dielectrics II written by G. S. Mathad and published by The Electrochemical Society. This book was released on 2003 with total page 290 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Copper Interconnects, New Contact Metallurgies/Structures, and Low-k Inter-level Dielectrics

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Author :
Publisher : The Electrochemical Society
ISBN 13 : 1566776937
Total Pages : 71 pages
Book Rating : 4.5/5 (667 download)

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Book Synopsis Copper Interconnects, New Contact Metallurgies/Structures, and Low-k Inter-level Dielectrics by : G. Mathad

Download or read book Copper Interconnects, New Contact Metallurgies/Structures, and Low-k Inter-level Dielectrics written by G. Mathad and published by The Electrochemical Society. This book was released on 2009-03 with total page 71 pages. Available in PDF, EPUB and Kindle. Book excerpt: The papers included in this issue of ECS Transactions were originally presented in the symposium ¿Low k Inter-Level Metal Dielectrics and New Contact and Barrier Metallurgies/Structures¿, held during the PRiME 2008 joint international meeting of The Electrochemical Society and The Electrochemical Society of Japan, with the technical cosponsorship of the Japan Society of Applied Physics, the Korean Electrochemical Society, the Electrochemistry Division of the Royal Australian Chemical Institute, and the Chinese Society of Electrochemistry. This meeting was held in Honolulu, Hawaii, from October 12 to 17, 2008.

Copper Interconnects, New Contact Metallurgies/structures, and Low-k Interlevel Dielectrics

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Author :
Publisher : The Electrochemical Society
ISBN 13 : 9781566773799
Total Pages : 364 pages
Book Rating : 4.7/5 (737 download)

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Book Synopsis Copper Interconnects, New Contact Metallurgies/structures, and Low-k Interlevel Dielectrics by :

Download or read book Copper Interconnects, New Contact Metallurgies/structures, and Low-k Interlevel Dielectrics written by and published by The Electrochemical Society. This book was released on 2003 with total page 364 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Copper Interconnects, New Contact Metallurgies/structures, and Low-k Inter-level Dielectrics

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Publisher :
ISBN 13 : 9781615672936
Total Pages : 61 pages
Book Rating : 4.6/5 (729 download)

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Book Synopsis Copper Interconnects, New Contact Metallurgies/structures, and Low-k Inter-level Dielectrics by : Electrochemical Society

Download or read book Copper Interconnects, New Contact Metallurgies/structures, and Low-k Inter-level Dielectrics written by Electrochemical Society and published by . This book was released on 2008 with total page 61 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Copper Interconnect Technology

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Author :
Publisher : Springer Science & Business Media
ISBN 13 : 1441900764
Total Pages : 423 pages
Book Rating : 4.4/5 (419 download)

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Book Synopsis Copper Interconnect Technology by : Tapan Gupta

Download or read book Copper Interconnect Technology written by Tapan Gupta and published by Springer Science & Business Media. This book was released on 2010-01-22 with total page 423 pages. Available in PDF, EPUB and Kindle. Book excerpt: Since overall circuit performance has depended primarily on transistor properties, previous efforts to enhance circuit and system speed were focused on transistors as well. During the last decade, however, the parasitic resistance, capacitance, and inductance associated with interconnections began to influence circuit performance and will be the primary factors in the evolution of nanoscale ULSI technology. Because metallic conductivity and resistance to electromigration of bulk copper (Cu) are better than aluminum, use of copper and low-k materials is now prevalent in the international microelectronics industry. As the feature size of the Cu-lines forming interconnects is scaled, resistivity of the lines increases. At the same time electromigration and stress-induced voids due to increased current density become significant reliability issues. Although copper/low-k technology has become fairly mature, there is no single book available on the promise and challenges of these next-generation technologies. In this book, a leader in the field describes advanced laser systems with lower radiation wavelengths, photolithography materials, and mathematical modeling approaches to address the challenges of Cu-interconnect technology.

Technology Development and Marketing

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Author :
Publisher : AuthorHouse
ISBN 13 : 1546245766
Total Pages : 86 pages
Book Rating : 4.5/5 (462 download)

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Book Synopsis Technology Development and Marketing by : Junmo Kim

Download or read book Technology Development and Marketing written by Junmo Kim and published by AuthorHouse. This book was released on 2018-06-07 with total page 86 pages. Available in PDF, EPUB and Kindle. Book excerpt: Technology development needs a market. Since technology development is from supply side, it is always crucial to pay attention to the demand side of technology. Taking this notion as an underlying assumption, this book discusses a technology development case in the realm of microelectronic packaging technology based on a real case study of a three-year consecutive research and development program conducted in Korea with expandable implications for other contexts.

Advanced Nanoscale ULSI Interconnects: Fundamentals and Applications

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Publisher : Springer Science & Business Media
ISBN 13 : 0387958681
Total Pages : 552 pages
Book Rating : 4.3/5 (879 download)

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Book Synopsis Advanced Nanoscale ULSI Interconnects: Fundamentals and Applications by : Yosi Shacham-Diamand

Download or read book Advanced Nanoscale ULSI Interconnects: Fundamentals and Applications written by Yosi Shacham-Diamand and published by Springer Science & Business Media. This book was released on 2009-09-19 with total page 552 pages. Available in PDF, EPUB and Kindle. Book excerpt: In Advanced ULSI interconnects – fundamentals and applications we bring a comprehensive description of copper-based interconnect technology for ultra-lar- scale integration (ULSI) technology for integrated circuit (IC) application. In- grated circuit technology is the base for all modern electronics systems. You can ?nd electronics systems today everywhere: from toys and home appliances to a- planes and space shuttles. Electronics systems form the hardware that together with software are the bases of the modern information society. The rapid growth and vast exploitation of modern electronics system create a strong demand for new and improved electronic circuits as demonstrated by the amazing progress in the ?eld of ULSI technology. This progress is well described by the famous “Moore’s law” which states, in its most general form, that all the metrics that describe integrated circuit performance (e. g. , speed, number of devices, chip area) improve expon- tially as a function of time. For example, the number of components per chip d- bles every 18 months and the critical dimension on a chip has shrunk by 50% every 2 years on average in the last 30 years. This rapid growth in integrated circuits te- nology results in highly complex integrated circuits with an increasing number of interconnects on chips and between the chip and its package. The complexity of the interconnect network on chips involves an increasing number of metal lines per interconnect level, more interconnect levels, and at the same time a reduction in the interconnect line critical dimensions.

Chemical Mechanical Planarization IV

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Author :
Publisher : The Electrochemical Society
ISBN 13 : 9781566772938
Total Pages : 350 pages
Book Rating : 4.7/5 (729 download)

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Book Synopsis Chemical Mechanical Planarization IV by : R. L. Opila

Download or read book Chemical Mechanical Planarization IV written by R. L. Opila and published by The Electrochemical Society. This book was released on 2001 with total page 350 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Cleaning Technology in Semiconductor Device Manufacturing VIII

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Author :
Publisher : The Electrochemical Society
ISBN 13 : 9781566774116
Total Pages : 452 pages
Book Rating : 4.7/5 (741 download)

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Book Synopsis Cleaning Technology in Semiconductor Device Manufacturing VIII by : Jerzy Rużyłło

Download or read book Cleaning Technology in Semiconductor Device Manufacturing VIII written by Jerzy Rużyłło and published by The Electrochemical Society. This book was released on 2004 with total page 452 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Cleaning Technology in Semiconductor Device Manufacturing ...

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Publisher :
ISBN 13 :
Total Pages : 458 pages
Book Rating : 4.3/5 (91 download)

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Book Synopsis Cleaning Technology in Semiconductor Device Manufacturing ... by :

Download or read book Cleaning Technology in Semiconductor Device Manufacturing ... written by and published by . This book was released on 2003 with total page 458 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Electrochemical Processes in ULSI and MEMS

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Publisher : The Electrochemical Society
ISBN 13 : 9781566774727
Total Pages : 494 pages
Book Rating : 4.7/5 (747 download)

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Book Synopsis Electrochemical Processes in ULSI and MEMS by : Hariklia Deligianni

Download or read book Electrochemical Processes in ULSI and MEMS written by Hariklia Deligianni and published by The Electrochemical Society. This book was released on 2005 with total page 494 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Electrochemical Surface Modification

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Author :
Publisher : John Wiley & Sons
ISBN 13 : 3527625313
Total Pages : 360 pages
Book Rating : 4.5/5 (276 download)

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Book Synopsis Electrochemical Surface Modification by : Richard C. Alkire

Download or read book Electrochemical Surface Modification written by Richard C. Alkire and published by John Wiley & Sons. This book was released on 2008-11-21 with total page 360 pages. Available in PDF, EPUB and Kindle. Book excerpt: In this topical volume, the authors provide in-depth coverage of the vital relationship between electrochemistry and the morphology of thin films and surfaces. Clearly divided into four major sections, the book covers nanoscale dielectric films for electronic devices, superconformal film growth, electrocatalytic properties of transition metal macrocycles, and the use of synchrotron techniques in electrochemistry. All the chapters offer a concise introduction to the relevant topic, as well as supplying numerous references for easy access to further reading and the original literature. The result is must-have reading for electrochemists, physical and surface chemists and physicists, as well as materials scientists and engineers active in the field of spectroscopic methods in electrochemistry.

Index of Conference Proceedings

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Publisher :
ISBN 13 :
Total Pages : 698 pages
Book Rating : 4.F/5 ( download)

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Book Synopsis Index of Conference Proceedings by : British Library. Document Supply Centre

Download or read book Index of Conference Proceedings written by British Library. Document Supply Centre and published by . This book was released on 2002 with total page 698 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Advanced Metallization Conference in ...

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Publisher :
ISBN 13 :
Total Pages : 936 pages
Book Rating : 4.3/5 (91 download)

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Book Synopsis Advanced Metallization Conference in ... by :

Download or read book Advanced Metallization Conference in ... written by and published by . This book was released on 2005 with total page 936 pages. Available in PDF, EPUB and Kindle. Book excerpt:

CMOS Past, Present and Future

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Author :
Publisher : Woodhead Publishing
ISBN 13 : 0081021402
Total Pages : 278 pages
Book Rating : 4.0/5 (81 download)

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Book Synopsis CMOS Past, Present and Future by : Henry Radamson

Download or read book CMOS Past, Present and Future written by Henry Radamson and published by Woodhead Publishing. This book was released on 2018-04-03 with total page 278 pages. Available in PDF, EPUB and Kindle. Book excerpt: CMOS Past, Present and Future provides insight from the basics, to the state-of-the-art of CMOS processing and electrical characterization, including the integration of Group IV semiconductors-based photonics. The book goes into the pitfalls and opportunities associated with the use of hetero-epitaxy on silicon with strain engineering and the integration of photonics and high-mobility channels on a silicon platform. It begins with the basic definitions and equations, but extends to present technologies and challenges, creating a roadmap on the origins of the technology and its evolution to the present, along with a vision for future trends. The book examines the challenges and opportunities that materials beyond silicon provide, including a close look at high-k materials and metal gate, strain engineering, channel material and mobility, and contacts. The book's key approach is on characterizations, device processing and electrical measurements. Addresses challenges and opportunities for the use of CMOS Covers the latest methods of strain engineering, materials integration to increase mobility, nano-scaled transistor processing, and integration of CMOS with photonic components Provides a look at the evolution of CMOS technology, including the origins of the technology, current status and future possibilities

Book Review Index

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Publisher :
ISBN 13 :
Total Pages : 1346 pages
Book Rating : 4.3/5 (91 download)

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Book Synopsis Book Review Index by :

Download or read book Book Review Index written by and published by . This book was released on 2003 with total page 1346 pages. Available in PDF, EPUB and Kindle. Book excerpt: Every 3rd issue is a quarterly cumulation.