Controlling Si(111) and Si(100) Surfaces for Subsequent GaP Heteroepitaxy in CVD Ambient

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ISBN 13 :
Total Pages : 0 pages
Book Rating : 4.:/5 (137 download)

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Book Synopsis Controlling Si(111) and Si(100) Surfaces for Subsequent GaP Heteroepitaxy in CVD Ambient by : Agnieszka Paszuk

Download or read book Controlling Si(111) and Si(100) Surfaces for Subsequent GaP Heteroepitaxy in CVD Ambient written by Agnieszka Paszuk and published by . This book was released on 2017 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt: Die Integration von III-V-Unterzellen auf einem kostengünstigen aktiven Si-Substrat hat das Potential, Mehrfach-Solarzellen mit einem hohen Konversionswirkungsgrad zu ermöglichen. Das Wachstum von III-V-Materialien mit niedriger Defektdichte auf Si ist schwierig aufgrund der unterschiedlichen Kristallstrukturen. Dank der geringen Gitterfehlanpassung kann eine GaP Nukleationsschicht, die auf dem Si Substrat aufgewachsen wird, den Übergang von Si zu anderen III-V Materialien erleichtern. Solche pseudomorphen GaP/Si-Quasisubstrate ermöglichen die anschließende Integration planarer oder Nanodraht (ND)-basierter III-V-Strukturen. Die planaren Strukturen werden für gewöhnlich in [100]-Orientierung gewachsen, wohingegen ND-Strukturen bevorzugt entlang der [111]-Richtung wachsen. Die vorliegende Arbeit untersucht die Präparation der Si Unterzelle und der pseudomorphen GaP/Si Quasisubstrate mittels metallorganischer chemischer Gasphasenabscheidung (MOCVD). Auf der Si(100) Oberfläche verursachen Einfachstufen beim heteroepitaktischen Wachstum von III-V-Schichten die Entstehung von Antiphasendomänen, wohingegen bei Si(111)-Substraten die Kontrolle der Polarität der GaP-Schichten entscheidend ist, um das senkrechte Wachstum von ND zu erreichen. MOCVD-Wachstumsprozesse sind sehr komplex aufgrund der Anwesenheit von metallorganischen Ausgangsstoffen, des Prozessgases (H2), welches einen starken Einfluss auf die Stufenformation des Si hat, und wegen des allgegenwertigen Wechselspiels zwischen energetischen und kinetischen Prozessen. Um die präzise Präparation der Si-Oberfläche kontrollieren zu können verwenden wir in situ Reflexions-Anisotropie-Spektroskopie (RAS) und korrelieren Signale, welche an entscheidenden Prozessschritten auftreten, mit Ultrahochvakuum (UHV)-basierten Oberflächen-empfindlichen Methoden. Beide Si-Oberflächen wechselwirken stark mit dem H2-Prozessgas, was zu einer Terminierung der Oberflächen mit Monohydrid führt. Der Kollektor in Si(100) und Si(111) wird durch Tempern unter TBP oder TBAs Precursor gebildet, welches zu einer Diffusion von P oder As in Si führt. Nach der Kollektor-Bildung weiteres Tempern in H2 ist notwendig, um für die GaP Nukleation wieder eine glatte Oberfläche (epiready) zu generieren. Um GaP(111) mit B-Typ-Polarität zu erzielen, was für vertikales III-V ND-Wachstum notwendig ist, ist eine Modifizierung der H-terminierten Si-Oberfläche nötig. Durch eine gezielte Terminierung der Si-Oberfläche mit As oder H2 lässt sich die Polarität des GaP-Films kontrollieren. Im Falle von Si(100) 6° kann mittels in situ RAS die Dimer-Ausrichtung der Majoritätsdomäne auf der Oberfläche in Abhängigkeit der As-Quelle (Asx oder TBAs) und der Abkühlprozedur kontrolliert werden. Dies erlaubt die gezielte Einstellung der Untergitterausrichtung der nachfolgend gewachsenen, eindomänigen GaP/Si(100)-Schicht. Somit können sowohl für planare als auch für ND-basierte photovoltaische Mehrfachabsorber-Strukturen geeignete GaP/Si Quasisubstrate mit wohldefinierten Grenzflächen und einem p-n-Übergang im Si kontrolliert in der MOCVD präpariert werden.

Heteroepitaxy on Silicon: Volume 67

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ISBN 13 :
Total Pages : 304 pages
Book Rating : 4.:/5 (45 download)

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Book Synopsis Heteroepitaxy on Silicon: Volume 67 by : J. C. C. Fan

Download or read book Heteroepitaxy on Silicon: Volume 67 written by J. C. C. Fan and published by . This book was released on 1986-10-20 with total page 304 pages. Available in PDF, EPUB and Kindle. Book excerpt: The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.

Semiconductor Nanostructures

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Publisher : Springer Science & Business Media
ISBN 13 : 3540778993
Total Pages : 369 pages
Book Rating : 4.5/5 (47 download)

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Book Synopsis Semiconductor Nanostructures by : Dieter Bimberg

Download or read book Semiconductor Nanostructures written by Dieter Bimberg and published by Springer Science & Business Media. This book was released on 2008-06-03 with total page 369 pages. Available in PDF, EPUB and Kindle. Book excerpt: Reducing the size of a coherently grown semiconductor cluster in all three directions of space to a value below the de Broglie wavelength of a charge carrier leads to complete quantization of the energy levels, density of states, etc. Such “quantum dots” are more similar to giant atoms in a dielectric cage than to classical solids or semiconductors showing a dispersion of energy as a function of wavevector. Their electronic and optical properties depend strongly on their size and shape, i.e. on their geometry. By designing the geometry by controlling the growth of QDs, absolutely novel possibilities for material design leading to novel devices are opened. This multiauthor book written by world-wide recognized leaders of their particular fields and edited by the recipient of the Max-Born Award and Medal 2006 Professor Dieter Bimberg reports on the state of the art of the growing of quantum dots, the theory of self-organised growth, the theory of electronic and excitonic states, optical properties and transport in a variety of materials. It covers the subject from the early work beginning of the 1990s up to 2006. The topics addressed in the book are the focus of research in all leading semiconductor and optoelectronic device laboratories of the world.

Electromagnetic Metrology

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ISBN 13 :
Total Pages : 38 pages
Book Rating : 4.:/5 (3 download)

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Book Synopsis Electromagnetic Metrology by :

Download or read book Electromagnetic Metrology written by and published by . This book was released on 1975 with total page 38 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Two-dimensional Materials

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Publisher : BoD – Books on Demand
ISBN 13 : 9535125540
Total Pages : 282 pages
Book Rating : 4.5/5 (351 download)

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Book Synopsis Two-dimensional Materials by : Pramoda Kumar Nayak

Download or read book Two-dimensional Materials written by Pramoda Kumar Nayak and published by BoD – Books on Demand. This book was released on 2016-08-31 with total page 282 pages. Available in PDF, EPUB and Kindle. Book excerpt: There are only a few discoveries and new technologies in materials science that have the potential to dramatically alter and revolutionize our material world. Discovery of two-dimensional (2D) materials, the thinnest form of materials to ever occur in nature, is one of them. After isolation of graphene from graphite in 2004, a whole other class of atomically thin materials, dominated by surface effects and showing completely unexpected and extraordinary properties, has been created. This book provides a comprehensive view and state-of-the-art knowledge about 2D materials such as graphene, hexagonal boron nitride (h-BN), transition metal dichalcogenides (TMD) and so on. It consists of 11 chapters contributed by a team of experts in this exciting field and provides latest synthesis techniques of 2D materials, characterization and their potential applications in energy conservation, electronics, optoelectronics and biotechnology.

Epoxy Composites

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Publisher : John Wiley & Sons
ISBN 13 : 3527346783
Total Pages : 450 pages
Book Rating : 4.5/5 (273 download)

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Book Synopsis Epoxy Composites by : Jyotishkumar Parameswaranpillai

Download or read book Epoxy Composites written by Jyotishkumar Parameswaranpillai and published by John Wiley & Sons. This book was released on 2021-06-01 with total page 450 pages. Available in PDF, EPUB and Kindle. Book excerpt: Discover a one-stop resource for in-depth knowledge on epoxy composites from leading voices in the field Used in a wide variety of materials engineering applications, epoxy composites are highly relevant to the work of engineers and scientists in many fields. Recent developments have allowed for significant advancements in their preparation, processing and characterization that are highly relevant to the aerospace and automobile industry, among others. In Epoxy Composites: Fabrication, Characterization and Applications, a distinguished team of authors and editors deliver a comprehensive and straightforward summary of the most recent developments in the area of epoxy composites. The book emphasizes their preparation, characterization and applications, providing a complete understanding of the correlation of rheology, cure reaction, morphology, and thermo-mechanical properties with filler dispersion. Readers will learn about a variety of topics on the cutting-edge of epoxy composite fabrication and characterization, including smart epoxy composites, theoretical modeling, recycling and environmental issues, safety issues, and future prospects for these highly practical materials. Readers will also benefit from the inclusion of: A thorough introduction to epoxy composites, their synthesis and manufacturing, and micro- and nano-scale structure formation in epoxy and clay nanocomposites An exploration of long fiber reinforced epoxy composites and eco-friendly epoxy-based composites Practical discussions of the processing of epoxy composites based on carbon nanomaterials and the thermal stability and flame retardancy of epoxy composites An analysis of the spectroscopy and X-ray scattering studies of epoxy composites Perfect for materials scientists, polymer chemists, and mechanical engineers, Epoxy Composites: Fabrication, Characterization and Applications will also earn a place in the libraries of engineering scientists working in industry and process engineers seeking a comprehensive and exhaustive resource on epoxy composites.

Specimen Handling, Preparation, and Treatments in Surface Characterization

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Publisher : Springer Science & Business Media
ISBN 13 : 030645887X
Total Pages : 316 pages
Book Rating : 4.3/5 (64 download)

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Book Synopsis Specimen Handling, Preparation, and Treatments in Surface Characterization by : Alvin W. Czanderna

Download or read book Specimen Handling, Preparation, and Treatments in Surface Characterization written by Alvin W. Czanderna and published by Springer Science & Business Media. This book was released on 1998 with total page 316 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book is intended for professionals, researchers, technicians and students who are newcomers to the field as well as those with experience. It will be an important resource in the following fields: surface science, electronic materials and processes, thin film deposition, surface compositional analysis and related topical areas such as corrosion, oxidation, reduction, adsorption, desorption, adhesion, epitaxial growth and contamination. The presentation uses a tutorial and pedagogical approach.

Materials Chemistry

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Publisher : Springer
ISBN 13 : 9402412557
Total Pages : 817 pages
Book Rating : 4.4/5 (24 download)

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Book Synopsis Materials Chemistry by : Bradley D. Fahlman

Download or read book Materials Chemistry written by Bradley D. Fahlman and published by Springer. This book was released on 2018-08-28 with total page 817 pages. Available in PDF, EPUB and Kindle. Book excerpt: The 3rd edition of this successful textbook continues to build on the strengths that were recognized by a 2008 Textbook Excellence Award from the Text and Academic Authors Association (TAA). Materials Chemistry addresses inorganic-, organic-, and nano-based materials from a structure vs. property treatment, providing a suitable breadth and depth coverage of the rapidly evolving materials field — in a concise format. The 3rd edition offers significant updates throughout, with expanded sections on sustainability, energy storage, metal-organic frameworks, solid electrolytes, solvothermal/microwave syntheses, integrated circuits, and nanotoxicity. Most appropriate for Junior/Senior undergraduate students, as well as first-year graduate students in chemistry, physics, or engineering fields, Materials Chemistry may also serve as a valuable reference to industrial researchers. Each chapter concludes with a section that describes important materials applications, and an updated list of thought-provoking questions.

Fundamentals of Silicon Carbide Technology

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Publisher : John Wiley & Sons
ISBN 13 : 1118313526
Total Pages : 565 pages
Book Rating : 4.1/5 (183 download)

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Book Synopsis Fundamentals of Silicon Carbide Technology by : Tsunenobu Kimoto

Download or read book Fundamentals of Silicon Carbide Technology written by Tsunenobu Kimoto and published by John Wiley & Sons. This book was released on 2014-11-24 with total page 565 pages. Available in PDF, EPUB and Kindle. Book excerpt: A comprehensive introduction and up-to-date reference to SiC power semiconductor devices covering topics from material properties to applications Based on a number of breakthroughs in SiC material science and fabrication technology in the 1980s and 1990s, the first SiC Schottky barrier diodes (SBDs) were released as commercial products in 2001. The SiC SBD market has grown significantly since that time, and SBDs are now used in a variety of power systems, particularly switch-mode power supplies and motor controls. SiC power MOSFETs entered commercial production in 2011, providing rugged, high-efficiency switches for high-frequency power systems. In this wide-ranging book, the authors draw on their considerable experience to present both an introduction to SiC materials, devices, and applications and an in-depth reference for scientists and engineers working in this fast-moving field. Fundamentals of Silicon Carbide Technology covers basic properties of SiC materials, processing technology, theory and analysis of practical devices, and an overview of the most important systems applications. Specifically included are: A complete discussion of SiC material properties, bulk crystal growth, epitaxial growth, device fabrication technology, and characterization techniques. Device physics and operating equations for Schottky diodes, pin diodes, JBS/MPS diodes, JFETs, MOSFETs, BJTs, IGBTs, and thyristors. A survey of power electronics applications, including switch-mode power supplies, motor drives, power converters for electric vehicles, and converters for renewable energy sources. Coverage of special applications, including microwave devices, high-temperature electronics, and rugged sensors. Fully illustrated throughout, the text is written by recognized experts with over 45 years of combined experience in SiC research and development. This book is intended for graduate students and researchers in crystal growth, material science, and semiconductor device technology. The book is also useful for design engineers, application engineers, and product managers in areas such as power supplies, converter and inverter design, electric vehicle technology, high-temperature electronics, sensors, and smart grid technology.

Integration of Functional Oxides with Semiconductors

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Publisher : Springer Science & Business Media
ISBN 13 : 146149320X
Total Pages : 284 pages
Book Rating : 4.4/5 (614 download)

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Book Synopsis Integration of Functional Oxides with Semiconductors by : Alexander A. Demkov

Download or read book Integration of Functional Oxides with Semiconductors written by Alexander A. Demkov and published by Springer Science & Business Media. This book was released on 2014-02-20 with total page 284 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book describes the basic physical principles of the oxide/semiconductor epitaxy and offers a view of the current state of the field. It shows how this technology enables large-scale integration of oxide electronic and photonic devices and describes possible hybrid semiconductor/oxide systems. The book incorporates both theoretical and experimental advances to explore the heteroepitaxy of tuned functional oxides and semiconductors to identify material, device and characterization challenges and to present the incredible potential in the realization of multifunctional devices and monolithic integration of materials and devices. Intended for a multidisciplined audience, Integration of Functional Oxides with Semiconductors describes processing techniques that enable atomic-level control of stoichiometry and structure and reviews characterization techniques for films, interfaces and device performance parameters. Fundamental challenges involved in joining covalent and ionic systems, chemical interactions at interfaces, multi-element materials that are sensitive to atomic-level compositional and structural changes are discussed in the context of the latest literature. Magnetic, ferroelectric and piezoelectric materials and the coupling between them will also be discussed. GaN, SiC, Si, GaAs and Ge semiconductors are covered within the context of optimizing next-generation device performance for monolithic device processing.

The Physics of Semiconductors

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Publisher : Springer Nature
ISBN 13 : 3030515699
Total Pages : 905 pages
Book Rating : 4.0/5 (35 download)

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Book Synopsis The Physics of Semiconductors by : Marius Grundmann

Download or read book The Physics of Semiconductors written by Marius Grundmann and published by Springer Nature. This book was released on 2021-03-06 with total page 905 pages. Available in PDF, EPUB and Kindle. Book excerpt: The 4th edition of this highly successful textbook features copious material for a complete upper-level undergraduate or graduate course, guiding readers to the point where they can choose a specialized topic and begin supervised research. The textbook provides an integrated approach beginning from the essential principles of solid-state and semiconductor physics to their use in various classic and modern semiconductor devices for applications in electronics and photonics. The text highlights many practical aspects of semiconductors: alloys, strain, heterostructures, nanostructures, amorphous semiconductors, and noise, which are essential aspects of modern semiconductor research but often omitted in other textbooks. This textbook also covers advanced topics, such as Bragg mirrors, resonators, polarized and magnetic semiconductors, nanowires, quantum dots, multi-junction solar cells, thin film transistors, and transparent conductive oxides. The 4th edition includes many updates and chapters on 2D materials and aspects of topology. The text derives explicit formulas for many results to facilitate a better understanding of the topics. Having evolved from a highly regarded two-semester course on the topic, The Physics of Semiconductors requires little or no prior knowledge of solid-state physics. More than 2100 references guide the reader to historic and current literature including original papers, review articles and topical books, providing a go-to point of reference for experienced researchers as well.

Physics and Chemistry of Interfaces

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Publisher : John Wiley & Sons
ISBN 13 : 3527836160
Total Pages : 485 pages
Book Rating : 4.5/5 (278 download)

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Book Synopsis Physics and Chemistry of Interfaces by : Hans-Jürgen Butt

Download or read book Physics and Chemistry of Interfaces written by Hans-Jürgen Butt and published by John Wiley & Sons. This book was released on 2023-02-07 with total page 485 pages. Available in PDF, EPUB and Kindle. Book excerpt: Physics and Chemistry of Interfaces Comprehensive textbook on the interdisciplinary field of interface science, fully updated with new content on wetting, spectroscopy, and coatings Physics and Chemistry of Interfaces provides a comprehensive introduction to the field of surface and interface science, focusing on essential concepts rather than specific details, and on intuitive understanding rather than convoluted math. Numerous high-end applications from surface technology, biotechnology, and microelectronics are included to illustrate and help readers easily comprehend basic concepts. The new edition contains an increased number of problems with detailed, worked solutions, making it ideal as a self-study resource. In topic coverage, the highly qualified authors take a balanced approach, discussing advanced interface phenomena in detail while remaining comprehensible. Chapter summaries with the most important equations, facts, and phenomena are included to aid the reader in information retention. A few of the sample topics included in Physics and Chemistry of Interfaces are as follows: Liquid surfaces, covering microscopic picture of a liquid surface, surface tension, the equation of Young and Laplace, and curved liquid surfaces Thermodynamics of interfaces, covering surface excess, internal energy and Helmholtz energy, equilibrium conditions, and interfacial excess energies Charged interfaces and the electric double layer, covering planar surfaces, the Grahame equation, and limitations of the Poisson-Boltzmann theory Surface forces, covering Van der Waals forces between molecules, macroscopic calculations, the Derjaguin approximation, and disjoining pressure Physics and Chemistry of Interfaces is a complete reference on the subject, aimed at advanced students (and their instructors) in physics, material science, chemistry, and engineering. Researchers requiring background knowledge on surface and interface science will also benefit from the accessible yet in-depth coverage of the text.

Physics and Technology of Silicon Carbide Devices

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Publisher :
ISBN 13 : 9781681176437
Total Pages : 284 pages
Book Rating : 4.1/5 (764 download)

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Book Synopsis Physics and Technology of Silicon Carbide Devices by : George Gibbs

Download or read book Physics and Technology of Silicon Carbide Devices written by George Gibbs and published by . This book was released on 2016-10-01 with total page 284 pages. Available in PDF, EPUB and Kindle. Book excerpt: Silicon (Si) is by far the most widely used semiconductor material for power devices. On the other hand, Si-based power devices are approaching their material limits, which has provoked a lot of efforts to find alternatives to Si-based power devices for better performance. With the rapid innovations and developments in the semiconductor industry, Silicon Carbide (SiC) power devices have progressed from immature prototypes in laboratories to a viable alternative to Si-based power devices in high-efficiency and high-power density applications. SiC devices have numerous persuasive advantages--high-breakdown voltage, high-operating electric field, high-operating temperature, high-switching frequency and low losses. Silicon Carbide (SiC) devices belong to the so-called wide band gap semiconductor group, which offers a number of attractive characteristics for high voltage power semiconductors when compared to commonly used silicon (Si). Recently, some SiC power devices, for example, Schottky-barrier diodes (SBDs), metal-oxide-semiconductor field-effecttransistors (MOSFETs), junction FETs (JFETs), and their integrated modules have come onto the market. Physics and Technology of Silicon Carbide Devices abundantly describes recent technologies on manufacturing, processing, characterization, modeling, etc. for SiC devices.

Silicon Photonics II

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Publisher : Springer Science & Business Media
ISBN 13 : 3642105068
Total Pages : 264 pages
Book Rating : 4.6/5 (421 download)

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Book Synopsis Silicon Photonics II by : David J. Lockwood

Download or read book Silicon Photonics II written by David J. Lockwood and published by Springer Science & Business Media. This book was released on 2010-10-13 with total page 264 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book is volume II of a series of books on silicon photonics. It gives a fascinating picture of the state-of-the-art in silicon photonics from a component perspective. It presents a perspective on what can be expected in the near future. It is formed from a selected number of reviews authored by world leaders in the field, and is written from both academic and industrial viewpoints. An in-depth discussion of the route towards fully integrated silicon photonics is presented. This book will be useful not only to physicists, chemists, materials scientists, and engineers but also to graduate students who are interested in the fields of micro- and nanophotonics and optoelectronics.

Electrochemistry of Metal Chalcogenides

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Publisher : Springer Science & Business Media
ISBN 13 : 3642039677
Total Pages : 365 pages
Book Rating : 4.6/5 (42 download)

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Book Synopsis Electrochemistry of Metal Chalcogenides by : Mirtat Bouroushian

Download or read book Electrochemistry of Metal Chalcogenides written by Mirtat Bouroushian and published by Springer Science & Business Media. This book was released on 2010-04-23 with total page 365 pages. Available in PDF, EPUB and Kindle. Book excerpt: The author provides a unified account of the electrochemical material science of metal chalcogenide (MCh) compounds and alloys with regard to their synthesis, processing and applications. Starting with the chemical fundamentals of the chalcogens and their major compounds, the initial part of the book includes a systematic description of the MCh solids on the basis of the Periodic Table in terms of their structures and key properties. This is followed by a general discussion on the electrochemistry of chalcogen species, and the principles underlying the electrochemical formation of inorganic compounds/alloys. The core of the book offers an insight into available experimental results and inferences regarding the electrochemical preparation and microstructural control of conventional and novel MCh structures. It also aims to survey their photoelectrochemistry, both from a material-oriented point of view and as connected to specific processes such as photocatalysis and solar energy conversion. Finally, the book illustrates the relevance of MCh materials to various applications of electrochemical interest such as (electro)catalysis in fuel cells, energy storage with intercalation electrodes, and ion sensing.

III-Nitride Based Light Emitting Diodes and Applications

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Publisher : Springer Science & Business Media
ISBN 13 : 9400758634
Total Pages : 434 pages
Book Rating : 4.4/5 (7 download)

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Book Synopsis III-Nitride Based Light Emitting Diodes and Applications by : Tae-Yeon Seong

Download or read book III-Nitride Based Light Emitting Diodes and Applications written by Tae-Yeon Seong and published by Springer Science & Business Media. This book was released on 2014-07-08 with total page 434 pages. Available in PDF, EPUB and Kindle. Book excerpt: Light emitting diodes (LEDs) are already used in traffic signals, signage lighting, and automotive applications. However, its ultimate goal is to replace traditional illumination through LED lamps since LED lighting significantly reduces energy consumption and cuts down on carbon-dioxide emission. Despite dramatic advances in LED technologies (e.g., growth, doping and processing technologies), however, there remain critical issues for further improvements yet to be achieved for the realization of solid-state lighting. This book aims to provide the readers with some contemporary LED issues, which have not been comprehensively discussed in the published books and, on which the performance of LEDs is seriously dependent. For example, most importantly, there must be a breakthrough in the growth of high-quality nitride semiconductor epitaxial layers with a low density of dislocations, in particular, in the growth of Al-rich and and In-rich GaN-based semiconductors. The materials quality is directly dependent on the substrates used, such as sapphire, Si, etc. In addition, efficiency droop, growth on different orientations and polarization are also important. Chip processing and packaging technologies are key issues. This book presents a comprehensive review of contemporary LED issues. Given the interest and importance of future research in nitride semiconducting materials and solid state lighting applications, the contents are very timely. The book is composed of chapters written by leading researchers in III-nitride semiconducting materials and device technology. This book will be of interest to scientists and engineers working on LEDs for lighting applications. Postgraduate researchers working on LEDs will also benefit from the issues this book provides.

MEMS Materials and Processes Handbook

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Publisher : Springer Science & Business Media
ISBN 13 : 0387473181
Total Pages : 1211 pages
Book Rating : 4.3/5 (874 download)

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Book Synopsis MEMS Materials and Processes Handbook by : Reza Ghodssi

Download or read book MEMS Materials and Processes Handbook written by Reza Ghodssi and published by Springer Science & Business Media. This book was released on 2011-03-18 with total page 1211 pages. Available in PDF, EPUB and Kindle. Book excerpt: MEMs Materials and Processes Handbook" is a comprehensive reference for researchers searching for new materials, properties of known materials, or specific processes available for MEMS fabrication. The content is separated into distinct sections on "Materials" and "Processes". The extensive Material Selection Guide" and a "Material Database" guides the reader through the selection of appropriate materials for the required task at hand. The "Processes" section of the book is organized as a catalog of various microfabrication processes, each with a brief introduction to the technology, as well as examples of common uses in MEMs.