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Chemistry Of The Semiconductor Industry
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Book Synopsis Chemistry of the Semiconductor Industry by : S.J. Moss
Download or read book Chemistry of the Semiconductor Industry written by S.J. Moss and published by Springer Science & Business Media. This book was released on 1989-02-28 with total page 456 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book covers the chemistry of the major processes involved in the manufacture of integrated circuits. The authors describe all the major processes in use, together with some interesting processes which are currently being developed and hold future promise. Each chapter covers the current state of knowledge of the underlying chemistry of a particular process, and identifies areas of uncertainty requiring further research.
Book Synopsis Handbook of Chemicals and Gases for the Semiconductor Industry by : Ashutosh Misra
Download or read book Handbook of Chemicals and Gases for the Semiconductor Industry written by Ashutosh Misra and published by John Wiley & Sons. This book was released on 2002-03-22 with total page 386 pages. Available in PDF, EPUB and Kindle. Book excerpt: The first comprehensive guide to the chemicals and gases used in semiconductor manufacturing The fabrication of semiconductor devices involves a series of complex chemical processes such as photolithography, etching, cleaning, thin film deposition, and polishing. Until now, there has been no convenient source of information on the properties, applications, and health and safety considerations of the chemicals used in these processes. The Handbook of Chemicals and Gases for the Semiconductor Industry meets this need. Each of the Handbook's eight chapters is related to a specific area of semiconductor processing. The authors provide a brief overview of each step in the process, followed by tables containing physical properties, handling, safety, and other pertinent information on chemicals and gases typically used in these processes. The 270 chemical and gas entries include data on physical properties, emergency treatment procedures, waste disposal, and incompatible materials, as well as descriptions of applications, chemical mechanisms involved, and references to the literature. Appendices cross-reference entries by process, chemical name, and CAS number. The Handbook's eight chapters are: Thin Film Deposition Materials Wafer Cleaning Materials Photolithography Materials Wet and Dry Etching Materials Chemical Mechanical Planarizing Methods Carrier Gases Uncategorized Materials Semiconductor Chemicals Analysis No other single source brings together these useful and important data on chemicals and gases used in the manufacture of semiconductor devices. The Handbook of Chemicals and Gases for the Semiconductor Industry will be a valuable reference for process engineers, scientists, suppliers to the semiconductor industry, microelectronics researchers, and students.
Book Synopsis The Chemistry of the Semiconductor Industry by : S. J. Moss
Download or read book The Chemistry of the Semiconductor Industry written by S. J. Moss and published by Chapman & Hall. This book was released on 1987 with total page 426 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Physical Chemistry of Semiconductor Materials and Processes by :
Download or read book Physical Chemistry of Semiconductor Materials and Processes written by and published by John Wiley & Sons. This book was released on 2015-10-12 with total page 420 pages. Available in PDF, EPUB and Kindle. Book excerpt: The development of solid state devices began a little more than a century ago, with the discovery of the electrical conductivity of ionic solids. Today, solid state technologies form the background of the society in which we live. The aim of this book is threefold: to present the background physical chemistry on which the technology of semiconductor devices is based; secondly, to describe specific issues such as the role of defects on the properties of solids, and the crucial influence of surface properties; and ultimately, to look at the physics and chemistry of semiconductor growth processes, both at the bulk and thin-film level, together with some issues relating to the properties of nano-devices. Divided into five chapters, it covers: Thermodynamics of solids, including phases and their properties and structural order Point defects in semiconductors Extended defects in semiconductors and their interactions with point defects and impurities Growth of semiconductor materials Physical chemistry of semiconductor materials processing With applications across all solid state technologies,the book is useful for advanced students and researchers in materials science, physics, chemistry, electrical and electronic engineering. It is also useful for those in the semiconductor industry.
Book Synopsis Handbook of Chemicals and Gases for the Semiconductor Industry by :
Download or read book Handbook of Chemicals and Gases for the Semiconductor Industry written by and published by . This book was released on 2005 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Chemical-Mechanical Planarization of Semiconductor Materials by : M.R. Oliver
Download or read book Chemical-Mechanical Planarization of Semiconductor Materials written by M.R. Oliver and published by Springer Science & Business Media. This book was released on 2004-01-26 with total page 444 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book contains a comprehensive review of CMP (Chemical-Mechanical Planarization) technology, one of the most exciting areas in the field of semiconductor technology. It contains detailed discussions of all aspects of the technology, for both dielectrics and metals. The state of polishing models and their relation to experimental results are covered. Polishing tools and consumables are also covered. The leading edge issues of damascene and new dielectrics as well as slurryless technology are discussed.
Book Synopsis Handbook for Cleaning for Semiconductor Manufacturing by : Karen A. Reinhardt
Download or read book Handbook for Cleaning for Semiconductor Manufacturing written by Karen A. Reinhardt and published by John Wiley & Sons. This book was released on 2011-04-12 with total page 596 pages. Available in PDF, EPUB and Kindle. Book excerpt: Provides an In-depth discussion of surface conditioning for semiconductor applications The Handbook of Cleaning for Semiconductor Manufacturing: Fundamentals and Applications provides an in-depth discussion of surface conditioning for semiconductor applications. The fundamental physics and chemistry associated with wet processing is reviewed as well as surface and colloidal aspects of cleaning and etching. Topics covered in this new reference include: Front end line (FEOL) and back end of line (BEOL) cleaning applications such as high-k/metal gate post-etch cleaning and pore sealing, high-dose implant stripping and cleaning, and germanium, and silicon passivation Formulation development practices, methodology and a new directions are presented including chemicals used for preventing corrosion of copper lines, cleaning aluminium lines, reclaiming wafers, and water bonding, as well as the filtering and recirculating of chemicals including reuse and recycling Wetting, cleaning, and drying of features, such as high aspect ratio features and hydrophilic surface states, especially how to dry without watermarks, the abilities to wet hydrophobic surfaces and to remove liquid from deep features The chemical reactions and mechanisms of silicon dioxide etching with hydrofluoric acid, particle removal with ammonium hydroxide/hydrogen peroxide mixture, and metal removal with hydrochloric acid The Handbook of Cleaning for Semiconductor Manufacturing: Fundamentals and Applications is a valuable resource for any engineer or manager associated with using or supplying cleaning and contamination free technologies for semiconductor manufacturing. Engineers working for semiconductor manufacturing, capital equipment, chemicals, or other industries that assures cleanliness of chemicals, material, and equipment in the manufacturing area will also find this handbook an indispensible reference.
Book Synopsis Semiconductor Manufacturing Technology by : Chue San Yoo
Download or read book Semiconductor Manufacturing Technology written by Chue San Yoo and published by World Scientific. This book was released on 2008 with total page 483 pages. Available in PDF, EPUB and Kindle. Book excerpt: This textbook contains all the materials that an engineer needs to know to start a career in the semiconductor industry. It also provides readers with essential background information for semiconductor research. It is written by a professional who has been working in the field for over two decades and teaching the material to university students for the past 15 years. It includes process knowledge from raw material preparation to the passivation of chips in a modular format.
Author :Electrochemical Society. Dielectric Science and Technology Division Publisher :The Electrochemical Society ISBN 13 :9781566772303 Total Pages :262 pages Book Rating :4.7/5 (723 download)
Book Synopsis Environmental Issues in the Electronics and Semiconductor Industries by : Electrochemical Society. Dielectric Science and Technology Division
Download or read book Environmental Issues in the Electronics and Semiconductor Industries written by Electrochemical Society. Dielectric Science and Technology Division and published by The Electrochemical Society. This book was released on 1999 with total page 262 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Contamination-Free Manufacturing for Semiconductors and Other Precision Products by : Robert P. Donovan
Download or read book Contamination-Free Manufacturing for Semiconductors and Other Precision Products written by Robert P. Donovan and published by CRC Press. This book was released on 2001-03-14 with total page 466 pages. Available in PDF, EPUB and Kindle. Book excerpt: Recognizing the need for improved control measures in the manufacturing process of highly sensitized semiconductor technology, this practical reference provides in-depth and advanced treatment on the origins, procedures, and disposal of a variety of contaminants. It uses contemporary examples based on the latest hardware and processing apparatus to illustrate previously unavailable results and insights along with experimental and theoretical developments. Ensures the proper methods necessary to meet the standards established in the 1997 National Technology Roadmap for Semiconductors (NTRS)! Summarizing up-to-date control practices in the industry, Contamination-Free Manufacturing for Semiconductors and Other Precision Products: Details the physics and chemistry behind the mechanisms leading to contamination-induced failures Considers particles and molecular contaminants, including the entire spectrum of mass-based contaminants Outlines primary contamination problems and target control levels Reveals and offers solutions to inadequate areas of measurement capability and control technology Clarifies significant problems and decisions facing the industry by analyzing NTRS standards and contamination mechanisms Containing over 700 literature references, drawings, photographs, equations, and tables, Contamination-Free Manufacturing for Semiconductors and Other Precision Products is an essential reference for electrical and electronics, instrumentation, process, manufacturing, development, contamination control and quality engineers; physicists; and upper-level undergraduate and graduate students in these disciplines.
Book Synopsis Series on Emission Scenario Documents Chemicals Vapour Deposition in the Semiconductor Industry by : OECD
Download or read book Series on Emission Scenario Documents Chemicals Vapour Deposition in the Semiconductor Industry written by OECD and published by OECD Publishing. This book was released on 2015-04-03 with total page 80 pages. Available in PDF, EPUB and Kindle. Book excerpt: This OECD Emission Scenario Document (ESD) provides information on the sources, use patterns, and potential release pathways of chemicals used as chemical vapour deposition (CVD) precursors in the semiconductor industry. The document presents standard approaches for estimating environmental releases and occupational exposures, and discusses the typical engineering controls used to mitigate exposure to CVD precursors.
Book Synopsis A History of the International Chemical Industry by : Fred Aftalion
Download or read book A History of the International Chemical Industry written by Fred Aftalion and published by Chemical Heritage Foundation. This book was released on 2001 with total page 468 pages. Available in PDF, EPUB and Kindle. Book excerpt: Fred Aftalion's international perspective of the history of chemistry integrates the story of chemical science with that of chemical industry. This new edition includes events from 1990 to 2000, when major companies began selling off their divisions, seeking to specialize in a particular business. Aftalion explores the pitfalls these companies encountered as well as the successes of "contrarians"--those companies that remained broad and diversified. He uses BASF, Dow, and Bayer as examples of true contrarians.
Book Synopsis Contamination-Free Manufacturing for Semiconductors and Other Precision Products by : Robert P. Donovan
Download or read book Contamination-Free Manufacturing for Semiconductors and Other Precision Products written by Robert P. Donovan and published by CRC Press. This book was released on 2018-10-08 with total page 460 pages. Available in PDF, EPUB and Kindle. Book excerpt: Recognizing the need for improved control measures in the manufacturing process of highly sensitized semiconductor technology, this practical reference provides in-depth and advanced treatment on the origins, procedures, and disposal of a variety of contaminants. It uses contemporary examples based on the latest hardware and processing apparatus to illustrate previously unavailable results and insights along with experimental and theoretical developments. Ensures the proper methods necessary to meet the standards established in the 1997 National Technology Roadmap for Semiconductors (NTRS)! Summarizing up-to-date control practices in the industry, Contamination-Free Manufacturing for Semiconductors and Other Precision Products: Details the physics and chemistry behind the mechanisms leading to contamination-induced failures Considers particles and molecular contaminants, including the entire spectrum of mass-based contaminants Outlines primary contamination problems and target control levels Reveals and offers solutions to inadequate areas of measurement capability and control technology Clarifies significant problems and decisions facing the industry by analyzing NTRS standards and contamination mechanisms Containing over 700 literature references, drawings, photographs, equations, and tables, Contamination-Free Manufacturing for Semiconductors and Other Precision Products is an essential reference for electrical and electronics, instrumentation, process, manufacturing, development, contamination control and quality engineers; physicists; and upper-level undergraduate and graduate students in these disciplines.
Book Synopsis Two-Dimensional Semiconductors by : Jingbo Li
Download or read book Two-Dimensional Semiconductors written by Jingbo Li and published by John Wiley & Sons. This book was released on 2020-04-13 with total page 192 pages. Available in PDF, EPUB and Kindle. Book excerpt: In-depth overview of two-dimensional semiconductors from theoretical studies, properties to emerging applications! Two-dimensional (2D) materials have attracted enormous attention due to their exotic properties deriving from their ultrathin dimensions. 2D materials, such as graphene, transition metal dichalcogenides, transition metal oxides, black phosphorus and boron nitride, exhibit versatile optical, electronic, catalytic and mechanical properties, thus can be used in a wide range of applications, including electronics, optoelectronics and optical applications. Two-Dimensional Semiconductors: Synthesis, Physical Properties and Applications provides an in-depth view of 2D semiconductors from theoretical studies, properties to applications, taking into account the current state of research and development. It introduces various preparation methods and describes in detail the physical properties of 2D semiconductors including 2D alloys and heterostructures. The covered applications include, but are not limited to, field-effect transistors, spintronics, solar cells, photodetectors, light-emitting diode, sensors and bioelectronics. * Highly topical: 2D materials are a rapidly advancing field that attracts increasing attention * Concise overview: covers theoretical studies, preparation methods, physical properties, potential applications, the challenges and opportunities * Application oriented: focuses on 2D semiconductors that can be used in various applications such as field-effect transistors, solar cells, sensors and bioelectronics * Highly relevant: newcomers as well as experienced researchers in the field of 2D materials will benefit from this book Two-Dimensional Semiconductors: Synthesis, Physical Properties and Applications is written for materials scientists, semiconductor and solid state physicists, electrical engineers, and readers working in the semiconductor industry.
Author :Electrochemical Society. High Temperature Materials Division Publisher :The Electrochemical Society ISBN 13 :9781566773195 Total Pages :526 pages Book Rating :4.7/5 (731 download)
Book Synopsis Fundamental Gas-phase and Surface Chemistry of Vapor-phase Deposition II and Process Control, Diagnostics and Modeling in Semiconductor Manufacturing IV by : Electrochemical Society. High Temperature Materials Division
Download or read book Fundamental Gas-phase and Surface Chemistry of Vapor-phase Deposition II and Process Control, Diagnostics and Modeling in Semiconductor Manufacturing IV written by Electrochemical Society. High Temperature Materials Division and published by The Electrochemical Society. This book was released on 2001 with total page 526 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Environmental Issues with Materials and Processes for the Electronics and Semiconductor Industries V by : Laura Mendicino
Download or read book Environmental Issues with Materials and Processes for the Electronics and Semiconductor Industries V written by Laura Mendicino and published by The Electrochemical Society. This book was released on 2002 with total page 278 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Fundamentals of Semiconductor Manufacturing and Process Control by : Gary S. May
Download or read book Fundamentals of Semiconductor Manufacturing and Process Control written by Gary S. May and published by John Wiley & Sons. This book was released on 2006-05-26 with total page 428 pages. Available in PDF, EPUB and Kindle. Book excerpt: A practical guide to semiconductor manufacturing from processcontrol to yield modeling and experimental design Fundamentals of Semiconductor Manufacturing and Process Controlcovers all issues involved in manufacturing microelectronic devicesand circuits, including fabrication sequences, process control,experimental design, process modeling, yield modeling, and CIM/CAMsystems. Readers are introduced to both the theory and practice ofall basic manufacturing concepts. Following an overview of manufacturing and technology, the textexplores process monitoring methods, including those that focus onproduct wafers and those that focus on the equipment used toproduce wafers. Next, the text sets forth some fundamentals ofstatistics and yield modeling, which set the foundation for adetailed discussion of how statistical process control is used toanalyze quality and improve yields. The discussion of statistical experimental design offers readers apowerful approach for systematically varying controllable processconditions and determining their impact on output parameters thatmeasure quality. The authors introduce process modeling concepts,including several advanced process control topics such asrun-by-run, supervisory control, and process and equipmentdiagnosis. Critical coverage includes the following: * Combines process control and semiconductor manufacturing * Unique treatment of system and software technology and managementof overall manufacturing systems * Chapters include case studies, sample problems, and suggestedexercises * Instructor support includes electronic copies of the figures andan instructor's manual Graduate-level students and industrial practitioners will benefitfrom the detailed exami?nation of how electronic materials andsupplies are converted into finished integrated circuits andelectronic products in a high-volume manufacturingenvironment. An Instructor's Manual presenting detailed solutions to all theproblems in the book is available from the Wiley editorialdepartment. An Instructor Support FTP site is also available.
