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Author : Chih-Wei Chuang
Publisher :
ISBN 13 :
Total Pages : 120 pages
Book Rating : 4.:/5 (7 download)
Download or read book Characterization of Optical MEMS by Stroboscopic Interferometry written by Chih-Wei Chuang and published by . This book was released on 2005 with total page 120 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Fu - Her written by and published by . This book was released on with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Matthew R. Hart
Publisher :
ISBN 13 :
Total Pages : 21 pages
Book Rating : 4.:/5 (445 download)
Download or read book Stroboscopic Interferometer System for Dynamic MEMS Characterization written by Matthew R. Hart and published by . This book was released on 2000 with total page 21 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author :
Publisher :
ISBN 13 :
Total Pages : 21 pages
Book Rating : 4.:/5 (227 download)
Download or read book Stroboscopic Imaging Interferometer for MEMS Performance Measurement written by and published by . This book was released on 2007 with total page 21 pages. Available in PDF, EPUB and Kindle. Book excerpt: The insertion of MEMS components into aerospace systems requires advanced testing to characterize performance in a space environment. Here we report a novel stroboscopic interferometer test system that measures nanometer-scale displacements of moving MEMS devices. By combining video imagery and phase-shift interferometry with an environmental chamber, rapid visualization of the dynamic device motion under the actual operational conditions can be measured. The utility of this system is further enhanced by integrating the interferometer onto the chamber window, allowing for robust interferometric testing in a noisy environment without requiring a floating optical table. To demonstrate these unique capabilities, we present the time-resolved images of an electrostatically actuated MEMS cantilevered beam showing the first- through sixth-order plate modes under vacuum.
Author : Wolfgang Osten
Publisher : CRC Press
ISBN 13 : 1420019163
Total Pages : 524 pages
Book Rating : 4.4/5 (2 download)
Download or read book Optical Inspection of Microsystems written by Wolfgang Osten and published by CRC Press. This book was released on 2018-10-03 with total page 524 pages. Available in PDF, EPUB and Kindle. Book excerpt: Where conventional testing and inspection techniques fail at the micro-scale, optical techniques provide a fast, robust, and relatively inexpensive alternative for investigating the properties and quality of microsystems. Speed, reliability, and cost are critical factors in the continued scale-up of microsystems technology across many industries, and optical techniques are in a unique position to satisfy modern commercial and industrial demands. Optical Inspection of Microsystems is the first comprehensive, up-to-date survey of the most important and widely used full-field optical metrology and inspection technologies. Under the guidance of accomplished researcher Wolfgang Osten, expert contributors from industrial and academic institutions around the world share their expertise and experience with techniques such as image correlation, light scattering, scanning probe microscopy, confocal microscopy, fringe projection, grid and moiré techniques, interference microscopy, laser Doppler vibrometry, holography, speckle metrology, and spectroscopy. They also examine modern approaches to data acquisition and processing. The book emphasizes the evaluation of various properties to increase reliability and promote a consistent approach to optical testing. Numerous practical examples and illustrations reinforce the concepts. Supplying advanced tools for microsystem manufacturing and characterization, Optical Inspection of Microsystems enables you to reach toward a higher level of quality and reliability in modern micro-scale applications.
Author : Markku Tilli
Publisher : Elsevier
ISBN 13 : 012817787X
Total Pages : 1028 pages
Book Rating : 4.1/5 (281 download)
Download or read book Handbook of Silicon Based MEMS Materials and Technologies written by Markku Tilli and published by Elsevier. This book was released on 2020-04-17 with total page 1028 pages. Available in PDF, EPUB and Kindle. Book excerpt: Handbook of Silicon Based MEMS Materials and Technologies, Third Edition is a comprehensive guide to MEMS materials, technologies, and manufacturing with a particular emphasis on silicon as the most important starting material used in MEMS. The book explains the fundamentals, properties (mechanical, electrostatic, optical, etc.), materials selection, preparation, modeling, manufacturing, processing, system integration, measurement, and materials characterization techniques of MEMS structures. The third edition of this book provides an important up-to-date overview of the current and emerging technologies in MEMS making it a key reference for MEMS professionals, engineers, and researchers alike, and at the same time an essential education material for undergraduate and graduate students. - Provides comprehensive overview of leading-edge MEMS manufacturing technologies through the supply chain from silicon ingot growth to device fabrication and integration with sensor/actuator controlling circuits - Explains the properties, manufacturing, processing, measuring and modeling methods of MEMS structures - Reviews the current and future options for hermetic encapsulation and introduces how to utilize wafer level packaging and 3D integration technologies for package cost reduction and performance improvements - Geared towards practical applications presenting several modern MEMS devices including inertial sensors, microphones, pressure sensors and micromirrors
Author : Murali Manohar Pai Screenivasan
Publisher :
ISBN 13 :
Total Pages : 0 pages
Book Rating : 4.:/5 (11 download)
Download or read book Acousto Optic Modulated Stroboscopic Interferometer for Comprehensive Characterization of Microstructure written by Murali Manohar Pai Screenivasan and published by . This book was released on 2008 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt: Mechanical and electro-mechanical advancements to the nano-scale require comprehensive and systematic testing at the micro-scale in order to understand the underlying influences that define the micro/nano-device both from fabrication and operational points of view. In this regard, surface metrology measurements, as well as static and dynamic characteristics will become very important and need to be experimentally determined to describe the system fully. These integrated tests are difficult to be implemented at dimensions where interaction with the device can seriously impact the results obtained. Hence, a characterization method to obtain valid experimental information without interfering with the functionality of the device needs to be developed. In this work, a simple yet viable Acousto Optic Modulated Stroboscopic Interferometer (AOMSI) was developed using a frequency stabilized Continuous Wave (CW) laser together with an Acousto Optic Modulator for comprehensive mechanical characterization to obtain surface, static and dynamic properties of micro-scale structures. An optimized methodology for measurement was established and sensitivity analysis was conducted. Being a whole-field technique, unlike single point or scanning interferometers, AOMSI can provide details of surface properties as well as displacements due to static/dynamic loads and modal profiles. Experiments for surface profiling were carried out on a micro-mirror, along with 2D and 3D profile measurements. The ability of AOMSI to perform dynamic measurements was tested on Micro-Cantilevers and on AFM (Atomic Force Microscopy) cantilevers. The resolution of AOMSI was identified as 10nms. The results for static deflections, 1 st and 2 nd natural frequencies and mode shapes were found to be in good agreement with results from the developed theoretical model and manufacturers specifications. The approach is a novel approach to investigate the surface, static and dynamic behavior of microstructures using a single interferometer.
Author : Guangya Zhou
Publisher : CRC Press
ISBN 13 : 1351647601
Total Pages : 548 pages
Book Rating : 4.3/5 (516 download)
Download or read book Optical MEMS, Nanophotonics, and Their Applications written by Guangya Zhou and published by CRC Press. This book was released on 2017-12-14 with total page 548 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book covers device design fundamentals and system applications in optical MEMS and nanophotonics. Expert authors showcase examples of how fusion of nanoelectromechanical (NEMS) with nanophotonic elements is creating powerful new photonic devices and systems including MEMS micromirrors, MEMS tunable filters, MEMS-based adjustable lenses and apertures, NEMS-driven variable silicon nanowire waveguide couplers, and NEMS tunable photonic crystal nanocavities. The book also addresses system applications in laser scanning displays, endoscopic systems, space telescopes, optical telecommunication systems, and biomedical implantable systems. Presents efforts to scale down mechanical and photonic elements into the nano regime for enhanced performance, faster operational speed, greater bandwidth, and higher level of integration. Showcases the integration of MEMS and optical/photonic devices into real commercial products. Addresses applications in optical telecommunication, sensing, imaging, and biomedical systems. Prof. Vincent C. Lee is Associate Professor in the Department of Electrical and Computer Engineering, National University of Singapore. Prof. Guangya Zhou is Associate Professor in the Department of Mechanical Engineering at National University of Singapore.
Author :
Publisher :
ISBN 13 :
Total Pages : 332 pages
Book Rating : 4.3/5 (91 download)
Download or read book Reliability, Testing, and Characterization of MEMS/MOEMS. written by and published by . This book was released on 2001 with total page 332 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Attilio Frangi
Publisher : World Scientific
ISBN 13 : 1908979127
Total Pages : 504 pages
Book Rating : 4.9/5 (89 download)
Download or read book Advances In Multiphysics Simulation And Experimental Testing Of Mems written by Attilio Frangi and published by World Scientific. This book was released on 2008-07-29 with total page 504 pages. Available in PDF, EPUB and Kindle. Book excerpt: This volume takes a much needed multiphysical approach to the numerical and experimental evaluation of the mechanical properties of MEMS and NEMS. The contributed chapters present many of the most recent developments in fields ranging from microfluids and damping to structural analysis, topology optimization and nanoscale simulations. The book responds to a growing need emerging in academia and industry to merge different areas of expertise towards a unified design and analysis of MEMS and NEMS./a
Author : Wolfgang Osten
Publisher : CRC Press
ISBN 13 : 1498779506
Total Pages : 570 pages
Book Rating : 4.4/5 (987 download)
Download or read book Optical Inspection of Microsystems, Second Edition written by Wolfgang Osten and published by CRC Press. This book was released on 2019-06-21 with total page 570 pages. Available in PDF, EPUB and Kindle. Book excerpt: Where conventional testing and inspection techniques fail at the microscale, optical techniques provide a fast, robust, noninvasive, and relatively inexpensive alternative for investigating the properties and quality of microsystems. Speed, reliability, and cost are critical factors in the continued scale-up of microsystems technology across many industries, and optical techniques are in a unique position to satisfy modern commercial and industrial demands. Optical Inspection of Microsystems, Second Edition, extends and updates the first comprehensive survey of the most important optical measurement techniques to be successfully used for the inspection of microsystems. Under the guidance of accomplished researcher Wolfgang Osten, expert contributors from industrial and academic institutions around the world share their expertise and experience with techniques such as image processing, image correlation, light scattering, scanning probe microscopy, confocal microscopy, fringe projection, grid and moire techniques, interference microscopy, laser-Doppler vibrometry, digital holography, speckle metrology, spectroscopy, and sensor fusion technologies. They also examine modern approaches to data acquisition and processing, such as the determination of surface features and the estimation of uncertainty of measurement results. The book emphasizes the evaluation of various system properties and considers encapsulated components to increase quality and reliability. Numerous practical examples and illustrations of optical testing reinforce the concepts. Supplying effective tools for increased quality and reliability, this book Provides a comprehensive, up-to-date overview of optical techniques for the measurement and inspection of microsystems Discusses image correlation, displacement and strain measurement, electro-optic holography, and speckle metrology techniques Offers numerous practical examples and illustrations Includes calibration of optical measurement systems for the inspection of MEMS Presents the characterization of dynamics of MEMS
Author : Hyunkyu Park
Publisher :
ISBN 13 :
Total Pages : 310 pages
Book Rating : 4.:/5 (83 download)
Download or read book Design, Fabrication and Characterization of MEMS Deformable Mirrors for Ocular Adaptive Optics written by Hyunkyu Park and published by . This book was released on 2009 with total page 310 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Sanichiro Yoshida
Publisher : Springer
ISBN 13 : 3319416006
Total Pages : 337 pages
Book Rating : 4.3/5 (194 download)
Download or read book Advancement of Optical Methods in Experimental Mechanics, Volume 3 written by Sanichiro Yoshida and published by Springer. This book was released on 2016-09-07 with total page 337 pages. Available in PDF, EPUB and Kindle. Book excerpt: Advancement of Optical Methods in Experimental Mechanics, Volume 3 of the Proceedings of the 2016 SEM Annual Conference & Exposition on Experimental and Applied Mechanics, the third volume of ten from the Conference, brings together contributions to this important area of research and engineering. The collection presents early findings and case studies on a wide range of optical methods ranging from traditional photoelasticity and interferometry to more recent DIC and DVC techniques, and includes papers in the following general technical research areas: Advances in Digital Image Correlation Challenging Applications of DIC Uncertainty Analysis & Improvements to DIC Accuracy Photoelasticity, Interferometry, & Moire Methods Applications of Stereovision Inverse Methods at High Strain Rates Inverse Methods in Plasticity
Author : Wolfgang Osten
Publisher : CRC Press
ISBN 13 : 0429532652
Total Pages : 656 pages
Book Rating : 4.4/5 (295 download)
Download or read book Optical Inspection of Microsystems, Second Edition written by Wolfgang Osten and published by CRC Press. This book was released on 2019-06-21 with total page 656 pages. Available in PDF, EPUB and Kindle. Book excerpt: Where conventional testing and inspection techniques fail at the microscale, optical techniques provide a fast, robust, noninvasive, and relatively inexpensive alternative for investigating the properties and quality of microsystems. Speed, reliability, and cost are critical factors in the continued scale-up of microsystems technology across many industries, and optical techniques are in a unique position to satisfy modern commercial and industrial demands. Optical Inspection of Microsystems, Second Edition, extends and updates the first comprehensive survey of the most important optical measurement techniques to be successfully used for the inspection of microsystems. Under the guidance of accomplished researcher Wolfgang Osten, expert contributors from industrial and academic institutions around the world share their expertise and experience with techniques such as image processing, image correlation, light scattering, scanning probe microscopy, confocal microscopy, fringe projection, grid and moire techniques, interference microscopy, laser-Doppler vibrometry, digital holography, speckle metrology, spectroscopy, and sensor fusion technologies. They also examine modern approaches to data acquisition and processing, such as the determination of surface features and the estimation of uncertainty of measurement results. The book emphasizes the evaluation of various system properties and considers encapsulated components to increase quality and reliability. Numerous practical examples and illustrations of optical testing reinforce the concepts. Supplying effective tools for increased quality and reliability, this book Provides a comprehensive, up-to-date overview of optical techniques for the measurement and inspection of microsystems Discusses image correlation, displacement and strain measurement, electro-optic holography, and speckle metrology techniques Offers numerous practical examples and illustrations Includes calibration of optical measurement systems for the inspection of MEMS Presents the characterization of dynamics of MEMS
Author : Robert Conant
Publisher : Springer Science & Business Media
ISBN 13 : 1475737645
Total Pages : 150 pages
Book Rating : 4.4/5 (757 download)
Download or read book Micromachined Mirrors written by Robert Conant and published by Springer Science & Business Media. This book was released on 2013-04-17 with total page 150 pages. Available in PDF, EPUB and Kindle. Book excerpt: Micromachined Mirrors provides an overview of the performance enhancements that will be realized by miniaturizing scanning mirrors like those used for laser printers and barcode scanners, and the newly enabled applications, including raster-scanning projection video displays and compact, high-speed fiber-optic components. There are a wide variety of methods used to fabricate micromachined mirrors - each with its advantages and disadvantages. There are, however, performance criteria common to mirrors made from any of these fabrication processes. For example, optical resolution is related to the mirror aperture, the mirror flatness, and the scan angle. Micromachined Mirrors provides a framework for the design of micromirrors, and derives equations showing the fundamental limits for micromirror performance. These limits provide the micromirror designer tools with which to determine the acceptable mirror geometries, and to quickly and easily determine the range of possible mirror optical resolution and scan speed.
Author : Danelle Mary Tanner
Publisher : SPIE-International Society for Optical Engineering
ISBN 13 : 9780819456908
Total Pages : 272 pages
Book Rating : 4.4/5 (569 download)
Download or read book Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS IV written by Danelle Mary Tanner and published by SPIE-International Society for Optical Engineering. This book was released on 2005 with total page 272 pages. Available in PDF, EPUB and Kindle. Book excerpt: Proceedings of SPIE present the original research papers presented at SPIE conferences and other high-quality conferences in the broad-ranging fields of optics and photonics. These books provide prompt access to the latest innovations in research and technology in their respective fields. Proceedings of SPIE are among the most cited references in patent literature.
Author : William N. Sharpe, Jr.
Publisher : Springer Science & Business Media
ISBN 13 : 0387268839
Total Pages : 1100 pages
Book Rating : 4.3/5 (872 download)
Download or read book Springer Handbook of Experimental Solid Mechanics written by William N. Sharpe, Jr. and published by Springer Science & Business Media. This book was released on 2008-12-04 with total page 1100 pages. Available in PDF, EPUB and Kindle. Book excerpt: The Springer Handbook of Experimental Solid Mechanics documents both the traditional techniques as well as the new methods for experimental studies of materials, components, and structures. The emergence of new materials and new disciplines, together with the escalating use of on- and off-line computers for rapid data processing and the combined use of experimental and numerical techniques have greatly expanded the capabilities of experimental mechanics. New exciting topics are included on biological materials, MEMS and NEMS, nanoindentation, digital photomechanics, photoacoustic characterization, and atomic force microscopy in experimental solid mechanics. Presenting complete instructions to various areas of experimental solid mechanics, guidance to detailed expositions in important references, and a description of state-of-the-art applications in important technical areas, this thoroughly revised and updated edition is an excellent reference to a widespread academic, industrial, and professional engineering audience.
