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Download or read book Challenges in Nanometrology: High Precision Measurement of Position and Size written by and published by . This book was released on 2014 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Günter Wilkening
Publisher : John Wiley & Sons
ISBN 13 : 3527606874
Total Pages : 541 pages
Book Rating : 4.5/5 (276 download)
Download or read book Nanoscale Calibration Standards and Methods written by Günter Wilkening and published by John Wiley & Sons. This book was released on 2006-05-12 with total page 541 pages. Available in PDF, EPUB and Kindle. Book excerpt: The quantitative determination of the properties of micro- and nanostructures is essential in research and development. It is also a prerequisite in process control and quality assurance in industry. The knowledge of the geometrical dimensions of structures in most cases is the base, to which other physical and chemical properties are linked. Quantitative measurements require reliable and stable instruments, suitable measurement procedures as well as appropriate calibration artefacts and methods. The seminar "NanoScale 2004" (6th Seminar on Quantitative Microscopy and 2nd Seminar on Nanoscale Calibration Standards and Methods) at the National Metrology Institute (Physikalisch-Technische Bundesanstalt PTB), Braunschweig, Germany, continues the series of seminars on Quantitative Microscopy. The series stimulates the exchange of information between manufacturers of relevant hard- and software and the users in science and industry. Topics addressed in these proceedings are a) the application of quantitative measurements and measurement problems in: microelectronics, microsystems technology, nano/quantum/molecular electronics, chemistry, biology, medicine, environmental technology, materials science, surface processing b) calibration & correction methods: calibration methods, calibration standards, calibration procedures, traceable measurements, standardization, uncertainty of measurements c) instrumentation and methods: novel/improved instruments and methods, reproducible probe/sample positioning, position-measuring systems, novel/improved probe/detector systems, linearization methods, image processing
Author : David J. Whitehouse
Publisher : CRC Press
ISBN 13 : 1420034197
Total Pages : 982 pages
Book Rating : 4.4/5 (2 download)
Download or read book Handbook of Surface and Nanometrology written by David J. Whitehouse and published by CRC Press. This book was released on 2002-12-01 with total page 982 pages. Available in PDF, EPUB and Kindle. Book excerpt: The Handbook of Surface and Nanometrology explains and challenges current concepts in nanotechnology. It covers in great detail surface metrology and nanometrology and more importantly the areas where they overlap, thereby providing a quantitative means of controlling and predicting processes and performance. Trends and mechanisms are explained wit
Author : Richard Leach
Publisher : William Andrew
ISBN 13 : 1437778321
Total Pages : 349 pages
Book Rating : 4.4/5 (377 download)
Download or read book Fundamental Principles of Engineering Nanometrology written by Richard Leach and published by William Andrew. This book was released on 2009-09-03 with total page 349 pages. Available in PDF, EPUB and Kindle. Book excerpt: Fundamental Principles of Engineering Nanometrology provides a comprehensive overview of engineering metrology and how it relates to micro and nanotechnology (MNT) research and manufacturing. By combining established knowledge with the latest advances from the field, it presents a comprehensive single volume that can be used for professional reference and academic study. Provides a basic introduction to measurement and instruments Thoroughly presents numerous measurement techniques, from static length and displacement to surface topography, mass and force Covers multiple optical surface measuring instruments and related topics (interferometry, triangulation, confocal, variable focus, and scattering instruments) Explains, in depth, the calibration of surface topography measuring instruments (traceability; calibration of profile and areal surface texture measuring instruments; uncertainties) Discusses the material in a way that is comprehensible to even those with only a limited mathematical knowledge
Author : David J. Whitehouse
Publisher : CRC Press
ISBN 13 : 1420082027
Total Pages : 982 pages
Book Rating : 4.4/5 (2 download)
Download or read book Handbook of Surface and Nanometrology written by David J. Whitehouse and published by CRC Press. This book was released on 2010-12-20 with total page 982 pages. Available in PDF, EPUB and Kindle. Book excerpt: Since the publication of the first edition, miniaturization and nanotechnology have become inextricably linked to traditional surface geometry and metrology. This interdependence of scales has had profound practical implications.Updated and expanded to reflect many new developments, Handbook of Surface and Nanometrology, Second Edition determines h
Author : Wei Gao
Publisher : Springer Science & Business Media
ISBN 13 : 1849962545
Total Pages : 358 pages
Book Rating : 4.8/5 (499 download)
Download or read book Precision Nanometrology written by Wei Gao and published by Springer Science & Business Media. This book was released on 2010-06-14 with total page 358 pages. Available in PDF, EPUB and Kindle. Book excerpt: Precision Nanometrology describes the new field of precision nanometrology, which plays an important part in nanoscale manufacturing of semiconductors, optical elements, precision parts and similar items. It pays particular attention to the measurement of surface forms of precision workpieces and to stage motions of precision machines. The first half of the book is dedicated to the description of optical sensors for the measurement of angle and displacement, which are fundamental quantities for precision nanometrology. The second half presents a number of scanning-type measuring systems for surface forms and stage motions. The systems discussed include: • error separation algorithms and systems for measurement of straightness and roundness, • the measurement of micro-aspherics, • systems based on scanning probe microscopy, and • scanning image-sensor systems. Precision Nanometrology presents the fundamental and practical technologies of precision nanometrology with a helpful selection of algorithms, instruments and experimental data. It will be beneficial for researchers, engineers and postgraduate students involved in precision engineering, nanotechnology and manufacturing.
Author : Vidosav D. Majstorovic
Publisher : Springer
ISBN 13 : 3030181774
Total Pages : 330 pages
Book Rating : 4.0/5 (31 download)
Download or read book Proceedings of the 12th International Conference on Measurement and Quality Control - Cyber Physical Issue written by Vidosav D. Majstorovic and published by Springer. This book was released on 2019-05-03 with total page 330 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book gathers the proceedings of the 12th International Conference on Measurement and Quality Control – Cyber Physical Issues (IMEKO TC 14 2019), held in Belgrade, Serbia, on 4–7 June 2019. The event marks the latest in a series of high-level conferences that bring together experts from academia and industry to exchange knowledge, ideas, experiences, research findings, and information in the field of measurement of geometrical quantities. The book addresses a wide range of topics, including: 3D measurement of GPS characteristics, measurement of gears and threads, measurement of roughness, micro- and nano-metrology, laser metrology for precision measurements, cyber physical metrology, optical measurement techniques, industrial computed tomography, multisensor techniques, intelligent measurement systems, evaluating measurement uncertainty, dimensional management in industry, product quality assurance methods, and big data analytics. By providing updates on key issues and highlighting recent advances in measurement and quality control, the book supports the transfer of vital knowledge to the next generation of academics and practitioners.
Author : Tsung-Fu Yao
Publisher :
ISBN 13 :
Total Pages : 498 pages
Book Rating : 4.:/5 (19 download)
Download or read book High-throughput, Tip-based In-line Nanometrology in Semiconductor and Nano-featured Manufacturing written by Tsung-Fu Yao and published by . This book was released on 2018 with total page 498 pages. Available in PDF, EPUB and Kindle. Book excerpt: A high-throughput, tip-based, in-line nanometrology system that can be helpful for developing closed-loop process control in nanomanufacturing of semiconductor industries. One of the most significant barriers stands in the path to in-line inspection in nanomanufacturing is sample-preparation. After the beforehand inspection process detecting regions that have higher chance to be failed, known as “hotspots,” the operator may need to spend much time to position a high-resolution probe to there because small field-of-view (FOV) makes it hard to recognize its position from target. The other barrier to developing in-line inspection is the resolution limitation of conventional metrology technique, a.k.a. optical and e-beam inspections. Especially for technology nodes beyond 10-nm, the critical dimension is going close to resolving capability. As a result, the in-line inspection requires a higher resolution imaging technique with fast and precision method to position the probe. The methodology developed in this study overcomes those barriers by passive alignment methods and a state-of-the-art single-chip atomic force microscopy system. Instead of those prevalent active methods, the passive alignment uses kinematic method providing the wafer adequately constraint to limit degree of freedoms in place. Once the wafer sit into site, a preload applied then a sub-micron precision can be achieved. The passive mechanism almost instantaneously finishes alignment, so no time budget should be counted. Compared with AFM’s FOV, the sub-micron positioning precision guarantees the same location on wafer-by-wafer inspection. To enhance the metrology throughput, the proposed system uses multiple AFM chips distributed over the wafer footprint in order to image on multiple hotspots simultaneously. On the other hand, a flexure-based XY stage which is able to make nm-precision and mm-range is implemented to position AFM probe. The proposed system takes a serial of images neighboring to each other, image-stitching programmatically mosaic all images to generate a large area FOV measurement. This system applies several concepts to thoroughly enhance the throughput of advanced nanometrology and make it compatible with an in-line inspection methodology in the nanomanufacturing process. By the enhanced throughput of metrology, the nanomanufacturing will have a great potential to develop a feedback, process control and improve product’s quality and yield.
Author : D. P. Yasin
Publisher : DEStech Publications, Inc
ISBN 13 : 1605951560
Total Pages : 520 pages
Book Rating : 4.6/5 (59 download)
Download or read book 2014 International Conference on Mechanical Design, Manufacture and Automation Engineering (MDMAE2014) written by D. P. Yasin and published by DEStech Publications, Inc. This book was released on 2014-02-04 with total page 520 pages. Available in PDF, EPUB and Kindle. Book excerpt: Automation Engineering (MDMAE2014) is to provide a platform for all researchers in the field of Mechanical, Manufacture, Automation and Material Engineering to share the most advanced knowledge from both academic and industrial world, and to communicate with each other about their experiences and the most up-to-date research achievements, discussing forward issues and future prospects, seeking a better way to solve practical problems in this fields. As the first international conference on MDMAE, consisting of five main topics: Mechanical Engineering, Automation Engineering, Manufacturing Systems, Materials Engineering and Measurement and Test, which offer attendees free space to present their inspiring works and academic achievements mixed with the atmosphere of industry and academia, it has attracted many scholars, researchers and practitioners in these fields from various countries to get together in this conference, sharing their latest research achievements with each other , enriching their professional knowledge and broadening their horizons as well.
Author : Vidosav Majstorovic
Publisher : Springer
ISBN 13 : 3319564307
Total Pages : 468 pages
Book Rating : 4.3/5 (195 download)
Download or read book Proceedings of 5th International Conference on Advanced Manufacturing Engineering and Technologies written by Vidosav Majstorovic and published by Springer. This book was released on 2017-04-22 with total page 468 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book presents the proceedings from the 5th NEWTECH conference (Belgrade, Serbia, 5–9 June 2017), the latest in a series of high-level conferences that bring together experts from academia and industry in order to exchange knowledge, ideas, experiences, research results, and information in the field of manufacturing. The range of topics addressed is wide, including, for example, machine tool research and in-machine measurements, progress in CAD/CAM technologies, rapid prototyping and reverse engineering, nanomanufacturing, advanced material processing, functional and protective surfaces, and cyber-physical and reconfigurable manufacturing systems. The book will benefit readers by providing updates on key issues and recent progress in manufacturing engineering and technologies and will aid the transfer of valuable knowledge to the next generation of academics and practitioners. It will appeal to all who work or conduct research in this rapidly evolving field.
Author : Svyatoslav Yatsyshyn
Publisher : Lulu.com
ISBN 13 : 8460675181
Total Pages : 487 pages
Book Rating : 4.4/5 (66 download)
Download or read book Handbook of Thermometry and Nanothermometry written by Svyatoslav Yatsyshyn and published by Lulu.com. This book was released on 2015 with total page 487 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Ichiko Misumi
Publisher :
ISBN 13 : 9780750331913
Total Pages : 0 pages
Book Rating : 4.3/5 (319 download)
Download or read book Nanoscale Standards by Metrological AFM and Other Instruments written by Ichiko Misumi and published by . This book was released on 2021 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt: The purpose of this book is to help semiconductor inspection equipment users and manufacturers understand what nano dimensional standards are used to calibrate their equipment and how to employ them effectively. Reviewing trends and developments in nanoscale standards, the book starts with an introductory overview of nanometrological standards before proceeding to detail pitch standard, step height, line width, nano particle size, and surface roughness. This book is essential for users making quantitative nanoscale measurements, be that in a commercial or academic research setting, or involved in engineering nanometrology for quality control in industrial applications. Here the author provides an approachable understanding and application of the nanoscale standards in a practical context across a range of common nanoscale measurement modalities, including 3D, with particular emphasis on applications to AFM, an exceptional and arguably the most common technique used in nanometrology due to the ease of use and versatility of applications.
Author : Svetan Ratchev
Publisher : Springer Science & Business Media
ISBN 13 : 3642281621
Total Pages : 223 pages
Book Rating : 4.6/5 (422 download)
Download or read book Precision Assembly Technologies and Systems written by Svetan Ratchev and published by Springer Science & Business Media. This book was released on 2012-02-17 with total page 223 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book constitutes the refereed proceedings of the 6th IFIP WG 5.5 International Precision Assembly Seminar, IPAS 2012, held in Chamonix, France, in February 2012. The 15 revised full papers were carefully reviewed and selected from numerous submissions. The papers are organized into the following topical sections: micro processes and systems; handling and manipulation in assembly; tolerance management and error compensation methods; metrology and quality control; intelligent control of assembly systems; and process selection and modelling techniques.
Author : Vlad Stolojan
Publisher : Morgan & Claypool Publishers
ISBN 13 : 1681741202
Total Pages : 69 pages
Book Rating : 4.6/5 (817 download)
Download or read book Nanometrology Using the Transmission Electron Microscope written by Vlad Stolojan and published by Morgan & Claypool Publishers. This book was released on 2015-10-12 with total page 69 pages. Available in PDF, EPUB and Kindle. Book excerpt: The Transmission Electron Microscope (TEM) is the ultimate tool to see and measure structures on the nanoscale and to probe their elemental composition and electronic structure with sub-nanometer spatial resolution. Recent technological breakthroughs have revolutionized our understanding of materials via use of the TEM, and it promises to become a significant tool in understanding biological and biomolecular systems such as viruses and DNA molecules. This book is a practical guide for scientists who need to use the TEM as a tool to answer questions about physical and chemical phenomena on the nanoscale.
Author : Gabor L. Hornyak
Publisher : CRC Press
ISBN 13 : 142004804X
Total Pages : 812 pages
Book Rating : 4.4/5 (2 download)
Download or read book Fundamentals of Nanotechnology written by Gabor L. Hornyak and published by CRC Press. This book was released on 2018-12-14 with total page 812 pages. Available in PDF, EPUB and Kindle. Book excerpt: WINNER 2009 CHOICE AWARD OUTSTANDING ACADEMIC TITLE! Nanotechnology is no longer a subdiscipline of chemistry, engineering, or any other field. It represents the convergence of many fields, and therefore demands a new paradigm for teaching. This textbook is for the next generation of nanotechnologists. It surveys the field’s broad landscape, exploring the physical basics such as nanorheology, nanofluidics, and nanomechanics as well as industrial concerns such as manufacturing, reliability, and safety. The authors then explore the vast range of nanomaterials and systematically outline devices and applications in various industrial sectors. This color text is an ideal companion to Introduction to Nanoscience by the same group of esteemed authors. Both titles are also available as the single volume Introduction to Nanoscience and Nanotechnology Qualifying instructors who purchase either of these volumes (or the combined set) are given online access to a wealth of instructional materials. These include detailed lecture notes, review summaries, slides, exercises, and more. The authors provide enough material for both one- and two-semester courses.
Author : Armando Albertazzi
Publisher : SPIE-International Society for Optical Engineering
ISBN 13 :
Total Pages : 230 pages
Book Rating : 4.3/5 (91 download)
Download or read book Laser Metrology for Precision Measurement and Inspection in Industry written by Armando Albertazzi and published by SPIE-International Society for Optical Engineering. This book was released on 2001 with total page 230 pages. Available in PDF, EPUB and Kindle. Book excerpt: "International Symposium on Laser Metrology for Precision Measurement and Inspection in Industry"--P. vii.
Author : Waldemar Nawrocki
Publisher : Springer
ISBN 13 : 3319156691
Total Pages : 287 pages
Book Rating : 4.3/5 (191 download)
Download or read book Introduction to Quantum Metrology written by Waldemar Nawrocki and published by Springer. This book was released on 2015-03-24 with total page 287 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book presents the theory of quantum effects used in metrology and results of the author’s own research in the field of quantum electronics. The book provides also quantum measurement standards used in many branches of metrology for electrical quantities, mass, length, time and frequency. This book represents the first comprehensive survey of quantum metrology problems. As a scientific survey, it propagates a new approach to metrology with more emphasis on its connection with physics. This is of importance for the constantly developing technologies and nanotechnologies in particular. Providing a presentation of practical applications of the effects used in quantum metrology for the construction of quantum standards and sensitive electronic components, the book is useful for a wide audience of physicists and metrologists in the broad sense of both terms. In 2014 a new system of units, the so called Quantum SI, is introduced. This book helps to understand and approve the new system to both technology and academic community.
