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Author : Ken D. Wise
Publisher :
ISBN 13 :
Total Pages : 42 pages
Book Rating : 4.:/5 (87 download)
Download or read book Automation in Semiconductor Manufacturing written by Ken D. Wise and published by . This book was released on 1985 with total page 42 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : James Moyne
Publisher : CRC Press
ISBN 13 : 1420040669
Total Pages : 368 pages
Book Rating : 4.4/5 (2 download)
Download or read book Run-to-Run Control in Semiconductor Manufacturing written by James Moyne and published by CRC Press. This book was released on 2018-10-08 with total page 368 pages. Available in PDF, EPUB and Kindle. Book excerpt: Run-to-run (R2R) control is cutting-edge technology that allows modification of a product recipe between machine "runs," thereby minimizing process drift, shift, and variability-and with them, costs. Its effectiveness has been demonstrated in a variety of processes, such as vapor phase epitaxy, lithography, and chemical mechanical planarization. The only barrier to the semiconductor industry's widespread adoption of this highly effective process control is a lack of understanding of the technology. Run to Run Control in Semiconductor Manufacturing overcomes that barrier by offering in-depth analyses of R2R control.
Author : Chen-Fu Chien
Publisher :
ISBN 13 :
Total Pages : pages
Book Rating : 4.:/5 (96 download)
Download or read book Special Section on Semiconductor Manufacturing Intelligence and Automation written by Chen-Fu Chien and published by . This book was released on 2016 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Shimon Y. Nof
Publisher : Springer Nature
ISBN 13 : 3030967298
Total Pages : 1533 pages
Book Rating : 4.0/5 (39 download)
Download or read book Springer Handbook of Automation written by Shimon Y. Nof and published by Springer Nature. This book was released on 2023-06-16 with total page 1533 pages. Available in PDF, EPUB and Kindle. Book excerpt: This handbook incorporates new developments in automation. It also presents a widespread and well-structured conglomeration of new emerging application areas, such as medical systems and health, transportation, security and maintenance, service, construction and retail as well as production or logistics. The handbook is not only an ideal resource for automation experts but also for people new to this expanding field.
Author : Sophia Keil
Publisher : Springer Nature
ISBN 13 : 3030486028
Total Pages : 150 pages
Book Rating : 4.0/5 (34 download)
Download or read book Digital Transformation in Semiconductor Manufacturing written by Sophia Keil and published by Springer Nature. This book was released on 2020-05-26 with total page 150 pages. Available in PDF, EPUB and Kindle. Book excerpt: This open access book reports on cutting-edge electrical engineering and microelectronics solutions to foster and support digitalization in the semiconductor industry. Based on the outcomes of the European project iDev40, which were presented at the two first conference editions of the European Advances in Digital Transformation Conference (EADCT 2018 and EADTC 2019), the book covers different, multidisciplinary aspects related to digital transformation, including technological and industrial developments, as well as human factors research and applications. Topics include modeling and simulation methods in semiconductor operations, supply chain management issues, employee training methods and workplaces optimization, as well as smart software and hardware solutions for semiconductor manufacturing. By highlighting industrially relevant developments and discussing open issues related to digital transformation, the book offers a timely, practice-oriented guide to graduate students, researchers and professionals interested in the digital transformation of manufacturing domains and work environments.
Author : JAMES ROBERT MOYNE
Publisher :
ISBN 13 :
Total Pages : 200 pages
Book Rating : 4.:/5 (687 download)
Download or read book SYSTEM DESIGN FOR AUTOMATION IN SEMICONDUCTOR MANUFACTURING. written by JAMES ROBERT MOYNE and published by . This book was released on 1990 with total page 200 pages. Available in PDF, EPUB and Kindle. Book excerpt: concepts presented, and identifies initial performance parameters.
Author : Hwaiyu Geng
Publisher : McGraw Hill Professional
ISBN 13 : 0071445595
Total Pages : 915 pages
Book Rating : 4.0/5 (714 download)
Download or read book Semiconductor Manufacturing Handbook written by Hwaiyu Geng and published by McGraw Hill Professional. This book was released on 2005-05-18 with total page 915 pages. Available in PDF, EPUB and Kindle. Book excerpt: WORLD-CLASS SEMICONDUCTOR MANUFACTURING EXPERTISE AT YOUR FINGERTIPS This is a comprehensive reference to the semiconductor manufacturing process and ancillary facilities -- from raw material preparation to packaging and testing, applying basics to emerging technologies. Readers charged with optimizing the design and performance of manufacturing processes will find all the information necessary to produce the highest quality chips at the lowest price in the shortest time possible. The Semiconductor Manufacturing Handbook provides leading-edge information on semiconductor wafer processes, MEMS, nanotechnology, and FPD, plus the latest manufacturing and automation technologies, including: Yield Management Automated Material Handling System Fab and Cleanroom Design and Operation Gas Abatement and Waste Treatment Management And much more Written by 60 international experts, and peer reviewed by a seasoned advisory board, this handbook covers the fundamentals of relevant technology and its real-life application and operational considerations for planning, implementing, and controlling manufacturing processes. It includes hundreds of detailed illustrations and a list of relevant books, technical papers, and websites for further research. This inclusive, wide-ranging coverage makes the Semiconductor Manufacturing Handbook the most comprehensive single-volume reference ever published in the field. STATE-OF-THE-ART SEMICONDUCTOR TECHNOLOGIES AND MANUFACTURING PROCESSES: SEMICONDUCTOR FUNDAMENTALS How Chips Are Designed and Made * Substrates * Copper and Low-k Dielectrics * Silicide Formation * Plasma * Vacuum * Photomask WAFER PROCESSING TECHNOLOGIES Microlithography * Ion Implantation * Etch * PVD/ALD * CVD * ECD * Epitaxy * CMP * Wet Cleaning FINAL MANUFACTURING Packaging * Grinding, Stress Relief, Dicing * Inspection, Measurement, and Testing NANOTECHNOLOGY, MEMS, AND FPD GAS AND CHEMICALS Specialty Gas System and DCA * Gas Abatement Systems * Chemical and Slurries Delivery System * Ultra Pure Water FAB YIELD, OPERATIONS, AND FACILITIES Yield Management * Automated Materials Handling System * Metrology * Six Sigma * Advanced Process Control * EHS * Fab Design and Construction * Cleanroom * Vibration and Acoustic Control * ESD * Airborne Molecular Control * Particle Monitoring * Wastewater Neutralization Systems
Author : John R. DeBolt
Publisher :
ISBN 13 :
Total Pages : 8 pages
Book Rating : 4.:/5 (135 download)
Download or read book Information Automation for Semiconductor Manufacturing written by John R. DeBolt and published by . This book was released on 1984 with total page 8 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Vaughn E. Akins
Publisher :
ISBN 13 :
Total Pages : 302 pages
Book Rating : 4.:/5 (2 download)
Download or read book Proceedings of the Fifth Symposium on Automated Integrated Circuits Manufacturing written by Vaughn E. Akins and published by . This book was released on 1990 with total page 302 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Jie Zhang
Publisher : Walter de Gruyter GmbH & Co KG
ISBN 13 : 3110487233
Total Pages : 347 pages
Book Rating : 4.1/5 (14 download)
Download or read book Wafer Fabrication written by Jie Zhang and published by Walter de Gruyter GmbH & Co KG. This book was released on 2018-09-24 with total page 347 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book systematically introduces modeling, performance evaluation and applications of Automatic Materiel Handling System (AMHS) in semiconductor manufactucing, and focuses discussion on the coordination of two subsystems. Resources dispatch and optimization are conducted on operational research combined with cases studies. Written in a practical way, it is an essential reference for researchers and engineers in manufacturing and management.
Author :
Publisher :
ISBN 13 :
Total Pages : 128 pages
Book Rating : 4.:/5 ( download)
Download or read book A Competitive Assessment of the U.S. Semiconductor Manufacturing Equipment Industry written by and published by . This book was released on 1985 with total page 128 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Jan Grym
Publisher : IntechOpen
ISBN 13 : 9789533070803
Total Pages : 498 pages
Book Rating : 4.0/5 (78 download)
Download or read book Semiconductor Technologies written by Jan Grym and published by IntechOpen. This book was released on 2010-04-01 with total page 498 pages. Available in PDF, EPUB and Kindle. Book excerpt: Semiconductor technologies continue to evolve and amaze us. New materials, new structures, new manufacturing tools, and new advancements in modelling and simulation form a breeding ground for novel high performance electronic and photonic devices. This book covers all aspects of semiconductor technology concerning materials, technological processes, and devices, including their modelling, design, integration, and manufacturing.
Author : Sophia Keil
Publisher :
ISBN 13 : 9783030486037
Total Pages : pages
Book Rating : 4.4/5 (86 download)
Download or read book Digital Transformation in Semiconductor Manufacturing written by Sophia Keil and published by . This book was released on 2020 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Karl Mathia
Publisher : Cambridge University Press
ISBN 13 : 0521876524
Total Pages : 251 pages
Book Rating : 4.5/5 (218 download)
Download or read book Robotics for Electronics Manufacturing written by Karl Mathia and published by Cambridge University Press. This book was released on 2010-05-06 with total page 251 pages. Available in PDF, EPUB and Kindle. Book excerpt: Understand the design, testing, and application of cleanroom robotics and get real-world examples and design tips with this practical guide.
Author : MS. Ligeti
Publisher :
ISBN 13 :
Total Pages : 11 pages
Book Rating : 4.:/5 (125 download)
Download or read book Computer Integrated Manufacturing written by MS. Ligeti and published by . This book was released on 1987 with total page 11 pages. Available in PDF, EPUB and Kindle. Book excerpt: Automation of semiconductor manufacturing is no longer an option: technological and competitive pressures have made it a necessity. Increasing wafer sizes, the need for reduced particle contamination, increasingly complex process technologies, high capital equipment costs, and continuously declining selling prices are all major challenges for manufacturers. Devices must be produced not only with greater precision and higher quality, but with ongoing unit cost reductions as well. Automation appears to be the top candidate to help meet these challenges.
Author : Bei-Tseng Bill Chu
Publisher : World Scientific Publishing Company Incorporated
ISBN 13 : 9789810208172
Total Pages : 263 pages
Book Rating : 4.2/5 (81 download)
Download or read book Intelligent Modeling, Diagnosis and Control of Manufacturing Processes written by Bei-Tseng Bill Chu and published by World Scientific Publishing Company Incorporated. This book was released on 1992 with total page 263 pages. Available in PDF, EPUB and Kindle. Book excerpt: 1. Manufacturing diagnosis and control: a task-specific approach / W.F. Punch III, A.K. Goel and J. Sticklen -- 2. The theory and application of diagnostic and control expert system based on plant model / J. Suzuki and M. Iwamasa -- 3. Integrated problem solving for the diagnosis of interacting process malfunctions / J.K. McDowell and J.F. Davis -- 4. A neural network model for diagnostic problem solving / Y. Peng and J.A. Reggia -- 5. Process control system for VLSI fabrication / E. Sachs [und weitere] -- 6. Development and application of equipment-specific process models for semiconductor manufacturing / K.-K. Lin and C. Spanos -- 7. Continuous equipment diagnosis using evidence integration - an LPCVD application / N.H. Chang, and C. Spanos -- 8. Equipment/instrument diagnosis with continuous and discrete causal relationships / B.-T.B. Chu -- 9. Intelligent control of semiconductor manufacturing processes / S.-S. Chen -- 10. A machine learning approach to diagnosis and control with applications in semiconductor manufacturing / K.B. Irani [und weitere]
Author : Gary S. May
Publisher : John Wiley & Sons
ISBN 13 : 0471790273
Total Pages : 428 pages
Book Rating : 4.4/5 (717 download)
Download or read book Fundamentals of Semiconductor Manufacturing and Process Control written by Gary S. May and published by John Wiley & Sons. This book was released on 2006-05-26 with total page 428 pages. Available in PDF, EPUB and Kindle. Book excerpt: A practical guide to semiconductor manufacturing from processcontrol to yield modeling and experimental design Fundamentals of Semiconductor Manufacturing and Process Controlcovers all issues involved in manufacturing microelectronic devicesand circuits, including fabrication sequences, process control,experimental design, process modeling, yield modeling, and CIM/CAMsystems. Readers are introduced to both the theory and practice ofall basic manufacturing concepts. Following an overview of manufacturing and technology, the textexplores process monitoring methods, including those that focus onproduct wafers and those that focus on the equipment used toproduce wafers. Next, the text sets forth some fundamentals ofstatistics and yield modeling, which set the foundation for adetailed discussion of how statistical process control is used toanalyze quality and improve yields. The discussion of statistical experimental design offers readers apowerful approach for systematically varying controllable processconditions and determining their impact on output parameters thatmeasure quality. The authors introduce process modeling concepts,including several advanced process control topics such asrun-by-run, supervisory control, and process and equipmentdiagnosis. Critical coverage includes the following: * Combines process control and semiconductor manufacturing * Unique treatment of system and software technology and managementof overall manufacturing systems * Chapters include case studies, sample problems, and suggestedexercises * Instructor support includes electronic copies of the figures andan instructor's manual Graduate-level students and industrial practitioners will benefitfrom the detailed exami?nation of how electronic materials andsupplies are converted into finished integrated circuits andelectronic products in a high-volume manufacturingenvironment. An Instructor's Manual presenting detailed solutions to all theproblems in the book is available from the Wiley editorialdepartment. An Instructor Support FTP site is also available.
