Wafer Fabrication: Factory Performance and Analysis

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Author :
Publisher : Springer Science & Business Media
ISBN 13 : 9780792396192
Total Pages : 498 pages
Book Rating : 4.3/5 (961 download)

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Book Synopsis Wafer Fabrication: Factory Performance and Analysis by : Linda F. Atherton

Download or read book Wafer Fabrication: Factory Performance and Analysis written by Linda F. Atherton and published by Springer Science & Business Media. This book was released on 1995-11-30 with total page 498 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book is concerned with wafer fabrication and the factories that manufacture microprocessors and other integrated circuits. With the invention of the transistor in 1947, the world as we knew it changed. The transistor led to the microprocessor, and the microprocessor, the guts of the modern computer, has created an epoch of virtually unlimited information processing. The electronics and computer revolution has brought about, for better or worse, a new way of life. This revolution could not have occurred without wafer fabrication, and its associated processing technologies. A microprocessor is fabricated via a lengthy, highly-complex sequence of chemical processes. The success of modern chip manufacturing is a miracle of technology and a tribute to the hundreds of engineers who have contributed to its development. This book will delineate the magnitude of the accomplishment, and present methods to analyze and predict the performance of the factories that make the chips. The set of topics covered juxtaposes several disciplines of engineering. A primary subject is the chemical engineering aspects of the electronics industry, an industry typically thought to be strictly an electrical engineer's playground. The book also delves into issues of manufacturing, operations performance, economics, and the dynamics of material movement, topics often considered the domain of industrial engineering and operations research. Hopefully, we have provided in this work a comprehensive treatment of both the technology and the factories of wafer fabrication. Novel features of these factories include long process flows and a dominance of processing over operational issues.

Production Planning and Control for Semiconductor Wafer Fabrication Facilities

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Author :
Publisher : Springer Science & Business Media
ISBN 13 : 1461444713
Total Pages : 298 pages
Book Rating : 4.4/5 (614 download)

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Book Synopsis Production Planning and Control for Semiconductor Wafer Fabrication Facilities by : Lars Mönch

Download or read book Production Planning and Control for Semiconductor Wafer Fabrication Facilities written by Lars Mönch and published by Springer Science & Business Media. This book was released on 2012-09-12 with total page 298 pages. Available in PDF, EPUB and Kindle. Book excerpt: Over the last fifty-plus years, the increased complexity and speed of integrated circuits have radically changed our world. Today, semiconductor manufacturing is perhaps the most important segment of the global manufacturing sector. As the semiconductor industry has become more competitive, improving planning and control has become a key factor for business success. This book is devoted to production planning and control problems in semiconductor wafer fabrication facilities. It is the first book that takes a comprehensive look at the role of modeling, analysis, and related information systems for such manufacturing systems. The book provides an operations research- and computer science-based introduction into this important field of semiconductor manufacturing-related research.

Fundamentals of Semiconductor Manufacturing and Process Control

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Author :
Publisher : John Wiley & Sons
ISBN 13 : 0471790273
Total Pages : 428 pages
Book Rating : 4.4/5 (717 download)

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Book Synopsis Fundamentals of Semiconductor Manufacturing and Process Control by : Gary S. May

Download or read book Fundamentals of Semiconductor Manufacturing and Process Control written by Gary S. May and published by John Wiley & Sons. This book was released on 2006-05-26 with total page 428 pages. Available in PDF, EPUB and Kindle. Book excerpt: A practical guide to semiconductor manufacturing from processcontrol to yield modeling and experimental design Fundamentals of Semiconductor Manufacturing and Process Controlcovers all issues involved in manufacturing microelectronic devicesand circuits, including fabrication sequences, process control,experimental design, process modeling, yield modeling, and CIM/CAMsystems. Readers are introduced to both the theory and practice ofall basic manufacturing concepts. Following an overview of manufacturing and technology, the textexplores process monitoring methods, including those that focus onproduct wafers and those that focus on the equipment used toproduce wafers. Next, the text sets forth some fundamentals ofstatistics and yield modeling, which set the foundation for adetailed discussion of how statistical process control is used toanalyze quality and improve yields. The discussion of statistical experimental design offers readers apowerful approach for systematically varying controllable processconditions and determining their impact on output parameters thatmeasure quality. The authors introduce process modeling concepts,including several advanced process control topics such asrun-by-run, supervisory control, and process and equipmentdiagnosis. Critical coverage includes the following: * Combines process control and semiconductor manufacturing * Unique treatment of system and software technology and managementof overall manufacturing systems * Chapters include case studies, sample problems, and suggestedexercises * Instructor support includes electronic copies of the figures andan instructor's manual Graduate-level students and industrial practitioners will benefitfrom the detailed exami?nation of how electronic materials andsupplies are converted into finished integrated circuits andelectronic products in a high-volume manufacturingenvironment. An Instructor's Manual presenting detailed solutions to all theproblems in the book is available from the Wiley editorialdepartment. An Instructor Support FTP site is also available.

Wafer Fabrication

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Author :
Publisher : Walter de Gruyter GmbH & Co KG
ISBN 13 : 3110487470
Total Pages : 284 pages
Book Rating : 4.1/5 (14 download)

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Book Synopsis Wafer Fabrication by : Jie Zhang

Download or read book Wafer Fabrication written by Jie Zhang and published by Walter de Gruyter GmbH & Co KG. This book was released on 2018-09-24 with total page 284 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book systematically introduces modeling, performance evaluation and applications of Automatic Materiel Handling System (AMHS) in semiconductor manufactucing, and focuses discussion on the coordination of two subsystems. Resources dispatch and optimization are conducted on operational research combined with cases studies. Written in a practical way, it is an essential reference for researchers and engineers in manufacturing and management.

Wafer Manufacturing

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Author :
Publisher : John Wiley & Sons
ISBN 13 : 0470061219
Total Pages : 304 pages
Book Rating : 4.4/5 (7 download)

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Book Synopsis Wafer Manufacturing by : Imin Kao

Download or read book Wafer Manufacturing written by Imin Kao and published by John Wiley & Sons. This book was released on 2021-01-11 with total page 304 pages. Available in PDF, EPUB and Kindle. Book excerpt: Presenting all the major stages in wafer manufacturing, from crystals to prime wafers. This book first outlines the physics, associated metrology, process modelling and quality requirements and the goes on to discuss wafer forming and wafer surface preparation techniques. The whole is rounded off with a chapter on the research and future challenges in wafer manufacturing.

Wafer Fabrication

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Author :
Publisher : Walter de Gruyter GmbH & Co KG
ISBN 13 : 3110487233
Total Pages : 347 pages
Book Rating : 4.1/5 (14 download)

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Book Synopsis Wafer Fabrication by : Jie Zhang

Download or read book Wafer Fabrication written by Jie Zhang and published by Walter de Gruyter GmbH & Co KG. This book was released on 2018-09-24 with total page 347 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book systematically introduces modeling, performance evaluation and applications of Automatic Materiel Handling System (AMHS) in semiconductor manufactucing, and focuses discussion on the coordination of two subsystems. Resources dispatch and optimization are conducted on operational research combined with cases studies. Written in a practical way, it is an essential reference for researchers and engineers in manufacturing and management.

Microchip Fabrication, 5th Ed.

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Author :
Publisher : McGraw Hill Professional
ISBN 13 : 0071501398
Total Pages : 658 pages
Book Rating : 4.0/5 (715 download)

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Book Synopsis Microchip Fabrication, 5th Ed. by : Peter Van Zant

Download or read book Microchip Fabrication, 5th Ed. written by Peter Van Zant and published by McGraw Hill Professional. This book was released on 2004-06-09 with total page 658 pages. Available in PDF, EPUB and Kindle. Book excerpt: The #1 book in the industry for more than 15 years! Utilizing a straightforward, math-free pathology, this is a novice-friendly guide to the semiconductor fabrication process from raw materials through shipping the finished, packaged device. Challenging quizzes and review summaries make this the perfect learning guide for technicians in training. * NEW chapter on nanotechnology * NEW sections on 300mm wafer processing * Processes and devices, and Green processing * Every chapter updated to reflect the latest processing techniques

Microchip Fabrication

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Author :
Publisher :
ISBN 13 :
Total Pages : 322 pages
Book Rating : 4.3/5 (91 download)

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Book Synopsis Microchip Fabrication by : Peter Van Zant

Download or read book Microchip Fabrication written by Peter Van Zant and published by . This book was released on 1984 with total page 322 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Semiconductor Industry

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Author :
Publisher : CRC Press
ISBN 13 : 1420027190
Total Pages : 216 pages
Book Rating : 4.4/5 (2 download)

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Book Synopsis Semiconductor Industry by : J. Michael Sherer

Download or read book Semiconductor Industry written by J. Michael Sherer and published by CRC Press. This book was released on 2018-10-03 with total page 216 pages. Available in PDF, EPUB and Kindle. Book excerpt: Given the myriad exhaust compounds and the corresponding problems that they can pose in an exhaust management system, the proper choice of such systems is a complex task. Presenting the fundamentals, technical details, and general solutions to real-world problems, Semiconductor Industry: Wafer Fab Exhaust Management offers practical guidance on selecting an appropriate system for a given application. Using examples that provide a clear understanding of the concepts discussed, Sherer covers facility layout, support facilities operations, and semiconductor process equipment, followed by exhaust types and challenges. He reviews exhaust point-of-use devices and exhaust line requirements needed between process equipment and the centralized exhaust system. The book includes information on wet scrubbers for a centralized acid exhaust system and a centralized ammonia exhaust system and on centralized equipment to control volatile organic compounds. It concludes with a chapter devoted to emergency releases and a separate chapter of examples illustrating these systems in use. Drawing on the author's 20 years of industry experience, the book shows you how to customize strategies specific to your needs, solve current problems, and prevent future issues in your exhaust management systems.

Practices of Wafer Fab Operations

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Author :
Publisher : CreateSpace
ISBN 13 : 9781499235555
Total Pages : 508 pages
Book Rating : 4.2/5 (355 download)

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Book Synopsis Practices of Wafer Fab Operations by : Len Mei

Download or read book Practices of Wafer Fab Operations written by Len Mei and published by CreateSpace. This book was released on 2014-05-25 with total page 508 pages. Available in PDF, EPUB and Kindle. Book excerpt: Wafer fab has one of the most complex manufacturing activities in the modern industry. It involves highly sophisticated and fast changing technologies, extremely high capital spending, short product and technology lifecycle and ultra sensitivity to the yield and quality. A successful wafer fab operation requires not only know-how in technologies/ products, acute sense in management, basic understanding in business and in-depth knowledge of the operation theories. This book provides an overview of the requirements of running an efficient, cost effective and high quality wafer fab operation. It discusses almost all important aspects of operating an efficient operation based on the concept of operating curve management. It covers the important subjects such as: how the automation will help in the operation, how to measure the effectiveness of quality control system, how to manage the capital expenditure, the important elements of process and technology management, including yield enhancement from the prospective of quality, cost down and speed, what kind of KPI's to use to measure the performance in different operation areas in the fab. To lay a foundation for the discussion of the wafer fab operation, this book also presents the relationship between wafer size conversion and its financial impact to the profitability, the consequence of Moore's Law to the cost and eventually economic feasibility of the next generation wafer fabs. It shows that if the top-most economic trends and business guidelines are violated, no matter how efficient the operation is, the wafer fab cannot turn profit. For the readers who already have a lot experience in the wafer fab operation, there is much food for thought in this book.

Optimizing Semiconductor Fabrication Scheduling in the Face of Uncertainties

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Author :
Publisher :
ISBN 13 :
Total Pages : 278 pages
Book Rating : 4.:/5 (34 download)

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Book Synopsis Optimizing Semiconductor Fabrication Scheduling in the Face of Uncertainties by : Thawee Chitchachornvanich

Download or read book Optimizing Semiconductor Fabrication Scheduling in the Face of Uncertainties written by Thawee Chitchachornvanich and published by . This book was released on 1998 with total page 278 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Semiconductor Manufacturing Handbook

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Author :
Publisher : McGraw Hill Professional
ISBN 13 : 0071445595
Total Pages : 915 pages
Book Rating : 4.0/5 (714 download)

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Book Synopsis Semiconductor Manufacturing Handbook by : Hwaiyu Geng

Download or read book Semiconductor Manufacturing Handbook written by Hwaiyu Geng and published by McGraw Hill Professional. This book was released on 2005-05-18 with total page 915 pages. Available in PDF, EPUB and Kindle. Book excerpt: WORLD-CLASS SEMICONDUCTOR MANUFACTURING EXPERTISE AT YOUR FINGERTIPS This is a comprehensive reference to the semiconductor manufacturing process and ancillary facilities -- from raw material preparation to packaging and testing, applying basics to emerging technologies. Readers charged with optimizing the design and performance of manufacturing processes will find all the information necessary to produce the highest quality chips at the lowest price in the shortest time possible. The Semiconductor Manufacturing Handbook provides leading-edge information on semiconductor wafer processes, MEMS, nanotechnology, and FPD, plus the latest manufacturing and automation technologies, including: Yield Management Automated Material Handling System Fab and Cleanroom Design and Operation Gas Abatement and Waste Treatment Management And much more Written by 60 international experts, and peer reviewed by a seasoned advisory board, this handbook covers the fundamentals of relevant technology and its real-life application and operational considerations for planning, implementing, and controlling manufacturing processes. It includes hundreds of detailed illustrations and a list of relevant books, technical papers, and websites for further research. This inclusive, wide-ranging coverage makes the Semiconductor Manufacturing Handbook the most comprehensive single-volume reference ever published in the field. STATE-OF-THE-ART SEMICONDUCTOR TECHNOLOGIES AND MANUFACTURING PROCESSES: SEMICONDUCTOR FUNDAMENTALS How Chips Are Designed and Made * Substrates * Copper and Low-k Dielectrics * Silicide Formation * Plasma * Vacuum * Photomask WAFER PROCESSING TECHNOLOGIES Microlithography * Ion Implantation * Etch * PVD/ALD * CVD * ECD * Epitaxy * CMP * Wet Cleaning FINAL MANUFACTURING Packaging * Grinding, Stress Relief, Dicing * Inspection, Measurement, and Testing NANOTECHNOLOGY, MEMS, AND FPD GAS AND CHEMICALS Specialty Gas System and DCA * Gas Abatement Systems * Chemical and Slurries Delivery System * Ultra Pure Water FAB YIELD, OPERATIONS, AND FACILITIES Yield Management * Automated Materials Handling System * Metrology * Six Sigma * Advanced Process Control * EHS * Fab Design and Construction * Cleanroom * Vibration and Acoustic Control * ESD * Airborne Molecular Control * Particle Monitoring * Wastewater Neutralization Systems

Frontiers of Manufacturing and Design Science

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Author :
Publisher : Trans Tech Publications Ltd
ISBN 13 : 3038135267
Total Pages : 4432 pages
Book Rating : 4.0/5 (381 download)

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Book Synopsis Frontiers of Manufacturing and Design Science by : Ran Chen

Download or read book Frontiers of Manufacturing and Design Science written by Ran Chen and published by Trans Tech Publications Ltd. This book was released on 2010-12-06 with total page 4432 pages. Available in PDF, EPUB and Kindle. Book excerpt: Volume is indexed by Thomson Reuters CPCI-S (WoS). This collection brings together 820 peer-reviewed papers, on Manufacturing and Design Science, aimed at promoting the development of design and manufacturing science, strengthening international academic cooperation and communications, and exchanging research ideas. It is divided into: Chapter 1 Frontiers in Manufacturing Science, Chapter 2: Frontiers in Design Science, Chapter 3: Frontiers in Mechanics and Materials, Chapter 4: Frontiers in Automation and Information.

Workload Regulation of Semiconductor Fabrication Facilities

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Author :
Publisher :
ISBN 13 :
Total Pages : 254 pages
Book Rating : 4.:/5 (7 download)

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Book Synopsis Workload Regulation of Semiconductor Fabrication Facilities by : Maria Guadalupe Solorzano

Download or read book Workload Regulation of Semiconductor Fabrication Facilities written by Maria Guadalupe Solorzano and published by . This book was released on 1988 with total page 254 pages. Available in PDF, EPUB and Kindle. Book excerpt:

III-V Integrated Circuit Fabrication Technology

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Author :
Publisher : CRC Press
ISBN 13 : 9814669318
Total Pages : 550 pages
Book Rating : 4.8/5 (146 download)

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Book Synopsis III-V Integrated Circuit Fabrication Technology by : Shiban Tiku

Download or read book III-V Integrated Circuit Fabrication Technology written by Shiban Tiku and published by CRC Press. This book was released on 2016-04-27 with total page 550 pages. Available in PDF, EPUB and Kindle. Book excerpt: GaAs processing has reached a mature stage. New semiconductor compounds are emerging that will dominate future materials and device research, although the processing techniques used for GaAs will still remain relevant. This book covers all aspects of the current state of the art of III–V processing, with emphasis on HBTs. It is aimed at practicing engineers and graduate students and engineers new to the field of III–V semiconductor IC processing. The book’s primary purpose is to discuss all aspects of processing of active and passive devices, from crystal growth to backside processing, including lithography, etching, and film deposition.

Microchip Fabrication, 5th Ed.

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Author :
Publisher : McGraw Hill Professional
ISBN 13 : 9780071432412
Total Pages : 662 pages
Book Rating : 4.4/5 (324 download)

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Book Synopsis Microchip Fabrication, 5th Ed. by : Peter Van Zant

Download or read book Microchip Fabrication, 5th Ed. written by Peter Van Zant and published by McGraw Hill Professional. This book was released on 2004-05-19 with total page 662 pages. Available in PDF, EPUB and Kindle. Book excerpt: The #1 book in the industry for more than 15 years! Utilizing a straightforward, math-free pathology, this is a novice-friendly guide to the semiconductor fabrication process from raw materials through shipping the finished, packaged device. Challenging quizzes and review summaries make this the perfect learning guide for technicians in training. * NEW chapter on nanotechnology * NEW sections on 300mm wafer processing * Processes and devices, and Green processing * Every chapter updated to reflect the latest processing techniques

Fundamentals of Semiconductor Processing Technology

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Author :
Publisher : Springer Science & Business Media
ISBN 13 : 1461522099
Total Pages : 605 pages
Book Rating : 4.4/5 (615 download)

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Book Synopsis Fundamentals of Semiconductor Processing Technology by : Badih El-Kareh

Download or read book Fundamentals of Semiconductor Processing Technology written by Badih El-Kareh and published by Springer Science & Business Media. This book was released on 2012-12-06 with total page 605 pages. Available in PDF, EPUB and Kindle. Book excerpt: The drive toward new semiconductor technologies is intricately related to market demands for cheaper, smaller, faster, and more reliable circuits with lower power consumption. The development of new processing tools and technologies is aimed at optimizing one or more of these requirements. This goal can, however, only be achieved by a concerted effort between scientists, engineers, technicians, and operators in research, development, and manufac turing. It is therefore important that experts in specific disciplines, such as device and circuit design, understand the principle, capabil ities, and limitations of tools and processing technologies. It is also important that those working on specific unit processes, such as lithography or hot processes, be familiar with other unit processes used to manufacture the product. Several excellent books have been published on the subject of process technologies. These texts, however, cover subjects in too much detail, or do not cover topics important to modem tech nologies. This book is written with the need for a "bridge" between different disciplines in mind. It is intended to present to engineers and scientists those parts of modem processing technologies that are of greatest importance to the design and manufacture of semi conductor circuits. The material is presented with sufficient detail to understand and analyze interactions between processing and other semiconductor disciplines, such as design of devices and cir cuits, their electrical parameters, reliability, and yield.