Author : Michael Lowell Holmes
Publisher :
ISBN 13 :
Total Pages : 406 pages
Book Rating : 4.:/5 (841 download)
Book Synopsis Analysis and Design of a Long Range Scanning Stage by : Michael Lowell Holmes
Download or read book Analysis and Design of a Long Range Scanning Stage written by Michael Lowell Holmes and published by . This book was released on 1998 with total page 406 pages. Available in PDF, EPUB and Kindle. Book excerpt: ABSTRACT: This thesis describes a magnetically-suspended six-degree-of-freedom precision motion control stage which was built at the University of North Carolina's Center for Precision Metrology. This Long-Range Scanning (LORS) stage controls motions in six degrees of freedom within a workspace of 25 mm by 25 mm by 100 /[mu]m. The LORS stage consists of a moving element (platen), a machine frame, and a metrology head. In the bottom of the platen are four permanent magnet arrays and to the top of the platen is mounted a reference block. The platen is light-weighted and floated in oil to reduce bias currents in the motors and to provide viscous damping. The mass of the platen/sample holder assembly "equals" the mass of the displaced oil thereby coupling motions of the machine frame to the suspended platen. Opposite the magnet arrays, mounted to the machine frame, are the stator windings. The reference block contains the reference surfaces for the position feedback sensors, namely, target mirrors for the interferometers and a conductor plane which acts as the target(s) for the capacitance probes. Kinematically mounted to the top of the machine frame is the metrology head. Both the reference block and the metrology head are Zerodur while the machine frame is aluminum. The metrology head contains the feedback sensors, three interferometers for lateral position feedback and three capacitance probes for vertical position feedback, and also provides support for a scanned probe microscope head. The idea is to control the currents in the motors, thereby controlling the forces exerted on the platen, based on the position feedback from the interferometers and the capacitance probes.