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Aluminum Nitride Contour Mode Resonators
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Download or read book Resonant MEMS written by Oliver Brand and published by John Wiley & Sons. This book was released on 2015-04-22 with total page 512 pages. Available in PDF, EPUB and Kindle. Book excerpt: Part of the AMN book series, this book covers the principles, modeling and implementation as well as applications of resonant MEMS from a unified viewpoint. It starts out with the fundamental equations and phenomena that govern the behavior of resonant MEMS and then gives a detailed overview of their implementation in capacitive, piezoelectric, thermal and organic devices, complemented by chapters addressing the packaging of the devices and their stability. The last part of the book is devoted to the cutting-edge applications of resonant MEMS such as inertial, chemical and biosensors, fluid properties sensors, timing devices and energy harvesting systems.
Book Synopsis Piezoelectric MEMS Resonators by : Harmeet Bhugra
Download or read book Piezoelectric MEMS Resonators written by Harmeet Bhugra and published by Springer. This book was released on 2017-01-09 with total page 423 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book introduces piezoelectric microelectromechanical (pMEMS) resonators to a broad audience by reviewing design techniques including use of finite element modeling, testing and qualification of resonators, and fabrication and large scale manufacturing techniques to help inspire future research and entrepreneurial activities in pMEMS. The authors discuss the most exciting developments in the area of materials and devices for the making of piezoelectric MEMS resonators, and offer direct examples of the technical challenges that need to be overcome in order to commercialize these types of devices. Some of the topics covered include: Widely-used piezoelectric materials, as well as materials in which there is emerging interest Principle of operation and design approaches for the making of flexural, contour-mode, thickness-mode, and shear-mode piezoelectric resonators, and examples of practical implementation of these devices Large scale manufacturing approaches, with a focus on the practical aspects associated with testing and qualification Examples of commercialization paths for piezoelectric MEMS resonators in the timing and the filter markets ...and more! The authors present industry and academic perspectives, making this book ideal for engineers, graduate students, and researchers.
Book Synopsis 3D and Circuit Integration of MEMS by : Masayoshi Esashi
Download or read book 3D and Circuit Integration of MEMS written by Masayoshi Esashi and published by John Wiley & Sons. This book was released on 2021-03-16 with total page 528 pages. Available in PDF, EPUB and Kindle. Book excerpt: Explore heterogeneous circuit integration and the packaging needed for practical applications of microsystems MEMS and system integration are important building blocks for the “More-Than-Moore” paradigm described in the International Technology Roadmap for Semiconductors. And, in 3D and Circuit Integration of MEMS, distinguished editor Dr. Masayoshi Esashi delivers a comprehensive and systematic exploration of the technologies for microsystem packaging and heterogeneous integration. The book focuses on the silicon MEMS that have been used extensively and the technologies surrounding system integration. You’ll learn about topics as varied as bulk micromachining, surface micromachining, CMOS-MEMS, wafer interconnection, wafer bonding, and sealing. Highly relevant for researchers involved in microsystem technologies, the book is also ideal for anyone working in the microsystems industry. It demonstrates the key technologies that will assist researchers and professionals deal with current and future application bottlenecks. Readers will also benefit from the inclusion of: A thorough introduction to enhanced bulk micromachining on MIS process, including pressure sensor fabrication and the extension of MIS process for various advanced MEMS devices An exploration of epitaxial poly Si surface micromachining, including process condition of epi-poly Si, and MEMS devices using epi-poly Si Practical discussions of Poly SiGe surface micromachining, including SiGe deposition and LP CVD polycrystalline SiGe A concise treatment of heterogeneously integrated aluminum nitride MEMS resonators and filters Perfect for materials scientists, electronics engineers, and electrical and mechanical engineers, 3D and Circuit Integration of MEMS will also earn a place in the libraries of semiconductor physicists seeking a one-stop reference for circuit integration and the practical application of microsystems.
Book Synopsis Piezoelectric Aluminum Nitride MEMS Resonators for RF Signal Processing by : Philip Jason Stephanou
Download or read book Piezoelectric Aluminum Nitride MEMS Resonators for RF Signal Processing written by Philip Jason Stephanou and published by . This book was released on 2006 with total page 404 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Fundamentals of Nanomechanical Resonators by : Silvan Schmid
Download or read book Fundamentals of Nanomechanical Resonators written by Silvan Schmid and published by Springer Nature. This book was released on 2023-05-18 with total page 215 pages. Available in PDF, EPUB and Kindle. Book excerpt: Now in an updated second edition, this classroom-tested textbook introduces and summarizes the latest models and skills required to design and optimize nanomechanical resonators, taking a top-down approach that uses macroscopic formulas to model the devices. The authors cover the electrical and mechanical aspects of nanoelectromechanical system (NEMS) devices in six expanded and revised chapters on lumped-element model resonators, continuum mechanical resonators, damping, transduction, responsivity, and measurements and noise. The applied approach found in this book is appropriate for engineering students and researchers working with micro and nanomechanical resonators.
Book Synopsis Micro-Resonators: The Quest for Superior Performance by : Reza Abdolvand
Download or read book Micro-Resonators: The Quest for Superior Performance written by Reza Abdolvand and published by MDPI. This book was released on 2019-02-15 with total page 147 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book is a printed edition of the Special Issue "Micro-Resonators: The Quest for Superior Performance" that was published in Micromachines
Book Synopsis MEMS-based Circuits and Systems for Wireless Communication by : Christian C Enz
Download or read book MEMS-based Circuits and Systems for Wireless Communication written by Christian C Enz and published by Springer Science & Business Media. This book was released on 2012-08-21 with total page 334 pages. Available in PDF, EPUB and Kindle. Book excerpt: MEMS-based Circuits and Systems for Wireless Communications provides comprehensive coverage of RF-MEMS technology from device to system level. This edited volume places emphasis on how system performance for radio frequency applications can be leveraged by Micro-Electro-Mechanical Systems (MEMS). Coverage also extends to innovative MEMS-aware radio architectures that push the potential of MEMS technology further ahead. This work presents a broad overview of the technology from MEMS devices (mainly BAW and Si MEMS resonators) to basic circuits, such as oscillators and filters, and finally complete systems such as ultra-low-power MEMS-based radios. Contributions from leading experts around the world are organized in three parts. Part I introduces RF-MEMS technology, devices and modeling and includes a prospective outlook on ongoing developments towards Nano-Electro-Mechanical Systems (NEMS) and phononic crystals. Device properties and models are presented in a circuit oriented perspective. Part II focusses on design of electronic circuits incorporating MEMS. Circuit design techniques specific to MEMS resonators are applied to oscillators and active filters. In Part III contributors discuss how MEMS can advantageously be used in radios to increase their miniaturization and reduce their power consumption. RF systems built around MEMS components such as MEMS-based frequency synthesis including all-digital PLLs, ultra-low power MEMS-based communication systems and a MEMS-based automotive wireless sensor node are described.
Book Synopsis Frequency References, Power Management for SoC, and Smart Wireless Interfaces by : Andrea Baschirotto
Download or read book Frequency References, Power Management for SoC, and Smart Wireless Interfaces written by Andrea Baschirotto and published by Springer Science & Business Media. This book was released on 2013-09-26 with total page 334 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book is based on the 18 tutorials presented during the 22nd workshop on Advances in Analog Circuit Design. Expert designers present readers with information about a variety of topics at the frontier of analog circuit design, including frequency reference, power management for systems-on-chip, and smart wireless interfaces. This book serves as a valuable reference to the state-of-the-art, for anyone involved in analog circuit research and development.
Book Synopsis Advanced Functional Piezoelectric Materials and Applications by : Inamuddin
Download or read book Advanced Functional Piezoelectric Materials and Applications written by Inamuddin and published by Materials Research Forum LLC. This book was released on 2022-10-05 with total page 290 pages. Available in PDF, EPUB and Kindle. Book excerpt: The book reviews our current knowledge of piezoelectric materials, including their history, developments, properties, process design, and technical applications in such areas as sensors, actuators, power sources, motors, environmental and biomedical domains. Piezoelectric materials will play a crucial role in the development of sustainable energy systems. Keywords: Piezoelectric Materials, Piezo-crystals, Nanogenerators, Phototronics, Piezoelectric Composites, Biomedical Applications, Energy Harvesting, Piezoelectric Thin Films, Piezoelectric Perovskites, Sensor Applications, Piezoelectric Ceramics, Piezoelectric Semiconductors, Piezoelectric Polymers.
Book Synopsis 21st Century Nanoscience – A Handbook by : Klaus D. Sattler
Download or read book 21st Century Nanoscience – A Handbook written by Klaus D. Sattler and published by CRC Press. This book was released on 2020-11-26 with total page 465 pages. Available in PDF, EPUB and Kindle. Book excerpt: 21st Century Nanoscience - A Handbook: Nanophotonics, Nanoelectronics, and Nanoplasmonics (Volume 6) will be the most comprehensive, up-to-date large reference work for the field of nanoscience. Handbook of Nanophysics by the same editor published in the fall of 2010 and was embraced as the first comprehensive reference to consider both fundamental and applied aspects of nanophysics. This follow-up project has been conceived as a necessary expansion and full update that considers the significant advances made in the field since 2010. It goes well beyond the physics as warranted by recent developments in the field. This sixth volume in a ten-volume set covers nanophotonics, nanoelectronics, and nanoplasmonics. Key Features: Provides the most comprehensive, up-to-date large reference work for the field. Chapters written by international experts in the field. Emphasises presentation and real results and applications. This handbook distinguishes itself from other works by its breadth of coverage, readability and timely topics. The intended readership is very broad, from students and instructors to engineers, physicists, chemists, biologists, biomedical researchers, industry professionals, governmental scientists, and others whose work is impacted by nanotechnology. It will be an indispensable resource in academic, government, and industry libraries worldwide. The fields impacted by nanophysics extend from materials science and engineering to biotechnology, biomedical engineering, medicine, electrical engineering, pharmaceutical science, computer technology, aerospace engineering, mechanical engineering, food science, and beyond.
Book Synopsis Emerging Nanoelectronic Devices by : An Chen
Download or read book Emerging Nanoelectronic Devices written by An Chen and published by John Wiley & Sons. This book was released on 2015-01-27 with total page 570 pages. Available in PDF, EPUB and Kindle. Book excerpt: Emerging Nanoelectronic Devices focuses on the future direction of semiconductor and emerging nanoscale device technology. As the dimensional scaling of CMOS approaches its limits, alternate information processing devices and microarchitectures are being explored to sustain increasing functionality at decreasing cost into the indefinite future. This is driving new paradigms of information processing enabled by innovative new devices, circuits, and architectures, necessary to support an increasingly interconnected world through a rapidly evolving internet. This original title provides a fresh perspective on emerging research devices in 26 up to date chapters written by the leading researchers in their respective areas. It supplements and extends the work performed by the Emerging Research Devices working group of the International Technology Roadmap for Semiconductors (ITRS). Key features: • Serves as an authoritative tutorial on innovative devices and architectures that populate the dynamic world of “Beyond CMOS” technologies. • Provides a realistic assessment of the strengths, weaknesses and key unknowns associated with each technology. • Suggests guidelines for the directions of future development of each technology. • Emphasizes physical concepts over mathematical development. • Provides an essential resource for students, researchers and practicing engineers.
Book Synopsis Tuneable Film Bulk Acoustic Wave Resonators by : Spartak Gevorgian
Download or read book Tuneable Film Bulk Acoustic Wave Resonators written by Spartak Gevorgian and published by Springer Science & Business Media. This book was released on 2013-02-14 with total page 255 pages. Available in PDF, EPUB and Kindle. Book excerpt: To handle many standards and ever increasing bandwidth requirements, large number of filters and switches are used in transceivers of modern wireless communications systems. It makes the cost, performance, form factor, and power consumption of these systems, including cellular phones, critical issues. At present, the fixed frequency filter banks based on Film Bulk Acoustic Resonators (FBAR) are regarded as one of the most promising technologies to address performance -form factor-cost issues. Even though the FBARs improve the overall performances the complexity of these systems remains high. Attempts are being made to exclude some of the filters by bringing the digital signal processing (including channel selection) as close to the antennas as possible. However handling the increased interference levels is unrealistic for low-cost battery operated radios. Replacing fixed frequency filter banks by one tuneable filter is the most desired and widely considered scenario. As an example, development of the software based cognitive radios is largely hindered by the lack of adequate agile components, first of all tuneable filters. In this sense the electrically switchable and tuneable FBARs are the most promising components to address the complex cost-performance issues in agile microwave transceivers, smart wireless sensor networks etc. Tuneable Film Bulk Acoustic Wave Resonators discusses FBAR need, physics, designs, modelling, fabrication and applications. Tuning of the resonant frequency of the FBARs is considered. Switchable and tuneable FBARs based on electric field induced piezoelectric effect in paraelectric phase ferroelectrics are covered. The resonance of these resonators may be electrically switched on and off and tuned without hysteresis. The book is aimed at microwave and sensor specialists in the industry and graduate students. Readers will learn about principles of operation and possibilities of the switchable and tuneable FBARs, and will be given general guidelines for designing, fabrication and applications of these devices.
Book Synopsis Innovations in Army Energy and Power Materials Technologies by : Edward C. Shaffer
Download or read book Innovations in Army Energy and Power Materials Technologies written by Edward C. Shaffer and published by Materials Research Forum LLC. This book was released on 2018-09-20 with total page 728 pages. Available in PDF, EPUB and Kindle. Book excerpt: This compendium reports fundamental science and engineering advances of the US Army Research Labratory (ARL) within the area of Energy and Power technologies. Although, in general, ARL's Materials Research encompasses a broad range of materials technologies (e.g.: Photonics, Electronics, Biological and Bio-inspired Materials, Structural Materials, High Strain and Ballistic Materials, and Manufacturing Science), this publication specifically addresses selected energy and power material related work at ARL. While this work includes electrochemical energy storage (batteries and capacitors) and electrochemical energy conversion (fuel cells, photoelectrochemistry, and photochemistry), special emphasis is given on electrochemical energy storage: • Micro Electro-Mechanical Systems (MEMS): Power density, efficiency, and robustness of motors, generators, and actuators while also reducing their life cycle costs. • Energy Storage: Electrical and electrochemical energy storage devices to decrease device size, weight, and cost as well as increase their capabilities in extreme temperatures and operating conditions. • Power Control and Distribution: Tactical, deployable power systems using conventional fuels, alternative fuels, and energy harvested from renewable/ambient sources. • Power Generation/Energy Conversion: Smart energy networks for platforms, forward operating bases, and facilities using modeling and simulation tools as well as new, greater capability and efficiency components. • Thermal Transport and Control: Heat and higher power density systems, advanced components, system modeling, and adaptive or hybrid-cycle technologies. Keywords: Electrochemical Energy Storage, Batteries, Capacitors, Electrochemical Energy Conversion, Fuel Cells, Photoelectrochemistry, Photochemistry, High Voltage Electrolytes, Li-ion Batteries, Li-ion Chemistry, Lithium–Sulphur Batteries, Nuclear Metastables, Pyroelectric Energy Conversion, Charged Quantum Dots, High-Efficiency Photovoltaics, IR Sensing, GaN Power Schottky Diodes, Threshold-Voltage Instability, Reliability Testing, SiC MOSFETs, Power Electronics Packaging, High Voltage 4H-SiC GTOs, Silicon Carbide, Avalanche Breakdown Diode, SiC PiN Diodes, Thyristor Protection, Compact DC-DC Battery Chargers
Book Synopsis Field-Coupled Nanocomputing by : Neal G. Anderson
Download or read book Field-Coupled Nanocomputing written by Neal G. Anderson and published by Springer. This book was released on 2014-05-31 with total page 395 pages. Available in PDF, EPUB and Kindle. Book excerpt: Field-coupled nanocomputing (FCN) paradigms offer fundamentally new approaches to digital information processing that do not utilize transistors or require charge transport. Information transfer and computation are achieved in FCN via local field interactions between nanoscale building blocks that are organized in patterned arrays. Several FCN paradigms are currently under active investigation, including quantum-dot cellular automata (QCA), molecular quantum cellular automata (MQCA), nanomagnetic logic (NML), and atomic quantum cellular automata (AQCA). Each of these paradigms has a number of unique features that make it attractive as a candidate for post-CMOS nanocomputing, and each faces critical challenges to realization. This State-of-the-Art-Survey provides a snapshot of the current developments and novel research directions in the area of FCN. The book is divided into five sections. The first part, Field-Coupled Nanocomputing Paradigms, provides valuable background information and perspectives on the QDCA, MQCA, NML, and AQCA paradigms and their evolution. The second section, Circuits and Architectures, addresses a wide variety of current research on FCN clocking strategies, logic synthesis, circuit design and test, logic-in-memory, hardware security, and architecture. The third section, Modeling and Simulation, considers the theoretical modeling and computer simulation of large FCN circuits, as well as the use of simulations for gleaning physical insight into elementary FCN building blocks. The fourth section, Irreversibility and Dissipation, considers the dissipative consequences of irreversible information loss in FCN circuits, their quantification, and their connection to circuit structure. The fifth section, The Road Ahead: Opportunities and Challenges, includes an edited transcript of the panel discussion that concluded the FCN 13 workshop.
Book Synopsis Advanced MEMS/NEMS Fabrication and Sensors by : Zhuoqing Yang
Download or read book Advanced MEMS/NEMS Fabrication and Sensors written by Zhuoqing Yang and published by Springer Nature. This book was released on 2021-10-12 with total page 312 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book begins by introducing new and unique fabrication, micromachining, and integration manufacturing methods for MEMS (Micro-Electro-Mechanical Systems) and NEMS (Nano-Electro-Mechanical Systems) devices, as well as novel nanomaterials for sensor fabrications. The second section focuses on novel sensors based on these emerging MEMS/NEMS fabrication methods, and their related applications in industrial, biomedical, and environmental monitoring fields, which makes up the sensing layer (or perception layer) in IoT architecture. This authoritative guide offers graduate students, postgraduates, researchers, and practicing engineers with state-of-the-art processes and cutting-edge technologies on MEMS /NEMS, micro- and nanomachining, and microsensors, addressing progress in the field and prospects for future development. Presents latest international research on MEMS/NEMS fabrication technologies and novel micro/nano sensors; Covers a broad spectrum of sensor applications; Written by leading experts in the field.
Book Synopsis Capacitive Silicon Resonators by : Nguyen Van Toan
Download or read book Capacitive Silicon Resonators written by Nguyen Van Toan and published by CRC Press. This book was released on 2019-07-10 with total page 159 pages. Available in PDF, EPUB and Kindle. Book excerpt: Microfabricated resonators play an essential role in a variety of applications, including mass sensing, timing reference applications, and filtering applications. Many transduction mechanisms including piezoelectric, piezoresistive, and capacitive mechanisms, have been studied to induce and detect the motion of resonators. This book is meant to introduce and suggest several technological approaches together with design considerations for performance enhancement of capacitive silicon resonators, and will be useful for those working in field of micro and nanotechnology. Features Introduces and suggests several technological approaches together with design considerations for performance enhancement of capacitive silicon resonators Provides information on the various fabrication technologies and design considerations that can be employed to improve the performance capacitive silicon resonator which is one of the promising options to replace the quartz crystal resonator. Discusses several technological approaches including hermetic packaging based on the LTCC substrate, deep reactive ion etching, neutral beam etching technology, and metal-assisted chemical etching, as well as design considerations for mechanically coupled, selective vibration of high-order mode, movable electrode structures, and piezoresistive heat engines were investigated to achieve small motional resistance, low insertion loss, and high quality factor. Focusses on a capacitive sensing method based on the measurement of the change in capacitance between a sensing electrode and the resonant body. Reviews recent progress in performance enhancement methods for capacitive silicon resonator, which are mainly based on the works of the authors.
Book Synopsis Multilayer Integrated Film Bulk Acoustic Resonators by : Yafei Zhang
Download or read book Multilayer Integrated Film Bulk Acoustic Resonators written by Yafei Zhang and published by Springer Science & Business Media. This book was released on 2012-08-28 with total page 159 pages. Available in PDF, EPUB and Kindle. Book excerpt: Mulilayer Integrated Film Bulk Acoustic Resonators mainly introduces the theory, design, fabrication technology and application of a recently developed new type of device, multilayer integrated film bulk acoustic resonators, at the micro and nano scale involving microelectronic devices, integrated circuits, optical devices, sensors and actuators, acoustic resonators, micro-nano manufacturing, multilayer integration, device theory and design principles, etc. These devices can work at very high frequencies by using the newly developed theory, design, and fabrication technology of nano and micro devices. Readers in fields of IC, electronic devices, sensors, materials, and films etc. will benefit from this book by learning the detailed fundamentals and potential applications of these advanced devices. Prof. Yafei Zhang is the director of the Ministry of Education’s Key Laboratory for Thin Films and Microfabrication Technology, PRC; Dr. Da Chen was a PhD student in Prof. Yafei Zhang’s research group.
