2017 Ieee 12th International Conference On Nano Micro Engineered And Molecular Systems Nems

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Intelligent Robotics and Applications

Author : Huayong Yang
Publisher : Springer Nature
ISBN 13 : 9819965012
Total Pages : 613 pages
Book Rating : 4.8/5 (199 download)

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Book Synopsis Intelligent Robotics and Applications by : Huayong Yang

Download or read book Intelligent Robotics and Applications written by Huayong Yang and published by Springer Nature. This book was released on 2023-11-13 with total page 613 pages. Available in PDF, EPUB and Kindle. Book excerpt: The 9-volume set LNAI 14267-14275 constitutes the proceedings of the 16th International Conference on Intelligent Robotics and Applications, ICIRA 2023, which took place in Hangzhou, China, during July 5–7, 2023. The 413 papers included in these proceedings were carefully reviewed and selected from 630 submissions. They were organized in topical sections as follows: Part I: Human-Centric Technologies for Seamless Human-Robot Collaboration; Multimodal Collaborative Perception and Fusion; Intelligent Robot Perception in Unknown Environments; Vision-Based Human Robot Interaction and Application. Part II: Vision-Based Human Robot Interaction and Application; Reliable AI on Machine Human Reactions; Wearable Sensors and Robots; Wearable Robots for Assistance, Augmentation and Rehabilitation of Human Movements; Perception and Manipulation of Dexterous Hand for Humanoid Robot. Part III: Perception and Manipulation of Dexterous Hand for Humanoid Robot; Medical Imaging for Biomedical Robotics; Advanced Underwater Robot Technologies; Innovative Design and Performance Evaluation of Robot Mechanisms; Evaluation of Wearable Robots for Assistance and Rehabilitation; 3D Printing Soft Robots. Part IV: 3D Printing Soft Robots; Dielectric Elastomer Actuators for Soft Robotics; Human-like Locomotion and Manipulation; Pattern Recognition and Machine Learning for Smart Robots. Part V: Pattern Recognition and Machine Learning for Smart Robots; Robotic Tactile Sensation, Perception, and Applications; Advanced Sensing and Control Technology for Human-Robot Interaction; Knowledge-Based Robot Decision-Making and Manipulation; Design and Control of Legged Robots. Part VI: Design and Control of Legged Robots; Robots in Tunnelling and Underground Space; Robotic Machining of Complex Components; Clinically Oriented Design in Robotic Surgery and Rehabilitation; Visual and Visual-Tactile Perception for Robotics. Part VII: Visual and Visual-Tactile Perception for Robotics; Perception, Interaction, and Control of Wearable Robots; Marine Robotics and Applications; Multi-Robot Systems for Real World Applications; Physical and Neurological Human-Robot Interaction. Part VIII: Physical and Neurological Human-Robot Interaction; Advanced Motion Control Technologies for Mobile Robots; Intelligent Inspection Robotics; Robotics in Sustainable Manufacturing for Carbon Neutrality; Innovative Design and Performance Evaluation of Robot Mechanisms. Part IX: Innovative Design and Performance Evaluation of Robot Mechanisms; Cutting-Edge Research in Robotics.

Design Tools and Methods in Industrial Engineering

Author : Caterina Rizzi
Publisher : Springer Nature
ISBN 13 : 3030311546
Total Pages : 989 pages
Book Rating : 4.0/5 (33 download)

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Book Synopsis Design Tools and Methods in Industrial Engineering by : Caterina Rizzi

Download or read book Design Tools and Methods in Industrial Engineering written by Caterina Rizzi and published by Springer Nature. This book was released on 2019-09-19 with total page 989 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book reports on cutting-edge design methods and tools in industrial engineering, advanced findings in mechanics and material science, and relevant technological applications. Topics span from geometric modelling tools to applications of virtual/augmented reality, from interactive design to ergonomics, human factors research and reverse engineering. Further topics include integrated design and optimization methods, as well as experimental validation techniques for product, processes and systems development, such as additive manufacturing technologies. This book is based on the International Conference on Design Tools and Methods in Industrial Engineering, ADM 2019, held on September 9–10, 2019, in Modena, Italy, and organized by the Italian Association of Design Methods and Tools for Industrial Engineering, and the Department of Engineering “Enzo Ferrari” of the University of Modena and Reggio Emilia, Italy. It provides academics and professionals with a timely overview and extensive information on trends and technologies in industrial design and manufacturing.

MEMS Accelerometers

Author : Mahmoud Rasras
Publisher : MDPI
ISBN 13 : 3038974145
Total Pages : 252 pages
Book Rating : 4.0/5 (389 download)

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Book Synopsis MEMS Accelerometers by : Mahmoud Rasras

Download or read book MEMS Accelerometers written by Mahmoud Rasras and published by MDPI. This book was released on 2019-05-27 with total page 252 pages. Available in PDF, EPUB and Kindle. Book excerpt: Micro-electro-mechanical system (MEMS) devices are widely used for inertia, pressure, and ultrasound sensing applications. Research on integrated MEMS technology has undergone extensive development driven by the requirements of a compact footprint, low cost, and increased functionality. Accelerometers are among the most widely used sensors implemented in MEMS technology. MEMS accelerometers are showing a growing presence in almost all industries ranging from automotive to medical. A traditional MEMS accelerometer employs a proof mass suspended to springs, which displaces in response to an external acceleration. A single proof mass can be used for one- or multi-axis sensing. A variety of transduction mechanisms have been used to detect the displacement. They include capacitive, piezoelectric, thermal, tunneling, and optical mechanisms. Capacitive accelerometers are widely used due to their DC measurement interface, thermal stability, reliability, and low cost. However, they are sensitive to electromagnetic field interferences and have poor performance for high-end applications (e.g., precise attitude control for the satellite). Over the past three decades, steady progress has been made in the area of optical accelerometers for high-performance and high-sensitivity applications but several challenges are still to be tackled by researchers and engineers to fully realize opto-mechanical accelerometers, such as chip-scale integration, scaling, low bandwidth, etc. This Special Issue on "MEMS Accelerometers" seeks to highlight research papers, short communications, and review articles that focus on: Novel designs, fabrication platforms, characterization, optimization, and modeling of MEMS accelerometers. Alternative transduction techniques with special emphasis on opto-mechanical sensing. Novel applications employing MEMS accelerometers for consumer electronics, industries, medicine, entertainment, navigation, etc. Multi-physics design tools and methodologies, including MEMS-electronics co-design. Novel accelerometer technologies and 9DoF IMU integration. Multi-accelerometer platforms and their data fusion.

New Materials and Devices Enabling 5G Applications and Beyond

Author : Nadine Collaert
Publisher : Elsevier
ISBN 13 : 0128234504
Total Pages : 369 pages
Book Rating : 4.1/5 (282 download)

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Book Synopsis New Materials and Devices Enabling 5G Applications and Beyond by : Nadine Collaert

Download or read book New Materials and Devices Enabling 5G Applications and Beyond written by Nadine Collaert and published by Elsevier. This book was released on 2024-01-24 with total page 369 pages. Available in PDF, EPUB and Kindle. Book excerpt: New Materials and Devices for 5G Applications and Beyond focuses on the materials, device architectures and enabling integration schemes for 5G applications and emerging technologies. It gives a comprehensive overview of the trade-offs, challenges and unique properties of novel upcoming technologies. Starting from the application side and its requirements, the book examines different technologies under consideration for the different functions, both more conventional to exploratory, and within this context the book provides guidance to the reader on how to possibly optimize the system for a particular application. This book aims at guiding the reader through the technologies required to enable 5G applications, with the main focus on mm-wave frequencies, up to THz. New Materials and Devises for 5G Applications and Beyond is suitable for industrial researchers and development engineers, and researchers in materials science, device engineering and circuit design. - Reviews challenges and emerging opportunities for materials, devices, and integration to enable 5G technologies - Includes discussion of technologies such as RF-MEMs, RF FINFETs, and transistors based on current and emerging materials (InP, GaN, etc.) - Focuses on mm-wave frequencies up to the terahertz regime

Implantable Microdevices

Author : Wen Li
Publisher : MDPI
ISBN 13 : 3039216600
Total Pages : 134 pages
Book Rating : 4.0/5 (392 download)

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Book Synopsis Implantable Microdevices by : Wen Li

Download or read book Implantable Microdevices written by Wen Li and published by MDPI. This book was released on 2019-10-23 with total page 134 pages. Available in PDF, EPUB and Kindle. Book excerpt: Implantable microdevices, providing accurate measurement of target analytes in animals and humans, have always been important in biological science, medical diagnostics, clinical therapy, and personal healthcare. Recently, there have been increasing unmet needs for developing high-performance implants that are small, minimally-invasive, biocompatible, long-term stable, and cost-effective. Therefore, the aim of this Special Issue is to bring together state-of-the-art research and development contributions that address key challenges and topics related to implantable microdevices. Applications of primary interest include, but are not limited to, miniaturized optical sensing and imaging tools, implantable sensors for detecting biochemical species and/or metabolites, transducers for measuring biophysical quantities (e.g., pressure and/or strain), and neural prosthetic devices.

Proceedings of XXIV AIMETA Conference 2019

Author : Antonio Carcaterra
Publisher : Springer Nature
ISBN 13 : 3030410579
Total Pages : 2200 pages
Book Rating : 4.0/5 (34 download)

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Book Synopsis Proceedings of XXIV AIMETA Conference 2019 by : Antonio Carcaterra

Download or read book Proceedings of XXIV AIMETA Conference 2019 written by Antonio Carcaterra and published by Springer Nature. This book was released on 2020-03-31 with total page 2200 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book gathers the peer-reviewed papers presented at the XXIV Conference of the Italian Association of Theoretical and Applied Mechanics, held in Rome, Italy, on September 15-19, 2019 (AIMETA 2019). The conference topics encompass all aspects of general, fluid, solid and structural mechanics, as well as mechanics for machines and mechanical systems, including theoretical, computational and experimental techniques and technological applications. As such the book represents an invaluable, up-to-the-minute tool, providing an essential overview of the most recent advances in the field.

Micromanipulation

Author : Nicola Pio Belfiore
Publisher : MDPI
ISBN 13 : 3038975036
Total Pages : 201 pages
Book Rating : 4.0/5 (389 download)

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Book Synopsis Micromanipulation by : Nicola Pio Belfiore

Download or read book Micromanipulation written by Nicola Pio Belfiore and published by MDPI. This book was released on 2019-01-10 with total page 201 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book is a printed edition of the Special Issue "Micromanipulation" that was published in Actuators

Handbook of Carbon Nanotubes

Author : Jiji Abraham
Publisher : Springer Nature
ISBN 13 : 3030913465
Total Pages : 2099 pages
Book Rating : 4.0/5 (39 download)

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Book Synopsis Handbook of Carbon Nanotubes by : Jiji Abraham

Download or read book Handbook of Carbon Nanotubes written by Jiji Abraham and published by Springer Nature. This book was released on 2022-11-16 with total page 2099 pages. Available in PDF, EPUB and Kindle. Book excerpt: This Handbook covers the fundamentals of carbon nanotubes (CNT), their composites with different polymeric materials (both natural and synthetic) and their potential advanced applications. Three different parts dedicated to each of these aspects are provided, with chapters written by worldwide experts in the field. It provides in-depth information about this material serving as a reference book for a broad range of scientists, industrial practitioners, graduate and undergraduate students, and other professionals in the fields of polymer science and engineering, materials science, surface science, bioengineering and chemical engineering. Part 1 comprises 22 chapters covering early stages of the development of CNT, synthesis techniques, growth mechanism, the physics and chemistry of CNT, various innovative characterization techniques, the need of functionalization and different types of functionalization methods as well as the different properties of CNT. A full chapter is devoted to theory and simulation aspects. Moreover, it pursues a significant amount of work on life cycle analysis of CNT and toxicity aspects. Part 2 covers CNT-based polymer nanocomposites in approximately 23 chapters. It starts with a short introduction about polymer nanocomposites with special emphasis on CNT-based polymer nanocomposites, different manufacturing techniques as well as critical issues concerning CNT-based polymer nanocomposites. The text deeply reviews various classes of polymers like thermoset, elastomer, latex, amorphous thermoplastic, crystalline thermoplastic and polymer fibers used to prepare CNT based polymer composites. It provides detailed awareness about the characterization of polymer composites. The morphological, rheological, mechanical, viscoelastic, thermal, electrical, electromagnetic shielding properties are discussed in detail. A chapter dedicated to the simulation and multiscale modelling of polymer nanocomposites is an additional attraction of this part of the Handbook. Part 3 covers various potential applications of CNT in approximately 27 chapters. It focuses on individual applications of CNT including mechanical applications, energy conversion and storage applications, fuel cells and water splitting, solar cells and photovoltaics, sensing applications, nanofluidics, nanoelectronics and microelectronic devices, nano-optics, nanophotonics and nano-optoelectronics, non-linear optical applications, piezo electric applications, agriculture applications, biomedical applications, thermal materials, environmental remediation applications, anti-microbial and antibacterial properties and other miscellaneous applications and multi-functional applications of CNT based polymer nanocomposites. One chapter is fully focussed on carbon nanotube research developments: published papers and patents. Risks associated with carbon nanotubes and competitive analysis of carbon nanotubes with other carbon allotropes are also addressed in this Handbook.

ICDSMLA 2021

Author : Amit Kumar
Publisher : Springer Nature
ISBN 13 : 9811959366
Total Pages : 875 pages
Book Rating : 4.8/5 (119 download)

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Book Synopsis ICDSMLA 2021 by : Amit Kumar

Download or read book ICDSMLA 2021 written by Amit Kumar and published by Springer Nature. This book was released on 2023-02-06 with total page 875 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book gathers selected high-impact articles from the 3rd International Conference on Data Science, Machine Learning & Applications 2021. It highlights the latest developments in the areas of artificial intelligence, machine learning, soft computing, human–computer interaction and various data science and machine learning applications. It brings together scientists and researchers from different universities and industries around the world to showcase a broad range of perspectives, practices and technical expertise.

Nanodevices for Integrated Circuit Design

Author : Suman Lata Tripathi
Publisher : John Wiley & Sons
ISBN 13 : 1394186371
Total Pages : 273 pages
Book Rating : 4.3/5 (941 download)

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Book Synopsis Nanodevices for Integrated Circuit Design by : Suman Lata Tripathi

Download or read book Nanodevices for Integrated Circuit Design written by Suman Lata Tripathi and published by John Wiley & Sons. This book was released on 2023-10-18 with total page 273 pages. Available in PDF, EPUB and Kindle. Book excerpt: NANODEVICES FOR INTEGRATED CIRCUIT DESIGN Nanodevices are an integral part of many of the technologies that we use every day. It is a constantly changing and evolving area, with new materials, processes, and applications coming online almost daily. Increasing demand for smart and intelligent devices in human life with better sensing, communication and signal processing is increasingly pushing researchers and designers towards future design challenges based upon internet-of-things (IoT) applications. Several types of research have been done at the level of solid-state devices, circuits, and materials to optimize system performance with low power consumption. For suitable IoT-based systems, there are some key areas, such as the design of energy storage devices, energy harvesters, novel low power high-speed devices, and circuits. Uses of new materials for different purposes, such as semiconductors, metals, and insulators in different parts of devices, circuits, and energy sources, also play a significant role in smart applications of such systems. Emerging techniques like machine learning and artificial intelligence are also becoming a part of the latest developments in an electronic device and circuit design. This groundbreaking new book will, among other things, aid developing countries in updating their semiconductor industries in terms of IC design and manufacturing to avoid dependency on other countries. Likewise, as an introduction to the area for the new-hire or student, and as a reference for the veteran engineer in the field, it will be helpful for more developed countries in their pursuit of better IC design. It is a must have for any engineer, scientist, or other industry professional working in this area.

MEMS Sensors and Resonators

Author : Frederic Nabki
Publisher : MDPI
ISBN 13 : 3039288652
Total Pages : 164 pages
Book Rating : 4.0/5 (392 download)

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Book Synopsis MEMS Sensors and Resonators by : Frederic Nabki

Download or read book MEMS Sensors and Resonators written by Frederic Nabki and published by MDPI. This book was released on 2020-05-27 with total page 164 pages. Available in PDF, EPUB and Kindle. Book excerpt: Microelectromechanical systems (MEMS) have had a profound impact on a wide range of applications. The degree of miniaturization made possible by MEMS technology has significantly improved the functionalities of many systems, and the performance of MEMS has steadily improved as its uses augment. Notably, MEMS sensors have been prevalent in motion sensing applications for decades, and the sensing mechanisms leveraged by MEMS have been continuously extended to applications spanning the detection of gases, magnetic fields, electromagnetic radiation, and more. In parallel, MEMS resonators have become an emerging field of MEMS and affected subfields such as electronic timing and filtering, and energy harvesting. They have, in addition, enabled a wide range of resonant sensors. For many years now, MEMS have been the basis of various industrial successes, often building on novel academic research. Accordingly, this Special Issue explores many research innovations in MEMS sensors and resonators, from biomedical applications to energy harvesting, gas sensing, resonant sensing, and timing.

Applications of Power Electronics

Author : Frede Blaabjerg
Publisher : MDPI
ISBN 13 : 3039210203
Total Pages : 500 pages
Book Rating : 4.0/5 (392 download)

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Book Synopsis Applications of Power Electronics by : Frede Blaabjerg

Download or read book Applications of Power Electronics written by Frede Blaabjerg and published by MDPI. This book was released on 2019-06-24 with total page 500 pages. Available in PDF, EPUB and Kindle. Book excerpt: Power electronics technology is still an emerging technology, and it has found its way into many applications, from renewable energy generation (i.e., wind power and solar power) to electrical vehicles (EVs), biomedical devices, and small appliances, such as laptop chargers. In the near future, electrical energy will be provided and handled by power electronics and consumed through power electronics; this not only will intensify the role of power electronics technology in power conversion processes, but also implies that power systems are undergoing a paradigm shift, from centralized distribution to distributed generation. Today, more than 1000 GW of renewable energy generation sources (photovoltaic (PV) and wind) have been installed, all of which are handled by power electronics technology. The main aim of this book is to highlight and address recent breakthroughs in the range of emerging applications in power electronics and in harmonic and electromagnetic interference (EMI) issues at device and system levels as discussed in ‎robust and reliable power electronics technologies, including fault prognosis and diagnosis technique stability of grid-connected converters and ‎smart control of power electronics in devices, microgrids, and at system levels.

MEMS and NEMS

Author : Sergey Edward Lyshevski
Publisher : CRC Press
ISBN 13 : 1420040510
Total Pages : 461 pages
Book Rating : 4.4/5 (2 download)

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Book Synopsis MEMS and NEMS by : Sergey Edward Lyshevski

Download or read book MEMS and NEMS written by Sergey Edward Lyshevski and published by CRC Press. This book was released on 2018-10-03 with total page 461 pages. Available in PDF, EPUB and Kindle. Book excerpt: The development of micro- and nano-mechanical systems (MEMS and NEMS) foreshadows momentous changes not only in the technological world, but in virtually every aspect of human life. The future of the field is bright with opportunities, but also riddled with challenges, ranging from further theoretical development through advances in fabrication technologies, to developing high-performance nano- and microscale systems, devices, and structures, including transducers, switches, logic gates, actuators and sensors. MEMS and NEMS: Systems, Devices, and Structures is designed to help you meet those challenges and solve fundamental, experimental, and applied problems. Written from a multi-disciplinary perspective, this book forms the basis for the synthesis, modeling, analysis, simulation, control, prototyping, and fabrication of MEMS and NEMS. The author brings together the various paradigms, methods, and technologies associated with MEMS and NEMS to show how to synthesize, analyze, design, and fabricate them. Focusing on the basics, he illustrates the development of NEMS and MEMS architectures, physical representations, structural synthesis, and optimization. The applications of MEMS and NEMS in areas such as biotechnology, medicine, avionics, transportation, and defense are virtually limitless. This book helps prepare you to take advantage of their inherent opportunities and effectively solve problems related to their configurations, systems integration, and control.

2013 8th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)

Author : IEEE Staff
Publisher :
ISBN 13 : 9781467363501
Total Pages : pages
Book Rating : 4.3/5 (635 download)

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Book Synopsis 2013 8th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) by : IEEE Staff

Download or read book 2013 8th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) written by IEEE Staff and published by . This book was released on 2013-04-07 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:

4th International Conference on Internet of Things and Connected Technologies (ICIoTCT), 2019

Author : Neeta Nain
Publisher : Springer Nature
ISBN 13 : 3030398757
Total Pages : 398 pages
Book Rating : 4.0/5 (33 download)

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Book Synopsis 4th International Conference on Internet of Things and Connected Technologies (ICIoTCT), 2019 by : Neeta Nain

Download or read book 4th International Conference on Internet of Things and Connected Technologies (ICIoTCT), 2019 written by Neeta Nain and published by Springer Nature. This book was released on 2020-02-14 with total page 398 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book presents the proceedings of the 4th International Conference on Internet of Things and Connected Technologies (ICIoTCT), held on May 9–10, 2019, at Malaviya National Institute of Technology (MNIT), Jaipur, India. The Internet of Things (IoT) promises to usher in a revolutionary, fully interconnected “smart” world, with relationships between objects and their environment and objects and people becoming more tightly intertwined. The prospect of the Internet of Things as a ubiquitous array of devices bound to the Internet could fundamentally change how people think about what it means to be “online”. The ICIotCT 2019 conference provided a platform to discuss advances in Internet of Things (IoT) and connected technologies, such as various protocols and standards. It also offered participants the opportunity to interact with experts through keynote talks, paper presentations and discussions, and as such stimulated research. With the recent adoption of a variety of enabling wireless communication technologies, like RFID tags, BLE, ZigBee, embedded sensor and actuator nodes, and various protocols such as CoAP, MQTT and DNS, IoT has moved on from its infancy. Today smart sensors can collaborate directly with machines to automate decision-making or to control a task without human involvement. Further, smart technologies, including green electronics, green radios, fuzzy neural approaches, and intelligent signal processing techniques play an important role in the development of the wearable healthcare devices.

Intelligent Wearable Interfaces

Author : Yang Xu
Publisher : John Wiley & Sons
ISBN 13 : 0470222859
Total Pages : 226 pages
Book Rating : 4.4/5 (72 download)

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Book Synopsis Intelligent Wearable Interfaces by : Yang Xu

Download or read book Intelligent Wearable Interfaces written by Yang Xu and published by John Wiley & Sons. This book was released on 2008-02-04 with total page 226 pages. Available in PDF, EPUB and Kindle. Book excerpt: A thorough introduction to the development and applications of intelligent wearable interfaces As mobile computing, sensing technology, and artificial intelligence become more advanced and their applications more widespread, the area of intelligent wearable interfaces is growing in importance. This emerging form of human-machine interaction has infinite possibilities for enhancing humans' capabilities in communications, actions, monitoring, and control. Intelligent Wearable Interfaces is a collection of the efforts the authors have made in this area at The Chinese University of Hong Kong. They introduce methodologies to develop a variety of intelligent wearable interfaces and cover practical implementations of systems for real-life applications. A number of novel intelligent wearable interface systems are examined, including: Network architecture for wearable robots Wearable interface for automatic language translation Intelligent cap interface for wheelchair control Intelligent shoes for human-computer interface Fingertip human-computer interface Ubiquitous 3D digital writing instrument Intelligent mobile human airbag system This book is a valuable reference for researchers, designers, engineers, and upper-level undergraduate and graduate students in the fields of human-machine interactions,rehabilitation engineering, robotics, and artificial intelligence.

3D and Circuit Integration of MEMS

Author : Masayoshi Esashi
Publisher : John Wiley & Sons
ISBN 13 : 3527823255
Total Pages : 528 pages
Book Rating : 4.5/5 (278 download)

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Book Synopsis 3D and Circuit Integration of MEMS by : Masayoshi Esashi

Download or read book 3D and Circuit Integration of MEMS written by Masayoshi Esashi and published by John Wiley & Sons. This book was released on 2021-03-16 with total page 528 pages. Available in PDF, EPUB and Kindle. Book excerpt: Explore heterogeneous circuit integration and the packaging needed for practical applications of microsystems MEMS and system integration are important building blocks for the “More-Than-Moore” paradigm described in the International Technology Roadmap for Semiconductors. And, in 3D and Circuit Integration of MEMS, distinguished editor Dr. Masayoshi Esashi delivers a comprehensive and systematic exploration of the technologies for microsystem packaging and heterogeneous integration. The book focuses on the silicon MEMS that have been used extensively and the technologies surrounding system integration. You’ll learn about topics as varied as bulk micromachining, surface micromachining, CMOS-MEMS, wafer interconnection, wafer bonding, and sealing. Highly relevant for researchers involved in microsystem technologies, the book is also ideal for anyone working in the microsystems industry. It demonstrates the key technologies that will assist researchers and professionals deal with current and future application bottlenecks. Readers will also benefit from the inclusion of: A thorough introduction to enhanced bulk micromachining on MIS process, including pressure sensor fabrication and the extension of MIS process for various advanced MEMS devices An exploration of epitaxial poly Si surface micromachining, including process condition of epi-poly Si, and MEMS devices using epi-poly Si Practical discussions of Poly SiGe surface micromachining, including SiGe deposition and LP CVD polycrystalline SiGe A concise treatment of heterogeneously integrated aluminum nitride MEMS resonators and filters Perfect for materials scientists, electronics engineers, and electrical and mechanical engineers, 3D and Circuit Integration of MEMS will also earn a place in the libraries of semiconductor physicists seeking a one-stop reference for circuit integration and the practical application of microsystems.