Understanding The Complex Chemistry Of Fluorocarbon Plasmas In A Long Residence Time Icp Reactor

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Understanding the Complex Chemistry of Fluorocarbon Plasmas in a Long Residence Time ICP Reactor

Author : Sanket Prakash Sant
Publisher :
ISBN 13 :
Total Pages : 374 pages
Book Rating : 4.:/5 (81 download)

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Book Synopsis Understanding the Complex Chemistry of Fluorocarbon Plasmas in a Long Residence Time ICP Reactor by : Sanket Prakash Sant

Download or read book Understanding the Complex Chemistry of Fluorocarbon Plasmas in a Long Residence Time ICP Reactor written by Sanket Prakash Sant and published by . This book was released on 2006 with total page 374 pages. Available in PDF, EPUB and Kindle. Book excerpt: The motivation behind this research is to understand the influence of plasma surface interactions on the gas phase chemistry and surface kinetics of polymerizing fluorocarbon plasmas. In order to achieve this, a modified GEC reference ICP reactor is used with in situ diagnostic tools like multipass Fourier transformed infrared (FTIR) spectroscopy, optical emission spectroscopy (OES) used in an actinometry mode, ellipsometry and self bias probe. A long residence time of 5.2 s was employed to maximize plasma surface interactions and electron impact collisions. This research is divided into three interdependent sections. In the first section a global gas phase model illustrating the gain and loss mechanisms of different fluorocarbon radicals and neutrals qualitatively and quantitatively as a function of source to chuck gap and feed gas stoichiometry has been developed. No bias is applied in that study. An upper bound translational temperature model is also developed. In the second section, a global model describing deposition and etch mechanisms has been developed which is further used to understand surface kinetics on SiO 2 substrate as a function of ion energy, ion flux and feed gas stoichiometry. Influence of surface kinetics on gas phase chemistry of different neutrals and radicals is shown at two different bias powers (0 and 200 W). In the third section, upper bound sticking coefficients for different radicals are developed on the surface. Collectively, this research is an effort to understand the interdependence between gas phase chemistry and surface kinetics in a long residence time fluorocarbon inductively coupled plasma.

Dissertation Abstracts International

Author :
Publisher :
ISBN 13 :
Total Pages : 902 pages
Book Rating : 4.F/5 ( download)

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Book Synopsis Dissertation Abstracts International by :

Download or read book Dissertation Abstracts International written by and published by . This book was released on 2007 with total page 902 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Gain and Loss Mechanisms in Fluorocarbon Plasmas

Author : Caleb Timothy Nelson
Publisher :
ISBN 13 :
Total Pages : 286 pages
Book Rating : 4.:/5 (695 download)

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Book Synopsis Gain and Loss Mechanisms in Fluorocarbon Plasmas by : Caleb Timothy Nelson

Download or read book Gain and Loss Mechanisms in Fluorocarbon Plasmas written by Caleb Timothy Nelson and published by . This book was released on 2010 with total page 286 pages. Available in PDF, EPUB and Kindle. Book excerpt: Understanding dominant reaction channels for important gas-phase species in fluorocarbon plasmas is crucial to the ability to control surface evolution and morphology. In order to accomplish this goal a modified GEC reference ICP reactor is used in tandem with Fourier transform infrared spectroscopy (FTIR) to measure the densities of stable species. Integrated absorption cross-sections are presented for all fundamental bands in the 650 cm -1 to 2000 cm -1 region for C 3 F 6 , C 4 F 8 , C 3 F 8 , C 2 F 6 , C 2 F 4 , and CF 4 . The results show that although the absorption profile changes significantly, the integrated absorption cross-sections, with the exception of CF 4 , do not change significantly as gas temperature increases from 25°C to 200°C. However, the internal temperature of the absorbing species can be estimated from the rotational band maximum in most cases. Species densities obtained with the aforementioned cross-sections are used with a novel analysis technique to quantify gain and loss rates as functions of residence time, pressure, and deposited power. CF 4 , C 2 F 6 , C 3 F 8 , and C 4 F 10 , share related production channels, which increase in magnitude as the plasma pressure, deposited power, or surface temperature are raised. CF 2 is primarily produced through a combination of surface production (the magnitude also increases with temperature) and electron impact dissociation of C 2 F 4 , while it is predominantly lost in the large reactor to gas-phase addition to form C 2 F 4 . Time-resolved FTIR results are used to measure a cross-section of 1.8x10 -14 cm 3 /s for the reaction between CF 2 radicals creating C 2 F 4 . Finally, C 2 F 4 originates through the electron impact dissociation of c- C 4 F 8 . The loss process for C 2 F 4 is undetermined, but the results indicate that it could occur on reactor surfaces. Neither the density of fluorine nor the ion flux to the chuck surface changes substantially with wall temperature. We show that increases in the deposition rate in a heated chamber are due to an increase in the fluxes of depositing neutral species. Furthermore, the sticking coefficient for these species does not change significantly as a function of surface temperature. Instead, surface temperature elevates the yield of etchant species, which terminate broken bonds to increase the desorption rates of stable species.

Principles of Plasma Discharges and Materials Processing

Author : Michael A. Lieberman
Publisher : John Wiley & Sons
ISBN 13 : 0471724246
Total Pages : 795 pages
Book Rating : 4.4/5 (717 download)

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Book Synopsis Principles of Plasma Discharges and Materials Processing by : Michael A. Lieberman

Download or read book Principles of Plasma Discharges and Materials Processing written by Michael A. Lieberman and published by John Wiley & Sons. This book was released on 2005-04-08 with total page 795 pages. Available in PDF, EPUB and Kindle. Book excerpt: A Thorough Update of the Industry Classic on Principles of Plasma Processing The first edition of Principles of Plasma Discharges and Materials Processing, published over a decade ago, was lauded for its complete treatment of both basic plasma physics and industrial plasma processing, quickly becoming the primary reference for students and professionals. The Second Edition has been carefully updated and revised to reflect recent developments in the field and to further clarify the presentation of basic principles. Along with in-depth coverage of the fundamentals of plasma physics and chemistry, the authors apply basic theory to plasma discharges, including calculations of plasma parameters and the scaling of plasma parameters with control parameters. New and expanded topics include: * Updated cross sections * Diffusion and diffusion solutions * Generalized Bohm criteria * Expanded treatment of dc sheaths * Langmuir probes in time-varying fields * Electronegative discharges * Pulsed power discharges * Dual frequency discharges * High-density rf sheaths and ion energy distributions * Hysteresis and instabilities * Helicon discharges * Hollow cathode discharges * Ionized physical vapor deposition * Differential substrate charging With new chapters on dusty plasmas and the kinetic theory of discharges, graduate students and researchers in the field of plasma processing should find this new edition more valuable than ever.

Japanese Journal of Applied Physics

Author :
Publisher :
ISBN 13 :
Total Pages : 714 pages
Book Rating : 4.3/5 (91 download)

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Book Synopsis Japanese Journal of Applied Physics by :

Download or read book Japanese Journal of Applied Physics written by and published by . This book was released on 1999 with total page 714 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Dry Etching Technology for Semiconductors

Author : Kazuo Nojiri
Publisher : Springer
ISBN 13 : 3319102958
Total Pages : 126 pages
Book Rating : 4.3/5 (191 download)

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Book Synopsis Dry Etching Technology for Semiconductors by : Kazuo Nojiri

Download or read book Dry Etching Technology for Semiconductors written by Kazuo Nojiri and published by Springer. This book was released on 2014-10-25 with total page 126 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book is a must-have reference to dry etching technology for semiconductors, which will enable engineers to develop new etching processes for further miniaturization and integration of semiconductor integrated circuits. The author describes the device manufacturing flow, and explains in which part of the flow dry etching is actually used. The content is designed as a practical guide for engineers working at chip makers, equipment suppliers and materials suppliers, and university students studying plasma, focusing on the topics they need most, such as detailed etching processes for each material (Si, SiO2, Metal etc) used in semiconductor devices, etching equipment used in manufacturing fabs, explanation of why a particular plasma source and gas chemistry are used for the etching of each material, and how to develop etching processes. The latest, key technologies are also described, such as 3D IC Etching, Dual Damascene Etching, Low-k Etching, Hi-k/Metal Gate Etching, FinFET Etching, Double Patterning etc.

Lecture Notes on Principles of Plasma Processing

Author : Francis F. Chen
Publisher : Springer Science & Business Media
ISBN 13 : 1461501814
Total Pages : 213 pages
Book Rating : 4.4/5 (615 download)

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Book Synopsis Lecture Notes on Principles of Plasma Processing by : Francis F. Chen

Download or read book Lecture Notes on Principles of Plasma Processing written by Francis F. Chen and published by Springer Science & Business Media. This book was released on 2012-12-06 with total page 213 pages. Available in PDF, EPUB and Kindle. Book excerpt: Plasma processing of semiconductors is an interdisciplinary field requiring knowledge of both plasma physics and chemical engineering. The two authors are experts in each of these fields, and their collaboration results in the merging of these fields with a common terminology. Basic plasma concepts are introduced painlessly to those who have studied undergraduate electromagnetics but have had no previous exposure to plasmas. Unnecessarily detailed derivations are omitted; yet the reader is led to understand in some depth those concepts, such as the structure of sheaths, that are important in the design and operation of plasma processing reactors. Physicists not accustomed to low-temperature plasmas are introduced to chemical kinetics, surface science, and molecular spectroscopy. The material has been condensed to suit a nine-week graduate course, but it is sufficient to bring the reader up to date on current problems such as copper interconnects, low-k and high-k dielectrics, and oxide damage. Students will appreciate the web-style layout with ample color illustrations opposite the text, with ample room for notes. This short book is ideal for new workers in the semiconductor industry who want to be brought up to speed with minimum effort. It is also suitable for Chemical Engineering students studying plasma processing of materials; Engineers, physicists, and technicians entering the semiconductor industry who want a quick overview of the use of plasmas in the industry.

Low Temperature Plasma Technology

Author : Paul K. Chu
Publisher : CRC Press
ISBN 13 : 1466509902
Total Pages : 497 pages
Book Rating : 4.4/5 (665 download)

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Book Synopsis Low Temperature Plasma Technology by : Paul K. Chu

Download or read book Low Temperature Plasma Technology written by Paul K. Chu and published by CRC Press. This book was released on 2013-07-15 with total page 497 pages. Available in PDF, EPUB and Kindle. Book excerpt: Written by a team of pioneering scientists from around the world, Low Temperature Plasma Technology: Methods and Applications brings together recent technological advances and research in the rapidly growing field of low temperature plasmas. The book provides a comprehensive overview of related phenomena such as plasma bullets, plasma penetration into biofilms, discharge-mode transition of atmospheric pressure plasmas, and self-organization of microdischarges. It describes relevant technology and diagnostics, including nanosecond pulsed discharge, cavity ringdown spectroscopy, and laser-induced fluorescence measurement, and explores the increasing research on atmospheric pressure nonequilibrium plasma jets. The authors also discuss how low temperature plasmas are used in the synthesis of nanomaterials, environmental applications, the treatment of biomaterials, and plasma medicine. This book provides a balanced and thorough treatment of the core principles, novel technology and diagnostics, and state-of-the-art applications of low temperature plasmas. It is accessible to scientists and graduate students in low-pressure plasma physics, nanotechnology, plasma medicine, and materials science. The book is also suitable as an advanced reference for senior undergraduate students.

Surface and Thin Film Analysis

Author : Gernot Friedbacher
Publisher : Wiley-VCH
ISBN 13 : 9783527320479
Total Pages : 0 pages
Book Rating : 4.3/5 (24 download)

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Book Synopsis Surface and Thin Film Analysis by : Gernot Friedbacher

Download or read book Surface and Thin Film Analysis written by Gernot Friedbacher and published by Wiley-VCH. This book was released on 2011-06-07 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt: Surveying and comparing all techniques relevant for practical applications in surface and thin film analysis, this second edition of a bestseller is a vital guide to this hot topic in nano- and surface technology. This new book has been revised and updated and is divided into four parts - electron, ion, and photon detection, as well as scanning probe microscopy. New chapters have been added to cover such techniques as SNOM, FIM, atom probe (AP),and sum frequency generation (SFG). Appendices with a summary and comparison of techniques and a list of equipment suppliers make this book a rapid reference for materials scientists, analytical chemists, and those working in the biotechnological industry. From a Review of the First Edition (edited by Bubert and Jenett) "... a useful resource..." (Journal of the American Chemical Society)

Encyclopedia of Microfluidics and Nanofluidics

Author : Dongqing Li
Publisher : Springer Science & Business Media
ISBN 13 : 0387324682
Total Pages : 2242 pages
Book Rating : 4.3/5 (873 download)

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Book Synopsis Encyclopedia of Microfluidics and Nanofluidics by : Dongqing Li

Download or read book Encyclopedia of Microfluidics and Nanofluidics written by Dongqing Li and published by Springer Science & Business Media. This book was released on 2008-08-06 with total page 2242 pages. Available in PDF, EPUB and Kindle. Book excerpt: Covering all aspects of transport phenomena on the nano- and micro-scale, this encyclopedia features over 750 entries in three alphabetically-arranged volumes including the most up-to-date research, insights, and applied techniques across all areas. Coverage includes electrical double-layers, optofluidics, DNC lab-on-a-chip, nanosensors, and more.

Chemical Kinetics and Reaction Dynamics

Author : Santosh K. Upadhyay
Publisher : Springer Science & Business Media
ISBN 13 : 1402045476
Total Pages : 256 pages
Book Rating : 4.4/5 (2 download)

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Book Synopsis Chemical Kinetics and Reaction Dynamics by : Santosh K. Upadhyay

Download or read book Chemical Kinetics and Reaction Dynamics written by Santosh K. Upadhyay and published by Springer Science & Business Media. This book was released on 2007-04-29 with total page 256 pages. Available in PDF, EPUB and Kindle. Book excerpt: Chemical Kinetics and Reaction Dynamics brings together the major facts and theories relating to the rates with which chemical reactions occur from both the macroscopic and microscopic point of view. This book helps the reader achieve a thorough understanding of the principles of chemical kinetics and includes: Detailed stereochemical discussions of reaction steps Classical theory based calculations of state-to-state rate constants A collection of matters on kinetics of various special reactions such as micellar catalysis, phase transfer catalysis, inhibition processes, oscillatory reactions, solid-state reactions, and polymerization reactions at a single source. The growth of the chemical industry greatly depends on the application of chemical kinetics, catalysts and catalytic processes. This volume is therefore an invaluable resource for all academics, industrial researchers and students interested in kinetics, molecular reaction dynamics, and the mechanisms of chemical reactions.

Plasma Catalysis

Author : Annemie Bogaerts
Publisher : MDPI
ISBN 13 : 3038977500
Total Pages : 248 pages
Book Rating : 4.0/5 (389 download)

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Book Synopsis Plasma Catalysis by : Annemie Bogaerts

Download or read book Plasma Catalysis written by Annemie Bogaerts and published by MDPI. This book was released on 2019-04-02 with total page 248 pages. Available in PDF, EPUB and Kindle. Book excerpt: Plasma catalysis is gaining increasing interest for various gas conversion applications, such as CO2 conversion into value-added chemicals and fuels, N2 fixation for the synthesis of NH3 or NOx, methane conversion into higher hydrocarbons or oxygenates. It is also widely used for air pollution control (e.g., VOC remediation). Plasma catalysis allows thermodynamically difficult reactions to proceed at ambient pressure and temperature, due to activation of the gas molecules by energetic electrons created in the plasma. However, plasma is very reactive but not selective, and thus a catalyst is needed to improve the selectivity. In spite of the growing interest in plasma catalysis, the underlying mechanisms of the (possible) synergy between plasma and catalyst are not yet fully understood. Indeed, plasma catalysis is quite complicated, as the plasma will affect the catalyst and vice versa. Moreover, due to the reactive plasma environment, the most suitable catalysts will probably be different from thermal catalysts. More research is needed to better understand the plasma–catalyst interactions, in order to further improve the applications.

Plasma Processes and Polymers

Author : Riccardo d'Agostino
Publisher : John Wiley & Sons
ISBN 13 : 3527605576
Total Pages : 545 pages
Book Rating : 4.5/5 (276 download)

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Book Synopsis Plasma Processes and Polymers by : Riccardo d'Agostino

Download or read book Plasma Processes and Polymers written by Riccardo d'Agostino and published by John Wiley & Sons. This book was released on 2006-03-06 with total page 545 pages. Available in PDF, EPUB and Kindle. Book excerpt: This volume compiles essential contributions to the most innovative fields of Plasma Processes and Polymers. High-quality contributions cover the fields of plasma deposition, plasma treatment of polymers and other organic compounds, plasma processes under partial vacuum and at atmospheric pressure, biomedical, textile, automotive, and optical applications as well as surface treatment of bulk materials, clusters, particles and powders. This unique collection of refereed papers is based on the best contributions presented at the 16th International Symposium on Plasma Chemistry in Taormina, Italy (ISPC-16, June 2003). A high class reference of relevance to a large audience in plasma community as well as in the area of its industrial applications.

Polymer Electrolyte Fuel Cell Durability

Author : Felix N. Büchi
Publisher : Springer Science & Business Media
ISBN 13 : 038785536X
Total Pages : 489 pages
Book Rating : 4.3/5 (878 download)

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Book Synopsis Polymer Electrolyte Fuel Cell Durability by : Felix N. Büchi

Download or read book Polymer Electrolyte Fuel Cell Durability written by Felix N. Büchi and published by Springer Science & Business Media. This book was released on 2009-02-08 with total page 489 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book covers a significant number of R&D projects, performed mostly after 2000, devoted to the understanding and prevention of performance degradation processes in polymer electrolyte fuel cells (PEFCs). The extent and severity of performance degradation processes in PEFCs were recognized rather gradually. Indeed, the recognition overlapped with a significant number of industrial dem- strations of fuel cell powered vehicles, which would suggest a degree of technology maturity beyond the resaolution of fundamental failure mechanisms. An intriguing question, therefore, is why has there been this apparent delay in addressing fun- mental performance stability requirements. The apparent answer is that testing of the power system under fully realistic operation conditions was one prerequisite for revealing the nature and extent of some key modes of PEFC stack failure. Such modes of failure were not exposed to a similar degree, or not at all, in earlier tests of PEFC stacks which were not performed under fully relevant conditions, parti- larly such tests which did not include multiple on–off and/or high power–low power cycles typical for transportation and mobile power applications of PEFCs. Long-term testing of PEFCs reported in the early 1990s by both Los Alamos National Laboratory and Ballard Power was performed under conditions of c- stant cell voltage, typically near the maximum power point of the PEFC.

Methods of Seawater Analysis

Author : Klaus Grasshoff
Publisher : John Wiley & Sons
ISBN 13 : 3527613994
Total Pages : 632 pages
Book Rating : 4.5/5 (276 download)

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Book Synopsis Methods of Seawater Analysis by : Klaus Grasshoff

Download or read book Methods of Seawater Analysis written by Klaus Grasshoff and published by John Wiley & Sons. This book was released on 2009-07-30 with total page 632 pages. Available in PDF, EPUB and Kindle. Book excerpt: Since the book first appeared in 1976, Methods of Seawater Analysis has found widespread acceptance as a reliable and detailed source of information. Its second extended and revised edition published in 1983 reflected the rapid pace of instrumental and methodological evolution in the preceding years. The development has lost nothing of its momentum, and many methods and procedures still suffering their teething troubles then have now matured into dependable tools for the analyst. This is especially evident for trace and ultra-trace analyses of organic and inorganic seawater constituents which have diversified considerably and now require more space for their description than before. Methods to determine volatile halocarbons, dimethyl sulphide, photosynthetic pigments and natural radioactive tracers have been added as well as applications of X-ray fluorescence spectroscopy and various electrochemical methods for trace metal analysis. Another method not previously described deals with the determination of the partial pressure of carbon dioxide as part of standardised procedures to describe the marine CO2 system.

Advanced Techniques for Surface Engineering

Author : W. Gissler
Publisher : Springer Science & Business Media
ISBN 13 : 940170631X
Total Pages : 402 pages
Book Rating : 4.4/5 (17 download)

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Book Synopsis Advanced Techniques for Surface Engineering by : W. Gissler

Download or read book Advanced Techniques for Surface Engineering written by W. Gissler and published by Springer Science & Business Media. This book was released on 2013-04-17 with total page 402 pages. Available in PDF, EPUB and Kindle. Book excerpt: Today's shortages of resources make the search for wear and corrosion resistant materials one of the most important tasks of the next century. Since the surface of a material is the location where any interaction occurs, it is that there the hardest requirements on the material are imposed: to be wear resistant for tools and bearings; to be corrosion resistant for turbine blades and tubes in the petrochemical industry; to be antireflecting for solar cells; to be decorative for architectural panels and to combine several of these properties in other applications. Surface engineering is the general term that incorporates all the techniques by which a surface modification can be accomplished. These techniques include both coating and modification of the surface by ion implantation and laser beam melting. In recent years a continuously growing number of these techniques were developed to the extent that it became more and more difficult to maintain an overlook and to understand which of these highly differentiated techniques might be applied to resolve a given surface engineering problem. A similar development is also occuring for surface characterization techniques. This volume contains contributions from renowned scientists and engineers to the Eurocourse the aim of which was to inform about the various techniques and to give a comprehensive survey of the latest development on this subject.

Catalyst Separation, Recovery and Recycling

Author : David J. Cole-Hamilton
Publisher : Springer Science & Business Media
ISBN 13 : 9781402040863
Total Pages : 270 pages
Book Rating : 4.0/5 (48 download)

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Book Synopsis Catalyst Separation, Recovery and Recycling by : David J. Cole-Hamilton

Download or read book Catalyst Separation, Recovery and Recycling written by David J. Cole-Hamilton and published by Springer Science & Business Media. This book was released on 2006-01-13 with total page 270 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book looks at new ways of tackling the problem of separating reaction products from homogeneous catalytic solutions. The new processes involve low leaching supported catalysts, soluble supports such as polymers and dendrimers and unusual solvents such as water, fluorinated organics, ionic liquids and supercritical fluids. The advantages of the different possibilities are discussed alongside suggestions for further research that will be required for commercialisation. Unlike other books, in addition to the chemistry involved, the book looks at the process design that would be required to bring the new approaches to fruition. Comparisons are given with existing processes that have already been successfully applied and examples are given where these approaches are not suitable. The book includes: - New processes for the separation of products from solutions containing homogeneous catalysts - Catalysts on insoluble or soluble supports – fixed bed catalysts - continuous flow or ultrafiltration - Biphasic systems: water - organic, fluorous - organic, ionic liquid – organic, supercritical fluids (monophasic or biphasic with water, organic or ionic liquid) - Comparisons with current processes involving atmospheric or low temperature distillation - Consideration of Chemistry and Process Design - Advantages and disadvantages of each process exposed - Consideration of what else is need for commercialisation