Ultra Shallow Junction Formation Using Silicide As A Diffusion Source And Low Thermal Budget

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Ion Implantation Technology - 92

Author : D.F. Downey
Publisher : Elsevier
ISBN 13 : 0444599800
Total Pages : 716 pages
Book Rating : 4.4/5 (445 download)

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Book Synopsis Ion Implantation Technology - 92 by : D.F. Downey

Download or read book Ion Implantation Technology - 92 written by D.F. Downey and published by Elsevier. This book was released on 2012-12-02 with total page 716 pages. Available in PDF, EPUB and Kindle. Book excerpt: Ion implantation technology has made a major contribution to the dramatic advances in integrated circuit technology since the early 1970's. The ever-present need for accurate models in ion implanted species will become absolutely vital in the future due to shrinking feature sizes. Successful wide application of ion implantation, as well as exploitation of newly identified opportunities, will require the development of comprehensive implant models. The 141 papers (including 24 invited papers) in this volume address the most recent developments in this field. New structures and possible approaches are described. The implications for ion implantation technology as well as additional observations of needs and opportunities are discussed. The volume will be of value to all those who are interested in acquiring a more complete understanding of the current developments in ion implantation processes and comprehensive implant models.

Ultra-shallow Junction Fabrication Using Plasma Immersion Ion Implantation and Epitaxial CoSi2 as a Dopant Source

Author : Erin Catherine Jones
Publisher :
ISBN 13 :
Total Pages : 428 pages
Book Rating : 4.:/5 (33 download)

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Book Synopsis Ultra-shallow Junction Fabrication Using Plasma Immersion Ion Implantation and Epitaxial CoSi2 as a Dopant Source by : Erin Catherine Jones

Download or read book Ultra-shallow Junction Fabrication Using Plasma Immersion Ion Implantation and Epitaxial CoSi2 as a Dopant Source written by Erin Catherine Jones and published by . This book was released on 1996 with total page 428 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Fundamentals of Semiconductor Processing Technology

Author : Badih El-Kareh
Publisher : Springer Science & Business Media
ISBN 13 : 9780792395348
Total Pages : 620 pages
Book Rating : 4.3/5 (953 download)

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Book Synopsis Fundamentals of Semiconductor Processing Technology by : Badih El-Kareh

Download or read book Fundamentals of Semiconductor Processing Technology written by Badih El-Kareh and published by Springer Science & Business Media. This book was released on 1994-12-31 with total page 620 pages. Available in PDF, EPUB and Kindle. Book excerpt: The drive toward new semiconductor technologies is intricately related to market demands for cheaper, smaller, faster, and more reliable circuits with lower power consumption. The development of new processing tools and technologies is aimed at optimizing one or more of these requirements. This goal can, however, only be achieved by a concerted effort between scientists, engineers, technicians, and operators in research, development, and manufac turing. It is therefore important that experts in specific disciplines, such as device and circuit design, understand the principle, capabil ities, and limitations of tools and processing technologies. It is also important that those working on specific unit processes, such as lithography or hot processes, be familiar with other unit processes used to manufacture the product. Several excellent books have been published on the subject of process technologies. These texts, however, cover subjects in too much detail, or do not cover topics important to modem tech nologies. This book is written with the need for a "bridge" between different disciplines in mind. It is intended to present to engineers and scientists those parts of modem processing technologies that are of greatest importance to the design and manufacture of semi conductor circuits. The material is presented with sufficient detail to understand and analyze interactions between processing and other semiconductor disciplines, such as design of devices and cir cuits, their electrical parameters, reliability, and yield.

Nanometer CMOS

Author : Juin J. Liou
Publisher : CRC Press
ISBN 13 : 1466511702
Total Pages : 271 pages
Book Rating : 4.4/5 (665 download)

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Book Synopsis Nanometer CMOS by : Juin J. Liou

Download or read book Nanometer CMOS written by Juin J. Liou and published by CRC Press. This book was released on 2010-02-28 with total page 271 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book presents the material necessary for understanding the physics, operation, design, and performance of modern MOSFETs with nanometer dimensions. It offers a brief introduction to the field and a thorough overview of MOSFET physics, detailing the relevant basics. The authors apply presented models to calculate and demonstrate transistor characteristics, and they include required input data (e.g., dimensions, doping) enabling readers to repeat the calculations and compare their results. The book introduces conventional and novel advanced MOSFET concepts, such as multiple-gate structures or alternative channel materials. Other topics covered include high-k dielectrics and mobility enhancement techniques, MOSFETs for RF (radio frequency) applications, MOSFET fabrication technology.

Frontiers In Electronics (With Cd-rom) - Proceedings Of The Wofe-04

Author : Michael S Shur
Publisher : World Scientific
ISBN 13 : 9814477478
Total Pages : 774 pages
Book Rating : 4.8/5 (144 download)

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Book Synopsis Frontiers In Electronics (With Cd-rom) - Proceedings Of The Wofe-04 by : Michael S Shur

Download or read book Frontiers In Electronics (With Cd-rom) - Proceedings Of The Wofe-04 written by Michael S Shur and published by World Scientific. This book was released on 2006-08-10 with total page 774 pages. Available in PDF, EPUB and Kindle. Book excerpt: Frontiers in Electronics reports on the most recent developments and future trends in the electronics and photonics industry. The issues address CMOS, SOI and wide band gap semiconductor technology, terahertz technology, and bioelectronics, providing a unique interdisciplinary overview of the key emerging issues.This volume accurately reflects the recent research and development trends: from pure research to research and development; and its contributors are leading experts in microelectronics, nanoelectronics, and nanophotonics from academia, industry, and government agencies.

VLSI Metallization

Author : Krishna Shenai
Publisher : Artech House Publishers
ISBN 13 :
Total Pages : 548 pages
Book Rating : 4.3/5 (91 download)

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Book Synopsis VLSI Metallization by : Krishna Shenai

Download or read book VLSI Metallization written by Krishna Shenai and published by Artech House Publishers. This book was released on 1991 with total page 548 pages. Available in PDF, EPUB and Kindle. Book excerpt: This comprehensive collection of reprinted articles presents the most important developments on VLSI contact and interconnect technologies and applications. The book covers important developments in metallization of compound semiconductor technologies, and includes a section on metallization reliability and high speed testing.

ULSI Process Integration 5

Author : Cor L. Claeys
Publisher : The Electrochemical Society
ISBN 13 : 1566775728
Total Pages : 509 pages
Book Rating : 4.5/5 (667 download)

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Book Synopsis ULSI Process Integration 5 by : Cor L. Claeys

Download or read book ULSI Process Integration 5 written by Cor L. Claeys and published by The Electrochemical Society. This book was released on 2007 with total page 509 pages. Available in PDF, EPUB and Kindle. Book excerpt: The symposium provided a forum for reviewing and discussing all aspects of process integration, with special focus on nanoscaled technologies, 65 nm and beyond on DRAM, SRAM, flash memory, high density logic-low power, RF, mixed analog-digital, process integration yield, CMP chemistries, low-k processes, gate stacks, metal gates, rapid thermal processing, silicides, copper interconnects, carbon nanotubes, novel materials, high mobility substrates (SOI, sSi, SiGe, GeOI), strain engineering, and hybrid integration.

Novel Methods for Low Resistance Ultra-shallow Junction Formation

Author : Sameer H. Jain
Publisher :
ISBN 13 :
Total Pages : 166 pages
Book Rating : 4.F/5 ( download)

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Book Synopsis Novel Methods for Low Resistance Ultra-shallow Junction Formation by : Sameer H. Jain

Download or read book Novel Methods for Low Resistance Ultra-shallow Junction Formation written by Sameer H. Jain and published by . This book was released on 2005 with total page 166 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Handbook of Integrated Circuit Industry

Author : Yangyuan Wang
Publisher : Springer Nature
ISBN 13 : 9819928362
Total Pages : 2006 pages
Book Rating : 4.8/5 (199 download)

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Book Synopsis Handbook of Integrated Circuit Industry by : Yangyuan Wang

Download or read book Handbook of Integrated Circuit Industry written by Yangyuan Wang and published by Springer Nature. This book was released on 2023-12-29 with total page 2006 pages. Available in PDF, EPUB and Kindle. Book excerpt: Written by hundreds experts who have made contributions to both enterprise and academics research, these excellent reference books provide all necessary knowledge of the whole industrial chain of integrated circuits, and cover topics related to the technology evolution trends, fabrication, applications, new materials, equipment, economy, investment, and industrial developments of integrated circuits. Especially, the coverage is broad in scope and deep enough for all kind of readers being interested in integrated circuit industry. Remarkable data collection, update marketing evaluation, enough working knowledge of integrated circuit fabrication, clear and accessible category of integrated circuit products, and good equipment insight explanation, etc. can make general readers build up a clear overview about the whole integrated circuit industry. This encyclopedia is designed as a reference book for scientists and engineers actively involved in integrated circuit research and development field. In addition, this book provides enough guide lines and knowledges to benefit enterprisers being interested in integrated circuit industry.

ULSI Science and Technology/1987

Author : S. Broydo
Publisher :
ISBN 13 :
Total Pages : 874 pages
Book Rating : 4.E/5 ( download)

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Book Synopsis ULSI Science and Technology/1987 by : S. Broydo

Download or read book ULSI Science and Technology/1987 written by S. Broydo and published by . This book was released on 1987 with total page 874 pages. Available in PDF, EPUB and Kindle. Book excerpt:

2000 22nd International Conference on Microelectronics

Author : IEEE Electron Devices Society
Publisher : Institute of Electrical & Electronics Engineers(IEEE)
ISBN 13 :
Total Pages : 392 pages
Book Rating : 4.X/5 (4 download)

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Book Synopsis 2000 22nd International Conference on Microelectronics by : IEEE Electron Devices Society

Download or read book 2000 22nd International Conference on Microelectronics written by IEEE Electron Devices Society and published by Institute of Electrical & Electronics Engineers(IEEE). This book was released on 1999 with total page 392 pages. Available in PDF, EPUB and Kindle. Book excerpt: The papers in this volume are a partial selection from the International Conference on Microelectronic 1999 which provides a forum for the presentation and discussion of the recent developments and future trends in the field of microelectronics."

Rapid Thermal and Integrated Processing

Author :
Publisher :
ISBN 13 :
Total Pages : 914 pages
Book Rating : 4.3/5 (91 download)

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Book Synopsis Rapid Thermal and Integrated Processing by :

Download or read book Rapid Thermal and Integrated Processing written by and published by . This book was released on 1998 with total page 914 pages. Available in PDF, EPUB and Kindle. Book excerpt:

1995 IEEE TENCON

Author : Institute of Electrical and Electronics Engineers. Region 10. Conference on Microelectronics and VLSI
Publisher :
ISBN 13 : 9780780326248
Total Pages : 524 pages
Book Rating : 4.3/5 (262 download)

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Book Synopsis 1995 IEEE TENCON by : Institute of Electrical and Electronics Engineers. Region 10. Conference on Microelectronics and VLSI

Download or read book 1995 IEEE TENCON written by Institute of Electrical and Electronics Engineers. Region 10. Conference on Microelectronics and VLSI and published by . This book was released on 1995 with total page 524 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Handbook of Multilevel Metallization for Integrated Circuits

Author : Syd R. Wilson
Publisher : William Andrew
ISBN 13 :
Total Pages : 922 pages
Book Rating : 4.3/5 (91 download)

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Book Synopsis Handbook of Multilevel Metallization for Integrated Circuits by : Syd R. Wilson

Download or read book Handbook of Multilevel Metallization for Integrated Circuits written by Syd R. Wilson and published by William Andrew. This book was released on 1993 with total page 922 pages. Available in PDF, EPUB and Kindle. Book excerpt: It is widely recognized that the successful design, development, and integration of multilevel metallization (MLM) systems is and will continue to be key to current and future VLSI technologies. All major semiconductor companies have significant ongoing research teams focused in this area. These teams must view multilevel metallization as a system rather than a collection of isolated process modules.

Frontiers in Electronics

Author : H. Iwai
Publisher : World Scientific Publishing Company
ISBN 13 :
Total Pages : 784 pages
Book Rating : 4.:/5 (9 download)

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Book Synopsis Frontiers in Electronics by : H. Iwai

Download or read book Frontiers in Electronics written by H. Iwai and published by World Scientific Publishing Company. This book was released on 2006 with total page 784 pages. Available in PDF, EPUB and Kindle. Book excerpt: Frontiers in Electronics reports on the most recent developments and future trends in the electronics and photonics industry. The issues address CMOS, SOI and wide band gap semiconductor technology, terahertz technology, and bioelectronics, providing a unique interdisciplinary overview of the key emerging issues. This volume accurately reflects the recent research and development trends: from pure research to research and development; and its contributors are leading experts in microelectronics, nanoelectronics, and nanophotonics from academia, industry, and government agencies.

Silicon Front-end Junction Formation Technologies

Author : Daniel F. Downey
Publisher :
ISBN 13 :
Total Pages : 336 pages
Book Rating : 4.3/5 (91 download)

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Book Synopsis Silicon Front-end Junction Formation Technologies by : Daniel F. Downey

Download or read book Silicon Front-end Junction Formation Technologies written by Daniel F. Downey and published by . This book was released on 2002 with total page 336 pages. Available in PDF, EPUB and Kindle. Book excerpt: Unlike the previous three volumes in the series on silicon front-end processing, this volume expands its focus to include more topics related to formation of ultrashallow junctions. With the challenges presented by the requirements of the sub- 100nm node, the need for new activation technologies which yield minimal diffusion of the dopant while producing high activation are paramount. In addition, the metrology required to measure these shallow profiles in both one and two dimensions becomes more critical. The volume attempts to address these new requirements and potential solutions by covering a variety of topics that include: alternate annealing technologies; device engineering options; dopant activation; epitaxial techniques primarily employing SiGe; defect and diffusion models; characterization using surface analysis techniques; and characterization technologies.

Ultra Clean Processing of Semiconductor Surfaces XI

Author : Paul Mertens
Publisher : Trans Tech Publications Ltd
ISBN 13 : 3038139084
Total Pages : 328 pages
Book Rating : 4.0/5 (381 download)

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Book Synopsis Ultra Clean Processing of Semiconductor Surfaces XI by : Paul Mertens

Download or read book Ultra Clean Processing of Semiconductor Surfaces XI written by Paul Mertens and published by Trans Tech Publications Ltd. This book was released on 2012-12-27 with total page 328 pages. Available in PDF, EPUB and Kindle. Book excerpt: Selected, peer reviewed papers from the 11th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS), September 17-19, 2012, Gent, Belgium