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Twelfth Workshop On Dielectrics In Microelectronics
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Book Synopsis Growth of High Permittivity Dielectrics by High Pressure Sputtering from Metallic Targets by : María Ángela Pampillón Arce
Download or read book Growth of High Permittivity Dielectrics by High Pressure Sputtering from Metallic Targets written by María Ángela Pampillón Arce and published by Springer. This book was released on 2017-10-04 with total page 181 pages. Available in PDF, EPUB and Kindle. Book excerpt: This thesis describes the fabrication of metal-insulator-semiconductor (MIS) structures using very high permittivity dielectrics (based on rare earths) grown by high-pressure sputtering from metallic targets. It demonstrates the possibility of depositing high permittivity materials (GdScO3) by means of high pressure sputtering from metallic targets using in situ plasma oxidation on Si and indium phosphate (InP) substrates. The advantage of this system is the high working pressure, which causes the particles to undergo multiple collisions and become thermalized before reaching the substrate in a pure diffusion process, thus protecting the semiconductor surface from damage. This work presents a unique fabrication using metallic targets and involving a two-step deposition process: a thin metallic film is sputtered in an Ar atmosphere and this film is then plasma oxidized in situ. It also demonstrates the fabrication of GdScO3 on Si with a permittivity value above 30 from metallic Gd and Sc targets. Since co-sputtering was not possible, a nanolaminate of these materials was deposited and annealed. The electrical properties of these devices show that the material is highly interesting from a microelectronic integration standpoint.
Book Synopsis Dielectric Material Integration for Microelectronics by : William D. Brown
Download or read book Dielectric Material Integration for Microelectronics written by William D. Brown and published by The Electrochemical Society. This book was released on 1998 with total page 384 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book EPJ AP written by and published by . This book was released on 2004 with total page 528 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Dielectric Films for Advanced Microelectronics by : Mikhail Baklanov
Download or read book Dielectric Films for Advanced Microelectronics written by Mikhail Baklanov and published by John Wiley & Sons. This book was released on 2007-04-04 with total page 508 pages. Available in PDF, EPUB and Kindle. Book excerpt: The topic of thin films is an area of increasing importance in materials science, electrical engineering and applied solid state physics; with both research and industrial applications in microelectronics, computer manufacturing, and physical devices. Advanced, high-performance computers, high-definition TV, broadband imaging systems, flat-panel displays, robotic systems, and medical electronics and diagnostics are a few examples of the miniaturized device technologies that depend on the utilization of thin film materials. This book presents an in-depth overview of the novel developments made by the scientific leaders in the area of modern dielectric films for advanced microelectronic applications. It contains clear, concise explanations of material science of dielectric films and their problem for device operation, including high-k, low-k, medium-k dielectric films and also specific features and requirements for dielectric films used in the packaging technology. A broad range of related topics are covered, from physical principles to design, fabrication, characterization, and applications of novel dielectric films.
Book Synopsis Proceedings of the ... International Symposium on Microelectronics by :
Download or read book Proceedings of the ... International Symposium on Microelectronics written by and published by . This book was released on 1994 with total page 782 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Carrier mobility in advanced channel materials using alternative gate dielectrics by : Eylem Durgun Özben
Download or read book Carrier mobility in advanced channel materials using alternative gate dielectrics written by Eylem Durgun Özben and published by Forschungszentrum Jülich. This book was released on 2014-03-20 with total page 123 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author :Electrochemical Society. Meeting Publisher :The Electrochemical Society ISBN 13 :9781566773478 Total Pages :652 pages Book Rating :4.7/5 (734 download)
Book Synopsis Silicon Nitride and Silicon Dioxide Thin Insulating Films VII by : Electrochemical Society. Meeting
Download or read book Silicon Nitride and Silicon Dioxide Thin Insulating Films VII written by Electrochemical Society. Meeting and published by The Electrochemical Society. This book was released on 2003 with total page 652 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Proceedings of the 1992 International Symposium on Microelectronics, October 19-21, 1992, Moscone Center, San Francisco, California by : International Society for Hybrid Microelectronics
Download or read book Proceedings of the 1992 International Symposium on Microelectronics, October 19-21, 1992, Moscone Center, San Francisco, California written by International Society for Hybrid Microelectronics and published by . This book was released on 1992 with total page 776 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Semiconductors, Dielectrics, and Metals for Nanoelectronics 12 by : S. Kar
Download or read book Semiconductors, Dielectrics, and Metals for Nanoelectronics 12 written by S. Kar and published by The Electrochemical Society. This book was released on 2014 with total page 203 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis ULSI Process Integration II by : Cor L. Claeys
Download or read book ULSI Process Integration II written by Cor L. Claeys and published by The Electrochemical Society. This book was released on 2001 with total page 636 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Silicon Nitride and Silicon Dioxide Thin Insulating Films by :
Download or read book Silicon Nitride and Silicon Dioxide Thin Insulating Films written by and published by . This book was released on 2003 with total page 660 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis High k Gate Dielectrics by : Michel Houssa
Download or read book High k Gate Dielectrics written by Michel Houssa and published by CRC Press. This book was released on 2003-12-01 with total page 614 pages. Available in PDF, EPUB and Kindle. Book excerpt: The drive toward smaller and smaller electronic componentry has huge implications for the materials currently being used. As quantum mechanical effects begin to dominate, conventional materials will be unable to function at scales much smaller than those in current use. For this reason, new materials with higher electrical permittivity will be requ
Book Synopsis Low and High Dielectric Constant Materials by : Rajendra Singh
Download or read book Low and High Dielectric Constant Materials written by Rajendra Singh and published by The Electrochemical Society. This book was released on 2000 with total page 242 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Leakage Current and Defect Characterization of Short Channel MOSFETs by : Guntrade Roll
Download or read book Leakage Current and Defect Characterization of Short Channel MOSFETs written by Guntrade Roll and published by Logos Verlag Berlin GmbH. This book was released on 2012 with total page 240 pages. Available in PDF, EPUB and Kindle. Book excerpt: The continuous improvement in semiconductor technology requires field effect transistor scaling while maintaining acceptable leakage currents. This study analyzes the effect of scaling on the leakage current and defect distribution in peripheral DRAM transistors. The influence of important process changes, such as the high-k gate patterning and encapsulation as well as carbon co-implants in the source/drain junction are investigated by advanced electrical measurements and TCAD simulation. A complete model for the trap assisted leakage currents in the silicon bulk of the transistors is presented.
Book Synopsis Low-dielectric Constant Materials by :
Download or read book Low-dielectric Constant Materials written by and published by . This book was released on 1999 with total page 330 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Silicon Nitride, Silicon Dioxide, and Emerging Dielectrics 10 by : R. Ekwal Sah
Download or read book Silicon Nitride, Silicon Dioxide, and Emerging Dielectrics 10 written by R. Ekwal Sah and published by The Electrochemical Society. This book was released on 2009 with total page 871 pages. Available in PDF, EPUB and Kindle. Book excerpt: The issue of ECS Transactions contains papers presented at the Tenth International Symposium on Silicon Nitride, Silicon Dioxide, and Alternate Emerging Dielectrics held in San Francisco on May 24-29, 2009. The papers address a very wide range of fabrication and characterization techniques, and applications of thin dielectric films in microelectronic and optoelectronic devices. More specific topics addressed by the papers include reliability, interface states, gate oxides, passivation, and dielctric breakdown.
Book Synopsis Proceedings of the ... International Microelectronics Symposium by :
Download or read book Proceedings of the ... International Microelectronics Symposium written by and published by . This book was released on 1978 with total page 376 pages. Available in PDF, EPUB and Kindle. Book excerpt:
