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Temperature And Density Measurements At An Inductively Rf Excited Hydrogen Plasma Discharge
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Book Synopsis Temperature and Density Measurements at an Inductively RF Excited Hydrogen Plasma Discharge by : Mohamed Abdel-Rahman
Download or read book Temperature and Density Measurements at an Inductively RF Excited Hydrogen Plasma Discharge written by Mohamed Abdel-Rahman and published by . This book was released on 2004 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Temperature and Density Measurements at an Inductively RF Excited Hydrogen Plasma Discharge by : Mohamed Abdalla
Download or read book Temperature and Density Measurements at an Inductively RF Excited Hydrogen Plasma Discharge written by Mohamed Abdalla and published by . This book was released on 2004 with total page 136 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Temperature and Density Measurements in a Linear Plasma Discharge by : Larry Gene Roseland
Download or read book Temperature and Density Measurements in a Linear Plasma Discharge written by Larry Gene Roseland and published by . This book was released on 1972 with total page 64 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis A Comparison of Spectroscopic Measurements of an Inductive Plasma Source with the INDUCT Model by :
Download or read book A Comparison of Spectroscopic Measurements of an Inductive Plasma Source with the INDUCT Model written by and published by . This book was released on 1999 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: Noninvasive spectroscopic measurements of an inductively driven hydrogen plasma source with density and temperature characteristic of plasma processing tools have been made with an ultimate application of cleaning of silicon substrates. These measurements allow full radial and axial profiles of electron density and temperature to be measured from absolutely calibrated multichannel spectroscopic measurements of upper state number densities and a collisional radiative model. Profiles were obtained over a range of powers from 50 to 200 W and pressures from 5 to 50 mTorr in hydrogen in a small cylindrical source. The hydrogen working gas and simple cylindrical geometry was chosen to simplify detailed comparisons with a 2D computational model (INDUCT95) which uses a fluid approximation for tbc plasma and neutral gas. The code calculates the inductive coupling of the 13.56 MHz RF source, the collisional, radiative, and wall losses as well as a chemistry model for electrons, H2, H, H, H2, and H3. Simulation results were sensitive to the value for the wall coefficient. The simulation and experimental temperature and density profiles in r and z were in rough agreement, but some details were quite different. The simulated axial density profile was located under the coil while the measured density profiles extended well beyond the edges of the coil. The scaling of conditions with pressure and power was in rough agreement between experiment and simulations.
Book Synopsis Temperature and Electron Density Profiles in an Inductively Coupled Plasma Discharge by : Kobus Visser
Download or read book Temperature and Electron Density Profiles in an Inductively Coupled Plasma Discharge written by Kobus Visser and published by . This book was released on 1980 with total page 514 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Spectroscopic measurements in low temperature in low temperature inductively coupled RF discharges in hydrogen by : Michael Lee Huebschman
Download or read book Spectroscopic measurements in low temperature in low temperature inductively coupled RF discharges in hydrogen written by Michael Lee Huebschman and published by . This book was released on 1999 with total page 310 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Measurement of Electron Temperature and Density in a Reflex Discharge by : Stanley J. Scalise
Download or read book Measurement of Electron Temperature and Density in a Reflex Discharge written by Stanley J. Scalise and published by . This book was released on 1967 with total page 186 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Ion Density Measurements in a Decaying Hydrogen Plasma by : William S. Cooper (III.)
Download or read book Ion Density Measurements in a Decaying Hydrogen Plasma written by William S. Cooper (III.) and published by . This book was released on 1961 with total page 36 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Atomic Hydrogen Density Measurements in an Ion Source Plasma Using a Vacuum Ultraviolet Absorption Spectrometer by :
Download or read book Atomic Hydrogen Density Measurements in an Ion Source Plasma Using a Vacuum Ultraviolet Absorption Spectrometer written by and published by . This book was released on 1989 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: A system to determine the density and temperature of ground state hydrogen atoms in a plasma by vacuum ultraviolet laser absorption spectroscopy is described. The continuous tunability of the spectrometer allows for analysis at any of the Lyman transitions. The narrow bandwidth of the laser system allows for the accurate determination of the absorption lineshape and hence the translational temperature. The utility of the system is exemplified by data obtained on an ion-source plasma. The measurements demonstrate the quality of the data as well as illustrating the behavior of this ion source under varying discharge conditions. 9 refs., 5 figs., 1 tab.
Book Synopsis H° Temperature and Density Measurements in a Penning Surface-plasma H− Ion Source by :
Download or read book H° Temperature and Density Measurements in a Penning Surface-plasma H− Ion Source written by and published by . This book was released on 1989 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: Using vacuum ultraviolet laser-absorption spectroscopy, the H° density and temperature are measured as a function of discharge current and H2-gas flow in both the plasma column and the drift region between the plasma column and the emitter in the 4X source. For typical source operating parameters, the atom temperature is 1.5 eV in the plasma column and 0.6 eV in the drift region; the atom density, 7 x 1014 cm/sup /minus/3/ in the plasma column and 4 x 1014 cm/sup /minus/3/ in the drift region. Separate measurements give 2% for the ratio of H2 molecules in the first vibrational level to the total H2 density. 8 refs., 6 figs., 1 tab.
Book Synopsis Method of Measuring Time Resolved Electron Density and Ion Temperature of Plasmas with a Fabry-Perot Etalon by : R. Mewe
Download or read book Method of Measuring Time Resolved Electron Density and Ion Temperature of Plasmas with a Fabry-Perot Etalon written by R. Mewe and published by . This book was released on 1964 with total page 33 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Nonthermal Plasma Chemistry and Physics by : Jurgen Meichsner
Download or read book Nonthermal Plasma Chemistry and Physics written by Jurgen Meichsner and published by CRC Press. This book was released on 2012-11-13 with total page 566 pages. Available in PDF, EPUB and Kindle. Book excerpt: In addition to introducing the basics of plasma physics, Nonthermal Plasma Chemistry and Physics is a comprehensive presentation of recent developments in the rapidly growing field of nonthermal plasma chemistry. The book offers a detailed discussion of the fundamentals of plasma chemical reactions and modeling, nonthermal plasma sources, relevant diagnostic techniques, and selected applications. Elucidating interconnections and trends, the book focuses on basic principles and illustrations across a broad field of applications. Expert contributors address environmental aspects of plasma chemistry. The book also includes selected plasma conditions and specific applications in volume plasma chemistry and treatment of material surfaces such as plasma etching in microelectronics, chemical modification of polymer surfaces and deposition of functional thin films. Designed for students of plasma physics, Nonthermal Plasma Chemistry and Physics is a concise resource also for specialists in this and related fields of research.
Book Synopsis RF Plasma Potential and Surface Temperature Measurements in an Inductively Coupled Plasma Source by : Gianluca Gregori
Download or read book RF Plasma Potential and Surface Temperature Measurements in an Inductively Coupled Plasma Source written by Gianluca Gregori and published by . This book was released on 1996 with total page 39 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Spectroscopic Measurements of Plasma Density and Temperature in a Plasma Opening Switch by : Lynne Kay Adler
Download or read book Spectroscopic Measurements of Plasma Density and Temperature in a Plasma Opening Switch written by Lynne Kay Adler and published by . This book was released on 1993 with total page 228 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Spectroscopic Diagnosis of a Dense Hydrogen Plasma Source by : Eric Christopher Alderson
Download or read book Spectroscopic Diagnosis of a Dense Hydrogen Plasma Source written by Eric Christopher Alderson and published by . This book was released on 2008 with total page 232 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Diagnostics and Modelling of an Inductively Coupled RF Low-pressure Low-temperature Plasma by : Suidong Yang
Download or read book Diagnostics and Modelling of an Inductively Coupled RF Low-pressure Low-temperature Plasma written by Suidong Yang and published by . This book was released on 1998 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Spectroscopic Measurement of H(1S) and H2(v",J") in an H- Ion Source Plasma by : Geoffrey Carlos Stutzin
Download or read book Spectroscopic Measurement of H(1S) and H2(v",J") in an H- Ion Source Plasma written by Geoffrey Carlos Stutzin and published by . This book was released on 1990 with total page 574 pages. Available in PDF, EPUB and Kindle. Book excerpt:
