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Synthesis Of Multilayer Coatings By Plasma Enhanced Chemical Vapor Deposition
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Book Synopsis Synthesis of Multilayer Coatings by Plasma Enhanced Chemical Vapor Deposition by :
Download or read book Synthesis of Multilayer Coatings by Plasma Enhanced Chemical Vapor Deposition written by and published by . This book was released on 2004 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: Silicon dioxide, silicon-containing polymer, silicon nitride, metal nitride, and germanium thin films were grown by electron cyclotron resonance (ECR) microwave plasma enhanced chemical vapor deposition (PECVD), and multilayer coatings were grown for high hardness and high corrosion resistance. Silicon dioxide was grown from hexamethyldisiloxane (HMDSO), 1,3,5,7-tetramethylcyclotetrasiloxane (TOMCTS), and ctamethylcyclotetrasiloxance (OMCTS) in a oxygen plasma. The grown silicon dioxide thin films were hard and colorless. Silicon nitride was grown from hexamethyldisiloxane (HMDSO) and tetramethylsilane (TMS) in an ammonia (NH3) plasma. The silicon nitride thin films grown from HMDSO were hard and transparent while the silicon nitride thin films grown from TMS were black and hard. Silicon-containing polymer was grown from 100% OMCTS. The polymer thin films are colorless, had relatively low hardness and very good salt-fog corrosion resistance. Titanium nitride, zirconium nitride, and chromium nitride were grown from titanium (IV) isopropoxide and tetrakis(dimethylamino)titanium, zirconium 2-methyl-2-butoxide and zirconium t-butoxide, and bis(ethylbenzene)chromium in an ammonia plasma. The grown titanium nitride and zirconium nitride thin films had characteristic gold coloring and high hardness while the grown chromium nitride thin films were black gray and had high hardness. Germanium thin films were grown from tetramethylgermane (TMG) in a argon plasma. The deposited germanium films were uniform and had polished-like shining surface. X-ray photoelectron spectroscopic (XPS) analyses showed the films contained 97 % germanium atomic concentration with less than 1 % carbon, and X-ray diffraction (XRD) analyses showed the films had the crystal structure of 220. Hard corrosion-resistant silicon-containing multilayer coatings were grown in a high-density microwave electron cyclotron resonance discharge. The multilayer coatings consist of a relatively soft silicon-containing polymer thin film as the bottom layer and a hard silicon dioxide or silicon nitride thin film as the top layer. Silicon-containing polymer thin films were grown from 100% OMCTS. Silicon dioxide and silicon nitride thin films were grown from OMCTS with O2 and HMDSO with NH3, respectively. The multilayer structures combined high surface hardnesses with good corrosion resistance, surviving 1800 to 2600 hours in an ASTM B117 salt-fog corrosion test. Multilayer coatings with a titanium nitride or zirconium nitride bottom layer and a transparent silicon-containing polymer or silicon dioxide top layer were grown in a high-density microwave electron cyclotron resonance discharge for protective or decorative coating application. The grown multilayer coatings had gold coloring and good film thickness.
Book Synopsis Protective Coatings and Thin Films by : Y. Pauleau
Download or read book Protective Coatings and Thin Films written by Y. Pauleau and published by Springer Science & Business Media. This book was released on 1996-12-31 with total page 694 pages. Available in PDF, EPUB and Kindle. Book excerpt: This volume entitled "Protective Coatings and Thin Films : Synthesis, Characterization and Applications" contains the Proceedings of the NATO Advanced Research Workshop (ARW) held in Alvor, Portugal from May 30 to June 5, 1996. This NATO-ARW was an expert meeting on the surface protection and modification of solid materials subjected to interactions with the environment. The meeting attracted 10 key speakers, 40 contributing speakers and 3 observers from various countries. The existing knowledge and current status of the science and technology related to protective coatings and thin films were assessed through a series of oral presentations, key notes (titles underlined in the volume content) and contributed papers distributed over various sessions dealing with: (a) plasma-assisted physical and chemical vapor deposition processes to enhance wear and corrosion protection of materials, (b) low friction coatings operating in hostile environment (vacuum, space, extreme temperatures, . . . ), (c) polymer films for protection against mechanical damage and chemical attack, (d) characterization of the structure of films and correlations with mechanical properties, (e) wear and corrosion resistant thermal spray coatings, (f) functional gradient ceramic/metallic coatings produced by high energy laser beam and energetic deposition processes for high temperature applications, (g) protective coatings for optical systems, and (h) ion beam assisted deposition of coatings for protection of materials against aqueous corrosion.
Book Synopsis Handbook of Deposition Technologies for Films and Coatings by : Peter M. Martin
Download or read book Handbook of Deposition Technologies for Films and Coatings written by Peter M. Martin and published by William Andrew. This book was released on 2009-12-01 with total page 932 pages. Available in PDF, EPUB and Kindle. Book excerpt: This 3e, edited by Peter M. Martin, PNNL 2005 Inventor of the Year, is an extensive update of the many improvements in deposition technologies, mechanisms, and applications. This long-awaited revision includes updated and new chapters on atomic layer deposition, cathodic arc deposition, sculpted thin films, polymer thin films and emerging technologies. Extensive material was added throughout the book, especially in the areas concerned with plasma-assisted vapor deposition processes and metallurgical coating applications.
Book Synopsis Comprehensive Materials Processing by :
Download or read book Comprehensive Materials Processing written by and published by Newnes. This book was released on 2014-04-07 with total page 5485 pages. Available in PDF, EPUB and Kindle. Book excerpt: Comprehensive Materials Processing, Thirteen Volume Set provides students and professionals with a one-stop resource consolidating and enhancing the literature of the materials processing and manufacturing universe. It provides authoritative analysis of all processes, technologies, and techniques for converting industrial materials from a raw state into finished parts or products. Assisting scientists and engineers in the selection, design, and use of materials, whether in the lab or in industry, it matches the adaptive complexity of emergent materials and processing technologies. Extensive traditional article-level academic discussion of core theories and applications is supplemented by applied case studies and advanced multimedia features. Coverage encompasses the general categories of solidification, powder, deposition, and deformation processing, and includes discussion on plant and tool design, analysis and characterization of processing techniques, high-temperatures studies, and the influence of process scale on component characteristics and behavior. Authored and reviewed by world-class academic and industrial specialists in each subject field Practical tools such as integrated case studies, user-defined process schemata, and multimedia modeling and functionality Maximizes research efficiency by collating the most important and established information in one place with integrated applets linking to relevant outside sources
Book Synopsis I. Plasma Enhanced Chemical Vapor Deposition of Main Group Nitride Thin Films by : Sri Prikash Rangarajan
Download or read book I. Plasma Enhanced Chemical Vapor Deposition of Main Group Nitride Thin Films written by Sri Prikash Rangarajan and published by . This book was released on 1994 with total page 330 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book CVD Polymers written by Karen K. Gleason and published by John Wiley & Sons. This book was released on 2015-04-01 with total page 484 pages. Available in PDF, EPUB and Kindle. Book excerpt: The method of CVD (chemical vapor deposition) is a versatile technique to fabricate high-quality thin films and structured surfaces in the nanometer regime from the vapor phase. Already widely used for the deposition of inorganic materials in the semiconductor industry, CVD has become the method of choice in many applications to process polymers as well. This highly scalable technique allows for synthesizing high-purity, defect-free films and for systematically tuning their chemical, mechanical and physical properties. In addition, vapor phase processing is critical for the deposition of insoluble materials including fluoropolymers, electrically conductive polymers, and highly crosslinked organic networks. Furthermore, CVD enables the coating of substrates which would otherwise dissolve or swell upon exposure to solvents. The scope of the book encompasses CVD polymerization processes which directly translate the chemical mechanisms of traditional polymer synthesis and organic synthesis in homogeneous liquids into heterogeneous processes for the modification of solid surfaces. The book is structured into four parts, complemented by an introductory overview of the diverse process strategies for CVD of polymeric materials. The first part on the fundamentals of CVD polymers is followed by a detailed coverage of the materials chemistry of CVD polymers, including the main synthesis mechanisms and the resultant classes of materials. The third part focuses on the applications of these materials such as membrane modification and device fabrication. The final part discusses the potential for scale-up and commercialization of CVD polymers.
Book Synopsis Thin Films and Coatings by : Sam Zhang
Download or read book Thin Films and Coatings written by Sam Zhang and published by CRC Press. This book was released on 2015-07-29 with total page 610 pages. Available in PDF, EPUB and Kindle. Book excerpt: Thin Films and Coatings: Toughening and Toughness Characterization captures the latest developments in the toughening of hard coatings and in the measurement of the toughness of thin films and coatings. Featuring chapters contributed by experts from Australia, China, Czech Republic, Poland, Singapore, Spain, and the United Kingdom, this book: Presents the current status of hard-yet-tough ceramic coatings Reviews various toughness evaluation methods for films and hard coatings Explores the toughness and toughening mechanisms of porous thin films and laser-treated surfaces Examines adhesions of the film/substrate interface and the characterization of coating adhesion strength Discusses nanoindentation determination of fracture toughness, resistance to cracking, and sliding contact fracture phenomena Toughening and toughness measurement (of films and coatings) are two related, yet separate, fields of great importance in today’s nanotechnology world. Thin Films and Coatings: Toughening and Toughness Characterization is a timely reference written in such a way that novices will find it a stepping stone to the field and veterans will find it a rich source of information for their research.
Book Synopsis Handbook of Manufacturing Engineering and Technology by : Andrew Y. C. Nee
Download or read book Handbook of Manufacturing Engineering and Technology written by Andrew Y. C. Nee and published by Springer. This book was released on 2014-10-31 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt: The Springer Reference Work Handbook of Manufacturing Engineering and Technology provides overviews and in-depth and authoritative analyses on the basic and cutting-edge manufacturing technologies and sciences across a broad spectrum of areas. These topics are commonly encountered in industries as well as in academia. Manufacturing engineering curricula across universities are now essential topics covered in major universities worldwide.
Book Synopsis The Foundations of Vacuum Coating Technology by : Donald M. Mattox
Download or read book The Foundations of Vacuum Coating Technology written by Donald M. Mattox and published by William Andrew. This book was released on 2018-08-21 with total page 383 pages. Available in PDF, EPUB and Kindle. Book excerpt: The Foundations of Vacuum Coating Technology, Second Edition, is a revised and expanded version of the first edition, which was published in 2003. The book reviews the histories of the various vacuum coating technologies and expands on the history of the enabling technologies of vacuum technology, plasma technology, power supplies, and low-pressure plasma-enhanced chemical vapor deposition. The melding of these technologies has resulted in new processes and products that have greatly expanded the application of vacuum coatings for use in our everyday lives. The book is unique in that it makes extensive reference to the patent literature (mostly US) and how it relates to the history of vacuum coating. The book includes a Historical Timeline of Vacuum Coating Technology and a Historical Timeline of Vacuum/Plasma Technology, as well as a Glossary of Terms used in the vacuum coating and surface engineering industries. History and detailed descriptions of Vacuum Deposition Technologies Review of Enabling Technologies and their importance to current applications Extensively referenced text Patents are referenced as part of the history Historical Timelines for Vacuum Coating Technology and Vacuum/Plasma Technology Glossary of Terms for vacuum coating
Book Synopsis Plasma Enhanced Chemical Vapor Deposition of Functional Coatings Using Experimental Design Methodology by : Chih-Tao Lin
Download or read book Plasma Enhanced Chemical Vapor Deposition of Functional Coatings Using Experimental Design Methodology written by Chih-Tao Lin and published by . This book was released on 1999 with total page 340 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Metallurgical Coatings and Thin Films 1991 by : G.E. McGuire
Download or read book Metallurgical Coatings and Thin Films 1991 written by G.E. McGuire and published by Elsevier. This book was released on 2012-12-02 with total page 587 pages. Available in PDF, EPUB and Kindle. Book excerpt: The contributions in this two-volume set represent the work of over two hundred international researchers from universities, government laboratories and industry, with diverse backgrounds and interests in a wide range of coatings and thin film processes. The two hundred and six papers attest to the fact that Metallurgical Coatings is a rapidly growing field attracting experts from the large materials, scientific and technical community. The papers will be a useful and dynamic tool for those wishing to increase their knowledge on metallurgical coatings, as well as providing a guide to recent literature in this field.
Book Synopsis Ion Beam Processing of Materials and Deposition Processes of Protective Coatings by : P.L.F. Hemment
Download or read book Ion Beam Processing of Materials and Deposition Processes of Protective Coatings written by P.L.F. Hemment and published by Newnes. This book was released on 2012-12-02 with total page 630 pages. Available in PDF, EPUB and Kindle. Book excerpt: Containing the proceedings of three symposia in the E-MRS series this book is divided into two parts. Part one is concerned with ion beam processing, a particularly powerful and versatile technology which can be used both to synthesise and modify materials, including metals, semiconductors, ceramics and dielectrics, with great precision and excellent control. Furthermore it also deals with the correlated effects in atomic and cluster ion bombardment and implantation. Part two deals with the deposition techniques, characterization and applications of advanced ceramic, metallic and polymeric coatings or thin films for surface protection against corrosion, erosion, abrasion, diffusion and for lubrication of contracting surfaces in relative motion.
Book Synopsis Handbook of Physical Vapor Deposition (PVD) Processing by : D. M. Mattox
Download or read book Handbook of Physical Vapor Deposition (PVD) Processing written by D. M. Mattox and published by Cambridge University Press. This book was released on 2014-09-19 with total page 947 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book covers all aspects of physical vapor deposition (PVD) process technology from the characterizing and preparing the substrate material, through deposition processing and film characterization, to post-deposition processing. The emphasis of the book is on the aspects of the process flow that are critical to economical deposition of films that can meet the required performance specifications. The book covers subjects seldom treated in the literature: substrate characterization, adhesion, cleaning and the processing. The book also covers the widely discussed subjects of vacuum technology and the fundamentals of individual deposition processes. However, the author uniquely relates these topics to the practical issues that arise in PVD processing, such as contamination control and film growth effects, which are also rarely discussed in the literature. In bringing these subjects together in one book, the reader can understand the interrelationship between various aspects of the film deposition processing and the resulting film properties. The author draws upon his long experience with developing PVD processes and troubleshooting the processes in the manufacturing environment, to provide useful hints for not only avoiding problems, but also for solving problems when they arise. He uses actual experiences, called ""war stories"", to emphasize certain points. Special formatting of the text allows a reader who is already knowledgeable in the subject to scan through a section and find discussions that are of particular interest. The author has tried to make the subject index as useful as possible so that the reader can rapidly go to sections of particular interest. Extensive references allow the reader to pursue subjects in greater detail if desired. The book is intended to be both an introduction for those who are new to the field and a valuable resource to those already in the field. The discussion of transferring technology between R&D and manufacturing provided in Appendix 1, will be of special interest to the manager or engineer responsible for moving a PVD product and process from R&D into production. Appendix 2 has an extensive listing of periodical publications and professional societies that relate to PVD processing. The extensive Glossary of Terms and Acronyms provided in Appendix 3 will be of particular use to students and to those not fully conversant with the terminology of PVD processing or with the English language.
Book Synopsis Principles of Chemical Vapor Deposition by : Daniel Dobkin
Download or read book Principles of Chemical Vapor Deposition written by Daniel Dobkin and published by Springer Science & Business Media. This book was released on 2003-04-30 with total page 298 pages. Available in PDF, EPUB and Kindle. Book excerpt: Principles of Chemical Vapor Deposition provides a simple introduction to heat and mass transfer, surface and gas phase chemistry, and plasma discharge characteristics. In addition, the book includes discussions of practical films and reactors to help in the development of better processes and equipment. This book will assist workers new to chemical vapor deposition (CVD) to understand CVD reactors and processes and to comprehend and exploit the literature in the field. The book reviews several disparate fields with which many researchers may have only a passing acquaintance, such as heat and mass transfer, discharge physics, and surface chemistry, focusing on key issues relevant to CVD. The book also examines examples of realistic industrial reactors and processes with simplified analysis to demonstrate how to apply the principles to practical situations. The book does not attempt to exhaustively survey the literature or to intimidate the reader with irrelevant mathematical apparatus. This book is as simple as possible while still retaining the essential physics and chemistry. The book is generously illustrated to assist the reader in forming the mental images which are the basis of understanding.
Book Synopsis Novel Aspects of Diamond II by : Soumen Mandal
Download or read book Novel Aspects of Diamond II written by Soumen Mandal and published by Springer Nature. This book was released on 2024 with total page 530 pages. Available in PDF, EPUB and Kindle. Book excerpt: This edited book covers a wide range of novel scientific and engineering aspects of diamond films produced from chemical vapor deposition. It focuses on the most recent developments and achievements in this rapidly growing field from scientists and engineers across the domains of chemistry, biology, medicine, physics, and semiconductor engineering. The latest volume of this consistently well-cited book brings an updated, systematic review of the latest developments in diamond research and application. Featuring contributed chapters from a mix of highly-active international researchers, this new edition presents recent research focusing on topics such as diamond for thermal management in high-power electronics, diamond MOSFETs, water treatment, application of machine learning for nanodiamonds, theoretical aspects of diamond growth, current trends in emerging diamond technologies, and the growth of doped single-crystal diamond. This book is especially appealing to interdisciplinary researchers and industry professionals working on advanced diamond devices and applications, as well as theoretical and computational methods for predicting and designing new diamond materials.
Book Synopsis Plasma Enhanced Chemical Vapor Deposition of Functional Coatings Using Metal-organic Compounds by : Feng Li
Download or read book Plasma Enhanced Chemical Vapor Deposition of Functional Coatings Using Metal-organic Compounds written by Feng Li and published by . This book was released on 1999 with total page 400 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Production, Properties, and Applications of High Temperature Coatings by : Pakseresht, Amir Hossein
Download or read book Production, Properties, and Applications of High Temperature Coatings written by Pakseresht, Amir Hossein and published by IGI Global. This book was released on 2018-01-12 with total page 581 pages. Available in PDF, EPUB and Kindle. Book excerpt: Heat resistant layers are meant to withstand high temperatures while also protecting against all types of corrosion and oxidation. Therefore, the micro-structure and behavior of such layers is essential in understanding the functionality of these materials in order to make improvements. Production, Properties, and Applications of High Temperature Coatings is a critical academic publication which examines the methods of creation, characteristics, and behavior of materials used in heat resistant layers. Featuring coverage on a wide range of topics such as, thermal spray methods, sol-gel coatings, and surface nanoengineering, this book is geared toward students, academicians, engineers, and researchers seeking relevant research on the methodology and materials for producing effective heat resistant layers.
