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Author : Weijie Yun
Publisher :
ISBN 13 :
Total Pages : 338 pages
Book Rating : 4.:/5 (33 download)
Download or read book A Surface Micromachined Accelerometer with Integrated CMOS Detection Circuitry written by Weijie Yun and published by . This book was released on 1992 with total page 338 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Oliver Brand
Publisher : John Wiley & Sons
ISBN 13 : 3527335455
Total Pages : 512 pages
Book Rating : 4.5/5 (273 download)
Download or read book Resonant MEMS written by Oliver Brand and published by John Wiley & Sons. This book was released on 2015-06-08 with total page 512 pages. Available in PDF, EPUB and Kindle. Book excerpt: Part of the AMN book series, this book covers the principles, modeling and implementation as well as applications of resonant MEMS from a unified viewpoint. It starts out with the fundamental equations and phenomena that govern the behavior of resonant MEMS and then gives a detailed overview of their implementation in capacitive, piezoelectric, thermal and organic devices, complemented by chapters addressing the packaging of the devices and their stability. The last part of the book is devoted to the cutting-edge applications of resonant MEMS such as inertial, chemical and biosensors, fluid properties sensors, timing devices and energy harvesting systems.
Author : Stephen Beeby
Publisher : Artech House
ISBN 13 : 9781580538732
Total Pages : 282 pages
Book Rating : 4.5/5 (387 download)
Download or read book MEMS Mechanical Sensors written by Stephen Beeby and published by Artech House. This book was released on 2004 with total page 282 pages. Available in PDF, EPUB and Kindle. Book excerpt: Annotation Engineers and researchers can turn to this reference time and time again when they need to overcome challenges in design, simulation, fabrication, and application of MEMS (microelectromechanical systems) sensors.
Author : Yi-Hsing Chen
Publisher :
ISBN 13 :
Total Pages : 302 pages
Book Rating : 4.E/5 ( download)
Download or read book A Thick Polysilicon Surface Micromachined Accelerometer Based on Optical Intensity Modulation written by Yi-Hsing Chen and published by . This book was released on 1999 with total page 302 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Fatos Xhafa
Publisher : Springer
ISBN 13 : 3319690965
Total Pages : 902 pages
Book Rating : 4.3/5 (196 download)
Download or read book Advances in Intelligent Systems and Interactive Applications written by Fatos Xhafa and published by Springer. This book was released on 2017-10-30 with total page 902 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book presents research papers from diverse areas on novel Intelligent Systems and Interactive Systems and Applications. It gathers selected research papers presented at the 2nd International Conference on Intelligent and Interactive Systems and Applications (IISA2017), which was held on June 17–18, 2017 in Beijing, China. Interactive Intelligent Systems (IIS) are systems that interact with human beings, media or virtual agents in intelligent computing environments. The emergence of Big Data and the Internet of Things have now opened new opportunities in both academic and industrial research for the successful design and development of intelligent interactive systems. This book explores how novel interactive systems can be used to overcome various challenges and limitations previously encountered by human beings by combining machine learning algorithms and the analysis of recent trends. The book presents 125 contributions, which have been categorized into seven sections, namely: i) Autonomous Systems; ii) Pattern Recognition and Vision Systems; iii) E-Enabled Systems; iv) Mobile Computing and Intelligent Networking; v) Internet and Cloud Computing; vi) Intelligent Systems, and vii) Various Applications. It not only offers readers extensive theoretical information on Intelligent and Interactive Systems, but also introduces them to various applications in different domains.
Author : Hongwee Lee
Publisher :
ISBN 13 :
Total Pages : 52 pages
Book Rating : 4.E/5 ( download)
Download or read book The Design and Testing of Surface Micromachined Optical Accelerometers written by Hongwee Lee and published by . This book was released on 1997 with total page 52 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Henry Baltes
Publisher : John Wiley & Sons
ISBN 13 : 352767506X
Total Pages : 610 pages
Book Rating : 4.5/5 (276 download)
Download or read book CMOS - MEMS written by Henry Baltes and published by John Wiley & Sons. This book was released on 2013-03-26 with total page 610 pages. Available in PDF, EPUB and Kindle. Book excerpt: This edition of 'CMOS-MEMS' was originally published in the successful series 'Advanced Micro & Nanosystems'. Here, the combination of the globally established, billion dollar chip mass fabrication technology CMOS with the fascinating and commercially promising new world of MEMS is covered from all angles. The book introduces readers to this fi eld and takes them from fabrication technologies and material charaterization aspects to the actual applications of CMOS-MEMS - a wide range of miniaturized physical, chemical and biological sensors and RF systems. Vital knowledge on circuit and system integration issues concludes this in-depth treatise, illustrating the advantages of combining CMOS and MEMS in the first place, rather than having a hybrid solution.
Author : Fatos Xhafa
Publisher : Springer
ISBN 13 : 3030028046
Total Pages : 1180 pages
Book Rating : 4.0/5 (3 download)
Download or read book Advances in Intelligent, Interactive Systems and Applications written by Fatos Xhafa and published by Springer. This book was released on 2019-01-16 with total page 1180 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book presents the proceedings of the International Conference on Intelligent, Interactive Systems and Applications (IISA2018), held in Hong Kong, China on June 29–30, 2018. It consists of contributions from diverse areas of intelligent interactive systems (IIS), such as: autonomous systems; pattern recognition and vision systems; e-enabled systems; mobile computing and intelligent networking; Internet & cloud computing; intelligent systems and applications. The book covers the latest ideas and innovations from both the industrial and academic worlds, and shares the best practices in the fields of computer science, communication engineering and latest applications of IOT and its use in industry. It also discusses key research outputs, providing readers with a wealth of new ideas and food for thought.
Author : Yong Ping Xu
Publisher : CRC Press
ISBN 13 : 1000793737
Total Pages : 312 pages
Book Rating : 4.0/5 (7 download)
Download or read book MEMS Silicon Oscillating Accelerometers and Readout Circuits written by Yong Ping Xu and published by CRC Press. This book was released on 2022-09-01 with total page 312 pages. Available in PDF, EPUB and Kindle. Book excerpt: Most MEMS accelerometers on the market today are capacitive accelerometers that are based on the displacement sensing mechanism. This book is intended to cover recent developments of MEMS silicon oscillating accelerometers (SOA), also referred to as MEMS resonant accelerometer. As contrast to the capacitive accelerometer, the MEMS SOA is based on the force sensing mechanism, where the input acceleration is converted to a frequency output. MEMS Silicon Oscillating Accelerometers and Readout Circuits consists of six chapters and covers both MEMS sensor and readout circuit, and provides an in-depth coverage on the design and modelling of the MEMS SOA with several recently reported prototypes. The book is not only useful to researchers and engineers who are familiar with the topic, but also appeals to those who have general interests in MEMS inertial sensors. The book includes extensive references that provide further information on this topic.
Author : Muthu Wijesundara
Publisher : Springer Science & Business Media
ISBN 13 : 1441971211
Total Pages : 247 pages
Book Rating : 4.4/5 (419 download)
Download or read book Silicon Carbide Microsystems for Harsh Environments written by Muthu Wijesundara and published by Springer Science & Business Media. This book was released on 2011-05-17 with total page 247 pages. Available in PDF, EPUB and Kindle. Book excerpt: Silicon Carbide Microsystems for Harsh Environments reviews state-of-the-art Silicon Carbide (SiC) technologies that, when combined, create microsystems capable of surviving in harsh environments, technological readiness of the system components, key issues when integrating these components into systems, and other hurdles in harsh environment operation. The authors use the SiC technology platform suite the model platform for developing harsh environment microsystems and then detail the current status of the specific individual technologies (electronics, MEMS, packaging). Additionally, methods towards system level integration of components and key challenges are evaluated and discussed based on the current state of SiC materials processing and device technology. Issues such as temperature mismatch, process compatibility and temperature stability of individual components and how these issues manifest when building the system receive thorough investigation. The material covered not only reviews the state-of-the-art MEMS devices, provides a framework for the joining of electronics and MEMS along with packaging into usable harsh-environment-ready sensor modules.
Author : Yong Zhu
Publisher : Springer Nature
ISBN 13 : 9811332479
Total Pages : 222 pages
Book Rating : 4.8/5 (113 download)
Download or read book Micro and Nano Machined Electrometers written by Yong Zhu and published by Springer Nature. This book was released on 2020-02-13 with total page 222 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book reviews advances in cutting-edge micro-/nano-electrometers, and discusses the technological challenges involved in their practical implementation. The detection of electrostatic charge has a wide range of applications in ionization chambers, bio-analyte and aerosol particle instruments, mass spectrometers, scanning tunneling microscopes, and even quantum computers. Designing micro-/nano-electrometers (also known as charge sensors) for electrometry is considered vital because of the charge sensitivity and resolution issues at micro-/nano-scales. The remarkably dynamic microelectromechanical systems (MEMSs)/nanoelectromechanical systems (NEMSs), and advances in solid-state electronics, hold considerable potential for the design and fabrication of extremely sensitive charge sensors.
Author : A Mehran Shahhosseini
Publisher : World Scientific
ISBN 13 : 9813208333
Total Pages : 758 pages
Book Rating : 4.8/5 (132 download)
Download or read book Design, Manufacturing And Mechatronics - Proceedings Of The International Conference On Design, Manufacturing And Mechatronics (Icdmm2016) written by A Mehran Shahhosseini and published by World Scientific. This book was released on 2016-12-29 with total page 758 pages. Available in PDF, EPUB and Kindle. Book excerpt: The 3rd Annual International Conference on Design, Manufacturing and Mechatronics (ICDMM2016) was successfully held in Wuhan, China in 2016.The ICDMM2016 covers a wide range of fundamental studies, technical innovations and industrial applications in industry design, manufacturing and mechatronics. The ICDMM2016 program consists of 4 keynote speeches, 96 oral and poster presentations. We were pleased to have more than 80 participants from China, South Korea, Taiwan, Japan, Malaysia, and Saudi Arabia. However, finally, only 83 articles were selected after peer review to be included in this proceedings.
Author : Ting Li
Publisher : Springer
ISBN 13 : 3319508245
Total Pages : 522 pages
Book Rating : 4.3/5 (195 download)
Download or read book Outlook and Challenges of Nano Devices, Sensors, and MEMS written by Ting Li and published by Springer. This book was released on 2017-02-22 with total page 522 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book provides readers with an overview of the design, fabrication, simulation, and reliability of nanoscale semiconductor devices, MEMS, and sensors, as they serve for realizing the next-generation internet of things. The authors focus on how the nanoscale structures interact with the electrical and/or optical performance, how to find optimal solutions to achieve the best outcome, how these apparatus can be designed via models and simulations, how to improve reliability, and what are the possible challenges and roadblocks moving forward.
Author : Mahmoud Rasras
Publisher : MDPI
ISBN 13 : 3038974145
Total Pages : 252 pages
Book Rating : 4.0/5 (389 download)
Download or read book MEMS Accelerometers written by Mahmoud Rasras and published by MDPI. This book was released on 2019-05-27 with total page 252 pages. Available in PDF, EPUB and Kindle. Book excerpt: Micro-electro-mechanical system (MEMS) devices are widely used for inertia, pressure, and ultrasound sensing applications. Research on integrated MEMS technology has undergone extensive development driven by the requirements of a compact footprint, low cost, and increased functionality. Accelerometers are among the most widely used sensors implemented in MEMS technology. MEMS accelerometers are showing a growing presence in almost all industries ranging from automotive to medical. A traditional MEMS accelerometer employs a proof mass suspended to springs, which displaces in response to an external acceleration. A single proof mass can be used for one- or multi-axis sensing. A variety of transduction mechanisms have been used to detect the displacement. They include capacitive, piezoelectric, thermal, tunneling, and optical mechanisms. Capacitive accelerometers are widely used due to their DC measurement interface, thermal stability, reliability, and low cost. However, they are sensitive to electromagnetic field interferences and have poor performance for high-end applications (e.g., precise attitude control for the satellite). Over the past three decades, steady progress has been made in the area of optical accelerometers for high-performance and high-sensitivity applications but several challenges are still to be tackled by researchers and engineers to fully realize opto-mechanical accelerometers, such as chip-scale integration, scaling, low bandwidth, etc. This Special Issue on "MEMS Accelerometers" seeks to highlight research papers, short communications, and review articles that focus on: Novel designs, fabrication platforms, characterization, optimization, and modeling of MEMS accelerometers. Alternative transduction techniques with special emphasis on opto-mechanical sensing. Novel applications employing MEMS accelerometers for consumer electronics, industries, medicine, entertainment, navigation, etc. Multi-physics design tools and methodologies, including MEMS-electronics co-design. Novel accelerometer technologies and 9DoF IMU integration. Multi-accelerometer platforms and their data fusion.
Author : Zhaoying Zhou
Publisher : Springer Science & Business Media
ISBN 13 : 3642182933
Total Pages : 1011 pages
Book Rating : 4.6/5 (421 download)
Download or read book Microsystems and Nanotechnology written by Zhaoying Zhou and published by Springer Science & Business Media. This book was released on 2012-08-30 with total page 1011 pages. Available in PDF, EPUB and Kindle. Book excerpt: “Microsystems and Nanotechnology” presents the latest science and engineering research and achievements in the fields of microsystems and nanotechnology, bringing together contributions by authoritative experts from the United States, Germany, Great Britain, Japan and China to discuss the latest advances in microelectromechanical systems (MEMS) technology and micro/nanotechnology. The book is divided into five parts – the fundamentals of microsystems and nanotechnology, microsystems technology, nanotechnology, application issues, and the developments and prospects – and is a valuable reference for students, teachers and engineers working with the involved technologies. Professor Zhaoying Zhou is a professor at the Department of Precision Instruments & Mechanology , Tsinghua University , and the Chairman of the MEMS & NEMS Society of China. Dr. Zhonglin Wang is the Director of the Center for Nanostructure Characterization, Georgia Tech, USA. Dr. Liwei Lin is a Professor at the Department of Mechanical Engineering, University of California at Berkeley, USA.
Author :
Publisher : Newnes
ISBN 13 : 0080932282
Total Pages : 3572 pages
Book Rating : 4.0/5 (89 download)
Download or read book Comprehensive Semiconductor Science and Technology written by and published by Newnes. This book was released on 2011-01-28 with total page 3572 pages. Available in PDF, EPUB and Kindle. Book excerpt: Semiconductors are at the heart of modern living. Almost everything we do, be it work, travel, communication, or entertainment, all depend on some feature of semiconductor technology. Comprehensive Semiconductor Science and Technology, Six Volume Set captures the breadth of this important field, and presents it in a single source to the large audience who study, make, and exploit semiconductors. Previous attempts at this achievement have been abbreviated, and have omitted important topics. Written and Edited by a truly international team of experts, this work delivers an objective yet cohesive global review of the semiconductor world. The work is divided into three sections. The first section is concerned with the fundamental physics of semiconductors, showing how the electronic features and the lattice dynamics change drastically when systems vary from bulk to a low-dimensional structure and further to a nanometer size. Throughout this section there is an emphasis on the full understanding of the underlying physics. The second section deals largely with the transformation of the conceptual framework of solid state physics into devices and systems which require the growth of extremely high purity, nearly defect-free bulk and epitaxial materials. The last section is devoted to exploitation of the knowledge described in the previous sections to highlight the spectrum of devices we see all around us. Provides a comprehensive global picture of the semiconductor world Each of the work's three sections presents a complete description of one aspect of the whole Written and Edited by a truly international team of experts
Author : Min-hang Bao
Publisher : Elsevier
ISBN 13 : 0080524036
Total Pages : 393 pages
Book Rating : 4.0/5 (85 download)
Download or read book Micro Mechanical Transducers written by Min-hang Bao and published by Elsevier. This book was released on 2000-10-16 with total page 393 pages. Available in PDF, EPUB and Kindle. Book excerpt: Some years ago, silicon-based mechanical sensors, like pressure sensors, accelerometers and gyroscopes, started their successful advance. Every year, hundreds of millions of these devices are sold, mainly for medical and automotive applications. The airbag sensor on which research already started several decades ago at Stanford University can be found in every new car and has saved already numerous lives. Pressure sensors are also used in modern electronic blood pressure equipment. Many other mechanical sensors, mostly invisible to the public, perform useful functions in countless industrial and consumer products. The underlying physics and technology of silicon-based mechanical sensors is rather complex and is treated in numerous publications scattered throughout the literature. Therefore, a clear need existed for a handbook that thoroughly and systematically reviews the present basic knowledge on these devices. After a short introduction, Professor Bao discusses the main issues relevant to silicon-based mechanical sensors. First a thorough treatment of stress and strain in diaphragms and beams is presented. Next, vibration of mechanical structures is illuminated, followed by a chapter on air damping. These basic chapters are then succeeded by chapters in which capacitive and piezoresistive sensing techniques are amply discussed. The book concludes with chapters on commercially available pressure sensors, accelerometers and resonant sensors in which the above principles are applied. Everybody, involved in designing silicon-based mechanical sensors, will find a wealth of useful information in the book, assisting the designer in obtaining highly optimized devices.
