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Author : Yur-Tsai Lin
Publisher :
ISBN 13 :
Total Pages : 458 pages
Book Rating : 4.:/5 (33 download)
Download or read book Studies of Flow, Heat Transfer and Particle Deposition During Chemical Vapor Deposition written by Yur-Tsai Lin and published by . This book was released on 1991 with total page 458 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Sooyun Joh
Publisher :
ISBN 13 :
Total Pages : 368 pages
Book Rating : 4.:/5 (33 download)
Download or read book Studies of Heat Transfer and Flow in the Modified Chemical Vapor Deposition Including Effects of Chemistry written by Sooyun Joh and published by . This book was released on 1993 with total page 368 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Shao-Luen Chou
Publisher :
ISBN 13 :
Total Pages : 408 pages
Book Rating : 4.:/5 (34 download)
Download or read book A Study of Fluid Flow, Heat Transfer and Particle Deposition in Chemical Vapor Deposition Processes written by Shao-Luen Chou and published by . This book was released on 1999 with total page 408 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Mansoo Choi
Publisher :
ISBN 13 :
Total Pages : 356 pages
Book Rating : 4.:/5 (29 download)
Download or read book Studies of Heat and Mass Transfer During Chemical Vapor Deposition written by Mansoo Choi and published by . This book was released on 1987 with total page 356 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Cheng-Kuan Wu
Publisher :
ISBN 13 :
Total Pages : 322 pages
Book Rating : 4.:/5 (34 download)
Download or read book Flow and Heat Transfer in External Chemical Vapor Deposition Including the Effects of Chemistry written by Cheng-Kuan Wu and published by . This book was released on 1997 with total page 322 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : D.M. Dobkin
Publisher : Springer Science & Business Media
ISBN 13 : 9401703698
Total Pages : 277 pages
Book Rating : 4.4/5 (17 download)
Download or read book Principles of Chemical Vapor Deposition written by D.M. Dobkin and published by Springer Science & Business Media. This book was released on 2013-03-09 with total page 277 pages. Available in PDF, EPUB and Kindle. Book excerpt: Principles of Chemical Vapor Deposition provides a simple introduction to heat and mass transfer, surface and gas phase chemistry, and plasma discharge characteristics. In addition, the book includes discussions of practical films and reactors to help in the development of better processes and equipment. This book will assist workers new to chemical vapor deposition (CVD) to understand CVD reactors and processes and to comprehend and exploit the literature in the field. The book reviews several disparate fields with which many researchers may have only a passing acquaintance, such as heat and mass transfer, discharge physics, and surface chemistry, focusing on key issues relevant to CVD. The book also examines examples of realistic industrial reactors and processes with simplified analysis to demonstrate how to apply the principles to practical situations. The book does not attempt to exhaustively survey the literature or to intimidate the reader with irrelevant mathematical apparatus. This book is as simple as possible while still retaining the essential physics and chemistry. The book is generously illustrated to assist the reader in forming the mental images which are the basis of understanding.
Author :
Publisher :
ISBN 13 :
Total Pages : 6 pages
Book Rating : 4.:/5 (727 download)
Download or read book Research on Fundamental Aspects of Inorganic Vapor and Particle Deposition in Coal-fired Systems written by and published by . This book was released on 1992 with total page 6 pages. Available in PDF, EPUB and Kindle. Book excerpt: Parallel research studies are underway on the following interrelated and fundamental subjects; Geometrical Approach to Determining the Sticking Probability of Particles Impacting on Convex Solid Surfaces; Correlations for High Schmidt Number Particle Deposition From Dilute Flowing Rational Engineering Suspensions; Average Capture Probability of Arriving Particles Which Are Distributed With ResPect to ImPact VelocitY and Incidence Angle (Relative to Deposit Substrate); Experimental and Theoretical Studies of Vapor Infiltration of Non-isothermal Granular Deposits; Effective Area/Volume of Populations of 'MicroPorous' Aerosol Particles (Compact and 'Fractal' Quasispherical Aggregates); Effects of Radiative Heat Transfer on the Coagulation Rates of Combustion-Generated Particles; Structure-Sensitivity of Total Mass Deposition Rates from Combustion Product Streams containing Coagulation-Aged Populations of Aggregated Primary Particles; and Na[sub 2]SO[sub 4] Chemical Vapor Deposition From Chlorine-containing Coal-Derived Gases.
Author : Hsin-Chuan Tsai
Publisher :
ISBN 13 :
Total Pages : 484 pages
Book Rating : 4.:/5 (1 download)
Download or read book A Study of Transport Phenomena in External Chemical Vapor Deposition Processes written by Hsin-Chuan Tsai and published by . This book was released on 1994 with total page 484 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Arthur Sherman
Publisher : William Andrew
ISBN 13 :
Total Pages : 240 pages
Book Rating : 4.3/5 (91 download)
Download or read book Chemical Vapor Deposition for Microelectronics written by Arthur Sherman and published by William Andrew. This book was released on 1987 with total page 240 pages. Available in PDF, EPUB and Kindle. Book excerpt: Presents an extensive, comprehensive study of chemical vapor deposition (CVD). Understanding CVD requires knowledge of fluid mechanics, plasma physics, chemical thermodynamics, and kinetics as well as homogenous and heterogeneous chemical reactions. This text presents these aspects of CVD in an integrated fashion, and also reviews films for use in integrated circuit technology.
Author : J. Mazumder
Publisher : Springer Science & Business Media
ISBN 13 : 1489914307
Total Pages : 406 pages
Book Rating : 4.4/5 (899 download)
Download or read book Theory and Application of Laser Chemical Vapor Deposition written by J. Mazumder and published by Springer Science & Business Media. This book was released on 2013-06-29 with total page 406 pages. Available in PDF, EPUB and Kindle. Book excerpt: In this monograph, the authors offer a comprehensive examination of the latest research on Laser Chemical Vapor Deposition (LCVD). Chapters explore the physics of LCVD as well as the principles of a wide range of related phenomena-including laser-matter interactions, heat transfer, fluid flow, chemical kinetics, and adsorption. With this reference, researchers will discover how to apply these principles to developing theories about various types of LCVD processes; gain greater insight into the basic mechanisms of LCVD; and obtain the ability to design and control an LCVD system.
Author : Amir Faghri
Publisher : Springer Nature
ISBN 13 : 3030221377
Total Pages : 820 pages
Book Rating : 4.0/5 (32 download)
Download or read book Fundamentals of Multiphase Heat Transfer and Flow written by Amir Faghri and published by Springer Nature. This book was released on 2019-09-13 with total page 820 pages. Available in PDF, EPUB and Kindle. Book excerpt: This textbook presents a modern treatment of fundamentals of heat and mass transfer in the context of all types of multiphase flows with possibility of phase-changes among solid, liquid and vapor. It serves equally as a textbook for undergraduate senior and graduate students in a wide variety of engineering disciplines including mechanical engineering, chemical engineering, material science and engineering, nuclear engineering, biomedical engineering, and environmental engineering. Multiphase Heat Transfer and Flow can also be used to teach contemporary and novel applications of heat and mass transfer. Concepts are reinforced with numerous examples and end-of-chapter problems. A solutions manual and PowerPoint presentation are available to instructors. While the book is designed for students, it is also very useful for practicing engineers working in technical areas related to both macro- and micro-scale systems that emphasize multiphase, multicomponent, and non-conventional geometries with coupled heat and mass transfer and phase change, with the possibility of full numerical simulation.
Author :
Publisher :
ISBN 13 :
Total Pages : 6 pages
Book Rating : 4.:/5 (727 download)
Download or read book Research on Fundamental Aspects of Inorganic Vapor and Particle Deposition in Coal-fired Systems. Seventh Quarterly Technical Report, March 6, 1992--June 5, 1992 written by and published by . This book was released on 1992 with total page 6 pages. Available in PDF, EPUB and Kindle. Book excerpt: Parallel research studies are underway on the following interrelated and fundamental subjects; Geometrical Approach to Determining the Sticking Probability of Particles Impacting on Convex Solid Surfaces; Correlations for High Schmidt Number Particle Deposition From Dilute Flowing Rational Engineering Suspensions; Average Capture Probability of Arriving Particles Which Are Distributed With ResPect to ImPact VelocitY and Incidence Angle (Relative to Deposit Substrate); Experimental and Theoretical Studies of Vapor Infiltration of Non-isothermal Granular Deposits; Effective Area/Volume of Populations of 'MicroPorous' Aerosol Particles (Compact and 'Fractal' Quasispherical Aggregates); Effects of Radiative Heat Transfer on the Coagulation Rates of Combustion-Generated Particles; Structure-Sensitivity of Total Mass Deposition Rates from Combustion Product Streams containing Coagulation-Aged Populations of Aggregated Primary Particles; and Na2SO4 Chemical Vapor Deposition From Chlorine-containing Coal-Derived Gases.
Author : Electrochemical Society. High Temperature Materials Division
Publisher : The Electrochemical Society
ISBN 13 : 9781566771788
Total Pages : 1686 pages
Book Rating : 4.7/5 (717 download)
Download or read book Chemical Vapor Deposition written by Electrochemical Society. High Temperature Materials Division and published by The Electrochemical Society. This book was released on 1997 with total page 1686 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : S. Sivaram
Publisher : Springer
ISBN 13 :
Total Pages : 312 pages
Book Rating : 4.3/5 (91 download)
Download or read book Chemical Vapor Deposition written by S. Sivaram and published by Springer. This book was released on 1995-03-31 with total page 312 pages. Available in PDF, EPUB and Kindle. Book excerpt: In early 1987 I was attempting to develop a CVD-based tungsten process for Intel. At every step ofthe development, information that we were collecting had to be analyzed in light of theories and hypotheses from books and papers in many unrelated subjects. Thesesources were so widely different that I came to realize there was no unifying treatment of CVD and its subprocesses. More interestingly, my colleagues in the industry were from many disciplines (a surface chemist, a mechanical engineer, a geologist, and an electrical engineer werein my group). To help us understand the field of CVD and its players, some of us organized the CVD user's group of Northern California in 1988. The idea for writing a book on the subject occurred to me during that time. I had already organized my thoughts for a course I taught at San Jose State University. Later Van Nostrand agreed to publish my book as a text intended for students at the senior/first year graduate level and for process engineers in the microelectronics industry, This book is not intended to be bibliographical, and it does not cover every new material being studied for chemical vapor deposition. On the other hand, it does present the principles of CVD at a fundamental level while uniting them with the needs of the microelectronics industry.
Author : Chang L. Tien
Publisher : Begell House Publishers
ISBN 13 : 9781567001297
Total Pages : 296 pages
Book Rating : 4.0/5 (12 download)
Download or read book Annual Review of Heat Transfer written by Chang L. Tien and published by Begell House Publishers. This book was released on 1999 with total page 296 pages. Available in PDF, EPUB and Kindle. Book excerpt: Heat Transfer Essentials is a focused and concise one semester textbook with synchronized PowerPoint lectures, solutions and tutoring material designed for online posting. Its distinguishing features are: - Essential Topics. Critical elements ofheat transfer arejudicially selected and organized for coverage in a one semester introductory course. Topics include conduction, convection and radiation. - PowerPoint Lectures. PowerPoint presentations are synchronized with the textbook. This eliminates the need for lecture preparation and blackboard use by the instructor and note taking by students. - Interactive Classroom Environment. Eliminating blackboard use and note taking liberates both instructor and students. More time can be devoted to engaging students to encourage thinking and understanding through discussion and dialog. - Problem Solving Methodology. Students are drilled in a systematic and logical procedure for solving engineering problems. The book emphasizes though process, modeling, approximation, checking and evaluation of results. Students can apply this methodology in other courses as well as throughout their careers. - Special Problems. Mini-projects involving open ended design considerations and others requiring computer solutions are included. - Home Experiments. A unique set of simple heat transfer experiments designed to be cawied out at home are described. Comparing experimental results with theoretical predictions serves as an effective learning tool.. - Online Solutions Manual. Solutions to problems are intended to serve as an important learning instrument. They follow the problem solving methodology format and are designed for onlineposting. - Online Tutor. A summary of each chapter is prepared for posting. Key points and critical conditions are highlighted and emphasized. - Online Homework Facilitator. To assist students in solving homework problems, helpful hints and relevant observations are compiled for each problem. They can be selectively posted by the instructor. - Outstanding Title. The first edition was selected by Choice: Current Reviewsfor Academic Libraries among its outstanding titles in 2000.
Author : Angel Yanguas-Gil
Publisher : Springer
ISBN 13 : 3319246720
Total Pages : 135 pages
Book Rating : 4.3/5 (192 download)
Download or read book Growth and Transport in Nanostructured Materials written by Angel Yanguas-Gil and published by Springer. This book was released on 2016-11-30 with total page 135 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book will address the application of gas phase thin film methods, including techniques such as evaporation, sputtering, CVD, and ALD to the synthesis of materials on nanostructured and high aspect-ratio high surface area materials. We have chosen to introduce these topics and the different application fields from a chronological perspective: we start with the early concepts of step coverage and later conformality in semiconductor manufacturing, and how later on the range of application branched out to include others such as energy storage, catalysis, and more broadly nanomaterials synthesis. The book will describe the ballistic and continuum descriptions of gas transport on nanostructured materials and then will move on to incorporate the impact of precursor-surface interaction. We will finally conclude approaching the subjects of feature shape evolution and the connection between nano and reactor scales and will briefly present different advanced algorithms that can be used to effectively compute particle transport, in some cases borrowing from other disciplines such as radiative heat transfer. The book gathers in a single place information scattered over thirty years of scientific research, including the most recent results in the field of Atomic Layer Deposition. Besides a mathematical description of the fundamentals of thin film growth in nanostructured materials, it includes analytic expressions and plots that can be used to predict the growth using gas phase synthesis methods in a number of ideal approximations. The focus on the fundamental aspects over particular processes will broaden the appeal and the shelf lifetime of this book. The reader of this book will gain a thorough understanding on the coating of high surface area and nanostructured materials using gas phase thin film deposition methods, including the limitations of each technique. Those coming from the theoretical side will gain the knowledge required to model the growth process, while those readers more interested in the process development will gain the theoretical understanding will be useful for process optimization.
Author : L. Melo
Publisher : Springer Science & Business Media
ISBN 13 : 9400928130
Total Pages : 720 pages
Book Rating : 4.4/5 (9 download)
Download or read book Fouling Science and Technology written by L. Melo and published by Springer Science & Business Media. This book was released on 2012-12-06 with total page 720 pages. Available in PDF, EPUB and Kindle. Book excerpt: The fouling of heat exchangers, reactors and catalysts remains one of the most urgent problems facing the process industries. Over the past ten years there has been limited research and investigation into the underlying mechanisms which give rise to this problem. For convenience, particularly in heat exchanger technology, the mechanisms involved have been subdivided into different subject areas. It is often the situation that individuals or groups of workers have concentra ted efforts in one or two of these specialist areas and there is a need to integrate the ideas across the whole spectrum of the subject. In addition, topics such as adhesion and surface phenomena have not been properly taken into account up till now in the assessment of the fouling processes. For this reason it was considered essential that the recognised experts from around the world, who are actively concerned with research, development and design in the fieId, should meet and exchange ideas and experience. Such a meeting was held at Alvor, Portugal, in May 1987, sponsored by the NATO Advanced St~dy Institutes Programme. In order to obtain a common basis for the work of the Advanced Study Institute, the whole technological field was reviewed right from the basic concepts to the frontiers of present knowledge. Each invited contributor was asked to make an overall presentation covering his or her area of expertise.
