Resonant MEMS

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Publisher : John Wiley & Sons
ISBN 13 : 3527335455
Total Pages : 512 pages
Book Rating : 4.5/5 (273 download)

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Book Synopsis Resonant MEMS by : Oliver Brand

Download or read book Resonant MEMS written by Oliver Brand and published by John Wiley & Sons. This book was released on 2015-06-08 with total page 512 pages. Available in PDF, EPUB and Kindle. Book excerpt: Part of the AMN book series, this book covers the principles, modeling and implementation as well as applications of resonant MEMS from a unified viewpoint. It starts out with the fundamental equations and phenomena that govern the behavior of resonant MEMS and then gives a detailed overview of their implementation in capacitive, piezoelectric, thermal and organic devices, complemented by chapters addressing the packaging of the devices and their stability. The last part of the book is devoted to the cutting-edge applications of resonant MEMS such as inertial, chemical and biosensors, fluid properties sensors, timing devices and energy harvesting systems.

Silicon Sensors and Actuators

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Author :
Publisher : Springer Nature
ISBN 13 : 3030801357
Total Pages : 988 pages
Book Rating : 4.0/5 (38 download)

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Book Synopsis Silicon Sensors and Actuators by : Benedetto Vigna

Download or read book Silicon Sensors and Actuators written by Benedetto Vigna and published by Springer Nature. This book was released on 2022-04-12 with total page 988 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book thoroughly reviews the present knowledge on silicon micromechanical transducers and addresses emerging and future technology challenges. Readers will acquire a solid theoretical and practical background that will allow them to analyze the key performance aspects of devices, critically judge a fabrication process, and then conceive and design new ones for future applications. Envisioning a future complex versatile microsystem, the authors take inspiration from Richard Feynman’s visionary talk “There is Plenty of Room at the Bottom” to propose that the time has come to see silicon sensors as part of a “Feynman Roadmap” instead of the “More-than-Moore” technology roadmap. The sharing of the author’s industrially proven track record of development, design, and manufacturing, along with their visionary approach to the technology, will allow readers to jump ahead in their understanding of the core of the topic in a very effective way. Students, researchers, engineers, and technologists involved in silicon-based sensor and actuator research and development will find a wealth of useful and groundbreaking information in this book.

Whole-Angle MEMS Gyroscopes

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Author :
Publisher : John Wiley & Sons
ISBN 13 : 1119441927
Total Pages : 223 pages
Book Rating : 4.1/5 (194 download)

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Book Synopsis Whole-Angle MEMS Gyroscopes by : Doruk Senkal

Download or read book Whole-Angle MEMS Gyroscopes written by Doruk Senkal and published by John Wiley & Sons. This book was released on 2020-05-11 with total page 223 pages. Available in PDF, EPUB and Kindle. Book excerpt: Presents the mathematical framework, technical language, and control systems know-how needed to design, develop, and instrument micro-scale whole-angle gyroscopes This comprehensive reference covers the technical fundamentals, mathematical framework, and common control strategies for degenerate mode gyroscopes, which are used in high-precision navigation applications. It explores various energy loss mechanisms and the effect of structural imperfections, along with requirements for continuous rate integrating gyroscope operation. It also provides information on the fabrication of MEMS whole-angle gyroscopes and the best methods of sustaining oscillations. Whole-Angle Gyroscopes: Challenges and Opportunities begins with a brief overview of the two main types of Coriolis Vibratory Gyroscopes (CVGs): non-degenerate mode gyroscopes and degenerate mode gyroscopes. It then introduces readers to the Foucault Pendulum analogy and a review of MEMS whole angle mode gyroscope development. Chapters cover: dynamics of whole-angle coriolis vibratory gyroscopes; fabrication of whole-angle coriolis vibratory gyroscopes; energy loss mechanisms of coriolis vibratory gyroscopes; and control strategies for whole-angle coriolis vibratory gyro- scopes. The book finishes with a chapter on conventionally machined micro-machined gyroscopes, followed by one on micro-wineglass gyroscopes. In addition, the book: Lowers barrier to entry for aspiring scientists and engineers by providing a solid understanding of the fundamentals and control strategies of degenerate mode gyroscopes Organizes mode-matched mechanical gyroscopes based on three classifications: wine-glass, ring/disk, and mass spring mechanical elements Includes case studies on conventionally micro-machined and 3-D micro-machined gyroscopes Whole-Angle Gyroscopes is an ideal book for researchers, scientists, engineers, and college/graduate students involved in the technology. It will also be of great benefit to engineers in control systems, MEMS production, electronics, and semi-conductors who work with inertial sensors.

Mechanical Sciences

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Publisher : Springer Nature
ISBN 13 : 9811557128
Total Pages : 279 pages
Book Rating : 4.8/5 (115 download)

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Book Synopsis Mechanical Sciences by : Uday S. Dixit

Download or read book Mechanical Sciences written by Uday S. Dixit and published by Springer Nature. This book was released on 2020-07-23 with total page 279 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book consists of review articles by experts on recent developments in mechanical engineering sciences. The book has been composed to commemorate the Silver Jubilee of the Mechanical Engineering Department, Indian Institute of Technology Guwahati. It includes articles on modern mechanical sciences subjects of advanced simulation techniques and molecular dynamics, microfluidics and microfluidic devices, energy systems, intelligent fabrication, microscale manufacturing, smart materials, computational techniques, robotics and their allied fields. It presents the upcoming and emerging areas in mechanical sciences which will help in formulation of new courses and updating existing curricula. This book will help the academicians and policy makers in the field of engineering education to chart out the desired path for the development of technical education.

Micro Energy Harvesting

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Publisher : John Wiley & Sons
ISBN 13 : 3527672931
Total Pages : 490 pages
Book Rating : 4.5/5 (276 download)

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Book Synopsis Micro Energy Harvesting by : Danick Briand

Download or read book Micro Energy Harvesting written by Danick Briand and published by John Wiley & Sons. This book was released on 2015-04-21 with total page 490 pages. Available in PDF, EPUB and Kindle. Book excerpt: With its inclusion of the fundamentals, systems and applications, this reference provides readers with the basics of micro energy conversion along with expert knowledge on system electronics and real-life microdevices. The authors address different aspects of energy harvesting at the micro scale with a focus on miniaturized and microfabricated devices. Along the way they provide an overview of the field by compiling knowledge on the design, materials development, device realization and aspects of system integration, covering emerging technologies, as well as applications in power management, energy storage, medicine and low-power system electronics. In addition, they survey the energy harvesting principles based on chemical, thermal, mechanical, as well as hybrid and nanotechnology approaches. In unparalleled detail this volume presents the complete picture -- and a peek into the future -- of micro-powered microsystems.

Proceedings of Asia International Conference on Tribology 2018

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Author :
Publisher : Malaysian Tribology Society
ISBN 13 : 9671362524
Total Pages : 540 pages
Book Rating : 4.6/5 (713 download)

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Book Synopsis Proceedings of Asia International Conference on Tribology 2018 by : Mohd Fadzli Bin Abdollah

Download or read book Proceedings of Asia International Conference on Tribology 2018 written by Mohd Fadzli Bin Abdollah and published by Malaysian Tribology Society. This book was released on 2018-09-17 with total page 540 pages. Available in PDF, EPUB and Kindle. Book excerpt: This ebook is a compilation of 234 papers presented at the 6th Asia International Conference on Tribology (ASIATRIB2018): Kuching, Sarawak - Malaysia from 17 to 20 September 2018.

Capacitive Silicon Resonators

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Publisher : CRC Press
ISBN 13 : 0429560990
Total Pages : 159 pages
Book Rating : 4.4/5 (295 download)

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Book Synopsis Capacitive Silicon Resonators by : Nguyen Van Toan

Download or read book Capacitive Silicon Resonators written by Nguyen Van Toan and published by CRC Press. This book was released on 2019-07-10 with total page 159 pages. Available in PDF, EPUB and Kindle. Book excerpt: Microfabricated resonators play an essential role in a variety of applications, including mass sensing, timing reference applications, and filtering applications. Many transduction mechanisms including piezoelectric, piezoresistive, and capacitive mechanisms, have been studied to induce and detect the motion of resonators. This book is meant to introduce and suggest several technological approaches together with design considerations for performance enhancement of capacitive silicon resonators, and will be useful for those working in field of micro and nanotechnology. Features Introduces and suggests several technological approaches together with design considerations for performance enhancement of capacitive silicon resonators Provides information on the various fabrication technologies and design considerations that can be employed to improve the performance capacitive silicon resonator which is one of the promising options to replace the quartz crystal resonator. Discusses several technological approaches including hermetic packaging based on the LTCC substrate, deep reactive ion etching, neutral beam etching technology, and metal-assisted chemical etching, as well as design considerations for mechanically coupled, selective vibration of high-order mode, movable electrode structures, and piezoresistive heat engines were investigated to achieve small motional resistance, low insertion loss, and high quality factor. Focusses on a capacitive sensing method based on the measurement of the change in capacitance between a sensing electrode and the resonant body. Reviews recent progress in performance enhancement methods for capacitive silicon resonator, which are mainly based on the works of the authors.

Molecular Sensors and Nanodevices

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Author :
Publisher : William Andrew
ISBN 13 : 1455776769
Total Pages : 512 pages
Book Rating : 4.4/5 (557 download)

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Book Synopsis Molecular Sensors and Nanodevices by : John X. J. Zhang

Download or read book Molecular Sensors and Nanodevices written by John X. J. Zhang and published by William Andrew. This book was released on 2013-12-03 with total page 512 pages. Available in PDF, EPUB and Kindle. Book excerpt: With applications ranging from medical diagnostics to environmental monitoring, molecular sensors (also known as biosensors, chemical sensors, or chemosensors), along with emerging nanotechnologies offer not only valuable tools but also unlimited possibilities for engineers and scientists to explore the world. New generation of functional microsystems can be designed to provide a variety of small scale sensing, imaging and manipulation techniques to the fundamental building blocks of materials. This book provides comprehensive coverage of the current and emerging technologies of molecular sensing, explaining the principles of molecular sensor design and assessing the sensor types currently available. Having explained the basic sensor structures and sensing principles, the authors proceed to explain the role of nano/micro fabrication techniques in molecular sensors, including MEMS, BioMEMS, MicroTAS among others. The miniaturization of versatile molecular sensors opens up a new design paradigm and a range of novel biotechnologies, which is illustrated through case studies of groundbreaking applications in the life sciences and elsewhere. As well as the techniques and devices themselves, the authors also cover the critical issues of implantability, biocompatibility and the regulatory framework. The book is aimed at a broad audience of engineering professionals, life scientists and students working in the multidisciplinary area of biomedical engineering. It explains essential principles of electrical, chemical, optical and mechanical engineering as well as biomedical science, intended for readers with a variety of scientific backgrounds. In addition, it will be valuable for medical professionals and researchers. An online tutorial developed by the authors provides learning reinforcement for students and professionals alike. - Reviews of state-of-the-art molecular sensors and nanotechnologies - Explains principles of sensors and fundamental theories with homework problems at the end of each chapter to facilitate learning - Demystifies the vertical integration from nanomaterials to devices design - Covers practical applications the recent progress in state-of-the-art sensor technologies - Includes case studies of important commercial products - Covers the critical issues of implantability, biocompatibility and the regulatory framework

Development of CMOS-MEMS/NEMS Devices

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Author :
Publisher : MDPI
ISBN 13 : 3039210688
Total Pages : 166 pages
Book Rating : 4.0/5 (392 download)

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Book Synopsis Development of CMOS-MEMS/NEMS Devices by : Jaume Verd

Download or read book Development of CMOS-MEMS/NEMS Devices written by Jaume Verd and published by MDPI. This book was released on 2019-06-25 with total page 166 pages. Available in PDF, EPUB and Kindle. Book excerpt: Micro and nano-electro-mechanical system (M/NEMS) devices constitute key technological building blocks to enable increased additional functionalities within Integrated Circuits (ICs) in the More-Than-Moore era, as described in the International Technology Roadmap for Semiconductors. The CMOS ICs and M/NEMS dies can be combined in the same package (SiP), or integrated within a single chip (SoC). In the SoC approach the M/NEMS devices are monolithically integrated together with CMOS circuitry allowing the development of compact and low-cost CMOS-M/NEMS devices for multiple applications (physical sensors, chemical sensors, biosensors, actuators, energy actuators, filters, mechanical relays, and others). On-chip CMOS electronics integration can overcome limitations related to the extremely low-level signals in sub-micrometer and nanometer scale electromechanical transducers enabling novel breakthrough applications. This Special Issue aims to gather high quality research contributions dealing with MEMS and NEMS devices monolithically integrated with CMOS, independently of the final application and fabrication approach adopted (MEMS-first, interleaved MEMS, MEMS-last or others).]

Radio Frequency Micromachined Switches, Switching Networks, and Phase Shifters

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Author :
Publisher : CRC Press
ISBN 13 : 1351021338
Total Pages : 288 pages
Book Rating : 4.3/5 (51 download)

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Book Synopsis Radio Frequency Micromachined Switches, Switching Networks, and Phase Shifters by : Shiban Kishen Koul

Download or read book Radio Frequency Micromachined Switches, Switching Networks, and Phase Shifters written by Shiban Kishen Koul and published by CRC Press. This book was released on 2019-05-03 with total page 288 pages. Available in PDF, EPUB and Kindle. Book excerpt: Radio Frequency Micromachined Switches, Switching Networks, and Phase Shifters discusses radio frequency microelectromechanical systems (RF MEMS)-based control components and will be useful for researchers and R&D engineers. It offers an in-depth study, performance analysis, and extensive characterization on micromachined switches and phase shifters. The reader will learn about basic design methodology and techniques to carry out extensive measurements on MEMS switches and phase shifters which include electrical, mechanical, power handling, linearity, temperature stability, reliability, and radio frequency performance. Practical examples included in the book will help readers to build high performance systems/subsystems using micromachined circuits. Key Features Provides simple design methodology of MEMS switches and switching networks including SPST to SP16T switches Gives an in-depth performance study of micromachined phase shifters. Detailed study on reliability and power handling capability of RF MEMS switches and phase shifters presented Proposes reconfigurable micromachined phase shifters Verifies a variety of MEMS switches and phase shifters experimentally

Microscale Soft Robotics

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Publisher : Springer
ISBN 13 : 3319502867
Total Pages : 114 pages
Book Rating : 4.3/5 (195 download)

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Book Synopsis Microscale Soft Robotics by : Jaeyoun (Jay) Kim

Download or read book Microscale Soft Robotics written by Jaeyoun (Jay) Kim and published by Springer. This book was released on 2016-12-20 with total page 114 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book presents the technological basics and applications of small-scale (mm to sub-mm in length-scales) soft robots and devices, written for researchers in both academia and industry. Author Jaeyoun Kim presents technological motivations, enabling factors, and examples in an inter-linked fashion, making it easy for readers to understand and explore how microscale soft robots are a solution to researchers in search of technological platforms for safe, human-friendly biomedical devices. A compact and timely introduction, this book summarizes not only the enabling factors for soft robots and MEMS devices, but also provides a survey of progress in the field and looks to the future in terms of the material, design, and application aspects this technology demonstrates.

Microsystems and Nanotechnology

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Publisher : Springer Science & Business Media
ISBN 13 : 3642182933
Total Pages : 1011 pages
Book Rating : 4.6/5 (421 download)

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Book Synopsis Microsystems and Nanotechnology by : Zhaoying Zhou

Download or read book Microsystems and Nanotechnology written by Zhaoying Zhou and published by Springer Science & Business Media. This book was released on 2012-08-30 with total page 1011 pages. Available in PDF, EPUB and Kindle. Book excerpt: “Microsystems and Nanotechnology” presents the latest science and engineering research and achievements in the fields of microsystems and nanotechnology, bringing together contributions by authoritative experts from the United States, Germany, Great Britain, Japan and China to discuss the latest advances in microelectromechanical systems (MEMS) technology and micro/nanotechnology. The book is divided into five parts – the fundamentals of microsystems and nanotechnology, microsystems technology, nanotechnology, application issues, and the developments and prospects – and is a valuable reference for students, teachers and engineers working with the involved technologies. Professor Zhaoying Zhou is a professor at the Department of Precision Instruments & Mechanology , Tsinghua University , and the Chairman of the MEMS & NEMS Society of China. Dr. Zhonglin Wang is the Director of the Center for Nanostructure Characterization, Georgia Tech, USA. Dr. Liwei Lin is a Professor at the Department of Mechanical Engineering, University of California at Berkeley, USA.

Piezoelectric MEMS Resonators

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Publisher : Springer
ISBN 13 : 3319286889
Total Pages : 423 pages
Book Rating : 4.3/5 (192 download)

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Book Synopsis Piezoelectric MEMS Resonators by : Harmeet Bhugra

Download or read book Piezoelectric MEMS Resonators written by Harmeet Bhugra and published by Springer. This book was released on 2017-01-09 with total page 423 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book introduces piezoelectric microelectromechanical (pMEMS) resonators to a broad audience by reviewing design techniques including use of finite element modeling, testing and qualification of resonators, and fabrication and large scale manufacturing techniques to help inspire future research and entrepreneurial activities in pMEMS. The authors discuss the most exciting developments in the area of materials and devices for the making of piezoelectric MEMS resonators, and offer direct examples of the technical challenges that need to be overcome in order to commercialize these types of devices. Some of the topics covered include: Widely-used piezoelectric materials, as well as materials in which there is emerging interest Principle of operation and design approaches for the making of flexural, contour-mode, thickness-mode, and shear-mode piezoelectric resonators, and examples of practical implementation of these devices Large scale manufacturing approaches, with a focus on the practical aspects associated with testing and qualification Examples of commercialization paths for piezoelectric MEMS resonators in the timing and the filter markets ...and more! The authors present industry and academic perspectives, making this book ideal for engineers, graduate students, and researchers.

Wide Bandgap Nanowires

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Publisher : John Wiley & Sons
ISBN 13 : 1119774381
Total Pages : 361 pages
Book Rating : 4.1/5 (197 download)

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Book Synopsis Wide Bandgap Nanowires by : Tuan Anh Pham

Download or read book Wide Bandgap Nanowires written by Tuan Anh Pham and published by John Wiley & Sons. This book was released on 2022-07-04 with total page 361 pages. Available in PDF, EPUB and Kindle. Book excerpt: WIDE BANDGAP NANOWIRES Comprehensive resource covering the synthesis, properties, and applications of wide bandgap nanowires This book presents first-hand knowledge on wide bandgap nanowires for sensor and energy applications. Taking a multidisciplinary approach, it brings together the materials science, physics and engineering aspects of wide bandgap nanowires, an area in which research has been accelerating dramatically in the past decade. Written by four well-qualified authors who have significant experience in the field, sample topics covered within the work include: Nanotechnology-enabled fabrication of wide bandgap nanowires, covering bottom-up, top-down and hybrid approaches Electrical, mechanical, optical, and thermal properties of wide bandgap nanowires, which are the basis for realizing sensor and energy device applications Measurement of electrical conductivity and fundamental electrical properties of nanowires Applications of nanowires, such as in flame sensors, biological sensors, and environmental monitoring For materials scientists, electrical engineers and professionals involved in the semiconductor industry, this book serves as a completely comprehensive resource to understand the topic of wide bandgap nanowires and how they can be successfully used in practical applications.

Percutaneous Penetration Enhancers Physical Methods in Penetration Enhancement

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Author :
Publisher : Springer
ISBN 13 : 3662532735
Total Pages : 496 pages
Book Rating : 4.6/5 (625 download)

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Book Synopsis Percutaneous Penetration Enhancers Physical Methods in Penetration Enhancement by : Nina Dragicevic

Download or read book Percutaneous Penetration Enhancers Physical Methods in Penetration Enhancement written by Nina Dragicevic and published by Springer. This book was released on 2017-05-04 with total page 496 pages. Available in PDF, EPUB and Kindle. Book excerpt: Percutaneous Penetration Enhancers in a mini-series format comprising five volumes, represents the most comprehensive reference on enhancement methods – both well established and recently introduced – in the field of dermal/transdermal drug delivery. In detail the broad range of both chemical and physical methods used to enhance the skin delivery of drugs is described. All aspects of drug delivery and measurement of penetration are covered, and the latest findings are provided on skin structure and function, mathematics in skin permeation, and modern analytical techniques adapted to assess and measure penetration. In offering a detailed description of the methods currently in use for penetration enhancement, this book will be of value for researchers, pharmaceutical scientists, practitioners, and also students.​

Handbook of Silicon Based MEMS Materials and Technologies

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Author :
Publisher : Elsevier
ISBN 13 : 012817787X
Total Pages : 1028 pages
Book Rating : 4.1/5 (281 download)

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Book Synopsis Handbook of Silicon Based MEMS Materials and Technologies by : Markku Tilli

Download or read book Handbook of Silicon Based MEMS Materials and Technologies written by Markku Tilli and published by Elsevier. This book was released on 2020-04-17 with total page 1028 pages. Available in PDF, EPUB and Kindle. Book excerpt: Handbook of Silicon Based MEMS Materials and Technologies, Third Edition is a comprehensive guide to MEMS materials, technologies, and manufacturing with a particular emphasis on silicon as the most important starting material used in MEMS. The book explains the fundamentals, properties (mechanical, electrostatic, optical, etc.), materials selection, preparation, modeling, manufacturing, processing, system integration, measurement, and materials characterization techniques of MEMS structures. The third edition of this book provides an important up-to-date overview of the current and emerging technologies in MEMS making it a key reference for MEMS professionals, engineers, and researchers alike, and at the same time an essential education material for undergraduate and graduate students. - Provides comprehensive overview of leading-edge MEMS manufacturing technologies through the supply chain from silicon ingot growth to device fabrication and integration with sensor/actuator controlling circuits - Explains the properties, manufacturing, processing, measuring and modeling methods of MEMS structures - Reviews the current and future options for hermetic encapsulation and introduces how to utilize wafer level packaging and 3D integration technologies for package cost reduction and performance improvements - Geared towards practical applications presenting several modern MEMS devices including inertial sensors, microphones, pressure sensors and micromirrors

Photon-Counting Image Sensors

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Author :
Publisher : MDPI
ISBN 13 : 3038423742
Total Pages : 379 pages
Book Rating : 4.0/5 (384 download)

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Book Synopsis Photon-Counting Image Sensors by : Eric R. Fossum

Download or read book Photon-Counting Image Sensors written by Eric R. Fossum and published by MDPI. This book was released on 2018-07-06 with total page 379 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book is a printed edition of the Special Issue "Photon-Counting Image Sensors" that was published in Sensors