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Silicon Dioxide Deposition At 100 C Using Vacuum Ultraviolet Light
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Book Synopsis Silicon Dioxide Deposition at 100 C Using Vacuum Ultraviolet Light by : J. Marks
Download or read book Silicon Dioxide Deposition at 100 C Using Vacuum Ultraviolet Light written by J. Marks and published by . This book was released on 1988 with total page 12 pages. Available in PDF, EPUB and Kindle. Book excerpt: Thin films of silicon dioxide are used extensively as insulators in the fabrication of many semiconductor devices. Silicon dioxide films deposited by chemical vapor deposition typically require temperatures near 800 C. However, some processes, such as the fabrication of devices with multilevel aluminum interconnects, require deposition temperatures below 350 C. Several techniques that have been developed for low-temperature deposition of silicon dioxide include plasma-assisted deposition, low-pressure chemical vapor deposition, and photo-assisted chemical vapor deposition. Some photochemical deposition reaction use Hg vapor as a photochemical catalyst to decompose nitrous oxide in the pressure of silane. Films deposited with these reactions have been found to have adhesion problems, and tend to be in completely oxidized. Several other deposition reactions using photodissociation of molecular oxygen or disilane have been reported. (jes).
Book Synopsis Photoassisted Deposition of Silicon Dioxide from Silane and Nitrogen Dioxide by : Jeffrey Marks
Download or read book Photoassisted Deposition of Silicon Dioxide from Silane and Nitrogen Dioxide written by Jeffrey Marks and published by . This book was released on 1988 with total page 17 pages. Available in PDF, EPUB and Kindle. Book excerpt: Three new reactions for depositing silicon dioxide at low temperatures using vacuum ultraviolet and ultraviolet radiation to initiate a reaction between silane and nitrogen dioxide have been developed. The optical and electrical properties of these films are reported. The effect of ion implantation on the infrared spectra of oxides grown by vacuum ultraviolet irradiation is also presented. Keywords: Photochemical deposition; Silicon dioxide; Silane; Nitrogen dioxide; ion implant; Effects; Silicon dioxide films. (mgm).
Book Synopsis Reduced Thermal Processing for ULSI by : R.A. Levy
Download or read book Reduced Thermal Processing for ULSI written by R.A. Levy and published by Springer Science & Business Media. This book was released on 2012-12-06 with total page 444 pages. Available in PDF, EPUB and Kindle. Book excerpt: As feature dimensions of integrated circuits shrink, the associated geometrical constraints on junction depth impose severe restrictions on the thermal budget for processing such devices. Furthermore, due to the relatively low melting point of the first aluminum metallization level, such restrictions extend to the fabrication of multilevel structures that are now essential in increasing packing density of interconnect lines. The fabrication of ultra large scale integrated (ULSI) devices under thermal budget restrictions requires the reassessment of existing and the development of new microelectronic materials and processes. This book addresses three broad but interrelated areas. The first area focuses on the subject of rapid thermal processing (RTP), a technology that allows minimization of processing time while relaxing the constraints on high temperature. Initially developed to limit dopant redistribution, current applications of RTP are shown here to encompass annealing, oxidation, nitridation, silicidation, glass reflow, and contact sintering. In a second but complementary area, advances in equipment design and performance of rapid thermal processing equipment are presented in conjunction with associated issues of temperature measurement and control. Defect mechanisms are assessed together with the resulting properties of rapidly deposited and processed films. The concept of RTP integration for a full CMOS device process is also examined together with its impact on device characteristics.
Book Synopsis Scientific and Technical Aerospace Reports by :
Download or read book Scientific and Technical Aerospace Reports written by and published by . This book was released on 1990 with total page 244 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Laser Processing and Chemistry by : Dieter Bäuerle
Download or read book Laser Processing and Chemistry written by Dieter Bäuerle and published by Springer Science & Business Media. This book was released on 2013-03-09 with total page 649 pages. Available in PDF, EPUB and Kindle. Book excerpt: Laser Processing and Chemistry gives an overview of the fundamentals and applications of laser--matter interactions, in particular with regard to laser material processing. Special attention is given to laser-induced physical and chemical processes at gas--solid, liquid--solid, and solid--solid interfaces. Starting with the background physics, the book proceeds to examine applications of laser techniques in micro-machining, and the patterning, coating, and modification of material surfaces. Students, engineers, and manufacturers alike will find this book an invaluable reference work for the state of the art in laser processing.
Book Synopsis Technical Reports Awareness Circular : TRAC. by :
Download or read book Technical Reports Awareness Circular : TRAC. written by and published by . This book was released on 1989 with total page 516 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis SiO2 and Its Interfaces: Volume 105 by : S. T. Pantelides
Download or read book SiO2 and Its Interfaces: Volume 105 written by S. T. Pantelides and published by Mrs Proceedings. This book was released on 1988-07-21 with total page 360 pages. Available in PDF, EPUB and Kindle. Book excerpt: The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.
Download or read book Physics Briefs written by and published by . This book was released on 1990 with total page 936 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Nuclear Science Abstracts written by and published by . This book was released on 1971-04 with total page 1658 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Japanese Technical Periodical Index by :
Download or read book Japanese Technical Periodical Index written by and published by . This book was released on 1987 with total page 572 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Handbook of Thin-film Deposition Processes and Techniques by : Klaus K. Schuegraf
Download or read book Handbook of Thin-film Deposition Processes and Techniques written by Klaus K. Schuegraf and published by William Andrew. This book was released on 1988 with total page 440 pages. Available in PDF, EPUB and Kindle. Book excerpt: The most recent developments and techniques in thin film deposition for high technology applications are described by 23 authorities in the field.
Book Synopsis Government Reports Annual Index by :
Download or read book Government Reports Annual Index written by and published by . This book was released on 1989 with total page 1372 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Electrical & Electronics Abstracts by :
Download or read book Electrical & Electronics Abstracts written by and published by . This book was released on 1997 with total page 1904 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author :United States. National Aeronautics and Space Administration. Scientific and Technical Information Division Publisher : ISBN 13 : Total Pages :2084 pages Book Rating :4.E/5 ( download)
Book Synopsis A Selected Listing of NASA Scientific and Technical Reports for 1966 by : United States. National Aeronautics and Space Administration. Scientific and Technical Information Division
Download or read book A Selected Listing of NASA Scientific and Technical Reports for 1966 written by United States. National Aeronautics and Space Administration. Scientific and Technical Information Division and published by . This book was released on 1967 with total page 2084 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Self-Cleaning Materials and Surfaces by : Walid A. Daoud
Download or read book Self-Cleaning Materials and Surfaces written by Walid A. Daoud and published by John Wiley & Sons. This book was released on 2013-07-12 with total page 513 pages. Available in PDF, EPUB and Kindle. Book excerpt: With increasing demand for hygienic, self-disinfecting and contamination free surfaces, interest in developing self-cleaning protective materials and surfaces has grown rapidly in recent times. This new title comprises of invited chapters from renowned researchers in the area of self-cleaning nano-coatings and the result is a comprehensive review of current research on both hydrophobic and hydrophilic (photocatalytic effect) self-cleaning materials.
Book Synopsis Japanese Journal of Applied Physics by :
Download or read book Japanese Journal of Applied Physics written by and published by . This book was released on 2007 with total page 1286 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author :United States. National Aeronautics and Space Administration Scientific and Technical Information Division Publisher : ISBN 13 : Total Pages :2300 pages Book Rating :4.F/5 ( download)
Book Synopsis NASA Scientific and Technical Reports by : United States. National Aeronautics and Space Administration Scientific and Technical Information Division
Download or read book NASA Scientific and Technical Reports written by United States. National Aeronautics and Space Administration Scientific and Technical Information Division and published by . This book was released on 1967 with total page 2300 pages. Available in PDF, EPUB and Kindle. Book excerpt:
