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Reactive Ion Beam Sputter Deposition Of High Temperature Superconducting Cuprate Oxide Thin Films
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Book Synopsis Reactive Ion Beam Sputter Deposition of High Temperature Superconducting Cuprate Oxide Thin Films by : Clifford Norman Soble
Download or read book Reactive Ion Beam Sputter Deposition of High Temperature Superconducting Cuprate Oxide Thin Films written by Clifford Norman Soble and published by . This book was released on 1992 with total page 252 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Computer-Controlled Ion Beam Sputter-Deposition of Superconducting Oxide Films by :
Download or read book Computer-Controlled Ion Beam Sputter-Deposition of Superconducting Oxide Films written by and published by . This book was released on 1989 with total page 76 pages. Available in PDF, EPUB and Kindle. Book excerpt: The goals of this project are: 1) the development of a new method for the fabrication of superconducting oxide thin films, viz computer controlled ion beam sputter deposition; and 2) the fabrication of YBa2Cu3O(7-delta) thin films and devices using this method. In the early stage of the project it was demonstrated that the use of complex multicomponent sputter targets (such as ceramic YBa2Cu3O7-delta) present significant problems for compositional control. The new computer-controlled ion beam sputter deposition system was developed. The key features include: 1) a rotatable target holder assembly, which serves to position elemental targets under the ion beam in a rapid sequence, 2) a primary ion beam to produce a sputtered flux from the targets, 3) a secondary oxygen beam (ionic, atomic, or reactive oxygen (ozone)) to oxygenate the film and lower the required deposition temperature, 4) complete computer interfacing to provide real time feedback on the thickness of the depositing species and control of the above items. In terms of the superconductor device objectives, the system is designed to allow for low temperature deposition for integrated devices, compositional control and flexibility, and for scaling to a commercial system. The capability of the system for controlled sequential deposition of layered structures is fundamental for the production of heterostructures and sandwich junctions (superconductor-insulator-superconductor and superconductor-normal-superconductor). This is demanding due to the short coherence lengths in the oxide superconductors.
Book Synopsis A Review of Basic Phenomena and Techniques for Sputter-deposition of High Temperature Superconducting Films by : O. Auciello
Download or read book A Review of Basic Phenomena and Techniques for Sputter-deposition of High Temperature Superconducting Films written by O. Auciello and published by . This book was released on 1990 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Handbook of Sputter Deposition Technology by : Kiyotaka Wasa
Download or read book Handbook of Sputter Deposition Technology written by Kiyotaka Wasa and published by William Andrew. This book was released on 2012-12-31 with total page 657 pages. Available in PDF, EPUB and Kindle. Book excerpt: This thoroughly updated new edition includes an entirely new team of contributing authors with backgrounds specializing in the various new applications of sputtering technology. It forms a bridge between fundamental theory and practical application, giving an insight into innovative new materials, devices and systems. Organized into three parts for ease of use, this Handbook introduces the fundamentals of thin films and sputtering deposition, explores the theory and practices of this field, and also covers new technology such as nano-functional materials and MEMS. Wide varieties of functional thin film materials and processing are described, and experimental data is provided with detailed examples and theoretical descriptions. A strong applications focus, covering current and emerging technologies, including nano-materials and MEMS (microelectrolmechanical systems) for energy, environments, communications, and/or bio-medical field. New chapters on computer simulation of sputtering and MEMS completes the update and insures that the new edition includes the most current and forward-looking coverage available All applications discussed are supported by theoretical discussions, offering readers both the "how" and the "why" of each technique 40% revision: the new edition includes an entirely new team of contributing authors with backgrounds specializing in the various new applications that are covered in the book and providing the most up-to-date coverage available anywhere
Book Synopsis Handbook of Sputter Deposition Technology by : Shigeru Hayakawa
Download or read book Handbook of Sputter Deposition Technology written by Shigeru Hayakawa and published by William Andrew Publishing. This book was released on 1992-01-01 with total page 304 pages. Available in PDF, EPUB and Kindle. Book excerpt: A concise, comprehensive overview of sputter deposition technologyùa key technology for materials research in the next decade. Cathode sputtering is widely used in the microelectronics industry for silicon integrated circuit production and for metallurgical coatings. High temperature superconductors can be synthesized with sputtering under non-equilibrium conditions. Diamond films and ferroelectric materials are other applications.
Book Synopsis Reactive Sputter Deposition by : Diederik Depla
Download or read book Reactive Sputter Deposition written by Diederik Depla and published by Springer Science & Business Media. This book was released on 2008-06-24 with total page 584 pages. Available in PDF, EPUB and Kindle. Book excerpt: In this valuable work, all aspects of the reactive magnetron sputtering process, from the discharge up to the resulting thin film growth, are described in detail, allowing the reader to understand the complete process. Hence, this book gives necessary information for those who want to start with reactive magnetron sputtering, understand and investigate the technique, control their sputtering process and tune their existing process, obtaining the desired thin films.
Book Synopsis Computer Simulation of Scattered Ion and Sputtered Species Effects in Ion Beam Sputter-deposition of High Temperature Superconducting Thin Films by :
Download or read book Computer Simulation of Scattered Ion and Sputtered Species Effects in Ion Beam Sputter-deposition of High Temperature Superconducting Thin Films written by and published by . This book was released on 1992 with total page 10 pages. Available in PDF, EPUB and Kindle. Book excerpt: Ion beam sputter-deposition is a technique currently used by many groups to produce single and multicomponent thin films. This technique provides several advantages over other deposition methods, which include the capability for yielding higher film density, accurate stoichiometry control, and smooth surfaces. However, the relatively high kinetic energies associated with ion beam sputtering also lead to difficulties if the process is not properly controlled. Computer simulations have been performed to determine net deposition rates, as well as the secondary erosion, lattice damage, and gas implantation in the films, associated with primary ions scattered from elemental Y, Ba and Cu targets used to produce high temperature superconducting Y-Ba-Cu-O films. The simulations were performed using the TRIM code for different ion masses and kinetic energies, and different deposition geometries. Results are presented for primary beams of Ar, Kr and Xe+ incident on Ba and Cu targets at 0° and 45° with respect to the surface normal, with the substrate positioned at 0° and 45°. The calculations indicate that the target composition, mass and kinetic energy of the primary beam, angle of incidence on the target, and position and orientation of the substrate affect the film damage and trapped primary beam gas by up to 5 orders of magnitude.
Book Synopsis Influence of Ion Beam Mixing on the Growth of High Temperature Oxide Superconducting Thin Film by :
Download or read book Influence of Ion Beam Mixing on the Growth of High Temperature Oxide Superconducting Thin Film written by and published by . This book was released on 1989 with total page 7 pages. Available in PDF, EPUB and Kindle. Book excerpt: The superconducting properties of high temperature superconductor thin films are dependent on the quality of the substrate used to grow these films. In order to maximize the lattice matching between the superconducting film and the substrate, we have used a YBa2Cu3O-- thin film deposited on {l angle}100{r angle} SrTiO3 as a template. The first film was prepared by coevaporation of Y, BaF2 and Cu on {l angle}100{r angle} SrTiO3, followed by an anneal in wet'' oxygen at 850°C. This film showed a sharp transition at about 90 K.A thicker layer of about 5000 A was then deposited on top of this first 2000 Å film, using the same procedure. After the post anneal at 850°C, the transition took place at 80 K and no epitaxy of the second film was observed. Ion beam mixing at 400°C, using 400 keV O ions was done at the interface of the two films (the second one being not annealed). After the post anneal, the film displayed an improved Tc at 90K. Moreover, epitaxy was shown to take place from the interface SrTiO3-123 film towards the surface and was dependent of the dose. These results will be discussed from the data obtained from Rutherford backscattering spectroscopy (RBS) combined with channeling experiments, x-ray diffraction (XRD) and scanning electron microscopy (SEM) observations. 8 refs., 2 figs., 2 tabs.
Book Synopsis High Rate Sputter Deposition Method for Superconductors by :
Download or read book High Rate Sputter Deposition Method for Superconductors written by and published by . This book was released on 1997 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt: Magnetron sputtering deposition is potentially the most economical deposition method for thin films. Presently sputtering can't deposit high temperature superconductors like Yttrium Barium Copper Oxide (YBCO) because of negative oxygen ion bombardment damage. Lowering the plasma discharge voltage to less than 100 volts would decrease such damage and make YBCO economically practical. The goal of this phase I effort was to lower plasma discharge voltages using high magnetic fields. Our results showed that high magnetic fields alone can lower plasma voltages to about 200 volts. Just as important, we showed that plasma impedance was lowered by more than ten times. Low plasma impedance allows high magnetic fields and electron injection into the plasma to be combined to lower plasma voltage to 30 volts. This combination removes the power limitations of electron injection. It should also produce epitaxial quality thin film semiconductors because low voltages allow 'self-bombardment' where the adatoms have the optimum energy to form a crystalline matrix at lower temperatures. The method is also applicable to thin film semiconductors such as II-VI solar cells and III-V films.
Book Synopsis The Study on the Growth of In-situ High-T[subscript C] Bi-Sr-Ca-Cu-O Superconducting Thin Films Using Single Target Rf Magnetron Sputtering System by : Ji Ung Lee
Download or read book The Study on the Growth of In-situ High-T[subscript C] Bi-Sr-Ca-Cu-O Superconducting Thin Films Using Single Target Rf Magnetron Sputtering System written by Ji Ung Lee and published by . This book was released on 1991 with total page 138 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Synthesis of YBa2Cu3O--[subscript Delta] Superconducting Thin Films by Reactive Ion-beam Sputter-deposition for Application to Devices by : René Ralph Woolcott
Download or read book Synthesis of YBa2Cu3O--[subscript Delta] Superconducting Thin Films by Reactive Ion-beam Sputter-deposition for Application to Devices written by René Ralph Woolcott and published by . This book was released on 1993 with total page 232 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis REACTIVE SPUTTER DEPOSITION OF VANADIUM, NICKEL, AND MOLYBDENUM OXIDE THIN FILMS FOR USE IN UNCOOLED INFRARED IMAGING. by : Yao Jin
Download or read book REACTIVE SPUTTER DEPOSITION OF VANADIUM, NICKEL, AND MOLYBDENUM OXIDE THIN FILMS FOR USE IN UNCOOLED INFRARED IMAGING. written by Yao Jin and published by . This book was released on 2014 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: A vanadium oxide (VO x) thin film is the most common imaging layer used in commercial uncooled focal plane arrays for infrared cameras. These VOx thin films have an x value ranging from 1.3 to 2 and have low resistivity (0.1 to 10 [omega] cm), high temperature coefficient of resistance (TCR) (-2 to -3 %/K), and low 1/f noise. Reactive ion beam sputtering is typically used to deposit these VOx thin films for commercial thermal imaging cameras. However, the reactive ion beam deposition system for the VOx is reported to have less than desirable throughput and a narrow process window. In this work, the potential for reactive pulsed-dc magnetron sputtering of nanocomposite VOx thin films for microbolometer applications was investigated. VOx thin films with resistivity from 10-4 to 105 [omega] cm with a TCR from 0 to -4.3 %/K were deposited by reactive sputtering from a metallic vanadium target in argon/oxygen mixtures with substrate bias. Magnetron sputtered VOx shows bolometric properties comparable to those of commercial-grade IBD prepared VOx. Important limitations for manufacturing implementation of reactive magnetron sputtering such as hysteresis oxidation and non-uniform oxidation of the vanadium target surface were evaluated. The VOx film deposition rate, resistivity, and temperature coefficient of resistance were correlated to oxygen to argon ratio, processing pressure, target-to-substrate distance, and oxygen inlet positions. To deposit VOx in the resistivity range of 0.1--10 [omega] cm with good uniformity and process control, it was found that a lower processing pressure, larger target-to-substrate distance, and an oxygen inlet near the substrate are useful. Other processing methods employing magnetron sputtering were investigated such as co-sputtering of V and V2O5 target, sputtering from a VC target, a V2O5 target, and a V2Ox target but initial investigation of these methods did not yield a superior process to the simple sputtering of a pure metallic vanadium target. Another technique, biased target ion beam deposition (BTIBD), was investigated for deposition VOx thin films with potential alloy additions. In this BTIBD system, ions with energy lower than 25 eV were generated remotely and vanadium targets are negatively biased independently for sputtering. High TCR (
Book Synopsis Studies on Ion Scattering and Sputtering Processes Relevant to Ion Beam Sputter Deposition of Multicomponent Thin Films by :
Download or read book Studies on Ion Scattering and Sputtering Processes Relevant to Ion Beam Sputter Deposition of Multicomponent Thin Films written by and published by . This book was released on 1989 with total page 5 pages. Available in PDF, EPUB and Kindle. Book excerpt: Results from computer simulation and experiments on ion scattering and sputtering processes in ion beam sputter deposition of high Tc superconducting and ferroelectric thin films are presented. It is demonstrated that scattering of neutralized ions from the targets can result in undesirable erosion of, and inert gas incorporation in, the growing films, depending on the ion/target atom ass ratio and ion beam angle of incidence/target/substrate geometry. The studies indicate that sputtering Kr or Xe ions is preferable to the most commonly used Ar+ ions, since the undesirable phenomena mentioned above are minimized for the first two ions. These results are used to determine optimum sputter deposition geometry and ion beam parameters for growing multicomponent oxide thin films by ion beam sputter-deposition. 10 refs., 5 figs.
Book Synopsis Reactive Ion Beam Etching of Aluminum-4% Copper Thin Films and Diamond by : Timothy John Whetten
Download or read book Reactive Ion Beam Etching of Aluminum-4% Copper Thin Films and Diamond written by Timothy John Whetten and published by . This book was released on 1986 with total page 300 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Sputter Deposition for Multi-component Thin Films by :
Download or read book Sputter Deposition for Multi-component Thin Films written by and published by . This book was released on 1990 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: Ion beam sputter-induced deposition using a single ion beam and a multicomponent target is capable of reproducibly producing thin films of arbitrary composition, including those which are close to stoichiometry. Using a quartz crystal deposition monitor and a computer controlled, well-focused ion beam, this sputter-deposition approach is capable of producing metal oxide superconductors and semiconductors of the superlattice type such as GaAs-AlGaAs as well as layered metal/oxide/semiconductor/superconductor structures. By programming the dwell time for each target according to the known sputtering yield and desired layer thickness for each material, it is possible to deposit composite films from a well-controlled sub-monolayer up to thicknesses determined only by the available deposition time. In one embodiment, an ion beam is sequentially directed via a set of X-Y electrostatic deflection plates onto three or more different element or compound targets which are constituents of the desired film. In another embodiment, the ion beam is directed through an aperture in the deposition plate and is displaced under computer control to provide a high degree of control over the deposited layer. In yet another embodiment, a single fixed ion beam is directed onto a plurality of sputter targets in a sequential manner where the targets are each moved in alignment with the beam under computer control in forming a multilayer thin film. This controlled sputter-deposition approach may also be used with laser and electron beams.
Book Synopsis High Temperature Superconducting Thin Films by : Paul H. Ballentine
Download or read book High Temperature Superconducting Thin Films written by Paul H. Ballentine and published by . This book was released on 1993 with total page 222 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Symposium on the Deposition of Thin Films by Sputtering by : Consolidated Vacuum Corporation
Download or read book Symposium on the Deposition of Thin Films by Sputtering written by Consolidated Vacuum Corporation and published by . This book was released on 1966 with total page 122 pages. Available in PDF, EPUB and Kindle. Book excerpt:
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