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Author : Rajendra Singh
Publisher :
ISBN 13 :
Total Pages : 440 pages
Book Rating : 4.3/5 (91 download)
Download or read book Rapid Thermal and Related Processing Techniques written by Rajendra Singh and published by . This book was released on 1991 with total page 440 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Richard B. Fair
Publisher : Academic Press
ISBN 13 : 0323139809
Total Pages : 430 pages
Book Rating : 4.3/5 (231 download)
Download or read book Rapid Thermal Processing written by Richard B. Fair and published by Academic Press. This book was released on 2012-12-02 with total page 430 pages. Available in PDF, EPUB and Kindle. Book excerpt: This is the first definitive book on rapid thermal processing (RTP), an essential namufacturing technology for single-wafer processing in highly controlled environments. Written and edited by nine experts in the field, this book covers a range of topics for academics and engineers alike, moving from basic theory to advanced technology for wafer manufacturing. The book also provides new information on the suitability or RTP for thin film deposition, junction formation, silicides, epitaxy, and in situ processing. Complete discussions on equipment designs and comparisons between RTP and other processing approaches also make this book useful for supplemental information on silicon processing, VLSI processing, and integrated circuit engineering.
Author : Dim-Lee Kwong
Publisher : The Electrochemical Society
ISBN 13 : 9781566773157
Total Pages : 458 pages
Book Rating : 4.7/5 (731 download)
Download or read book Rapid Thermal and Other Short-time Processing Technologies II written by Dim-Lee Kwong and published by The Electrochemical Society. This book was released on 2001 with total page 458 pages. Available in PDF, EPUB and Kindle. Book excerpt: "Electronics, Dielectric Science and Technology, and High Temperature Materials Divisions."
Author : Wielfried Lerch
Publisher : Trans Tech Publications Ltd
ISBN 13 : 3038131733
Total Pages : 448 pages
Book Rating : 4.0/5 (381 download)
Download or read book Rapid Thermal Processing and beyond: Applications in Semiconductor Processing written by Wielfried Lerch and published by Trans Tech Publications Ltd. This book was released on 2008-03-24 with total page 448 pages. Available in PDF, EPUB and Kindle. Book excerpt: Heat-treatment and thermal annealing are very common processing steps which have been employed during semiconductor manufacturing right from the beginning of integrated circuit technology. In order to minimize undesired diffusion, and other thermal budget-dependent effects, the trend has been to reduce the annealing time sharply by switching from standard furnace batch-processing (involving several hours or even days), to rapid thermal processing involving soaking times of just a few seconds. This transition from thermal equilibrium, to highly non-equilibrium, processing was very challenging and is still a field ripe for further development.
Author : F. Roozeboom
Publisher : Springer Science & Business Media
ISBN 13 : 9401587116
Total Pages : 568 pages
Book Rating : 4.4/5 (15 download)
Download or read book Advances in Rapid Thermal and Integrated Processing written by F. Roozeboom and published by Springer Science & Business Media. This book was released on 2013-03-09 with total page 568 pages. Available in PDF, EPUB and Kindle. Book excerpt: Rapid thermal and integrated processing is an emerging single-wafer technology in ULSI semiconductor manufacturing, electrical engineering, applied physics and materials science. Here, the physics and engineering of this technology are discussed at the graduate level. Three interrelated areas are covered. First, the thermophysics of photon-induced annealing of semiconductor and related materials, including fundamental pyrometry and emissivity issues, the modelling of reactor designs and processes, and their relation to temperature uniformity. Second, process integration, treating the advances in basic equipment design, scale-up, integrated cluster-tool equipment, including wafer cleaning and integrated processing. Third, the deposition and processing of thin epitaxial, dielectric and metal films, covering selective deposition and epitaxy, integrated processing of layer stacks, and new areas of potential application, such as the processing of III-V semiconductor structures and thin- film head processing for high-density magnetic data storage.
Author : J. C. Gelpey
Publisher :
ISBN 13 :
Total Pages : 416 pages
Book Rating : 4.:/5 (318 download)
Download or read book Rapid Thermal and Integrated Processing V: Volume 429 written by J. C. Gelpey and published by . This book was released on 1996-10-14 with total page 416 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book is the latest in a continuing series on rapid thermal processing and related topics. It embraces a diversity of research, development and manufacturing activities that require rapid thermal and integrated processing techniques which are recognized by their acronyms, such as rapid thermal annealing (RTA), rapid thermal processing (RTP), rapid thermal chemical vapor deposition (RTCVP), rapid thermal oxidation (RTO), and others. This fifth anniversary volume reports notable advances in the use of rapid thermal techniques in processing science and technology, and for process control in industrial fabrication facilities. It is organized around progress obtained through: evaluation methodology; equipment and process modelling; temperature control; defects and diffusion associated with annealing; metallizations such as silicidation; novel processing of sol-gel and magnetic films; dielectric growth and deposition; and silicon or silicon-germanium film deposition.
Author : Senate Commission on Food Safety SKLM
Publisher : John Wiley & Sons
ISBN 13 : 3527611509
Total Pages : 294 pages
Book Rating : 4.5/5 (276 download)
Download or read book Thermal Processing of Food written by Senate Commission on Food Safety SKLM and published by John Wiley & Sons. This book was released on 2007-09-24 with total page 294 pages. Available in PDF, EPUB and Kindle. Book excerpt: This is the latest and most authoritative documentation of current scientific knowledge regarding the health effects of thermal food processing. Authors from all over Europe and the USA provide an international perspective, weighing up the risks and benefits. In addition, the contributors outline those areas where further research is necessary.
Author : S. Donald Holdsworth
Publisher : Springer
ISBN 13 : 3319249045
Total Pages : 516 pages
Book Rating : 4.3/5 (192 download)
Download or read book Thermal Processing of Packaged Foods written by S. Donald Holdsworth and published by Springer. This book was released on 2015-11-30 with total page 516 pages. Available in PDF, EPUB and Kindle. Book excerpt: This new edition discusses the physical and engineering aspects of the thermal processing of packaged foods and examines the methods which have been used to establish the time and temperature of processes suitable to achieve adequate sterilization or pasteurization of the packaged food. The third edition is totally renewed and updated, including new concepts and areas that are relevant for thermal food processing: This edition is formed by 22 chapters—arranged in five parts—that maintain great parts of the first and second editions The First part includes five chapters analyzing different topics associated to heat transfer mechanism during canning process, kinetic of microbial death, sterilization criteria and safety aspect of thermal processing. The second part, entitled Thermal Food Process Evaluation Techniques, includes six chapters and discusses the main process evaluation techniques. The third part includes six chapters treating subjects related with pressure in containers, simultaneous sterilization and thermal food processing equipment. The fourth part includes four chapters including computational fluid dynamics and multi-objective optimization. The fifth part, entitled Innovative Thermal Food Processing, includes a chapter focused on two innovative processes used for food sterilization such high pressure with thermal sterilization and ohmic heating. Thermal Processing of Pa ckaged Foods, Third Edition is intended for a broad audience, from undergraduate to post graduate students, scientists, engineers and professionals working for the food industry.
Author : M. Meyyappan
Publisher : The Electrochemical Society
ISBN 13 : 9781566770965
Total Pages : 644 pages
Book Rating : 4.7/5 (79 download)
Download or read book Proceedings of the Symposium Om Process Control, Diagnostics, and Modeling in Semiconductor Manufacturing written by M. Meyyappan and published by The Electrochemical Society. This book was released on 1995 with total page 644 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : A. Slaoui
Publisher : Elsevier Science
ISBN 13 : 9780080436128
Total Pages : 0 pages
Book Rating : 4.4/5 (361 download)
Download or read book Rapid Thermal Processing written by A. Slaoui and published by Elsevier Science. This book was released on 1999-03-17 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt: Rapid Thermal Processing (RTP) is a well established single-wafer technology in USLI semiconductor manufacturing and electrical engineering, as well as in materials science. The biggest advantage of RTP is that it eliminates the long-ramp-up and ramp-down times associated with furnaces, enabling a significant reduction in the thermal budget. Today, RTP is in production use for source/drain implant annealing, contact alloying, formation of refractory nitrides and silicides and thin gate dielectric (oxide) formation. The aim of Symposium I was to provide an overview of the latest information on research and development in the different topics cited above. The potential applications of RTP in new areas like large area devices such as flat planel displays and solar cells has to be investigated. About 30 papers were presented in this symposium. The contributions of most interest involved modelling and control, junctions formation and thermal oxidation, deposition and recrystallisation and silicide formations. However, the range of topics and the intent to focus on underlying, fundamental issues like dopant diffusion in silicon from solid sources, strain relaxation and photonic effects, nucleation as well as applications to magnetic films and solar cells devices.
Author :
Publisher :
ISBN 13 :
Total Pages : 460 pages
Book Rating : 4.3/5 (91 download)
Download or read book Rapid Thermal and Integrated Processing written by and published by . This book was released on 1997 with total page 460 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Nuggehalli M. Ravindra
Publisher : Minerals, Metals, & Materials Society
ISBN 13 :
Total Pages : 192 pages
Book Rating : 4.F/5 ( download)
Download or read book Transient Thermal Processing Techniques in Electronic Materials written by Nuggehalli M. Ravindra and published by Minerals, Metals, & Materials Society. This book was released on 1996 with total page 192 pages. Available in PDF, EPUB and Kindle. Book excerpt: This volume presents a research update of silicon and non-silicon transient processing techniques such as rapid thermal processing, pulsed laser processes, flash evaporation, jet processes, and more. Also covered are process sensors, equipment issues, and the manufacturing perspective.
Author : Fred Roozeboom
Publisher : The Electrochemical Society
ISBN 13 : 9781566772747
Total Pages : 482 pages
Book Rating : 4.7/5 (727 download)
Download or read book Rapid Thermal and Other Short-time Processing Technologies written by Fred Roozeboom and published by The Electrochemical Society. This book was released on 2000 with total page 482 pages. Available in PDF, EPUB and Kindle. Book excerpt: The proceedings from this May 2000 symposium illustrate the range of applications in Rapid Thermal Processing (RTP). The refereed papers cover a variety of issues, such as ultra-shallow junctions; contacts for nanoscale CMOS; gate stacks; new applications of RTP, such as for the enhanced crystalization of amorphous silicon thin films; and advances on RTP systems and process monitoring, including optimizing and controlling gas flows in an RTCVD reactor. Most presentations are supported by charts and other graphical data. c. Book News Inc.
Author : Patrick J. Cullen
Publisher : Academic Press
ISBN 13 : 0123814707
Total Pages : 544 pages
Book Rating : 4.1/5 (238 download)
Download or read book Novel Thermal and Non-Thermal Technologies for Fluid Foods written by Patrick J. Cullen and published by Academic Press. This book was released on 2011-08-17 with total page 544 pages. Available in PDF, EPUB and Kindle. Book excerpt: Chapter 1. Status and Trends of Novel Thermal and Non-Thermal Technologies for Fluid Foods -- Chapter 2. Fluid Dynamics in Novel Thermal and Non-Thermal Processes -- Chapter 3. Fluid Rheology in Novel Thermal and Non-Thermal Processes --Chapter 4. Pulsed Electric Field Processing of Fluid Foods -- Chapter 5. High Pressure Processing of Fluid Foods -- Chapter 6. Ultrasound Processing of Fluid Foods -- Chapter 7. Irradiation of Fluid Foods -- Chapter 8. Ultraviolet and Pulsed Light Processing of Fluid Foods -- Chapter 9. Ozone Processing of Fluid Foods -- Chapter 10. Dense Phase Carbon Dioxide Processing of Fluid Foods -- Chapter 11. Ohmic Heating of Fluid Foods -- Chapter 12. Microwave Heating of Fluid Foods -- Chapter 13. Infrared Heating of Fluid Foods -- Chapter 14. Modelling the Kinetics of Microbial and Quality Attributes of Fluid Food during Novel Thermal and Non-Thermal Processes -- Chapter 15. Regulatory and Legislative issues for Thermal and Non-Thermal Technologies: An EU Pers ...
Author : Paul J. Timans
Publisher : The Electrochemical Society
ISBN 13 : 9781566773348
Total Pages : 500 pages
Book Rating : 4.7/5 (733 download)
Download or read book Rapid Thermal and Other Short-time Processing Technologies III written by Paul J. Timans and published by The Electrochemical Society. This book was released on 2002 with total page 500 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Fred Roozeboom
Publisher : The Electrochemical Society
ISBN 13 : 9781566772327
Total Pages : 470 pages
Book Rating : 4.7/5 (723 download)
Download or read book Advances in Rapid Thermal Processing written by Fred Roozeboom and published by The Electrochemical Society. This book was released on 1999 with total page 470 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Shivani Pathania
Publisher : John Wiley & Sons
ISBN 13 : 1119614740
Total Pages : 340 pages
Book Rating : 4.1/5 (196 download)
Download or read book Food Formulation written by Shivani Pathania and published by John Wiley & Sons. This book was released on 2021-03-15 with total page 340 pages. Available in PDF, EPUB and Kindle. Book excerpt: Reviews innovative processing techniques and recent developments in food formulation, identification, and utilization of functional ingredients Food Formulation: Novel Ingredients and Processing Techniques is a comprehensive and up-to-date account of novel food ingredients and new processing techniques used in advanced commercial food formulations. This unique volume will help students and industry professionals alike in understanding the current trends, emerging technologies, and their impact on the food formulation techniques. Contributions from leading academic and industrial experts provide readers with informed and relevant insights on using the latest technologies and production processes for new product development and reformulations. The text first describes the basis of a food formulation, including smart protein and starch ingredients, healthy ingredients such as salt and sugar replacers, and interactions within the food components. Emphasizing operational principles, the book reviews state-of-the-art 3D printing technology, encapsulation and a range of emerging technologies including high pressure, pulsed electric field, ultrasound and supercritical fluid extraction. The final chapters discuss recent developments and trends in food formulation, from foods that target allergies and intolerance, to prebiotic and probiotic food formulation designed to improve gut health. A much-needed reference on novel sourcing of food ingredients, processing technologies, and application, this book: Explores new food ingredients as well as impact of processing on ingredient interactions Describes new techniques that improve the flavor and acceptability of functional food ingredients Reviews mathematical tools used for recipe formulation, process control and consumer studies Includes regulations and legislations around tailor-made food products Food Formulation: Novel Ingredients and Processing Techniques is an invaluable resource for students, educators, researchers, food technologists, and professionals, engineers and scientists across the food industry.
