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Author : Dim-Lee Kwong
Publisher :
ISBN 13 :
Total Pages : 184 pages
Book Rating : 4.3/5 (91 download)
Download or read book Rapid Thermal and Laser Processing written by Dim-Lee Kwong and published by . This book was released on 1993 with total page 184 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : F. Roozeboom
Publisher : Springer Science & Business Media
ISBN 13 : 9401587116
Total Pages : 568 pages
Book Rating : 4.4/5 (15 download)
Download or read book Advances in Rapid Thermal and Integrated Processing written by F. Roozeboom and published by Springer Science & Business Media. This book was released on 2013-03-09 with total page 568 pages. Available in PDF, EPUB and Kindle. Book excerpt: Rapid thermal and integrated processing is an emerging single-wafer technology in ULSI semiconductor manufacturing, electrical engineering, applied physics and materials science. Here, the physics and engineering of this technology are discussed at the graduate level. Three interrelated areas are covered. First, the thermophysics of photon-induced annealing of semiconductor and related materials, including fundamental pyrometry and emissivity issues, the modelling of reactor designs and processes, and their relation to temperature uniformity. Second, process integration, treating the advances in basic equipment design, scale-up, integrated cluster-tool equipment, including wafer cleaning and integrated processing. Third, the deposition and processing of thin epitaxial, dielectric and metal films, covering selective deposition and epitaxy, integrated processing of layer stacks, and new areas of potential application, such as the processing of III-V semiconductor structures and thin- film head processing for high-density magnetic data storage.
Author : Dim-Lee Kwong
Publisher : The Electrochemical Society
ISBN 13 : 9781566773157
Total Pages : 458 pages
Book Rating : 4.7/5 (731 download)
Download or read book Rapid Thermal and Other Short-time Processing Technologies II written by Dim-Lee Kwong and published by The Electrochemical Society. This book was released on 2001 with total page 458 pages. Available in PDF, EPUB and Kindle. Book excerpt: "Electronics, Dielectric Science and Technology, and High Temperature Materials Divisions."
Author : Fred Roozeboom
Publisher : The Electrochemical Society
ISBN 13 : 9781566772747
Total Pages : 482 pages
Book Rating : 4.7/5 (727 download)
Download or read book Rapid Thermal and Other Short-time Processing Technologies written by Fred Roozeboom and published by The Electrochemical Society. This book was released on 2000 with total page 482 pages. Available in PDF, EPUB and Kindle. Book excerpt: The proceedings from this May 2000 symposium illustrate the range of applications in Rapid Thermal Processing (RTP). The refereed papers cover a variety of issues, such as ultra-shallow junctions; contacts for nanoscale CMOS; gate stacks; new applications of RTP, such as for the enhanced crystalization of amorphous silicon thin films; and advances on RTP systems and process monitoring, including optimizing and controlling gas flows in an RTCVD reactor. Most presentations are supported by charts and other graphical data. c. Book News Inc.
Author : Victor E. Borisenko
Publisher : Springer Science & Business Media
ISBN 13 : 1489918043
Total Pages : 374 pages
Book Rating : 4.4/5 (899 download)
Download or read book Rapid Thermal Processing of Semiconductors written by Victor E. Borisenko and published by Springer Science & Business Media. This book was released on 2013-11-22 with total page 374 pages. Available in PDF, EPUB and Kindle. Book excerpt: Rapid thermal processing has contributed to the development of single wafer cluster processing tools and other innovations in integrated circuit manufacturing environments. Borisenko and Hesketh review theoretical and experimental progress in the field, discussing a wide range of materials, processes, and conditions. They thoroughly cover the work of international investigators in the field.
Author : Richard B. Fair
Publisher : Academic Press
ISBN 13 : 0323139809
Total Pages : 441 pages
Book Rating : 4.3/5 (231 download)
Download or read book Rapid Thermal Processing written by Richard B. Fair and published by Academic Press. This book was released on 2012-12-02 with total page 441 pages. Available in PDF, EPUB and Kindle. Book excerpt: This is the first definitive book on rapid thermal processing (RTP), an essential namufacturing technology for single-wafer processing in highly controlled environments. Written and edited by nine experts in the field, this book covers a range of topics for academics and engineers alike, moving from basic theory to advanced technology for wafer manufacturing. The book also provides new information on the suitability or RTP for thin film deposition, junction formation, silicides, epitaxy, and in situ processing. Complete discussions on equipment designs and comparisons between RTP and other processing approaches also make this book useful for supplemental information on silicon processing, VLSI processing, and integrated circuit engineering.
Author : H. Fukuda
Publisher : Elsevier
ISBN 13 : 0080540260
Total Pages : 161 pages
Book Rating : 4.0/5 (85 download)
Download or read book Rapid Thermal Processing for Future Semiconductor Devices written by H. Fukuda and published by Elsevier. This book was released on 2003-04-02 with total page 161 pages. Available in PDF, EPUB and Kindle. Book excerpt: This volume is a collection of papers which were presented at the 2001 International Conference on Rapid Thermal Processing (RTP 2001) held at Ise Shima, Mie, on November 14-16, 2001. This symposium is second conference followed the previous successful first International RTP conference held at Hokkaido in 1997. The RTP 2001 covered the latest developments in RTP and other short-time processing continuously aiming to point out the future direction in the Silicon ULSI devices and II-VI, III-V compound semiconductor devices.This book covers the following areas: advanced MOS gate stack, integration technologies, advancd channel engineering including shallow junction, SiGe, hetero-structure, novel metallization, inter-connect, silicidation, low-k materials, thin dielectrics including gate dielectrics and high-k materials, thin film deposition including SiGe, SOI and SiC, process and device modelling, Laser-assisted crystallization and TFT device fabrication technologies, temperature monitoring and slip-free technologies.
Author : Fred Roozeboom
Publisher : The Electrochemical Society
ISBN 13 : 9781566772327
Total Pages : 470 pages
Book Rating : 4.7/5 (723 download)
Download or read book Advances in Rapid Thermal Processing written by Fred Roozeboom and published by The Electrochemical Society. This book was released on 1999 with total page 470 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Jacques Perriere
Publisher : Elsevier
ISBN 13 : 0080459714
Total Pages : 469 pages
Book Rating : 4.0/5 (84 download)
Download or read book Recent Advances in Laser Processing of Materials written by Jacques Perriere and published by Elsevier. This book was released on 2006-03-29 with total page 469 pages. Available in PDF, EPUB and Kindle. Book excerpt: Laser materials interaction and processing is an established and growing field within the materials science community. By taking a detailed look at the fundamentals of laser matter interaction, Recent Advances in Laser Processing of Materials charts the recent progress of laser materials interaction and processing in various emerging materials science domains. With special emphasis placed on nanostructures and future developments, this book provides an interdisciplinary support for basic and applied photo-assisted processing research. Coverage includes: - laser assisted synthesis of new materials (nanoparticles, nanotubes, active molecules, new phases...) - laser assisted surface transformation (nanostructuring, lithography, etching...) - laser assisted bulk material transformation (doping, marking, crystallisation...) - Laser assisted synthesis of new materials (nanoparticles, nanotubes, active molecules, new phases...) - Laser assisted surface transformation (nanostructuring, lithography, etching...) - Laser assisted bulk material transformation (doping, marking, crystallisation...)
Author : Elijah Kannatey-Asibu, Jr.
Publisher : John Wiley & Sons
ISBN 13 : 0470459190
Total Pages : 849 pages
Book Rating : 4.4/5 (74 download)
Download or read book Principles of Laser Materials Processing written by Elijah Kannatey-Asibu, Jr. and published by John Wiley & Sons. This book was released on 2009-04-22 with total page 849 pages. Available in PDF, EPUB and Kindle. Book excerpt: Coverage of the most recent advancements and applications in laser materials processing This book provides state-of-the-art coverage of the field of laser materials processing, from fundamentals to applications to the latest research topics. The content is divided into three succinct parts: Principles of laser engineering-an introduction to the basic concepts and characteristics of lasers, design of their components, and beam delivery Engineering background&-a review of engineering concepts needed to analyze different processes: thermal analysis and fluid flow; solidification of molten metal; and residual stresses that evolve during processes Laser materials processing-a rigorous and detailed treatment of laser materials processing and its principle applications, including laser cutting and drilling, welding, surface modification, laser forming, and rapid prototyping Each chapter includes an outline, summary, and example sets to help readers reinforce their understanding of the material. This book is designed to prepare graduate students who will be entering industry; researchers interested in initiating a research program; and practicing engineers who need to stay abreast of the latest developments in this rapidly evolving field.
Author : Paul J. Timans
Publisher : The Electrochemical Society
ISBN 13 : 9781566773348
Total Pages : 500 pages
Book Rating : 4.7/5 (733 download)
Download or read book Rapid Thermal and Other Short-time Processing Technologies III written by Paul J. Timans and published by The Electrochemical Society. This book was released on 2002 with total page 500 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : KOJI SUGIOKA.
Publisher :
ISBN 13 : 9783319695372
Total Pages : pages
Book Rating : 4.6/5 (953 download)
Download or read book Handbook of Laser Micro- and Nano-Engineering written by KOJI SUGIOKA. and published by . This book was released on 2019 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: This handbook provides a comprehensive review of the entire field of laser micro and nano processing, including not only a detailed introduction to individual laser processing techniques but also the fundamentals of laser-matter interaction and lasers, optics, equipment, diagnostics, as well as monitoring and measurement techniques for laser processing. Consisting of 11 sections, each composed of 4 to 6 chapters written by leading experts in the relevant field. Each main part of the handbook is supervised by its own part editor(s) so that high-quality content as well as completeness are assured. The book provides essential scientific and technical information to researchers and engineers already working in the field as well as students and young scientists planning to work in the area in the future. Lasers found application in materials processing practically since their invention in 1960, and are currently used widely in manufacturing. The main driving force behind this fact is that the lasers can provide unique solutions in material processing with high quality, high efficiency, high flexibility, high resolution, versatility and low environmental load. Macro-processing based on thermal process using infrared lasers such as CO2 lasers has been the mainstream in the early stages, while research and development of micro- and nano-processing are becoming increasingly more active as short wavelength and/or short pulse width lasers have been developed. In particular, recent advances in ultrafast lasers have opened up a new avenue to laser material processing due to the capabilities of ultrahigh precision micro- and nanofabrication of diverse materials. This handbook is the first book covering the basics, the state-of-the-art and important applications of the dynamic and rapidly expanding discipline of laser micro- and nanoengineering. This comprehensive source makes readers familiar with a broad spectrum of approaches to solve all relevant problems in science and technology. This handbook is the ultimate desk reference for all people working in the field.
Author : John Ion
Publisher : Elsevier
ISBN 13 : 0080492800
Total Pages : 589 pages
Book Rating : 4.0/5 (84 download)
Download or read book Laser Processing of Engineering Materials written by John Ion and published by Elsevier. This book was released on 2005-03-22 with total page 589 pages. Available in PDF, EPUB and Kindle. Book excerpt: The complete guide to understanding and using lasers in material processing!Lasers are now an integral part of modern society, providing extraordinary opportunities for innovation in an ever-widening range of material processing and manufacturing applications. The study of laser material processing is a core element of many materials and manufacturing courses at undergraduate and postgraduate level. As a consequence, there is now a vast amount of research on the theory and application of lasers to be absorbed by students, industrial researchers, practising engineers and production managers. Written by an acknowledged expert in the field with over twenty years' experience in laser processing, John Ion distils cutting-edge information and research into a single key text. Essential for anyone studying or working with lasers, Laser Processing of Engineering Materials provides a clear explanation of the underlying principles, including physics, chemistry and materials science, along with a framework of available laser processes and their distinguishing features and variables. This book delivers the knowledge needed to understand and apply lasers to the processing of engineering materials, and is highly recommended as a valuable guide to this revolutionary manufacturing technology. The first single volume text that treats this core engineering subject in a systematic manner Covers the principles, practice and application of lasers in all contemporary industrial processes; packed with examples, materials data and analysis, and modelling techniques
Author : I.W. Boyd
Publisher : Elsevier
ISBN 13 : 0444596658
Total Pages : 482 pages
Book Rating : 4.4/5 (445 download)
Download or read book Beam Processing and Laser Chemistry written by I.W. Boyd and published by Elsevier. This book was released on 1990-02-01 with total page 482 pages. Available in PDF, EPUB and Kindle. Book excerpt: This volume discusses both the practical and theoretical aspects of energy beam materials processing. It highlights the recent advances in the use of beams and incoherent light sources to enhance or modify chemical processes at solid surfaces. Special attention is given to the latest developments in the use of ion, electron and photon beams, and on laser-assisted process chemistry. Thin film and surface and interface reactions as well as bulk phase transformations are discussed. Practical technological details and the criteria for present and future applications are also reviewed. The papers collected in this volume reflect the continuing strong interest and variety of development in this field.
Author : Daniel Montero Álvarez
Publisher : Springer Nature
ISBN 13 : 303063826X
Total Pages : 262 pages
Book Rating : 4.0/5 (36 download)
Download or read book Near Infrared Detectors Based on Silicon Supersaturated with Transition Metals written by Daniel Montero Álvarez and published by Springer Nature. This book was released on 2021-01-08 with total page 262 pages. Available in PDF, EPUB and Kindle. Book excerpt: This thesis makes a significant contribution to the development of cheaper Si-based Infrared detectors, operating at room temperature. In particular, the work is focused in the integration of the Ti supersaturated Si material into a CMOS Image Sensor route, the technology of choice for imaging nowadays due to its low-cost and high resolution. First, the material is fabricated using ion implantation of Ti atoms at high concentrations. Afterwards, the crystallinity is recovered by means of a pulsed laser process. The material is used to fabricate planar photodiodes, which are later characterized using current-voltage and quantum efficiency measurements. The prototypes showed improved sub-bandgap responsivity up to 0.45 eV at room temperature. The work is further supported by a collaboration with STMicroelectronics, where the supersaturated material was integrated into CMOS-based sensors at industry level. The results show that Ti supersaturated Si is compatible in terms of contamination, process integration and uniformity. The devices showed similar performance to non-implanted devices in the visible region. This fact leaves the door open for further integration of supersaturated materials into CMOS Image Sensors.
Author : Narendra B. Dahotre
Publisher : ASM International
ISBN 13 : 9781615032235
Total Pages : 622 pages
Book Rating : 4.0/5 (322 download)
Download or read book Lasers in Surface Engineering written by Narendra B. Dahotre and published by ASM International. This book was released on 1998-01-01 with total page 622 pages. Available in PDF, EPUB and Kindle. Book excerpt: Presents various facets of laser surface treatment, emphasizing technologies that are expected to be important soon. The topics include fundamentals and types, surface texturing, heat treatment, metallic and intermetallic coating, the laser deposition of ceramic coatings, polymeric coatings, the cor
Author : John Michael Dowden
Publisher : CRC Press
ISBN 13 : 1420035622
Total Pages : 305 pages
Book Rating : 4.4/5 (2 download)
Download or read book The Mathematics of Thermal Modeling written by John Michael Dowden and published by CRC Press. This book was released on 2001-05-24 with total page 305 pages. Available in PDF, EPUB and Kindle. Book excerpt: The use of lasers for various applications in materials processing has grown rapidly in recent years. Lasers are by nature particularly well suited to automation, but to ensure repeatability and reliability, the engineers employing them must not simply rely on numerical analysis software. They must have a firm grasp on the physical principles invol
